Sucking disc

Abstract

The utility model discloses a sucking disc which comprises a disc part and a plurality of annular adsorption parts, and the adsorption parts are used for adsorbing samples. An avoiding area is arranged between every two adjacent adsorption parts, and the avoiding areas are used for isolating the adsorption force between the adjacent adsorption parts; the disc part is provided with at least one first vacuum air channel, the first vacuum air channel is used for providing negative pressure or positive pressure for the adsorption part, the adsorption part is in ventilation communication with the at least one first vacuum air channel, and the first vacuum air channel is in ventilation communication with a vacuumizing device. The suction cup disclosed by the utility model can be matched with samples with various sizes, and ensures that the force for adsorbing the samples is uniform.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a suction cup. Background Art

[0002] Wafers are a basic material in the semiconductor manufacturing process, usually made of silicon, and are used to manufacture integrated circuits and other electronic devices. Wafers have a round, flat surface on which microelectronic components are built. Since wafers are thin and brittle, they need to be fixed on a customized carrier for protection during wafer transportation, testing, processing, and storage. The suction carrier uses the vacuum negative pressure generated by exhaust to absorb the wafer and fix it on the suction cup, thereby achieving the purpose of fixing the wafer.

[0003] A wafer adsorption carrier is disclosed in Chinese patent application publication number CN210805729U. The device can play a double insurance role by adsorbing different positions of the wafer. Even if the vacuum adsorption in the middle or the peripheral side of the wafer loosens, the adsorption at another position will ensure its normal operation, thereby effectively preventing the wafer from falling off the carrier. However, the device only adsorbs the wafer through the central suction duct at the center and a circle of suction ports on the periphery. The adsorption force is not uniform enough, and this adsorption method can only be used for wafers with a size not much different from that of the device, which is not convenient for adsorbing wafers of different sizes. Utility Model Content

[0004] The utility model aims to provide a suction cup which can match samples of various sizes and ensure uniform adsorption force on the samples.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A suction cup comprises: a cup portion and a plurality of annular adsorption portions, wherein the adsorption portions are used to adsorb samples;

[0007] An avoidance zone is provided between two adjacent adsorption parts, and the avoidance zone is used to isolate the adsorption force between the adjacent adsorption parts;

[0008] The disk portion is provided with at least one first vacuum air channel, which is used to provide negative pressure or positive pressure for the adsorption portion. The adsorption portion is ventilated with at least one of the first vacuum air channels, and the first vacuum air channels are ventilated with a vacuum extraction device.

[0009] Preferably, the number of the first vacuum air channels is equal to the number of the adsorption parts, and each of the first vacuum air channels is ventilatedly connected to one of the adsorption parts;

[0010] Alternatively, the first vacuum air duct is ventilated in communication with a plurality of the adsorption parts, and the suction cup further comprises an isolating member detachably connected to the cup part, wherein the isolating member is used to isolate the adsorption part from the first vacuum air duct.

[0011] Preferably, the suction cup further comprises: a connection hole and an adsorption channel located at the adsorption part; the adsorption channel and the first vacuum air channel are ventilated and connected through the connection hole, and the adsorption channels of the same adsorption part are ventilated and connected;

[0012] The isolating member is detachably disposed on the connecting hole and is used to block the connecting hole;

[0013] Alternatively, the isolation member can be detachably disposed in the first vacuum air passage corresponding to the avoidance zone to isolate the adsorption passage from the first vacuum air passage.

[0014] Preferably, the isolating member is threadedly connected to the connecting hole.

[0015] Preferably, it also includes a second vacuum air duct, the first vacuum air duct and the second vacuum air duct are isolated from each other, and the first vacuum air duct and the second vacuum air duct are ventilated and connected to the vacuum extraction device through different air pipes respectively.

[0016] Preferably, the plurality of adsorption parts include a first adsorption part, a second adsorption part, a third adsorption part, a fourth adsorption part and a fifth adsorption part which are arranged in sequence from the inside to the outside;

[0017] The first vacuum air passage is ventilatedly connected to the first adsorption part, the second adsorption part and the third adsorption part respectively, and the second vacuum air passage is ventilatedly connected to the fourth adsorption part and the fifth adsorption part respectively.

