Sheet material arranging device and sorting machine

Abstract

The utility model discloses a sheet material neatening device and a sorting machine, the sheet material neatening device comprises a conveying line and two neatening mechanisms, the conveying line is configured to convey sheet materials in the first direction, the conveying line is provided with a neatening station in the first direction, and the two neatening mechanisms are correspondingly arranged on the two sides of the neatening station in the second direction; the arranging mechanism comprises a driving assembly, an eccentric wheel mechanism and a belt assembly. The driving assembly is configured to drive the belt assembly to be close to or away from the conveying line through the eccentric wheel mechanism. The two tidying mechanisms are configured to enable the belt assemblies in the two tidying mechanisms to get close to and get away from each other in a reciprocating mode through the eccentric wheel mechanisms of the two tidying mechanisms so as to tidy the sheet stock or enable the sheet stock to enter a tidying station for avoiding, and the two belt assemblies assist in conveying the sheet stock when the sheet stock is tidied. According to the sheet material tidying device, automatic tidying of sheet materials is achieved through the belt assembly, sheet material conveying can be assisted, friction force between the belt assembly and the sheet materials is greatly reduced, and meanwhile efficiency and productivity can be improved.

Description

Technical Field

[0001] The present application relates to the field of silicon wafer production equipment manufacturing, and in particular to a wafer tidying device and a sorting machine. Background Art

[0002] In the production process of silicon wafers, it is usually necessary to use conveyor lines to transport silicon wafers to inspection, sorting and other workstations. During the transportation of silicon wafers on the conveyor lines, regular operations are usually required to ensure the smooth transportation of silicon wafers and the accuracy of silicon wafer inspection.

[0003] The existing aligning mechanism usually includes aligning components arranged on both sides of the conveyor line, and the aligning components on both sides can move relative to each other to clamp and align the silicon wafers. Among them, the aligning components often use multiple rollers arranged at intervals. The rollers are unpowered rollers. The friction between the silicon wafers and the rollers is large during the conveying process, which is easy to wear the silicon wafers, and will reduce the conveying efficiency and affect the production capacity. Utility Model Content

[0004] The purpose of the present application is to provide a sheet material aligning device to solve the problem in the prior art that silicon wafers are easily worn and the conveying efficiency is reduced when the silicon wafers are aligned by rollers; in addition, the present application also provides a sorting machine including the above-mentioned sheet material aligning device.

[0005] To achieve the above purpose, the embodiment of the present application adopts the following technical solution:

[0006] In a first aspect, the present application proposes a sheet tidying device, which comprises a conveying line and two tidying mechanisms, wherein:

[0007] The conveyor line is configured to convey the sheet material along a first direction, the conveyor line is provided with a tidying station in the first direction, and two tidying mechanisms are correspondingly provided on both sides of the tidying station along a second direction;

[0008] The tidying mechanism includes a driving assembly, an eccentric wheel mechanism and a belt assembly, wherein the driving assembly is configured to drive the belt assembly to approach or move away from the conveying line through the eccentric wheel mechanism;

[0009] The two tidying mechanisms are configured to reciprocate the belt assemblies in the two tidying mechanisms toward and away from each other through their respective eccentric wheel mechanisms, so as to tidy the sheets or avoid the sheets from entering the tidying stations. The two belt assemblies assist in conveying the sheets when tidying the sheets.

[0010] By controlling the belt assemblies in the two straightening mechanisms to approach each other, the belt assemblies can push the skewed sheet material straight, thereby realizing automatic straightening of the sheet material at the straightening station. Compared with the prior art using roller straightening, the belt assembly itself has power and can assist in conveying the sheet material, greatly reducing the friction between the belt assembly and the sheet material, causing almost no damage to the sheet material, and at the same time improving efficiency and production capacity; and the eccentric wheel mechanism can control the two belt assemblies to move back and forth by rotating continuously in the same direction, which has a simple structure, improves the straightening efficiency, and further improves production capacity.

