Dust collection device

Abstract

The utility model discloses a dust collecting device. The dust collecting device comprises a particle separating assembly, an airflow output assembly and a particle collecting assembly, one side edge of the particle separation assembly extends outwards to form a first gas input part, one end of the particle separation assembly extends outwards to form a first gas output part, and the other end of the particle separation assembly extends outwards to form a foreign matter collecting part. One side edge of the airflow output assembly extends outwards to form an airflow leading-in part, one end of the airflow output assembly extends outwards to form a second gas output part, the other end of the airflow output assembly extends outwards to form a second gas input part, and the second gas output part is connected to the first gas input part. The particle collecting assembly is connected to the foreign matter collecting part. Therefore, the dust collecting device provided by the utility model can improve the removal efficiency of harmful substances and can reduce the production cost.

Description

Technical Field

[0001] The utility model relates to a dust collecting device, in particular to a dust collecting device which has no consumption of electric energy and water and can capture harmful substances. Background Art

[0002] When it comes to particle dust disposal systems in high-tech manufacturing, many waste gas reduction processes require the collection of fine dust. Fine dust in waste gas is extremely fine solid particles that remain suspended in the air for a long time. Particles with a diameter of more than 10 microns are classified as coarse particles, which are absorbed by nasal hair or the mucous membrane in the nasopharynx. Fine dust with a diameter of less than 10 microns (PM10) is considered suspended particles. Once inhaled, it will travel along the trachea and bronchi all the way to the lungs.

[0003] Currently, semiconductor process equipment uses wet scrubbers to filter out fine dust. However, wet scrubbers not only consume energy (i.e., they require electricity and water), but also have many components and complex structures inside. Therefore, maintenance costs are naturally considerable.

[0004] Therefore, how to overcome the above-mentioned defects through the improvement of structural design has become one of the important issues that this business wants to solve. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a dust collecting device in view of the deficiencies of the prior art.

[0006] In order to solve the above technical problems, one of the technical solutions adopted by the utility model is to provide a dust collecting device, which includes at least one particle separation component, at least one airflow output component and at least one particle collection component. The at least one particle separation component has a body, one side of the body of the at least one particle separation component extends outward to form a first gas input part, one end of the body of the at least one particle separation component extends outward to form a first gas output part, and the other end of the body of the at least one particle separation component extends outward to form a foreign matter outlet, the first gas output part is connected to a first external device, and the first gas input part, the first gas output part and the foreign matter outlet are connected to each other. At least one airflow output component has a body, one side of the body of the at least one airflow output component extends outward to form an airflow introduction part, one end of the body of the at least one airflow output component extends outward to form a second gas output part, and the other end of the body of the at least one airflow output component extends outward to form a second gas input part, the airflow introduction part is connected to an external gas source device, the second gas output part is connected to the first gas input part, the second gas input part is connected to a second external device, and the airflow introduction part, the second gas output part and the second gas input part are connected to each other. At least one particle collection component is connected to the foreign matter outlet.

[0007] In one feasible or preferred embodiment, when the airflow inlet portion receives the driving airflow provided by the external air source device, and the second gas input portion receives the harmful airflow provided by the second external device, the at least one airflow output component drives the harmful airflow to flow toward the second gas output portion through the driving airflow; wherein, when the first gas input portion receives the harmful airflow provided by the second gas output portion, the first gas input portion introduces the harmful airflow into the main body of the at least one particle separation component and drives the harmful airflow to flow in a vortex manner, so that at least one harmful substance in the harmful airflow is separated from the harmful airflow to form a purified airflow, and the at least one particle separation component transports the purified airflow to the first external device through the first gas output portion; wherein, the at least one particle separation component collects the at least one harmful substance separated from the harmful airflow through the foreign matter outlet portion, and transports the at least one harmful substance to the at least one particle collection component.

[0008] In one feasible or preferred embodiment, the body of the at least one airflow output component has a cavity portion and a guide ear portion, one end of the cavity portion extends outward to form the second gas output portion, the other end of the cavity portion extends outward to form a first hook-shaped portion, the guide ear portion surrounds the side of the cavity portion, the outer edge of the guide ear portion extends outward to form the airflow inlet portion, one end of the guide ear portion is connected to the cavity portion, the other end of the guide ear portion extends toward the cavity portion in a rotational manner to form a second hook-shaped portion, and the second hook-shaped portion extends outward to form a second gas input portion; wherein a special flow channel is defined between the guide ear portion and the cavity portion, and the special flow channel is connected to the airflow inlet portion and the interior of the cavity portion.

