Lifting device for wafer grinding disc, trimming device and wafer grinding device

Abstract

The utility model provides a lifting device for a wafer grinding disc, a trimming device and a wafer grinding device. The lifting device comprises a shell, a power device, a first position sensor and a second position sensor, the power device is arranged on the shell and comprises a lifting driving assembly and a lifting shaft, and the lifting driving assembly is used for controlling the lifting shaft to ascend and descend; the first position sensor and the second position sensor are located on the side edge of the lifting shaft. One end of the lifting shaft is used for being connected with the grinding disc; when the lifting shaft ascends to enable the grinding disc to be in the standby position, the first position sensor detects the sensing part; and when the lifting shaft descends to enable the grinding disc to be in the working position, the second position sensor detects the sensing part. According to the lifting device provided by the utility model, the first position sensor and the second position sensor are arranged in the shell at an interval, and the sensing part is arranged on the lifting shaft, so that the position of the grinding disc in a standby state or a working state is detected, and the trimming reliability of the grinding pad is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to a lifting device for a wafer grinding disc, a trimming device and a wafer grinding device. Background Art

[0002] Chemical mechanical polishing equipment is usually equipped with a polishing pad dresser device, the purpose of which is to remove residual particles on the surface of the polishing pad, repair the surface roughness of the polishing pad, and ensure that the polishing pad has a stable polishing speed. And a position sensor is usually installed on the polishing pad dresser to detect the lifting status of the grinding disc. The existing solution generally installs a set of capacitive position sensors on the side of the polishing pad dresser to detect the lifting status of the grinding disc. When in standby mode, the grinding disc rises, triggering the position sensor to sound an alarm; when in working mode, the grinding disc drops and the position sensor goes out.

[0003] Since the grinding disc needs to be raised and lowered frequently, if a mechanical failure causes the grinding disc to descend or get stuck midway, the position sensor will show that the grinding disc is still in normal working condition and the equipment will not be able to sound an alarm, resulting in the grinding pad surface being unable to be trimmed in time. Utility Model Content

[0004] The utility model aims at providing a lifting device, a dressing device and a wafer grinding device for a wafer grinding disc, which realizes the detection of the position of the grinding disc in a standby state or a working state, and improves the reliability of the dressing of the grinding pad.

[0005] To achieve the above-mentioned purpose, in a first aspect, the utility model provides a lifting device for a wafer grinding disc, comprising a housing, a power device, a first position sensor and a second position sensor;

[0006] The power device is arranged on the housing, and the power device comprises a lifting drive assembly and a lifting shaft, and the lifting drive assembly is used to control the lifting of the lifting shaft;

[0007] The first position sensor and the second position sensor are located on the side of the lifting shaft and are arranged in the housing at intervals along the axial direction of the lifting shaft;

[0008] The lifting shaft has a sensing portion, and one end of the lifting shaft is used to connect to the grinding disc;

[0009] When the lifting shaft rises to place the grinding disc in a standby position, the first position sensor detects the sensing portion; when the lifting shaft descends to place the grinding disc in a working position, the second position sensor detects the sensing portion.

[0010] In some embodiments, a receiving cavity is provided in the shell, a lifting channel is provided at the bottom of the receiving cavity, and the lifting channel is connected to the receiving cavity;

[0011] The lifting drive assembly is arranged in the accommodating cavity;

[0012] The lifting shaft is arranged in the lifting channel and one end of the lifting shaft extends out of the lifting channel and is connected to the grinding disc, and the other end of the lifting shaft is connected to the lifting drive assembly.

[0013] In some embodiments, the lifting drive assembly includes an airbag and an elastic member;

[0014] The other end of the lifting shaft has an abutment portion;

[0015] The airbag is disposed in the accommodating cavity and contacts the abutting portion;

[0016] The elastic member is disposed between the abutment portion and the bottom of the accommodating cavity, and one end of the elastic member is connected to the bottom of the accommodating cavity, and the other end of the elastic member is connected to the abutment portion for supporting the abutment portion;

[0017] When gas is introduced into the airbag, the airbag applies a force to the abutment portion to lower the lifting shaft; when gas is discharged from the airbag, the elastic member applies a force to the abutment portion to raise the lifting shaft.