[0011] Optionally, the tidying mechanism also includes a base, the eccentric wheel mechanism includes two eccentric wheels, the two eccentric wheels are rotatably mounted on the base, the driving assembly is configured to drive the two eccentric wheels to rotate simultaneously, and the belt assembly is eccentrically arranged on the two eccentric wheels so that when the two eccentric wheels rotate, the belt assembly is driven to approach or move away from the conveyor line.

[0012] By rotatably arranging two eccentric wheels on the base, the driving assembly drives the two eccentric wheels to rotate simultaneously to drive the belt assembly to approach or move away from the conveyor line, providing an eccentric wheel mechanism with simple structure, easy implementation, stable and reliable operation.

[0013] Optionally, the two eccentric wheels are spaced apart along the first direction, and the tidying mechanism further comprises a mounting member, two ends of the mounting member are eccentrically mounted on the two eccentric wheels respectively, and the belt assembly is mounted on the mounting member.

[0014] By arranging the mounting parts, the belt assembly can be mounted on the two eccentric wheels, and the structure is simple and stable.

[0015] Optionally, the eccentricities of the two ends of the mounting member on the corresponding eccentric wheels are the same.

[0016] By setting the eccentric distances of the two ends of the mounting member on the corresponding eccentric wheels to be the same, the travel distances of the two ends of the belt assembly during regularization are the same, thereby ensuring the regularization accuracy of the belt assembly.

[0017] Optionally, the drive assembly includes a first drive member and a transmission assembly, the transmission assembly includes a synchronous belt, two synchronous pulleys and two axles, the two axles are rotatably mounted on a base, a synchronous pulley is mounted on each axle, an eccentric wheel is mounted on the end of each axle, the synchronous belt is sleeved on the two synchronous pulleys, and the first drive member is configured to drive one of the axles to rotate.

[0018] Through the cooperation of the first driving member and the transmission assembly, the two eccentric wheels are driven to rotate synchronously. At the same time, the transmission form of a synchronous belt and a synchronous pulley is adopted to provide a transmission assembly with high transmission efficiency, high transmission accuracy and good transmission stability.

[0019] Optionally, the belt assembly includes a belt, a second driving member, a driving wheel, two driven wheels and two connecting shafts. The second driving member is mounted on the mounting member. The second driving member is configured to drive the driving wheel to rotate. Each connecting shaft corresponds to an eccentric wheel. The first ends of the two connecting shafts are rotatably mounted on the mounting member. The second ends of the two connecting shafts are respectively fixed to the corresponding eccentric wheels. Each driven wheel corresponds to a connecting shaft. The two driven wheels are respectively rotatably mounted on the corresponding connecting shafts. The belt is rotatably mounted on the driving wheel and the two driven wheels.

[0020] The rotation of the belt is achieved through the cooperation of the second driving member, the driving wheel, the two driven wheels and the two connecting shafts, so that the belt can assist in conveying the sheet materials while tidying the sheet materials, thereby improving the conveying efficiency of the sheet materials; at the same time, the transmission form of the pulley and the belt is adopted, providing a belt assembly with low cost, stable operation and easy maintenance.

[0021] Optionally, at least one tensioning wheel is further provided on the mounting member, and the belt is rotatably mounted on the driving wheel, the two driven wheels and the at least one tensioning wheel, and the at least one tensioning wheel is configured to tension the belt.

[0022] By setting a tensioning wheel, the belt can be tensioned to ensure stable and reliable operation of the belt assembly.

[0023] Optionally, the rotation speed of the belt is greater than or equal to the rotation speed of the conveyor line.

[0024] By setting the rotation speed of the belt to be greater than or equal to the rotation speed of the conveyor line, the tidying speed of the tidying mechanism can be increased.

[0025] Optionally, when the sheet aligning device is working, the minimum spacing between the two belts is greater than the side length of the sheet after aligning on the conveyor line in the second direction.

[0026] By setting the minimum distance between the two belts, it is possible to avoid collision between the two aligning mechanisms and the sheet material during aligning, thereby preventing the sheet material from being damaged.