[0018] Preferably, the third adsorption portion includes: a ring-shaped main body portion, a first support portion extending from the main body portion toward the second adsorption portion, and a second support portion extending from the main body portion toward the second adsorption portion and then extending toward both sides.

[0019] Preferably, a mounting hole and / or a lifting hole is provided in the avoidance area between the first supporting part and the second supporting part.

[0020] Preferably, it further comprises: a lifting component and a plurality of lifting pins located on the lifting component, wherein the lifting component is used to drive the lifting pins to move in a direction perpendicular to the surface of the adsorption portion;

[0021] The bottom wall of the avoidance area is provided with a plurality of lifting holes for the lifting ejector pins to pass through, and the plurality of lifting holes are arranged equidistantly along the circumference.

[0022] Preferably, the first vacuum air passage comprises an air hole for ventilation and connection with the vacuum pumping device, and the air hole is arranged at a position close to the center of the disk.

[0023] Preferably, at least one exhaust port connected to the outside is formed on the bottom wall of the avoidance zone, and the exhaust port is connected to the air or to a blowing device for ventilation.

[0024] Preferably, a plurality of blocking blocks are provided on the side wall of the disk portion along the circumferential direction, the blocking blocks are higher than the adsorption portion, and the plurality of blocking blocks are arranged equidistantly along the circumference.

[0025] Preferably, a plurality of groups of weight-reducing grooves are provided on the bottom surface of the disc portion at equal intervals along the circumferential direction, and the weight-reducing groove groups include two first weight-reducing grooves and one second weight-reducing groove arranged along the circumferential direction, and the second weight-reducing groove is arranged between the two first weight-reducing grooves, and the cross-sectional area of ​​the second weight-reducing groove is smaller than the cross-sectional area of ​​the first weight-reducing groove.

[0026] Compared with the prior art, the utility model has the following beneficial effects:

[0027] 1. Multiple adsorption parts are located on circles of different diameters to form adsorption ranges of different sizes, corresponding to the adsorption of samples of different sizes;

[0028] 2. The adsorption part is in a complete ring shape, which can provide stable and uniform adsorption force to the sample;

[0029] 3. The exhaust port set in the avoidance zone is conducive to the rapid adsorption and release of samples. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed by the present invention.

[0032] Figure 1 Schematic diagram of the structure of the suction cup in this embodiment;

[0033] Figure 2 is a cross-sectional view of the suction cup in this embodiment;

[0034] Figure 3 for Figure 2 A magnified schematic diagram of part A;

[0035] Figure 4 FIG. 4 is a schematic structural diagram of the suction cup in another angle in this embodiment.

[0036] Description of reference numerals: 1, disk; 10, connecting hole; 11, first vacuum air passage; 111, air hole; 12, second vacuum air passage;

[0037] 20, adsorption channel; 21, first adsorption part; 22, second adsorption part; 23, third adsorption part; 231, main body; 232, first support part; 233, second support part; 24, fourth adsorption part; 25, fifth adsorption part;

[0038] 3. Avoidance area; 4. Mounting hole; 5. Lifting hole; 6. Exhaust port; 7. Blocking block; 8. Weight reduction groove group; 81. First weight reduction groove; 82. Second weight reduction groove. DETAILED DESCRIPTION

[0039] In order to make the utility model's purpose, features, and advantages more obvious and easy to understand, the following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the embodiments described below are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0040] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. It should be noted that when a component is considered to be "connected" to another component, it is directly connected to the other component or there may be a centrally arranged component at the same time.

[0041] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0042] Reference Figure 1-4The suction cup provided in this embodiment includes: a disc portion 1 and a plurality of annular adsorption portions, the adsorption portion is used to adsorb samples; an avoidance area 3 is arranged between two adjacent adsorption portions, the avoidance area 3 is used to isolate the adsorption force between adjacent adsorption portions; the disc portion 1 is provided with at least one first vacuum air channel 11, the first vacuum air channel 11 is used to provide negative pressure or positive pressure for the adsorption portion, the adsorption portion is ventilated and connected to the at least one first vacuum air channel 11, and the first vacuum air channel 11 is ventilated and connected to the vacuum extraction device.