[0018] In some embodiments, the power device further comprises a rotating mechanism and a rolling bearing;

[0019] The rolling bearing is sleeved on the abutment portion, and the outer ring structure of the rolling bearing is connected to the airbag and the elastic member;

[0020] The rotating mechanism is arranged at the top of the shell, and the rotating mechanism has a rotating shaft. The rotating shaft is penetrated in the accommodating cavity and movably connected with the lifting shaft to drive the lifting shaft to rotate.

[0021] In some embodiments, the end surface of the other end of the lifting shaft is provided with a mounting hole, the mounting hole extends along the axial direction of the lifting shaft, and the inner side wall of the mounting hole is provided with a protrusion. The rotating shaft is inserted into the mounting hole, and the outer side wall of the rotating shaft is provided with a slide groove corresponding to the protrusion, and the protrusion is located in the slide groove;

[0022] When the lifting shaft rises or falls, the protrusion can slide in the sliding groove.

[0023] In some embodiments, the first position sensor and the second position sensor are both disposed close to the lifting shaft, and the first position sensor is close to the airbag.

[0024] In some embodiments, the sensing portion has magnetism, and both the first position sensor and the second position sensor are magnetic sensors.

[0025] In some embodiments, a side wall of the lifting shaft is provided with an annular receiving groove, and an annular magnetic member is embedded in the receiving groove to form the sensing portion.

[0026] In a second aspect, the utility model provides a grinding pad dressing device, comprising a connecting member, a rotating device, a grinding disc and the lifting device;

[0027] One end of the connecting member is connected to the rotating device, and the other end of the connecting member is connected to the housing of the lifting device, and the rotating device is used to drive the lifting device to rotate;

[0028] The grinding disc is connected to the lifting shaft of the lifting device.

[0029] In a third aspect, the utility model provides a wafer grinding device, comprising a grinding table, a grinding pad and a dressing device for the grinding pad;

[0030] The grinding pad is arranged on the grinding table, and the grinding table is used to drive the grinding pad to rotate;

[0031] The trimming device is arranged on the side of the grinding table.

[0032] The beneficial effects of the lifting device, dressing device and wafer grinding device for the wafer grinding disk provided by the utility model are: by arranging the first position sensor and the second position sensor at intervals in the shell, and arranging the sensing part on the lifting shaft, the position of the grinding disk in the standby state or the working state can be detected, so as to improve the reliability of the dressing of the grinding pad. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A cross-sectional view of the lifting device for a wafer grinding disk according to an embodiment of the utility model along its axial direction;

[0034] Figure 2 A cross-sectional view of the embodiment of the utility model provided by the utility model after the rotating shaft and the lifting shaft are assembled along the radial direction thereof;

[0035] Figure 3 A schematic diagram of the structure of the main structure and magnetic components of the lifting shaft of the embodiment provided by the utility model;

[0036] Figure 4 A schematic diagram of the structure of a dressing device for a polishing pad according to an embodiment of the present invention;

[0037] Figure 5This is a schematic structural diagram of a wafer grinding device according to an embodiment of the present invention.

[0038] Reference numerals:

[0039] Shell 1, accommodating chamber 11, lifting channel 12, lifting drive assembly 21, airbag 211, elastic member 212, lifting shaft 22, sensing part 221, accommodating groove 2211, magnetic member 2212, abutment part 222, mounting hole 223, protrusion 224, rotating mechanism 23, rotating shaft 231, slide groove 232, rolling bearing 24, first position sensor 3, second position sensor 4, grinding disc 5, connecting member 6, rotating device 7, grinding table 8, grinding pad 9. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0041] The utility model provides a lifting device for a wafer grinding disc, referring to Figure 1 As shown, it includes a housing 1, a power device, a first position sensor 3 and a second position sensor 4. The power device is arranged in the housing 1, and the power device includes a lifting drive component 21 and a lifting shaft 22, and the lifting drive component 21 is used to control the lifting of the lifting shaft 22. The first position sensor 3 and the second position sensor 4 are located on the side of the lifting shaft 22, and are arranged in the housing 1 at intervals along the axial direction of the lifting shaft 22, and the first position sensor 3 is located above the second position sensor 4. The middle area of ​​the lifting shaft 22 has a sensing part 221, and one end of the lifting shaft 22 extends out of the housing 1 for connecting the grinding disc 5.