[0027] In a second aspect, the present application provides a sorting machine, which includes a feeding device, the above-mentioned sheet material regularization device, a detection device and a material receiving device, wherein:

[0028] The feeding device is used to convey the sheets to the conveying line of the sheet aligning device in sequence;

[0029] The conveyor line is used to receive the sheet material provided by the feeding device and convey the received sheet material to the arranging station. Two arranging mechanisms are arranged at the arranging station. The two arranging mechanisms are configured to arranging the sheet material on the arranging station. The conveyor line is also configured to convey the arranging sheet material to the detection device and the receiving device.

[0030] The detection device is used to detect the sheet material conveyed to the detection area;

[0031] The material receiving device is used to receive the sheet material conveyed to the material receiving area according to the detection result.

[0032] Through the cooperation of the feeding device, the sheet material straightening device, the detection device and the receiving device, the automatic straightening of the sheet materials is realized, and the sorting and receiving of the sheet materials are carried out with high work efficiency; the two straightening mechanisms push the skewed sheet materials to the right position through the belt assembly, thereby realizing the automatic straightening of the sheet materials; the belt assembly itself is powered and can assist in conveying the sheet materials, greatly reducing the friction between the belt assembly and the sheet materials, causing almost no damage to the sheet materials, and at the same time improving efficiency and production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present application, the following briefly introduces the background technology of the present application and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present application and these drawings without paying any creative work.

[0034] Figure 1 It is a schematic diagram of the three-dimensional structure of the sheet material tidying device provided in an embodiment of the present application;

[0035] Figure 2 It is a schematic diagram of the three-dimensional structure of the first viewing angle of the arranging mechanism of the sheet material arranging device provided in an embodiment of the present application;

[0036] Figure 3 is a schematic diagram of the three-dimensional structure of the arranging mechanism of the sheet arranging device provided in an embodiment of the present application from a second viewing angle;

[0037] Figure 4 It is a schematic diagram of the three-dimensional structure of the sorting machine provided in the embodiment of the present application.

[0038] Figures 1 to 4 The following reference numerals are included:

[0039] The tidying mechanism 10, the tidying station 11, the driving assembly 12, the first driving member 120, the synchronous belt 121, the synchronous pulley 122, the eccentric wheel mechanism 13, the eccentric wheel 130, the belt assembly 14, the belt 140, the second driving member 141, the driving wheel 142, the driven wheel 143, the connecting shaft 144, the tensioning wheel 145, the base 15, and the mounting member 16;

[0040] Feeding device 20;

[0041] Sheet material aligning device 30;

[0042] Detection device 40;

[0043] The material receiving device 50. DETAILED DESCRIPTION

[0044] In order to make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved more clearly, the technical solutions of the embodiments of this application will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this application.

[0045] In the production process of silicon wafers, it is usually necessary to use conveyor lines to transport silicon wafers to inspection, sorting and other workstations. During the transportation of silicon wafers on the conveyor lines, regular operations are usually required to ensure the smooth transportation of silicon wafers and the accuracy of silicon wafer inspection.

[0046] The existing aligning mechanism usually includes aligning components arranged on both sides of the conveyor line, and the aligning components on both sides can move relative to each other to clamp and align the silicon wafers. Among them, the aligning components often use multiple rollers arranged at intervals. The rollers are unpowered rollers. The friction between the silicon wafers and the rollers is large during the conveying process, which is easy to wear the silicon wafers, and will reduce the conveying efficiency and affect the production capacity.

[0047] Therefore, this application proposes a sheet material tidying device, please refer to Figure 1 As shown, the sheet material tidying device proposed in the embodiment of the present application includes a conveyor line (not shown in the figure) and two tidying mechanisms 10, wherein: the conveyor line is configured to be arranged along a first direction ( Figure 1 The conveying line is provided with a tidying station 11 in the first direction, and two tidying mechanisms 10 are arranged along the second direction ( Figure 1 The tidying mechanism 10 includes a driving assembly 12, an eccentric wheel mechanism 13 and a belt assembly 14, and the driving assembly 12 is configured to drive the belt assembly 14 to approach or move away from the conveyor line through the eccentric wheel mechanism 13; the two tidying mechanisms 10 are configured to make the belt assemblies 14 in the two tidying mechanisms 10 move back and forth through their respective eccentric wheel mechanisms 13 to tidy up the sheets or avoid them from entering the tidying station, and the two belt assemblies 14 assist in conveying the sheets when tidying them.