[0009] In one feasible or preferred embodiment, when the airflow inlet portion receives the driving airflow, the guide ear portion introduces the driving airflow into the cavity portion through the special flow channel and drives the harmful airflow to flow toward the second gas output portion; wherein the second gas input portion is configured to provide the harmful airflow into the cavity portion and combine with the driving airflow to increase the flow intensity of the harmful airflow.

[0010] In one feasible or preferred embodiment, the special flow channel is divided into a guide area and a drainage area, the guide area is connected to the drainage area, the cross-section of the guide area is conical, and the cross-section of the drainage area is C-shaped or hook-shaped.

[0011] In one feasible or preferred embodiment, the body of the at least one particle separation component, the first gas input part and the first gas output part are in the shape of a straight tube, the foreign matter outlet part is in the shape of a cone, and the diameters of the first gas input part and the first gas output part are less than or equal to the diameter of the body of the at least one particle separation component.

[0012] In one feasible or preferred embodiment, the diameter of the body of the at least one particle separation component is defined as a predetermined value, the diameter of the first gas input part and the diameter of the first gas output part are 0.01 to 1 times of the predetermined value, the length of the body of the at least one particle separation component and the length of the foreign matter outlet part are 0.5 to 4 times of the predetermined value, and the length of the first gas output part is 1 to 4.5 times of the predetermined value.

[0013] In one feasible or preferred embodiment, one end of the foreign matter outlet portion is connected to the main body of the at least one particle separation component, and the other end of the foreign matter outlet portion extends outward to form a protruding connection portion, which is connected to the at least one particle collection component, and the diameter of the protruding connection portion is 0.1 to 0.5 times the predetermined value, and the length of the protruding connection portion is 0.1 to 0.5 times the predetermined value.

[0014] In one feasible or preferred embodiment, one end of the first gas output portion is connected to the body of the at least one particle separation component, and the other end of the first gas output portion extends toward the interior of the at least one particle separation component to form an extension into and out of the portion, the diameter of the extension into and out of the portion is equal to the diameter of the first gas output portion, and the length of the extension into and out of the portion is 0.1 to 2.5 times the predetermined value.

[0015] In one feasible or preferred embodiment, one end of the at least one particle collecting component extends outward to form a foreign matter inlet portion, and the foreign matter inlet portion is connected to the foreign matter outlet portion.

[0016] One of the beneficial effects of the utility model is that the dust collecting device provided by the utility model can be realized by "at least one particle separation component has a body, one side of the body of the at least one particle separation component extends outward to form a first gas input part, one end of the body of the at least one particle separation component extends outward to form a first gas output part, one end of the body of the at least one particle separation component extends outward to form a foreign matter outlet, the first gas output part is connected to a first external device, and the first gas input part, the first gas output part and the foreign matter outlet are communicated with each other. At least one airflow output component has a body, and the at least one airflow output component One side of the body of the component extends outward to form an airflow introduction part, one end of the body of the at least one airflow output component extends outward to form a second gas output part, and the other end of the body of the at least one airflow output component extends outward to form a second gas input part, the airflow introduction part is connected to an external gas source device, the second gas output part is connected to the first gas input part, the second gas input part is connected to a second external device, and the airflow introduction part, the second gas output part and the second gas input part are connected to each other. At least one particle collection component is connected to the foreign matter outlet "technical solution to improve the removal efficiency of harmful substances and reduce production costs.

[0017] In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and description and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the dust collecting device in the first embodiment of the utility model in use.

[0019] Figure 2 It is an exploded schematic diagram of the dust collecting device of the first embodiment of the utility model.

[0020] Figure 3 It is a structural schematic diagram of a particle separation component of a dust collecting device according to the first embodiment of the utility model.

[0021] Figure 4 It is a schematic top view of a particle separation assembly of a dust collecting device according to the first embodiment of the utility model.

[0022] Figure 5 It is a cross-sectional schematic diagram of the airflow output assembly of the dust collecting device according to the first embodiment of the utility model.

[0023] Figure 6 for Figure 5 An enlarged schematic diagram of part VI.

[0024] Figure 7 This is a schematic diagram of the particle separation component of the dust collecting device of the first embodiment of the utility model in use.

[0025] Figure 8 It is a schematic structural diagram of a dust collecting device according to the second embodiment of the present utility model.

[0026] Fig. 9 It is a schematic structural diagram of a dust collecting device according to the third embodiment of the present utility model.

[0027] Fig.10 It is a schematic structural diagram of a dust collecting device according to a fourth embodiment of the present utility model.