[0042] When the lifting drive assembly 21 controls the lifting shaft 22 to rise and drive the grinding disc 5 to the standby position, the first position sensor 3 can detect the sensing part 221 and send out detection information to remind the staff that the grinding disc 5 is in the standby position at this time. When the lifting drive assembly 21 controls the lifting shaft 22 to descend and make the grinding disc 5 in the working position, the second position sensor 4 can detect the sensing part 221 and send out detection information to remind the staff that the grinding disc 5 is in the working position at this time.

[0043] It is understandable that if both the first position sensor 3 and the second position sensor 4 fail to detect the sensing part 221, so that the staff cannot receive the detection information, it means that there is an abnormality in the lifting shaft 22, causing the grinding disc 5 to be neither in the working position nor in the standby position. At this time, the staff needs to perform maintenance in time to ensure that the grinding pad 9 can be trimmed in time, thereby improving the reliability of the trimming of the grinding pad 9.

[0044] In some embodiments, a housing 1 is provided with a housing chamber 11, a lifting channel 12 is provided at the bottom of the housing chamber 11, and the lifting channel 12 is connected to the housing chamber 11. The lifting drive assembly 21 is provided in the housing chamber 11 and connected to the other end of the lifting shaft 22, and the lifting drive assembly 21 is used to apply an ascending or descending force to the lifting shaft 22 so as to ascend or descend the lifting shaft 22. The lifting shaft 22 is provided in the lifting channel 12 and one end of the lifting shaft 22 extends out of the lifting channel 12 and is connected to the grinding disc 5, so as to drive the grinding disc 5 to ascend or descend.

[0045] Further, the lifting drive assembly 21 includes an airbag 211 and an elastic member 212. The other end of the lifting shaft 22 has an abutment portion 222, and the upper end of the abutment portion 222 has an annular flange protruding from the outer side wall of the lifting shaft 22. The abutment portion 222 is located in the accommodating cavity 11, and the airbag 211 is arranged in the accommodating cavity 11 and contacts the abutment portion 222. The elastic member 212 is arranged between the abutment portion 222 and the bottom of the accommodating cavity 11, and one end of the elastic member 212 is connected to the bottom inner wall of the accommodating cavity 11, and the other end of the elastic member 212 is used to connect the annular flange of the abutment portion 222, for example, the other end of the elastic member 212 is connected to the annular flange of the abutment portion 222 through the rolling bearing 24 described below, so that the elastic member 212 supports the abutment portion 222 and suspends the lifting shaft 22 in the accommodating cavity 11. The airbag 211 can be connected to an external air source through an air pipe. When gas is introduced into the airbag 211, the volume of the airbag 211 increases, exerting a force on the abutment portion 222, so that the lifting shaft 22 is lowered, and the abutment portion 222 compresses the elastic member 212 during the lowering process. When the airbag 211 discharges gas, the volume of the airbag 211 decreases, thereby canceling the force on the abutment portion 222. At this time, the elastic member 212 exerts an upward force on the abutment portion 222 during the process of restoring to its original length, so that the lifting shaft 22 is lifted, until the grinding disc 5 is driven to rise to the standby position.

[0046] In this embodiment, the elastic member 212 may be a spring. The elastic member 212 is sleeved on the lifting shaft 22 and does not contact the outer side wall of the main structure of the lifting shaft 22 .

