Gas-water supply device for atmosphere sintering furnace

Abstract

The utility model provides a gas-water supply device for an atmosphere sintering furnace. The gas-water supply device comprises a hydrogen supply pipeline, a nitrogen supply pipeline, a pure water supply pipeline, a heating chamber and a heat preservation pipeline. A hydrogen supply line for supplying hydrogen to the heating chamber; a nitrogen gas supply line for supplying nitrogen gas to the heating chamber; a pure water supply line for supplying a predetermined amount of water to the heating chamber; the heating chamber is used for receiving hydrogen from the hydrogen supply pipeline, nitrogen from the nitrogen supply pipeline and pure water from the pure water supply pipeline, so that the pure water from the pure water supply pipeline becomes water vapor in the heating chamber, and the water vapor is mixed with the hydrogen and the nitrogen to form water vapor-hydrogen-nitrogen mixed gas; the heat preservation pipeline is used for conducting heat preservation on the mixed gas and leading into the atmosphere sintering furnace. Therefore, the amount of water supplied to the atmosphere sintering furnace can be accurately controlled, and the temperature of gas-water mixture water supplied to the atmosphere sintering furnace can be more accurately controlled.

Description

Technical Field

[0001] The present disclosure relates to the field of atmosphere sintering furnaces, and more particularly to a gas-water supply device for atmosphere sintering furnaces. Background Art

[0002] The current atmosphere sintering furnace needs to add water vapor during the atmosphere sintering (H2 and N2) process to meet the dew point and oxygen concentration requirements in the furnace. At present, the market generally adds water vapor by blowing bubbles (similar to the oxygen outlet of the hospital). Figure 1 It is a schematic diagram of the structure of an existing gas-water supply device for an atmosphere sintering furnace.

[0003] like Figure 1 As shown, the existing gas-water supply device 100' for atmosphere sintering furnace includes a box 1', a pure water supply pipeline 2', a nitrogen supply pipeline 3', a heater 4', an insulation mixing chamber 5', a first insulation pipeline 6', a hydrogen supply pipeline 7', and a second insulation pipeline 8'.

[0004] The box body 1' has a surrounding wall 11', and the surrounding wall 11' includes a peripheral wall 111', a top wall 112' and a bottom wall 113', and the peripheral wall 111', the top wall 112' and the bottom wall 113' enclose an internal closed receiving tank 114'. The pure water supply pipeline 2' is used to pass through the surrounding wall 11' of the box body 1' and supply pure water to the receiving tank 114' of the box body 1'. The nitrogen supply pipeline 3' is used to pass through the surrounding wall 11' of the box body 1' and pass nitrogen into the pure water contained in the receiving tank 114' of the box body 1', so that the nitrogen passing through the pure water contained in the receiving tank 114' of the box body 1' carries moisture when it is discharged from the pure water. The heater 4' is used to heat the box body 1', and then heat the pure water contained in the receiving tank 114' of the box body 1'. The heat preservation mixing chamber 5' is located outside the box body 1'. One end of the first insulation pipe 6' passes through the surrounding wall 11' of the box body 1' and is connected to the space above the liquid level of the pure water in the receiving tank 114' of the box body 1'. The other end of the first insulation pipe 6' is connected to the insulation mixing chamber 5'. The first insulation pipe 6' is used to transport the nitrogen carrying water discharged from the pure water contained in the receiving tank 114' of the box body 1' to the insulation mixing chamber 5'. The hydrogen supply pipeline 7' is used to supply hydrogen to the insulation mixing chamber 5'. The insulation mixing chamber 5' is used to mix the nitrogen carrying water transported through the first insulation pipe 6' and the hydrogen supplied through the hydrogen supply pipeline 7' to form a gas-water mixture of nitrogen, water and hydrogen and keep it warm. The second insulation pipe 8' is connected to the insulation mixing chamber 5', and the second insulation pipe 8' is used to pass the gas-water mixture insulated in the insulation mixing chamber 5' into the atmosphere sintering furnace (not shown).

[0005] exist Figure 1In the example, the pure water supply pipeline 2' passes through the top wall 112' of the surrounding wall 11' of the box body 1', the nitrogen supply pipeline 3' passes through the peripheral wall 111' of the surrounding wall 11' of the box body 1', the heater 4' is arranged in the portion of the peripheral wall 111' of the surrounding wall 11' of the box body 1' opposite to the nitrogen supply pipeline 3', and one end of the first heat-insulating pipe 6' passes through the peripheral wall 412' of the surrounding wall 11' of the box body 1' above the liquid level of the pure water in the receiving tank 114' of the box body 1'. In addition, the pure water supply pipeline 2' is provided with a valve V1 for controlling the connection and disconnection of the pure water supply pipeline 2'.

[0006] In addition, Figure 1 In the example, the gas-water supply device 100' also includes a discharge pipe 9' and a drainage pipe 10'. The discharge pipe 9' passes through the peripheral wall 111' of the surrounding wall 11' of the box body 1' above the liquid level of the pure water in the receiving tank 114' of the box body 1', and the discharge pipe 9' is provided with a valve V2, which is used to open the valve V2 when exhaust is required to discharge the nitrogen carrying water above the liquid level of the pure water in the receiving tank 114'. The drainage pipe 10' passes through the bottom of the peripheral wall 111' of the surrounding wall 11' of the box body 1', and the drainage pipe 10' is provided with a corresponding valve V3, which is used to open the valve V3 when drainage is required to drain the pure water in the receiving tank 114'.

