Beam lens cover plate debugging and mounting tool

Abstract

The utility model belongs to the technical field of semiconductor vacuum detection equipment, and particularly discloses a beam mirror cover plate debugging and mounting tool which comprises a welding rack assembly, a cover plate mounting disc assembly, a blind plate mounting disc assembly, a speed reducer assembly and an overturning assembly. The welding rack assembly comprises a connecting limiting plate, a welding supporting frame and a bottom plate connecting block fixed to the lower portion of the welding supporting frame. The blind plate mounting disc assembly comprises a blind plate mounting disc main body; the overturning assembly comprises a first connecting disc and a second connecting disc which are fixed to the welding supporting frame, bearing bases are arranged on the first connecting disc and the second connecting disc, and locking bearings are arranged on the bearing bases. The cover plate mounting disc assembly comprises a cover plate mounting disc main body, and the side edge of the cover plate mounting disc main body is rotationally connected with a bearing base through a locking bearing; the speed reducer assembly is located on the side edge of the second connecting disc and comprises a speed reducer body, a hand wheel, a coupler and a speed reducer fixing welding plate, and the output end of the speed reducer body is connected with the locking bearing through the coupler.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor vacuum detection equipment, in particular to a beam mirror cover plate debugging and installation tool. Background Art

[0002] Vacuum and leak detection expertise and equipment play a key role in the production of electronic components. Semiconductor processing often requires that process chamber pressures be maintained within precise limits in order to continuously produce the gas mixture required for the target reaction. Reactive gases such as water vapor, organics, and oxygen must be pumped out at high circulation rates before the required process gases can be introduced.

[0003] The beam mirror cover of the current vacuum detection equipment needs to install parts and maintain parts, so the beam mirror cover needs to be hoisted out and placed on a tooling after hoisting. After the beam mirror cover is hoisted out, the vacuum environment will be destroyed, which greatly increases the maintenance time. At this time, the mirror group maintenance also needs to be carried out at the same time. The current existing debugging cover has no flipping function and can only be installed on the top. For the installation on the bottom, the debugging personnel must debug at the bottom, which is troublesome to operate. Utility Model Content

[0004] The utility model aims to provide a beam mirror cover debugging and installation tool to solve the problems raised in the above background technology.

[0005] To achieve the above purpose, the utility model provides the following technical solutions: a beam mirror cover debugging and installation tool, comprising a welding frame assembly, a cover mounting plate assembly, a blind plate mounting plate assembly, a reducer assembly and a flip assembly, wherein the cover mounting plate assembly is arranged above the welding frame assembly, the blind plate mounting plate assembly is arranged below the welding frame assembly, the flip assembly is arranged on the side of the cover mounting plate assembly, and the reducer assembly is arranged on the side of the flip assembly;

[0006] The welding frame assembly includes a connection limit plate, a welding support frame, and a bottom plate connection block fixed below the welding support frame, and the connection limit plate is hinged to the bottom plate connection block;

[0007] The blind plate mounting plate assembly comprises a blind plate mounting plate body, and the blind plate mounting plate body is located above the bottom plate connecting block;

[0008] The flip assembly includes a first connection plate and a second connection plate fixed on the welding support frame, the first connection plate and the second connection plate are both provided with a bearing base, and the bearing base is provided with a locking bearing;

[0009] The cover plate mounting plate assembly comprises a cover plate mounting plate body, and the side of the cover plate mounting plate body is rotatably connected to the bearing base through a locking bearing;

[0010] The reducer assembly is located on the side of the second connecting plate, and the reducer assembly includes a reducer body, a handwheel, a coupling and a reducer fixing welding plate, the reducer fixing welding plate is fixed to the welding support frame, the reducer body is installed above the reducer fixing welding plate, the output end of the reducer body is connected to the locking bearing through the coupling, and the handwheel is fixed to the input end of the reducer body;

[0011] The speed reducer uses a reduction ratio of 1:50. By turning the hand wheel, the main body of the cover mounting plate can be driven to flip through the main body of the speed reducer.

[0012] The screw holes on the cover mounting plate body are all 304 stainless steel threaded sleeves.

[0013] Preferably, a plurality of mounting plate limit blocks are arranged on the side of the base plate connecting block, and a counterweight block is fixed under the base plate connecting block. The mounting plate limit blocks mainly play the role of limiting the blind plate mounting plate body, and the counterweight block can improve the overall stability.