[0043] When in use, the sample is placed on the suction cup manually or by an automatic manipulator, and then the vacuum device is turned on to generate negative pressure or positive pressure in the adsorption part connected to the first vacuum air channel 11, so that the suction cup adsorbs the sample or releases the sample; the adsorption part is in a complete ring shape, so as to provide a stable and uniform adsorption force to the sample; multiple adsorption parts are located on circles of different diameters to form adsorption ranges of different sizes, corresponding to the adsorption of samples of different sizes.

[0044] Furthermore, the surface flatness of the multiple adsorption parts is 0-3 μm, so as to ensure that the sample can be completely adsorbed and achieve high-flatness adsorption. The surface of the suction cup is also sprayed with a Teflon coating, so that the suction cup is not easy to adsorb dust, and achieve low-pollution adsorption of the sample.

[0045] In this embodiment, the disk portion 1 is circular, and the adsorption portion is annular. In other embodiments, the disk portion may be rectangular, and the adsorption portion may be a rectangular ring.

[0046] In this embodiment, the sample is a wafer. In other embodiments, the sample can be a magnetic disk, a glass screen, or a mobile phone housing.

[0047] In one embodiment, the number of first vacuum air channels 11 is equal to the number of adsorption parts, and each first vacuum air channel 11 is ventilated to one adsorption part; the adsorption force of each adsorption part can be conveniently and flexibly adjusted to ensure that the adsorption effect of the suction cup on samples of different sizes can achieve the best, and if one first vacuum air channel 11 fails, the other first vacuum air channels 11 can continue to work, reducing the possibility of failure of the entire suction cup due to a single failure.

[0048] In another embodiment, the first vacuum air duct 11 is ventilated to connect multiple adsorption parts, and the suction cup also includes an isolation member (not shown in the figure) detachably connected to the disc part 1, and the isolation member is used to isolate the adsorption part from the first vacuum air duct 11.

[0049] Furthermore, the suction cup further comprises: a connection hole 10 and an adsorption channel 20 located at the adsorption part; the adsorption channel 20 and the first vacuum air channel 11 are ventilated and connected through the connection hole 10, and the adsorption channel 20 of the same adsorption part is ventilated and connected. The isolation piece is detachably arranged at the connection hole 10, and is used to block the connection hole 10. The adsorption channel 20 is a hole or a groove, and the material of the adsorption part is a metal alloy.

[0050] Alternatively, the isolating member may be detachably disposed in the first vacuum air passage 11 (eg Figure 1 and Figure 2 The position indicated by the arrow in the figure is used to isolate the adsorption channel 20 from the first vacuum air channel 11. The avoidance area 3 is correspondingly provided with an isolation hole for installing the isolation member. The isolation hole extends from the top surface of the isolation area of ​​the disk portion and passes through the first vacuum air channel. By providing an isolation member, when using the suction cup to absorb a smaller sample, the adsorption channel 20 corresponding to the large sample can be isolated by installing the isolation member, and only the adsorption channel 20 corresponding to the small sample is enabled, thereby improving the adsorption stability and reliability, and reducing energy consumption. The material of the adsorption portion is a microporous material, and the adsorption channel 20 is a microporous material. If the suction cup absorbs a larger sample, the isolation member is removed before absorption.

[0051] In other embodiments, the isolation hole extends from the bottom surface of the disk isolation area and passes through the second vacuum air channel. The isolation member is threadedly connected to the connection hole 10. When the suction cup absorbs a smaller sample, the isolation member isolates the two adsorption areas by tightening the isolation member. When the suction cup absorbs a larger sample, the two adsorption areas are ventilated and connected by loosening the isolation member, and the isolation member is always located in the isolation hole to prevent air leakage.

[0052] In this embodiment, the isolating member is threadedly connected to the connecting hole 10, so that the installation and removal of the isolating member are more convenient. In other embodiments, the material of the isolating member is an elastic material, such as rubber.

[0053] Reference Figure 1-2 The suction cup also includes a second vacuum air channel 12. The first vacuum air channel 11 is isolated from the second vacuum air channel 12. The first vacuum air channel 11 and the second vacuum air channel 12 are ventilated and connected to the vacuum device through different air pipes.