[0048] Optionally, the first direction and the second direction are perpendicular.

[0049] It should be noted that the sheet material may be a silicon wafer or a battery wafer, etc., wherein the silicon wafer and the battery wafer may be a whole wafer, or may be a slice obtained by dicing a standard whole wafer.

[0050] See also Figure 1and Figure 2 As shown, as an embodiment, the tidying mechanism 10 also includes a base 15, the eccentric wheel mechanism 13 includes two eccentric wheels 130, the two eccentric wheels 130 are rotatably mounted on the base 15, the driving assembly 12 is configured to drive the two eccentric wheels 130 to rotate simultaneously, and the belt assembly 14 is eccentrically arranged on the two eccentric wheels 130 so that when the two eccentric wheels 130 rotate, the belt assembly 14 is driven to approach or move away from the conveyor line.

[0051] By rotatably arranging two eccentric wheels 130 on the base 15, the driving assembly 12 drives the two eccentric wheels 130 to rotate simultaneously to drive the belt assembly 14 to approach or move away from the conveyor line, providing an eccentric wheel mechanism 13 with a simple structure, easy implementation, stable and reliable operation.

[0052] As an implementation mode, the two eccentric wheels 130 are spaced apart along the first direction, and the tidying mechanism 10 further includes a mounting member 16 , both ends of the mounting member 16 are eccentrically mounted on the two eccentric wheels 130 , and the belt assembly 14 is mounted on the mounting member 16 .

[0053] By providing the mounting member 16, the belt assembly 14 is mounted on the two eccentric wheels 130, and the structure is simple and stable.

[0054] As an implementation manner, the eccentricities of the two ends of the mounting member 16 on the corresponding eccentric wheel 130 are the same.

[0055] By setting the eccentricity of the two ends of the mounting member 16 on the corresponding eccentric wheel 130 to be the same, the movement strokes of the two ends of the belt assembly 14 during regularization are the same, so as to ensure the regularization accuracy of the belt assembly 14.

[0056] As an embodiment, the drive assembly 12 includes a first drive member 120 and a transmission assembly, the transmission assembly includes a synchronous belt 121, two synchronous pulleys 122 and two axles, the two axles are rotatably mounted on the base 15, a synchronous pulley 122 is mounted on each axle, an eccentric wheel 130 is mounted on the end of each axle, the synchronous belt 121 is sleeved on the two synchronous pulleys 122, the first drive member 120 is configured to drive one of the axles to rotate, so as to drive one of the synchronous pulleys 122 to rotate, and then drive the two synchronous pulleys 122 to rotate synchronously through the synchronous belt 121, so as to drive the two eccentric wheels 130 to rotate synchronously.

[0057] Optionally, the first driving member 120 is a motor.

[0058] Through the cooperation of the first driving member 120 and the transmission assembly, the two eccentric wheels 130 are driven to rotate synchronously. At the same time, the transmission form of the synchronous belt 121 and the synchronous pulley 122 is adopted to provide a transmission assembly with high transmission efficiency, high transmission accuracy and good transmission stability.

[0059] Please participate Figures 1 to 3 As shown, as an embodiment, the belt assembly 14 includes a belt 140, a second driving member 141, a driving wheel 142, two driven wheels 143 and two connecting shafts 144. The second driving member 141 is installed on the mounting member 16. The second driving member 141 is configured to drive the driving wheel 142 to rotate. Each connecting shaft 144 is provided corresponding to an eccentric wheel 130. The first ends of the two connecting shafts 144 are rotatably installed on the mounting member 16. The second ends of the two connecting shafts 144 are respectively fixed on the corresponding eccentric wheels 130. Each driven wheel 143 is provided corresponding to a connecting shaft 144. The two driven wheels 143 are respectively rotatably installed on the corresponding connecting shafts 144. The belt 140 is rotatably mounted on the driving wheel 142 and the two driven wheels 143.

[0060] Optionally, the second driving member 141 is a motor.