[0028] The following are the descriptions of the reference numerals:

[0029] Z: dust collecting device 200c: first hook portion

[0030] 1: Particle separation component a1: First arc angle

[0031] 10: Body a2: Second arc angle

[0032] 10D: diameter a3: third arc angle

[0033] 10L: Length 201: Ear guide

[0034] 11: first gas input part 201a: second hook part

[0035] 11D: Diameter 2010: Special flow channel

[0036] 12: First gas output section 2010a: flow guide area

[0037] 12D: diameter 2010b: drainage area

[0038] 12L: Length 21: Airflow inlet

[0039] 120: Extending into the outlet 22: Second gas outlet

[0040] 120L: Length 23: Second gas input

[0041] 13: Foreign matter outlet 3: Particle collection component

[0042] 13L: Length 30: Body

[0043] 130: protruding connection part 31: foreign body inlet part

[0044] 130D: Diameter DA: Driving airflow

[0045] 130L: Length E1: First external device

[0046] 14L: Predetermined distance E2: Second external device

[0047] 2: Air flow output component G: External air source device

[0048] 20: Main body HA: Harmful airflow

[0049] 200: Cavity HS: Hazardous substances

[0050] 200a: Flat wall PA: Purified air flow

[0051] 200b: arc wall RA: predetermined angle DETAILED DESCRIPTION

[0052] The following is an explanation of the implementation method of the "dust collecting device" disclosed in the utility model through specific specific embodiments. Those skilled in the art can understand the advantages and effects of the utility model from the contents disclosed in this specification. The utility model can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the utility model. In addition, the drawings of the utility model are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following implementation methods will further explain the relevant technical contents of the utility model in detail, but the disclosed contents are not intended to limit the scope of protection of the utility model.

[0053] It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are mainly used to distinguish one element from another element. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[0054] [First embodiment]

[0055] See also Figures 1 to 7, respectively, are a schematic diagram of the use state of the dust collecting device of the first embodiment of the utility model, a decomposition schematic diagram, a structural schematic diagram of the particle separation component, a top view schematic diagram of the particle separation component, a cross-sectional schematic diagram of the airflow output component, Figure 5 As shown in the above figures, the first embodiment of the utility model provides a dust collecting device Z, which includes at least one particle separation component 1, at least one airflow output component 2 and at least one particle collection component 3.

[0056] Cooperate Figures 1 to 4 and Figure 6 As shown, the particle separation component 1 may have a body 10, one side of the body 10 of the particle separation component 1 may extend outward to form a first gas input portion 11, one end of the body 10 of the particle separation component 1 may extend outward to form a first gas output portion 12, and the other end of the body 10 of the particle separation component 1 may extend outward to form a foreign matter outlet portion 13, the first gas output portion 12 can be detachably connected to a first external device E1 (such as a turbo pump, a dry pump or a central processing device (such as a wet scrubber) in a semiconductor device, but not limited thereto), and the first gas input portion 11, the first gas output portion 12 and the foreign matter outlet portion 13 are connected to each other. For example, the particle separation component 1 may be a hollow tubular structure, and the body 10 of the particle separation component 1 may be a hollow cavity. The top of the body 10 of the particle separation component 1 is provided with a first gas output portion 12, which may be a tubular structure and communicate with the inside of the body 10 of the particle separation component 1. The bottom of the body 10 of the particle separation component 1 is provided with a foreign matter outlet 13, which may be a tubular structure and communicate with the inside of the body 10 of the particle separation component 1. The side of the body 10 of the particle separation component 1 and adjacent to the top is provided with a first gas input portion 11, which may be a tubular structure and communicate with the inside of the body 10 of the particle separation component 1; wherein the first gas input portion 11 is provided in the body 10 of the particle separation component 1 in a tangential form and in a tangential manner. Furthermore, the body 10, the first gas input part 11 and the first gas output part 12 of the particle separation component 1 may be in a straight tube shape, the foreign matter outlet part 13 may be in a conical shape, and the diameter 12D of the first gas input part 11 and the first gas output part 12 may be less than or equal to the diameter 10D of the body of the particle separation component 1. In one feasible or preferred embodiment, the body 10, the first gas input part 11, the first gas output part 12 and the foreign matter outlet part 13 of the particle separation component 1 may be an integrated structure.