[0047] In some embodiments, the power device further includes a rotating mechanism 23 and a rolling bearing 24. The inner ring structure of the rolling bearing 24 is sleeved on the outer side wall of the annular flange of the abutment portion 222 and is fixedly connected to the abutment portion 222. The upper surface of the outer ring structure of the rolling bearing 24 is connected to the airbag 211, and the lower surface of the outer ring structure of the rolling bearing 24 is connected to the elastic member 212. A through hole is provided at the top of the housing 1 corresponding to the lifting channel 12. The rotating mechanism 23 is provided at the top of the housing 1, and the rotating shaft 231 of the rotating mechanism 23 passes through the through hole and is movably connected to the lifting shaft 22 located in the accommodating chamber 11, so as to drive the lifting shaft 22 to rotate.

[0048] In this embodiment, the rotating mechanism 23 may be a motor. By providing the rotating mechanism 23 and the rolling bearing 24, the grinding disc 5 can rotate when it descends to the working position, thereby achieving the dressing of the grinding pad 9.

[0049] Specifically, combined Figure 2 As shown, the end surface of the other end of the lifting shaft 22 is provided with a mounting hole 223, and the mounting hole 223 extends along the axial direction of the lifting shaft 22, so that the lifting shaft 22 is formed into a hollow cylindrical structure. The inner side wall of the mounting hole 223 is provided with a protrusion 224, and the rotating shaft 231 is penetrated in the mounting hole 223 and maintains a certain gap with the inner side wall of the mounting hole 223, and the outer side wall of the rotating shaft 231 is provided with a slide groove 232 at the position corresponding to the protrusion 224, so that the protrusion 224 is located in the slide groove 232. When the lifting shaft 22 rises or falls, the protrusion 224 can slide in the slide groove 232, so as not to affect the lifting and lowering of the lifting shaft 22. When the rotating shaft 231 rotates, the inner side wall of the slide groove 232 applies a force to the protrusion 224, so that the lifting shaft 22 rotates.

[0050] In some embodiments, the sliding groove 232 may be provided on the inner wall of the mounting hole 223 , and the protruding block may be provided on the outer wall of the rotating shaft 231 .

[0051] refer to Figure 1 As shown, in some embodiments, the first position sensor 3 and the second position sensor 4 are both magnetic sensors, and the sensing portion 221 is magnetic. Therefore, in order to ensure the magnetic induction detection effect of the first position sensor 3 and the second position sensor 4, the first position sensor 3 and the second position sensor 4 are both arranged in the housing 1 close to the lifting shaft 22. Among them, the first position sensor 3 is close to the airbag 211, that is, the first position sensor 3 is located above the second position sensor 4 and maintains a certain distance.

[0052] refer to Figure 1 and Figure 3 As shown, in some embodiments, a side wall of the lifting shaft 22 is provided with a ring-shaped receiving groove 2211 , and a ring-shaped magnetic member 2212 is embedded in the receiving groove 2211 to form the sensing portion 221 .

[0053] In some embodiments, reference Figure 1 and Figure 4 As shown, the utility model provides a dressing device for a grinding pad, comprising a connecting member 6, a rotating device 7, a grinding disc 5 and the lifting device described in the above embodiment. The grinding disc 5 is connected to the lifting shaft 22 of the lifting device. One end of the connecting member 6 is connected to the rotating device 7, and the other end of the connecting member 6 is connected to the housing 1 of the lifting device. The rotating device 7 is used to drive the lifting device to rotate.

[0054] In this embodiment, when the grinding pad needs to be trimmed, the rotating device 7 is used to drive the lifting device to rotate above the grinding pad, and then the lifting device drives the grinding disc 5 to descend and contact the grinding pad, and then the lifting device drives the grinding disc 5 to rotate to trim the grinding pad. Since the second position sensor 4 can detect whether the grinding disc 5 is in the working position, it can detect the working state of the grinding disc 5, thereby improving the reliability of the grinding pad trimming.

[0055] In some embodiments, reference Figure 5 As shown, the utility model provides a wafer grinding device, comprising a grinding table 8, a grinding pad 9 and a dressing device for the grinding pad 9 in the above embodiment. The grinding pad 9 is arranged on the grinding table 8, and the grinding table 8 is used to drive the grinding pad 9 to rotate. The dressing device is arranged on the side of the grinding table 8, and is used to drive the grinding disc 5 to contact the grinding pad 9, so as to achieve the dressing of the grinding pad 9.