[0054] The multiple adsorption parts include a first adsorption part 21 (corresponding to a 4-inch sample), a second adsorption part 22 (corresponding to a 6-inch sample), a third adsorption part 23 (corresponding to an 8-inch sample), a fourth adsorption part 24 and a fifth adsorption part 25 (corresponding to a 12-inch sample) which are arranged in sequence from the inside to the outside; the first vacuum air channel 11 is ventilatedly connected to the first adsorption part 21, the second adsorption part 22 and the third adsorption part 23, respectively, and the second vacuum air channel 12 is ventilatedly connected to the fourth adsorption part 24 and the fifth adsorption part 25, respectively.

[0055] By setting the first vacuum air channel 11 and the second vacuum air channel 12 and controlling them separately, the application range and flexibility of the suction cup are improved, and negative pressure can be avoided to be applied to all the adsorption parts at the same time, thereby reducing energy consumption; when adsorbing samples of smaller sizes, only the corresponding adsorption parts and vacuum air channels can be activated, thereby reducing energy consumption. By adding the second vacuum air channel 12 and making it ventilated and connected with the fourth adsorption part 24 and the fifth adsorption part 25, the adsorption force of the fourth adsorption part 24 and the fifth adsorption part 25 can be flexibly adjusted according to the specific sample size and weight, thereby improving the adsorption stability and reliability of large samples, thereby ensuring the best adsorption effect for 12-inch samples.

[0056] In this embodiment, the second vacuum air channel is also connected to a plurality of adsorption areas. In one embodiment, the second vacuum air channel is provided with a spacer, or the fifth adsorption portion has the connection hole. The spacer is detachably provided at the connection hole to block the connection hole.

[0057] The third adsorption part 23 includes: a ring-shaped main body 231, a first support part 232 extending from the main body 231 to the second adsorption part 22, and a second support part 233 extending from the main body 231 to the second adsorption part 22 and then extending to both sides. The first support part 232 and the second support part 233 support the sample to provide a stable support force for the sample.

[0058] The avoidance area 3 between the first supporting portion 232 and the second supporting portion 233 is provided with a mounting hole 4 and / or a lifting hole 5 , and the suction cup can be fixed to the motion platform through the mounting hole 4 .

[0059] The suction cup also includes: a lifting assembly (not shown in the figure) and a plurality of lifting pins (not shown in the figure) located in the lifting assembly, the lifting assembly is used to drive the lifting pins to move in a direction perpendicular to the surface of the adsorption portion; the bottom wall of the avoidance area 3 is provided with a plurality of lifting holes 5 for the lifting pins to pass through, and the plurality of lifting holes 5 are arranged equidistantly along the circumference.

[0060] When this suction cup is used to hold a 4-inch or 6-inch sample, the sample can be placed on the suction cup manually, and then the vacuum device can be turned on to allow the suction cup to adsorb the sample. When the suction cup is used to hold an 8-inch or 12-inch sample, since the radius of the sample is greater than the distance from the lifting hole 5 to the center of the suction cup, the lifting assembly and the lifting pin can lift the sample to leave a certain space between the sample and the suction cup, making it convenient for the robot to enter and exit. Therefore, the sample can be placed on the suction cup manually or by an automatic robot.

[0061] In another embodiment, the lifting hole 5 can be set in the first adsorption part or the avoidance area 3 between the first adsorption part 21 and the second adsorption part 22, so that when the suction cup is used to hold a 6-inch sample, the sample can also be placed on the suction cup by an automatic manipulator.

[0062] In other embodiments, multiple groups of lifting pins may be provided on the lifting assembly, and correspondingly, multiple groups of lifting holes may be provided on the disk. Each group of lifting pins is distributed in an isolation zone, for example, multiple groups of lifting pins include a group of lifting pins located in an isolation zone between the first adsorption zone and the second adsorption zone, and multiple lifting pins located in an isolation zone between the second adsorption zone and the third adsorption zone. Alternatively, the lifting holes may be located in the adsorption zone, for example, multiple groups of lifting pins include a group of lifting pins located in the first adsorption zone, and a group of lifting pins located in the first adsorption zone and the second adsorption zone. The number of each group of lifting pins is greater than or equal to 3.