[0057] Furthermore, with Figure 3As shown, the diameter 10D of the body 10 of the particle separation component 1 can be defined as a predetermined value, which can be between 5 and 500, preferably 15 or 80, and the unit can be centimeters, but is not limited to this. The diameter 11D of the first gas input part 11 and the diameter 12D of the first gas output part 12 can be 0.01 to 1 times the predetermined value, preferably 0.5 times, that is, the diameter 11D and the diameter 12D can be between 9 and 220 centimeters, preferably 50 centimeters. The length 10L of the body of the particle separation component 1 and the length 13L of the foreign matter outlet 13 can be 0.5 to 4 times the predetermined value, preferably 2 times. The length 12L of the first gas output part 12 can be 1 to 4.5 times the predetermined value, preferably 1.5 times. The outer edge of the first gas input part 11 is at a predetermined distance 14L from the top edge of the body 10 of the particle separation component 1, and the predetermined distance 14L may be 0.1 to 0.5 times of the predetermined value, preferably 0.125 times. It is worth mentioning that when the structure of the body 10 of the particle separation component 1 and the foreign matter outlet 13 is designed to be slender, smaller solid phase particles can be separated from the gas phase, for example, fine suspended particles with a particle size of 2.5 microns or less in the gas can be separated; and when the structure of the body 10 of the particle separation component 1 and the foreign matter outlet 13 is designed to be short and fat, larger solid phase particles can be separated from the gas phase, for example, suspended particles with a particle size of more than 2.5 microns in the gas can be separated.

[0058] Furthermore, with Figure 3 As shown, one end of the foreign matter outlet 13 can be connected to the body 10 of the particle separation component 1; the other end of the foreign matter outlet 13 can extend outward to form a protruding connection portion 130, and the protruding connection portion 130 is connected to the particle collection component 3; wherein, the protruding connection portion 130 can be a straight tube structure. The diameter 130D of the protruding connection portion 130 can be 0.1 to 0.5 times of the predetermined value, preferably 0.25 times. The length 130L of the protruding connection portion 130 can be 0.1 to 0.5 times of the predetermined value, preferably 0.125 times. In addition, one end of the first gas output portion 12 can be connected to the body 10 of the particle separation component 1, and the other end of the first gas output portion 12 can extend toward the inside of the body 10 of the particle separation component 1 to form an extension outlet portion 120. The diameter of the outlet portion 120 may be equal to the diameter 12D of the first gas output portion 12 , and the length 120L of the outlet portion 120 may be 0.1 to 2.5 times of a predetermined value, preferably 0.75 times.

[0059] Next, cooperate Figure 1 , Figure 2 , Figure 5 and Figure 6As shown, the airflow output component 2 may have a main body 20, one side of the main body 20 of the airflow output component 2 may extend outward to form an airflow introduction part 21, one end of the main body of the airflow output component 2 may extend outward to form a second gas output part 22, and the other end of the main body 20 of the airflow output component 2 may extend outward to form a second gas input part 23, the airflow introduction part 21 can be detachably connected to an external gas source device G (for example, a gas supply device in a semiconductor device, which can provide general air or special gas (for example, inert gas, but not limited to this)), the second gas output part 22 is connected to the first gas input part 11, and the second gas input part 23 can be detachably connected to a second external device E2 (for example, a turbo pump (Turbo Pump) in a semiconductor device, a dry pump (dry pump) or a central processing equipment (Central Scrubber; for example, a wet scrubber); and the airflow introduction part 21, the second gas output part 22 and the second gas input part 23 are connected to each other. For example, the body 20 of the airflow output component 2 may be in a trapezoidal shape (e.g., a rounded trapezoidal shape), a conical shape, or other similar geometric shapes; the body 20 of the airflow output component 2 may have a cavity portion 200 and a guide ear portion 201. The cavity portion 200 may be a hollow structure, and one end of the cavity portion 200 may extend outward to form a second gas output portion 22; wherein the cavity portion 200 may have a flat wall surface 200a and an arc wall surface 200b, the flat wall surface 200a is connected to the arc wall surface 200b, and the arc wall surface 200b may be connected to the inner wall surface of the second gas output portion 22. The other end of the cavity portion 200 may extend outward to form a first hook-shaped portion 200c; wherein the outer edge of the first hook-shaped portion 200c may include a first arc angle a1, a second arc angle a2, and a third arc angle a3. The first arc angle a1 can be a rounded corner (R angle) between 1.5 and 2.5 cm, preferably 2 cm, but not limited thereto. The second arc angle a2 can be a rounded corner (R angle) between 2 and 3 cm, preferably 2.5 cm, but not limited thereto. The third arc angle a3 can be a rounded corner (R angle) between 5 and 7 cm, preferably 6.51 cm, but not limited thereto. The guide ear portion 201 surrounds the side (i.e., outer edge, outer surface) of the cavity portion 200, and the outer edge of the guide ear portion 201 can extend outward to form an airflow introduction portion 21, one end of the guide ear portion 201 is connected to the cavity portion 200, and the other end of the guide ear portion 201 extends toward the cavity portion 200 in a rotating manner to form a second hook portion 201a, and the second hook portion 201a extends outward to form a second gas input portion 23; wherein, a special flow channel 2010 can be defined between the guide ear portion 201 and the cavity portion 200 (i.e., the interior of the guide ear portion 201), and the special flow channel 2010 can be connected with the airflow introduction portion 21 and the interior of the cavity portion 200. wherein, the airflow introduction portion 21, the second gas output portion 22 and the second gas input portion 23 can be tubular structures.