[0056] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A lifting device for a wafer grinding disc, characterized in that: It includes a housing, a power device, a first position sensor and a second position sensor; The power device is arranged on the housing, and the power device comprises a lifting drive assembly and a lifting shaft, and the lifting drive assembly is used to control the lifting of the lifting shaft; The first position sensor and the second position sensor are located on the side of the lifting shaft and are arranged in the housing at intervals along the axial direction of the lifting shaft; The lifting shaft has a sensing portion, and one end of the lifting shaft is used to connect to the grinding disc; When the lifting shaft rises to place the grinding disc in a standby position, the first position sensor detects the sensing portion; when the lifting shaft descends to place the grinding disc in a working position, the second position sensor detects the sensing portion.

2. The lifting device according to claim 1, characterized in that: A receiving cavity is provided in the shell, a lifting channel is provided at the bottom of the receiving cavity, and the lifting channel is connected to the receiving cavity; The lifting drive assembly is arranged in the accommodating cavity; The lifting shaft is arranged in the lifting channel and one end of the lifting shaft extends out of the lifting channel and is connected to the grinding disc, and the other end of the lifting shaft is connected to the lifting drive assembly.

3. The lifting device according to claim 2, characterized in that: The lifting drive assembly includes an air bag and an elastic member; The other end of the lifting shaft has an abutment portion; The airbag is disposed in the accommodating cavity and contacts the abutting portion; The elastic member is disposed between the abutment portion and the bottom of the accommodating cavity, and one end of the elastic member is connected to the bottom of the accommodating cavity, and the other end of the elastic member is connected to the abutment portion for supporting the abutment portion; When gas is introduced into the airbag, the airbag applies a force to the abutment portion to lower the lifting shaft; when gas is discharged from the airbag, the elastic member applies a force to the abutment portion to raise the lifting shaft.

4. The lifting device according to claim 3, characterized in that: The power device also includes a rotating mechanism and a rolling bearing; The rolling bearing is sleeved on the abutment portion, and the outer ring structure of the rolling bearing is connected to the airbag and the elastic member; The rotating mechanism is arranged at the top of the shell, and the rotating mechanism has a rotating shaft. The rotating shaft is penetrated in the accommodating cavity and movably connected with the lifting shaft to drive the lifting shaft to rotate.

5. The lifting device according to claim 4, characterized in that: The end surface of the other end of the lifting shaft is provided with a mounting hole, the mounting hole extends along the axial direction of the lifting shaft, and the inner side wall of the mounting hole is provided with a protrusion; The rotating shaft is inserted into the mounting hole, and a sliding groove is provided on the outer wall of the rotating shaft corresponding to the protruding portion, and the protruding portion is located in the sliding groove; When the lifting shaft rises or falls, the protrusion can slide in the sliding groove.

6. The lifting device according to claim 3, characterized in that: The first position sensor and the second position sensor are both arranged close to the lifting shaft, and the first position sensor is close to the airbag.

7. The lifting device according to claim 1, characterized in that: The sensing portion has magnetism, and both the first position sensor and the second position sensor are magnetic sensors.

8. The lifting device according to claim 6, characterized in that: The side wall of the lifting shaft is provided with an annular receiving groove, and an annular magnetic part is embedded in the receiving groove to form the sensing part.

9. A grinding pad dressing device, characterized in that: It comprises a connecting member, a rotating device, a grinding disc and a lifting device according to any one of claims 1 to 8; One end of the connecting member is connected to the rotating device, and the other end of the connecting member is connected to the housing of the lifting device, and the rotating device is used to drive the lifting device to rotate; The grinding disc is connected to the lifting shaft of the lifting device.

10. A wafer grinding device, characterized in that: A dressing device comprising a grinding table, a grinding pad and the grinding pad according to claim 9; The grinding pad is arranged on the grinding table, and the grinding table is used to drive the grinding pad to rotate; The trimming device is arranged on the side of the grinding table.

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