[0014] Preferably, two lens group installation tooling parts positions and two lens group installation positions are provided on the cover plate mounting plate main body, and the two lens group installation tooling parts positions and the two lens group installation positions are respectively located at the corners of the cover plate mounting plate main body, and a lens group installation tooling main body is provided in one of the lens group installation tooling parts positions.

[0015] Preferably, a plurality of lifting rings are arranged above the cover plate mounting plate body, and the plurality of lifting rings are respectively located on the side of the mirror group mounting tooling, the mirror group mounting tooling and the mirror group mounting position. The lifting rings are arranged to facilitate lifting the mirror group to the mirror group mounting position.

[0016] Preferably, a first PTFE spacer is arranged in the middle of the cover plate mounting plate body, and a second PTFE spacer is arranged in the middle of the blind plate mounting plate body, and both the first PTFE spacer and the second PTFE spacer are made of PTFE material.

[0017] Preferably, a handle is provided on the side of the blind plate mounting plate body, and a plurality of rollers are provided below the blind plate mounting plate body. The provided rollers and handles can facilitate pulling the blind plate mounting plate body out of the welding support frame.

[0018] Preferably, the sides of the first connecting plate and the second connecting plate are both threadedly connected with limit pins, and the provided limit pins mainly play the role of limiting the cover plate mounting plate body.

[0019] Preferably, a universal wheel is provided at the corner below the base plate connecting block, and a supporting foot threadedly connected to the base plate connecting block is provided on the side of the universal wheel. The universal wheel is mainly provided to facilitate the movement of the device, and the supporting foot can be rotated to prop up the device and improve the stability of the device.

[0020] Compared with the prior art, the beneficial effects of the utility model are:

[0021] The utility model can solve the problem of fixed installation and debugging of the beam mirror cover after hoisting, and can be turned 360 degrees to maintain the front and back of the cover, which is convenient and quick. The tool can maintain the mirror group at the same time. In addition to being able to maintain and debug the components on the beam mirror cover, the blind plate can be pulled out to seal the cavity, greatly reducing the time for vacuuming. The use of PTFE spacers can prevent the cover and blind plate from contacting the mounting plate, reducing the tiny dust generated by wear. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0023] Figure 2 It is a schematic diagram of the three-dimensional structure of the utility model;

[0024] Figure 3 This is a schematic diagram of the top view structure of the utility model;

[0025] Figure 4 This is a schematic diagram of the main structure of the blind plate mounting plate of the utility model;

[0026] Figure 5 This is a schematic diagram of the structure of the first PTFE spacer of the utility model.

[0027] In the figure: 1. Welding frame assembly; 11. Connecting limit plate; 12. Welding support frame; 13. Mounting plate limit block; 14. Counterweight block; 15. Bottom plate connecting block; 16. Universal wheel; 17. Support foot;

[0028] 2. Cover plate mounting plate assembly; 21. Cover plate mounting plate body; 22. First PTFE spacer; 23. Lifting ring; 24. Mirror group mounting position; 25. Mirror group mounting tooling position; 26. Mirror group mounting tooling body;

[0029] 3. Blind plate mounting plate assembly; 31. Blind plate mounting plate body; 32. Second PTFE spacer; 33. Handle; 34. Roller;

[0030] 4. Reducer assembly; 41. Reducer body; 42. Handwheel; 43. Coupling; 44. Reducer fixing welding plate;

[0031] 5. Flip assembly; 51. First connecting plate; 52. Second connecting plate; 53. Bearing base; 54. Locking bearing; 55. Limit pin. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] See also Figure 1-5 The utility model provides a technical solution: a beam mirror cover debugging and installation tool, comprising a welding frame assembly 1, a cover mounting plate assembly 2, a blind plate mounting plate assembly 3, a reducer assembly 4 and a flip assembly 5, wherein the cover mounting plate assembly 2 is arranged above the welding frame assembly 1, the blind plate mounting plate assembly 3 is arranged below the welding frame assembly 1, the flip assembly 5 is arranged on the side of the cover mounting plate assembly 2, and the reducer assembly 4 is arranged on the side of the flip assembly 5.

[0036] Furthermore, the welding frame assembly 1 includes a connecting limit plate 11 , a welding support frame 12 , and a bottom plate connecting block 15 fixed below the welding support frame 12 , and the connecting limit plate 11 is hinged to the bottom plate connecting block 15 .