[0060] Furthermore, with Figure 5 and Figure 6 As shown, the special flow channel 2010 can be divided into a guide area 2010a and a drainage area 2010b. The guide area 2010a is connected to the drainage area 2010b, and the cross section of the guide area 2010a can be conical; wherein, there can be a predetermined angle RA between the inner wall surface of the guide ear portion 201 and the outer wall surface of the cavity portion 200, and the predetermined angle RA can be between 8 and 30 degrees, preferably 8 degrees, 16 degrees, 19 degrees, and 26.5 degrees, but not limited thereto. One end of the drainage area 2010b is connected to the guide area 2010a, and the other end of the guide area 2010a is connected to the inside of the cavity portion 200, and the cross section of the drainage area 2010b can be C-shaped or hook-shaped.

[0061] Next, cooperate Figure 1 and Figure 2 As shown, the particle collection component 3 is connected to the foreign matter outlet 13. For example, the particle collection component 3 can be a collection bucket or a collection tank. One end of the particle collection component 3 can extend outward to form a foreign matter inlet 31, and the foreign matter inlet 31 is connected to the foreign matter outlet 13. The diameter of the foreign matter inlet 31 is the same as the diameter 130D of the protruding connection portion 130.

[0062] Therefore, when the airflow inlet 21 receives the driving airflow DA provided by the external gas source device G, and the second gas input 23 receives the harmful airflow HA provided by the second external device E2, at least one airflow output component 2 drives the harmful airflow HA to flow toward the second gas output 22 through the driving airflow DA; wherein, when the first gas input 11 receives the harmful airflow HA provided by the second gas output 22, the first gas input 11 introduces the harmful airflow HA into the body of at least one particle separation component 1 and drives the harmful airflow HA to flow in a vortex manner, so that at least one harmful substance HS in the harmful airflow HA is separated from the harmful airflow HA to form a purified airflow PA, and at least one particle separation component 1 delivers the purified airflow PA to the first external device E1 through the first gas output 12. wherein, at least one particle separation component 1 collects at least one harmful substance HS separated from the harmful airflow HA through the foreign matter outlet 13, and delivers at least one harmful substance HS to at least one particle collection component 3. When the airflow inlet portion 21 receives the driving airflow DA, the guide ear portion 201 introduces the driving airflow DA into the cavity portion 200 through the special flow channel 2010 and drives the harmful airflow HA to flow toward the second gas output portion 22; wherein the second gas input portion 23 is configured to provide the harmful airflow HA to be introduced into the cavity portion 200 and combined with the driving airflow DA to increase the flow intensity of the harmful airflow HA.

[0063] For example, with Figures 1 to 7As shown, the dust collecting device Z of the present invention can be applied to semiconductor process equipment and used as a high-efficiency dust capturing device in semiconductor process equipment. Therefore, when the second external device E2 provides the harmful airflow HA generated by the semiconductor process to the dust collecting device Z, the dust collecting device Z can receive the driving airflow DA (such as the airflow of inert gas) provided by the external air source device G through the airflow introduction part 21 of the airflow output component 2 and introduce it into the special flow channel 2010; at this time, the airflow output component 2 can drive the driving airflow DA to flow in the special flow channel 2010 in a vortex manner through the structural design of the special flow channel 2010, and flow toward the inside of the cavity part 200 through the discharge area 2010b. When the driving airflow DA flows into the cavity 200, the driving airflow DA will flow toward the cavity 200 and the second gas output portion 22 according to the structural design of the drainage area 2010b; at the same time, the driving airflow DA will draw the harmful airflow HA introduced by the second gas input portion 23 into it, and combine with the harmful airflow HA to form a strong and stable airflow and flow toward the second gas output portion 22. Finally, the harmful airflow HA combined with the driving airflow DA can be transported to the particle separation component 1 through the second gas output portion 22.

[0064] Next, the dust collecting device Z can first guide the harmful airflow HA delivered by the second gas output part 22 into the interior of the body 10 of the particle separation component 1 through the first gas input part 11 of the particle separation component 1; wherein, through the arrangement and connection method of the first gas input part 11 and the body 10 of the particle separation component 1, and the structural design of the body 10 of the particle separation component 1, the harmful airflow HA can flow in the body 10 of the particle separation component 1 in a vortex manner after entering the body 10 of the particle separation component 1. During the flow of the harmful airflow HA, the harmful substances HS carried by the harmful airflow HA will fall toward the bottom of the body 10 of the particle separation component 1 (i.e., toward the direction of the foreign matter outlet 13) and separate from the harmful airflow HA. Next, the particle separation component 1 can collect the fallen harmful substances HS through the foreign matter outlet 13 and deliver them to the interior of the body 30 of the particle collection component 3 through the foreign matter inlet 31. The harmful airflow HA forms a purified airflow PA after the harmful substances HS carried by the airflow HA are separated, and moves and flows toward the first gas output portion 12 .