[0063] Reference Figure 2 and 3 The first vacuum air channel 11 includes an air hole 111 for ventilation and connection with the vacuum device, and the air hole 111 is arranged near the center of the disk 1. Since the suction cup rotates to a certain extent during use, the air hole 111 is arranged near the center of the disk 1 to avoid large twisting and movement of the air pipe connected to the air hole 111, thereby avoiding deformation or entanglement of the air pipe. In other embodiments, the central area A of the disk has a connecting hole, and the first vacuum air channel and the second vacuum air channel extend to the side wall of the connecting hole, and are ventilated and connected with the vacuum device at the side wall.

[0064] At least one exhaust port 6 connected to the outside is provided on the bottom wall of the avoidance area 3, and the exhaust port 6 is connected to the air or to the blowing device. When vacuuming, the exhaust port 6 helps to quickly exhaust the gas between the sample and the suction cup, which is conducive to the rapid adsorption of the sample; when breaking the vacuum, the exhaust port 6 helps the outside gas to enter between the sample and the suction cup, which is conducive to the rapid release of the sample.

[0065] The side wall of the disk portion 1 is provided with a plurality of blocking blocks 7 along the circumference, the blocking blocks 7 are higher than the adsorption portion, and the plurality of blocking blocks 7 are arranged equidistantly along the circumference. In use, the suction cup has a certain horizontal rotation and horizontal displacement, and the setting of the blocking blocks 7 can effectively reduce the risk of accidental slipping of the sample and improve safety; the plurality of blocking blocks 7 are arranged equidistantly along the circumference, which makes it more difficult for the sample to pass through the gaps between the blocking blocks 7 or slide over the entire circumference, further improving safety.

[0066] Reference Figure 4The bottom surface of the disk 1 is provided with a plurality of groups of weight-reducing grooves 8 equidistantly arranged along the circumferential direction. The weight-reducing groove group 8 includes two first weight-reducing grooves 81 and one second weight-reducing groove 82 arranged along the circumferential direction. The second weight-reducing groove 82 is arranged between the two first weight-reducing grooves 81. The cross-sectional area of ​​the second weight-reducing groove 82 is smaller than the cross-sectional area of ​​the first weight-reducing groove 81.

[0067] The suction cup is relatively large in size. By opening multiple groups of weight-reducing groove groups 8 on the bottom surface of the disc part 1, the weight of the suction cup can be reduced, thereby reducing the dynamic load and vibration of the equipment during operation, and reducing the equipment wear, damage and accident risks caused by excessive load or vibration, which helps to improve the stability and safety of the equipment; moreover, the multiple groups of weight-reducing groove groups 8 are arranged equidistantly along the circumference, so that the multiple groups of weight-reducing groove groups 8 have a centrally symmetrical structure, which can avoid the instability of the disc part 1 during rotation or movement due to eccentricity, and further improve the stability and safety of the equipment; each group of weight-reducing groove groups 8 includes two first weight-reducing grooves 81 and one second weight-reducing groove 82 arranged along the circumference, and the cross-sectional area of ​​the second weight-reducing groove 82 is smaller than the cross-sectional area of ​​the first weight-reducing groove 81, which reduces the weight of the suction cup as much as possible while ensuring the strength requirement of the suction cup.

[0068] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A suction cup, characterized in that: include: A disk portion (1) and a plurality of annular adsorption portions, wherein the adsorption portions are used to adsorb samples; An avoidance zone (3) is provided between two adjacent adsorption portions, and the avoidance zone (3) is used to isolate the adsorption force between the adjacent adsorption portions; The disk portion (1) is provided with at least one first vacuum air channel (11), the first vacuum air channel (11) being used to provide negative pressure or positive pressure for the adsorption portion, the adsorption portion being ventilated and connected to at least one of the first vacuum air channels (11), and the first vacuum air channel (11) being ventilated and connected to a vacuum extraction device.