[0037] Furthermore, the blind plate mounting plate assembly 3 includes a blind plate mounting plate body 31 , and the blind plate mounting plate body 31 is located above the bottom plate connecting block 15 .

[0038] Furthermore, the flip assembly 5 includes a first connection plate 51 and a second connection plate 52 fixed on the welding support frame 12 , and a bearing base 53 is provided on the first connection plate 51 and the second connection plate 52 , and a locking bearing 54 is provided on the bearing base 53 .

[0039] Furthermore, the cover plate mounting plate assembly 2 includes a cover plate mounting plate body 21 , and a side of the cover plate mounting plate body 21 is rotatably connected to a bearing base 53 via a locking bearing 54 .

[0040] Furthermore, the reducer assembly 4 is located on the side of the second connecting plate 52, and the reducer assembly 4 includes a reducer body 41, a handwheel 42, a coupling 43 and a reducer fixed welding plate 44, the reducer fixed welding plate 44 is fixed to the welding support frame 12, the reducer body 41 is installed above the reducer fixed welding plate 44, the output end of the reducer body 41 is connected to the locking bearing 54 through the coupling 43, and the handwheel 42 is fixed to the input end of the reducer body 41.

[0041] Furthermore, the speed reducer uses a speed reduction ratio of 1:50, and by turning the hand wheel 42, the speed reducer body 41 can drive the cover plate mounting plate body 21 to flip.

[0042] Furthermore, the screw holes on the cover mounting plate body 21 are all 304 stainless steel threaded sleeves.

[0043] Furthermore, a plurality of mounting plate limit blocks 13 are arranged on the side of the bottom plate connecting block 15, and a counterweight block 14 is fixed below the bottom plate connecting block 15. The mounting plate limit blocks 13 are mainly used to limit the blind plate mounting plate body 31, and the counterweight block 14 can improve the overall stability.

[0044] Furthermore, two lens group installation tooling parts positions 25 and two lens group installation positions 24 are provided on the cover plate mounting plate main body 21, and the two lens group installation tooling parts positions 25 and the two lens group installation positions 24 are respectively located at the corners of the cover plate mounting plate main body 21, and a lens group installation tooling main body 26 is provided in one of the lens group installation tooling parts positions 25.

[0045] Furthermore, a plurality of lifting rings 23 are provided above the cover plate mounting plate main body 21 , and the plurality of lifting rings 23 are respectively located on the sides of the group mounting tooling, the mirror group mounting tooling and the mirror group mounting position 24 . The lifting rings 23 are provided to facilitate lifting the mirror group to the mirror group mounting position 24 .

[0046] Furthermore, a first PTFE spacer 22 is disposed in the middle of the cover plate mounting plate body, and a second PTFE spacer 32 is disposed in the middle of the blind plate mounting plate body 31. Both the first PTFE spacer 22 and the second PTFE spacer 32 are made of PTFE material.

[0047] Furthermore, a handle 33 is provided on the side of the blind plate mounting plate body 31 , and a plurality of rollers 34 are provided below the blind plate mounting plate body 31 . The provided rollers 34 and handle 33 can conveniently pull the blind plate mounting plate body 31 out of the welding support frame 12 .

[0048] Furthermore, the sides of the first connection plate 51 and the second connection plate 52 are both threadedly connected with limit pins 55 , and the provided limit pins 55 mainly play the role of limiting the cover plate mounting plate body 21 .

[0049] Furthermore, a universal wheel 16 is provided at the corner below the bottom plate connecting block 15, and a supporting foot 17 threadedly connected to the bottom plate connecting block 15 is provided on the side of the universal wheel 16. The universal wheel 16 is mainly provided to facilitate the movement of the device. The supporting foot 17 can be rotated to prop up the device and improve the stability of the device.

[0050] In summary, when the device is in use, the center of the cover plate mounting plate body 21 can be brought as close to the frame body as possible, reducing the hoisting distance and the travel of the overhead crane. The cover plate mounting plate body 21 is installed in place by means of the overhead crane through the hoisting ring 23 installed on the cover plate mounting plate body 21. Then install the mirror assembly installation tooling. The mirror assembly is hoisted in the mirror assembly installation position 24 by the overhead crane. The first PTFE spacer 22 and the second PTFE spacer 32 are provided to avoid contact between the cover plate, the blind plate and the cover plate mounting plate body 21 and the blind plate mounting plate body 31, thereby reducing the tiny dust generated by wear. By turning the handwheel 42 of the flip reducer assembly 4, the handwheel 42 drives the coupling 43 to rotate through the reducer body 41, so that the coupling 43 drives the cover plate mounting plate body 21 through the locking bearing 54 to rotate 360 ​​degrees, and the components of the cover plate are effectively maintained and debugged. The limit pin 55 on the flip assembly 5 is used to limit the position to prevent the cover plate mounting plate from flipping.