[0065] Finally, the purified gas flow PA is output to the first external device E1 through the first gas output portion 12 .

[0066] Thus, the dust collecting device Z of the present invention can, through the above-mentioned technical scheme, first utilize the structural design of the airflow output component 2, in conjunction with the airflow (active airflow) provided by the external air source device G, to enhance the airflow power of the harmful airflow HA and supply it to the particle separation component 1; and, then, the particle separation component 1 is used to capture large and small dust in the harmful airflow HA, thereby enhancing the removal efficiency of harmful substances, thereby solving the pipeline blockage problem in semiconductor process equipment, and there is no need to provide additional electricity or water, and in the future, the pipeline will not require heating belts.

[0067] However, the above example is only one feasible implementation example and is not intended to limit the present invention.

[0068] [Second embodiment]

[0069] See also Figure 8 , which is a schematic diagram of the structure of the dust collecting device of the second embodiment of the utility model, and please refer to Figures 1 to 7 As shown in the figure, the dust collecting device Z of this embodiment is substantially similar to the dust collecting device Z of the above embodiment, so the arrangement or operation of the same components will not be repeated here. The difference between this embodiment and the above first embodiment is that in this embodiment, the dust collecting device Z of the utility model can be provided with a plurality of airflow output components 2; wherein, in this embodiment, two airflow output components 2 are used as an example, but the present invention is not limited thereto.

[0070] For example, the dust collecting device Z of the present invention can greatly improve the airflow power (transmission power) of transmitting the harmful airflow HA by setting a plurality of airflow output components 2, and each airflow output component 2 cooperates with an external air source device G. Therefore, when the distance (or pipeline) between the second external device E2 and the particle separation component 1 is too long, or the distance (or pipeline) between the airflow output component 2 and the particle separation component 1 is too long, one or more airflow output components 2 can be set between the second external device E2 and the particle separation component 1, or between the airflow output component 2 and the particle separation component 1, to avoid the airflow power of the harmful airflow HA being too low or too slow, thereby reducing the harmful substance removal efficiency of the particle separation component 1.

[0071] However, the above example is only one feasible implementation example and is not intended to limit the present invention.

[0072] [Third embodiment]

[0073] See also Fig. 9 , which is a schematic diagram of the structure of the dust collecting device of the third embodiment of the utility model, and please refer to Figures 1 to 8As shown in the figure, the dust collecting device Z of this embodiment is substantially similar to the dust collecting device Z of the above embodiments, so the arrangement or operation of the same components will not be repeated here. The difference between this embodiment and the above embodiments is that in this embodiment, the dust collecting device Z of the utility model can be provided with a plurality of particle separation components 1; wherein, in this embodiment, two particle separation components 1 are used as an example, but the present invention is not limited thereto.

[0074] For example, the dust collecting device Z of the present invention can be provided with one or more particle separation components 1 between the particle separation component 1 and the first external device E1, and the main body 10 of each particle separation component 1 has a different structural design (as described in the first embodiment above) to improve the filtering efficiency of removing multiple harmful substances. Further, when the harmful airflow HA carries harmful substances of different sizes, after the airflow output component 2 transports the harmful airflow HA to the particle separation component 1, the dust collecting device Z of the present invention can first filter out large particles of harmful substances in the harmful airflow HA through the first particle separation component 1; then, the first particle separation component 1 uses the first gas output part 12 to transport the harmful airflow HA that has filtered out large particles of harmful substances to the second particle separation component 1. At this time, the dust collecting device Z of the present invention can use the second particle separation component 1 to filter out small particles of harmful substances in the harmful airflow HA.

[0075] It is worth mentioning that the dust collecting device Z of the present invention is not limited to the above-mentioned implementation mode. In actual implementation, the dust collecting device Z of the present invention can also filter out small particles of harmful substances in the harmful airflow HA through the first particle separation component 1, and then use the second particle separation component 1 to filter out large particles of harmful substances in the harmful airflow HA.

[0076] However, the above example is only one feasible implementation example and is not intended to limit the present invention.