[0061] Through the cooperation of the second driving member 141, the driving wheel 142, the two driven wheels 143 and the two connecting shafts 144, the rotation of the belt 140 is realized, so that the belt 140 can assist in conveying the sheet material while organizing the sheet material, thereby improving the conveying efficiency of the sheet material; at the same time, the transmission method of the pulley and the belt is adopted, providing a belt assembly 14 with low cost, stable operation and easy maintenance.

[0062] As an embodiment, at least one tensioning wheel 145 is also provided on the mounting member 16 , and the belt 140 is rotatably mounted on the driving wheel 142 , two driven wheels 143 and at least one tensioning wheel 145 , and the at least one tensioning wheel 145 is configured to tension the belt 140 .

[0063] By providing the tensioning wheel 145 , the belt 140 is tensioned, thereby ensuring that the belt assembly 14 works stably and reliably.

[0064] As an implementation method, the rotation speed of the belt 140 is greater than or equal to the rotation speed of the conveyor line.

[0065] By setting the rotation speed of the belt 140 to be greater than or equal to the rotation speed of the conveyor line, the aligning speed of the aligning mechanism can be increased.

[0066] As an embodiment, when the sheet aligning device is working, the minimum spacing between the two belts 140 is greater than the side length of the sheet aligned on the conveyor line in the second direction.

[0067] By setting the minimum distance between the two belts 140, it is possible to avoid the two aligning mechanisms 10 colliding with the sheet material and damaging the sheet material during aligning.

[0068] The sheet material tidying device proposed in this embodiment has the following advantages compared with the prior art:

[0069] 1) The sheet material at the tidying station is automatically tidyed by the belt assembly. The belt assembly itself has power and can assist in conveying the sheet material, which greatly reduces the friction between the belt assembly and the sheet material and causes almost no damage to the sheet material. At the same time, it can improve efficiency and production capacity. The eccentric wheel mechanism rotates continuously in the same direction to control the two belt assemblies to move back and forth. The structure is simple, which improves the tidying efficiency and further improves the production capacity.

[0070] 2) The drive assembly adopts the transmission form of synchronous belt and synchronous pulley, which has high transmission efficiency, high transmission accuracy and good transmission stability.

[0071] 3) The belt assembly adopts the transmission form of pulley and belt, which has low cost, smooth operation and easy maintenance.

[0072] This application also proposes a sorting machine, see Figure 1 and Figure 4 As shown, the sorting machine proposed in the embodiment of the present application includes a loading device 20, the above-mentioned sheet material sorting device 30, a detection device 40 and a receiving device 50, wherein: the loading device 20 is used to convey the sheets to the conveying line of the sheet material sorting device 30 in sequence; the conveying line is used to receive the sheets provided by the loading device 20, and convey the received sheets to the sorting station 11, two sorting mechanisms 10 are arranged at the sorting station 11, and the two sorting mechanisms 10 are configured to sort the sheets on the sorting station 11, and the conveying line is also configured to convey the sorted sheets to the detection device 40 and the receiving device 50; the detection device 40 is used to detect the sheets transported to the detection area; the receiving device 50 is used to receive the sheets transported to the receiving area according to the detection results.

[0073] Specifically, the loading device 20 can utilize a telescopic conveyor belt to connect with the flower basket to transport the sheet material in the flower basket to the conveyor line; the detection device 40 is used to detect whether the sheet material is a qualified sheet material or an NG sheet material; the receiving device 50 can utilize an adsorption conveyor belt to suck up the sheet material on the conveyor line and transport it to different material boxes for storage according to the detection structure.

[0074] Through the cooperation of the feeding device 20, the sheet material sizing device 30, the detection device 40 and the receiving device 50, the automatic sizing of the sheets and then the sorting and receiving of the sheets are realized, and the working efficiency is high; the two sizing mechanisms 10 push the skewed sheets to the right position through the belt assembly 14, thereby realizing the automatic sizing of the sheets; the belt assembly 14 itself is powered and can assist in conveying the sheets, which greatly reduces the friction between the belt assembly 14 and the sheets, and hardly causes damage to the sheets, while being able to improve efficiency and production capacity.