[0051] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A beam mirror cover debugging and installation tool, characterized in that: The invention comprises a welding frame assembly (1), a cover plate mounting plate assembly (2), a blind plate mounting plate assembly (3), a speed reducer assembly (4) and a flip assembly (5), wherein the cover plate mounting plate assembly (2) is arranged above the welding frame assembly (1), the blind plate mounting plate assembly (3) is arranged below the welding frame assembly (1), the flip assembly (5) is arranged on the side of the cover plate mounting plate assembly (2), and the speed reducer assembly (4) is arranged on the side of the flip assembly (5); The welding frame assembly (1) comprises a connecting limit plate (11), a welding support frame (12), and a bottom plate connecting block (15) fixed below the welding support frame (12); the connecting limit plate (11) is hinged to the bottom plate connecting block (15); The blind plate mounting plate assembly (3) comprises a blind plate mounting plate body (31), and the blind plate mounting plate body (31) is located above the bottom plate connecting block (15); The flip assembly (5) comprises a first connection plate (51) and a second connection plate (52) fixed on the welding support frame (12); a bearing base (53) is provided on the first connection plate (51) and the second connection plate (52); and a locking bearing (54) is provided on the bearing base (53); The cover plate mounting plate assembly (2) comprises a cover plate mounting plate body (21), and the side edge of the cover plate mounting plate body (21) is rotatably connected to a bearing base (53) via a locking bearing (54); The reducer assembly (4) is located on the side of the second connecting plate (52). The reducer assembly (4) comprises a reducer body (41), a hand wheel (42), a coupling (43) and a reducer fixing welding plate (44). The reducer fixing welding plate (44) is fixed to the welding support frame (12). The reducer body (41) is installed above the reducer fixing welding plate (44). The output end of the reducer body (41) is connected to the locking bearing (54) through the coupling (43). The hand wheel (42) is fixed to the input end of the reducer body (41).

2. The debugging and installation tool for the beam mirror cover according to claim 1 is characterized in that: A plurality of mounting plate limit blocks (13) are arranged on the side of the bottom plate connecting block (15), and a counterweight block (14) is fixed below the bottom plate connecting block (15).

3. The debugging and installation tool for the beam mirror cover according to claim 1 is characterized in that: The cover plate mounting plate main body (21) is provided with two lens assembly mounting tool parts positions (25) and two lens assembly mounting positions (24), and the two lens assembly mounting tool parts positions (25) and the two lens assembly mounting positions (24) are respectively located at the corners of the cover plate mounting plate main body (21), and a lens assembly mounting tool main body (26) is arranged in one of the lens assembly mounting tool parts positions (25).

4. The debugging and installation tool for the beam mirror cover according to claim 1 is characterized in that: A plurality of lifting rings (23) are arranged above the cover plate mounting plate main body (21), and the plurality of lifting rings (23) are respectively located on the sides of the assembly mounting tooling, the mirror assembly mounting tooling and the mirror assembly mounting position (24).

5. The debugging and installation tool for the beam mirror cover according to claim 1 is characterized in that: A first PTFE spacer (22) is arranged in the middle of the cover plate mounting plate body, and a second PTFE spacer (32) is arranged in the middle of the blind plate mounting plate body (31). Both the first PTFE spacer (22) and the second PTFE spacer (32) are made of PTFE material.

6. The debugging and installation tool for the beam mirror cover according to claim 1, characterized in that: A handle (33) is provided on the side of the blind plate installation plate body (31), and a plurality of rollers (34) are provided below the blind plate installation plate body (31).

7. The debugging and installation tool for the beam mirror cover according to claim 1 is characterized in that: The side edges of the first connection plate (51) and the second connection plate (52) are both threadedly connected with limit pins (55).

8. The debugging and installation tool for the beam mirror cover according to claim 1, characterized in that: A universal wheel (16) is arranged at a corner below the bottom plate connecting block (15), and a supporting foot (17) threadedly connected to the bottom plate connecting block (15) is arranged on the side of the universal wheel (16).

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