[0077] [Fourth embodiment]

[0078] See also Fig.10 , which is a schematic diagram of the structure of the dust collecting device of the fourth embodiment of the utility model, and please refer to Figures 1 to 9 As shown in the figure, the dust collecting device Z of this embodiment is substantially similar to the dust collecting device Z of the above embodiments, so the arrangement or operation of the same components will not be repeated here. The difference between this embodiment and the above embodiments is that in this embodiment, the utility model can be provided with multiple dust collecting devices Z; wherein, in this embodiment, two dust collecting devices Z are used as an example, but the present invention is not limited thereto.

[0079] For example, the utility model can improve the filtering efficiency of removing multiple harmful substances by setting multiple dust collecting devices Z between the first external device E1 and the second external device E2, and can avoid the reduction of the airflow power (transmission power) of transmitting the harmful airflow HA. Further, the body 10 structural design of the particle separation component 1 of each dust collecting device Z is different from each other (as described in the first embodiment); therefore, when the harmful airflow HA carries harmful substances of different sizes, after the airflow output component 2 of the first dust collecting device Z transports the harmful airflow HA to the particle separation component 1, the large particles of harmful substances in the harmful airflow HA can be filtered out by the first particle separation component 1. Then, the first particle separation component 1 uses the first gas output part 12 to transport the harmful airflow HA that has filtered out the large particles of harmful substances to the airflow output component 2 of the second dust collecting device Z; at this time, after the airflow output component 2 transports the harmful airflow HA to the second particle separation component 1, the second particle separation component 1 can be used to filter out the small particles of harmful substances in the harmful airflow HA. In this embodiment, since an airflow output component 2 is further provided between the two particle separation components 1 , it is possible to avoid the airflow power of the harmful airflow HA being too low or too slow, thereby reducing the harmful substance removal efficiency of the particle separation component 1 .

[0080] However, the above example is only one feasible implementation example and is not intended to limit the present invention.

[0081] [Beneficial Effects of Embodiments]

[0082] One of the beneficial effects of the present invention is that the dust collecting device Z provided by the present invention can be realized by "at least one particle separation component 1 having a body 10, one side of the body 10 of at least one particle separation component 1 extending outward to form a first gas input part 11, one end of the body 10 of at least one particle separation component 1 extending outward to form a first gas output part 12, one end of the body 10 of at least one particle separation component 1 extending outward to form a foreign matter outlet 13, the first gas output part 12 is connected to the first external device E1, and the first gas input part 11, the first gas output part 12 and the foreign matter outlet 13 are communicated with each other; at least one airflow output component 2 having a body 20, at least one airflow output One side of the body 20 of the component 2 extends outward to form an airflow inlet 21, one end of the body 20 of at least one airflow output component 2 extends outward to form a second gas output part 22, and the other end of the body 20 of at least one airflow output component 2 extends outward to form a second gas input part 23, the airflow inlet 21 is connected to the external gas source device G, the second gas output part 22 is connected to the first gas input part 11, and the second gas input part 23 is connected to the second external device E2, and the airflow inlet 21, the second gas output part 22 and the second gas input part 23 are connected to each other; at least one particle collection component 3 is connected to the foreign matter outlet 13" technical solution to improve the removal efficiency of harmful substances and reduce production costs.

[0083] Furthermore, the dust collecting device Z of the present invention can utilize the active airflow provided by the external device through the above-mentioned technical solution, without the need to set up additional energy-consuming gas-driven equipment, that is, no additional power supply is required, and no water resources are consumed. In addition, the dust collecting device Z of the present invention adopts a simple structural design, which can not only effectively improve the efficiency of harmful substance removal, but also greatly reduce the cost and expenses of equipment maintenance. Moreover, it can also solve the problem of pipeline blockage in semiconductor process equipment, and in the future, the pipeline will not need heating belts.

[0084] In addition, the dust collecting device Z of the utility model can also be provided with multiple airflow output components 2 to significantly improve the airflow dynamics (transmission dynamics) of transmitting the harmful airflow HA, or, it can be provided with multiple particle separation components 1 with different structural designs to improve the filtration efficiency for removing a variety of harmful substances, or, multiple dust collecting devices Z can be provided to improve the filtration efficiency for removing a variety of harmful substances and avoid reducing the airflow dynamics (transmission dynamics) of transmitting the harmful airflow HA.

[0085] The contents disclosed above are only preferred feasible embodiments of the present utility model, and are not intended to limit the scope of the patent application of the present utility model. Therefore, all equivalent technical changes made using the contents of the present utility model specification and drawings are included in the scope of the patent application of the present utility model.