[0075] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A sheet tidying device, characterized in that: The sheet tidying device comprises a conveying line and two tidying mechanisms, wherein: The conveyor line is configured to convey the sheet material along a first direction, the conveyor line is provided with a tidying station in the first direction, and the two tidying mechanisms are correspondingly arranged on both sides of the tidying station along a second direction; The tidying mechanism comprises a driving assembly, an eccentric wheel mechanism and a belt assembly, wherein the driving assembly is configured to drive the belt assembly to approach or move away from the conveying line through the eccentric wheel mechanism; The two tidying mechanisms are configured to reciprocate the belt assemblies in the two tidying mechanisms toward and away from each other through their respective eccentric wheel mechanisms, so as to tidy up the sheets or avoid the sheets from entering the tidying stations. The two belt assemblies assist in conveying the sheets when tidying them.

2. The sheet material aligning device according to claim 1, characterized in that: The tidying mechanism also includes a base, the eccentric wheel mechanism includes two eccentric wheels, and the two eccentric wheels are rotatably mounted on the base. The driving assembly is configured to drive the two eccentric wheels to rotate simultaneously, and the belt assembly is eccentrically arranged on the two eccentric wheels so that the belt assembly is driven to approach or move away from the conveyor line when the two eccentric wheels rotate.

3. The sheet material aligning device according to claim 2, characterized in that: The two eccentric wheels are spaced apart along the first direction, and the tidying mechanism further comprises a mounting member, two ends of the mounting member are eccentrically mounted on the two eccentric wheels respectively, and the belt assembly is mounted on the mounting member.

4. The sheet material aligning device according to claim 3, characterized in that: The eccentricity of the two ends of the mounting member on the corresponding eccentric wheel is the same.

5. The sheet aligning device according to claim 2, characterized in that: The driving assembly includes a first driving member and a transmission assembly, the transmission assembly includes a synchronous belt, two synchronous pulleys and two axles, the two axles are rotatably mounted on the base, one synchronous pulley is mounted on each axle, an eccentric wheel is mounted on the end of each axle, the synchronous belt is sleeved on the two synchronous pulleys, and the first driving member is configured to drive one of the axles to rotate.

6. The sheet material aligning device according to claim 3, characterized in that: The belt assembly includes a belt, a second driving member, a driving wheel, two driven wheels and two connecting shafts. The second driving member is mounted on the mounting member. The second driving member is configured to drive the driving wheel to rotate. Each connecting shaft is arranged corresponding to an eccentric wheel. The first ends of the two connecting shafts are rotatably mounted on the mounting member. The second ends of the two connecting shafts are respectively fixed to the corresponding eccentric wheels. Each driven wheel is arranged corresponding to a connecting shaft. The two driven wheels are respectively rotatably mounted on the corresponding connecting shafts. The belt is rotatably mounted on the driving wheel and the two driven wheels.

7. The sheet aligning device according to claim 6, characterized in that: At least one tensioning wheel is also arranged on the mounting member, and the belt is rotatably mounted on the driving wheel, the two driven wheels and the at least one tensioning wheel, and the at least one tensioning wheel is configured to tension the belt.

8. The sheet material aligning device according to claim 6, characterized in that: The rotation speed of the belt is greater than or equal to the rotation speed of the conveyor line.

9. The sheet aligning device according to claim 6, characterized in that: When the sheet material aligning device is in operation, the minimum spacing between the two belts is greater than the side length of the sheet material aligned on the conveyor line in the second direction.

10. A sorting machine, characterized in that: The sorting machine comprises a feeding device, a sheet material tidying device according to any one of claims 1 to 9, a detection device and a receiving device, wherein: The feeding device is used to sequentially convey the sheets to the conveying line of the sheet tidying device; The conveyor line is used to receive the sheet material provided by the feeding device and convey the received sheet material to the arranging station, the two arranging mechanisms are arranged at the arranging station, the two arranging mechanisms are configured to arranging the sheet material on the arranging station, and the conveyor line is also configured to convey the arranging sheet material to the detection device and the receiving device; The detection device is used to detect the sheet material conveyed to the detection area; The material receiving device is used to receive the sheet material conveyed to the material receiving area according to the detection result.

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