2. The suction cup according to claim 1, characterized in that The number of the first vacuum air channels (11) is equal to the number of the adsorption parts, and each of the first vacuum air channels (11) is ventilatedly connected to one of the adsorption parts; Alternatively, the first vacuum air channel (11) is ventilated and connected to the plurality of adsorption parts, and the suction cup further comprises an isolating member detachably connected to the cup part (1), the isolating member being used to isolate the adsorption part from the first vacuum air channel (11).

3. The suction cup according to claim 2, characterized in that The suction cup further comprises: a connection hole (10) and an adsorption channel (20) located at the adsorption portion; the adsorption channel (20) and the first vacuum air channel (11) are ventilated and connected via the connection hole (10), and the adsorption channels (20) of the same adsorption portion are ventilated and connected; The isolating member is detachably arranged on the connecting hole (10) and is used to block the connecting hole (10); Alternatively, the isolation member can be detachably arranged in the first vacuum air passage (11) corresponding to the avoidance zone (3) to isolate the adsorption passage (20) from the first vacuum air passage (11).

4. The suction cup according to claim 3, characterized in that The isolating piece is threadably connected to the connecting hole (10).

5. The suction cup according to claim 1, characterized in that The invention also comprises a second vacuum air passage (12), wherein the first vacuum air passage (11) and the second vacuum air passage (12) are arranged in isolation, and the first vacuum air passage (11) and the second vacuum air passage (12) are respectively ventilated and connected to the vacuum extraction device via different air pipes.

6. The suction cup according to claim 5, characterized in that The plurality of adsorption parts include a first adsorption part (21), a second adsorption part (22), a third adsorption part (23), a fourth adsorption part (24) and a fifth adsorption part (25) which are arranged in sequence from the inside to the outside; The first vacuum air passage (11) is ventilated and connected to the first adsorption part (21), the second adsorption part (22) and the third adsorption part (23), respectively; and the second vacuum air passage (12) is ventilated and connected to the fourth adsorption part (24) and the fifth adsorption part (25), respectively.

7. The suction cup according to claim 6, characterized in that The third adsorption portion (23) comprises: a ring-shaped main body portion (231), a first support portion (232) extending from the main body portion (231) toward the second adsorption portion (22), and a second support portion (233) extending from the main body portion (231) toward the second adsorption portion (22) and then extending toward both sides.

8. The suction cup according to claim 7, characterized in that A mounting hole (4) and / or a lifting hole (5) is provided in the avoidance area (3) between the first supporting portion (232) and the second supporting portion (233).

9. The suction cup according to claim 8, characterized in that Also includes: A lifting assembly and a plurality of lifting pins located on the lifting assembly, wherein the lifting assembly is used to drive the lifting pins to move in a direction perpendicular to the surface of the adsorption portion; The bottom wall of the avoidance area (3) is provided with a plurality of lifting holes (5) for the lifting ejector pins to pass through, and the plurality of lifting holes (5) are arranged at equal distances along the circumference.

10. The suction cup according to claim 1, characterized in that The first vacuum air passage (11) comprises an air hole (111) for ventilation and connection with a vacuum extraction device, wherein the air hole (111) is arranged at a position close to the center of the disk portion (1).

11. The suction cup according to claim 1, characterized in that The bottom wall of the avoidance area (3) is provided with at least one exhaust port (6) connected to the outside, and the exhaust port (6) is connected to the air or to a blowing device for ventilation.

12. The suction cup according to claim 1, characterized in that A plurality of blocking blocks (7) are arranged on the side wall of the disk portion (1) along the circumferential direction, the blocking blocks (7) are higher than the adsorption portion, and the plurality of blocking blocks (7) are arranged at equal distances along the circumference.

13. The suction cup according to claim 1, characterized in that The bottom surface of the disc portion (1) is provided with a plurality of groups of weight-reducing grooves (8) equidistantly arranged along the circumferential direction, the group of weight-reducing grooves (8) comprising two first weight-reducing grooves (81) and one second weight-reducing groove (82) arranged along the circumferential direction, the second weight-reducing groove (82) being arranged between the two first weight-reducing grooves (81), the cross-sectional area of ​​the second weight-reducing groove (82) being smaller than the cross-sectional area of ​​the first weight-reducing groove (81).

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