Claims

1. A dust collecting device, characterized in that: include: At least one particle separation component has a body, one side of the body of the at least one particle separation component extends outward to form a first gas input portion, one end of the body of the at least one particle separation component extends outward to form a first gas output portion, and the other end of the body of the at least one particle separation component extends outward to form a foreign matter outlet portion, the first gas output portion is connected to a first external device, and the first gas input portion, the first gas output portion and the foreign matter outlet portion are in communication with each other; At least one airflow output component, which has a body, one side of the body of the at least one airflow output component extends outward to form an airflow introduction part, one end of the body of the at least one airflow output component extends outward to form a second gas output part, and the other end of the body of the at least one airflow output component extends outward to form a second gas input part, the airflow introduction part is connected to an external gas source device, the second gas output part is connected to the first gas input part, the second gas input part is connected to a second external device, and the airflow introduction part, the second gas output part and the second gas input part are connected to each other; and At least one particle collecting component is connected to the foreign matter collecting portion.

2. The dust collecting device according to claim 1, characterized in that: When the airflow inlet part receives the driving airflow provided by the external air source device, and the second gas input part receives the harmful airflow provided by the second external device, the at least one airflow output component drives the harmful airflow to flow toward the second gas output part through the driving airflow; wherein, when the first gas input part receives the harmful airflow provided by the second gas output part, the first gas input part introduces the harmful airflow into the main body of the at least one particle separation component and drives the harmful airflow to flow in a vortex manner, so that at least one harmful substance in the harmful airflow is separated from the harmful airflow to form a purified airflow, and the at least one particle separation component transports the purified airflow to the first external device through the first gas output part; wherein, the at least one particle separation component collects the at least one harmful substance separated from the harmful airflow through the foreign matter outlet, and transports the at least one harmful substance to the at least one particle collection component.

3. The dust collecting device according to claim 2, characterized in that: The body of the at least one airflow output component has a cavity portion and a guide ear portion, one end of the cavity portion extends outward to form the second gas output portion, the other end of the cavity portion extends outward to form a first hook-shaped portion, the guide ear portion surrounds the side of the cavity portion, the outer edge of the guide ear portion extends outward to form the airflow introduction portion, one end of the guide ear portion is connected to the cavity portion, the other end of the guide ear portion extends toward the cavity portion in a rotational manner to form a second hook-shaped portion, and the second hook-shaped portion extends outward to form the second gas input portion; wherein a special flow channel is defined between the guide ear portion and the cavity portion, and the special flow channel is connected to the airflow introduction portion and the interior of the cavity portion.

4. The dust collecting device according to claim 3, characterized in that: When the airflow inlet portion receives the driving airflow, the guide ear portion introduces the driving airflow into the cavity portion through the special flow channel and drives the harmful airflow to flow toward the second gas output portion; wherein the second gas input portion is configured to provide the harmful airflow to be introduced into the cavity portion and combined with the driving airflow to increase the flow intensity of the harmful airflow.

5. The dust collecting device according to claim 3, characterized in that: The special flow channel area is divided into a guide area and a drainage area, the guide area is connected to the drainage area, the cross section of the guide area is in a cone shape, and the cross section of the drainage area is in a C shape or a hook shape.

6. The dust collecting device according to claim 1, characterized in that: The body of the at least one particle separation component, the first gas input part and the first gas output part are in the shape of a straight tube, the foreign matter outlet part is in the shape of a cone, and the diameters of the first gas input part and the first gas output part are less than or equal to the diameter of the body of the at least one particle separation component.

7. The dust collecting device according to claim 6, characterized in that: The diameter of the body of the at least one particle separation component is defined as a predetermined value, the diameter of the first gas input part and the diameter of the first gas output part are 0.01 to 1 times the predetermined value, the length of the body of the at least one particle separation component and the length of the foreign matter outlet part are 0.5 to 4 times the predetermined value, and the length of the first gas output part is 1 to 4.5 times the predetermined value.

8. The dust collecting device according to claim 7, characterized in that: One end of the foreign matter outlet portion is connected to the main body of the at least one particle separation component, and the other end of the foreign matter outlet portion extends outward to form a protruding connection portion, which is connected to the at least one particle collection component. The diameter of the protruding connection portion is 0.1 to 0.5 times the predetermined value, and the length of the protruding connection portion is 0.1 to 0.5 times the predetermined value.

9. The dust collecting device according to claim 7, characterized in that: One end of the first gas output part is connected to the main body of the at least one particle separation component, and the other end of the first gas output part extends toward the interior of the at least one particle separation component to form an extension into and out of the part, the diameter of the extension into and out of the part is equal to the diameter of the first gas output part, and the length of the extension into and out of the part is 0.1 to 2.5 times the predetermined value.

10. The dust collecting device according to claim 1, characterized in that: One end of the at least one particle collecting component extends outward to form a foreign matter collecting portion, and the foreign matter collecting portion is connected to the foreign matter collecting portion.

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