[0007] exist Figure 1 In the gas-water supply device 100' shown, the moisture in the gas-water mixture leading to the atmosphere sintering furnace through the second insulation pipe 8' comes from the moisture carried by the nitrogen of the pure water contained in the receiving tank 114' of the box 1' through the nitrogen supply pipeline 3'. It is impossible to accurately control the amount of water supplied to the atmosphere sintering furnace, and thus it is impossible to accurately control the dew point of the atmosphere sintering furnace.

[0008] exist Figure 1 In the gas-water supply device 100' shown, since the moisture carried by nitrogen discharged from the pure water contained in the receiving tank 114' of the box body 1' cannot be accurately determined, the time and opportunity for the pure water supply pipeline 2' to replenish the pure water into the receiving tank 114' of the box body 1' is difficult to accurately determine, which is not conducive to the production of large-scale atmosphere sintering furnaces.

[0009] exist Figure 1In the gas-water supply device 100' shown, the heater 4' heats the box body 1', and then heats the pure water contained in the receiving tank 114' of the box body 1'. Of course, the nitrogen discharged from the pure water contained in the receiving tank 114' together with the moisture carried by it will also be heated, but the hydrogen supplied to the insulation mixing chamber 5' through the hydrogen supply pipeline 7' is not heated. The hydrogen in the insulation mixing chamber 5' will reduce the temperature of the nitrogen carrying moisture transported through the first insulation pipe 6' (i.e., it is too low). Such a low gas-water mixture insulated in the insulation mixing chamber 5' is not conducive to accurately controlling the dew point of the atmosphere sintering furnace. Utility Model Content

[0010] In view of the problems existing in the background technology, an object of the present disclosure is to provide a gas-water supply device for an atmosphere sintering furnace, which can accurately control the amount of water supplied to the atmosphere sintering furnace.

[0011] Another object of the present disclosure is to provide a gas-water supply device for an atmosphere sintering furnace, which can more accurately control the temperature of the gas-water mixture water supplied to the atmosphere sintering furnace.

[0012] Thus, a gas and water supply device for an atmosphere sintering furnace is provided, the gas and water supply device comprising a hydrogen supply pipeline, a nitrogen supply pipeline, a pure water supply pipeline, a heating chamber and an insulation pipe; the hydrogen supply pipeline is used to supply hydrogen to the heating chamber; the nitrogen supply pipeline is used to supply nitrogen to the heating chamber; the pure water supply pipeline is used to supply a specified amount of water to the heating chamber; the heating chamber is used to receive hydrogen from the hydrogen supply pipeline, nitrogen from the nitrogen supply pipeline and pure water from the pure water supply pipeline, so that the pure water from the pure water supply pipeline is converted into water vapor in the heating chamber and the water vapor is mixed with hydrogen and nitrogen to form a mixed gas of water vapor-hydrogen-nitrogen; the insulation pipe is used to keep the mixed gas warm and lead it into the atmosphere sintering furnace.

[0013] The beneficial effects of the present disclosure are as follows.

[0014] In the gas-water supply device according to the present disclosure, the pure water supply pipeline is used to supply a specified amount of water to the heating chamber, so that the amount of water supplied to the heating chamber can be precisely controlled, and then the amount of water passing from the heating chamber to the atmosphere sintering furnace through the insulated pipe can be precisely controlled, thereby enabling the dew point of the atmosphere sintering furnace to be precisely controlled.

[0015] In the gas-water supply device according to the present disclosure, the heating chamber receives hydrogen from the hydrogen supply pipeline 1, nitrogen from the nitrogen supply pipeline and pure water from the pure water supply pipeline. While the pure water from the pure water supply pipeline is converted into water vapor in the heating chamber, the hydrogen from the hydrogen supply pipeline and the nitrogen from the nitrogen supply pipeline are also heated. In this way, a mixture of water vapor-hydrogen-nitrogen is formed in situ in the heating chamber. The temperature of the mixture can be accurately determined in the heating chamber, which avoids the problem in the background technology that the gas-water mixture insulated in the low insulation mixing chamber is not conducive to accurately controlling the dew point of the atmosphere sintering furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of an existing gas-water supply device for an atmosphere sintering furnace.

[0017] Figure 2 It is a schematic structural diagram of a gas-water supply device for an atmosphere sintering furnace according to the present disclosure.

[0018] The reference numerals are described as follows:

[0019] 100' Gas and water supply device 100 Gas and water supply device

[0020] 1'Box 1 Hydrogen supply pipeline

[0021] 11' wall 11 hydrogen supply pipeline

[0022] 111' wall 12 solenoid valve

[0023] 112' top wall 13 electronic flow meter

[0024] 113' Bottom wall 2 nitrogen supply pipeline

[0025] 114' Nitrogen supply pipeline for receiving tank 21

[0026] 2' pure water supply line 22 solenoid valve

[0027] V1 valve 23 electronic flow meter

[0028] 3' Nitrogen supply line 3 Pure water supply line

[0029] 4' Heater 31 pure water input pipeline

[0030] 5' insulation mixing chamber 32 solenoid valve

[0031] 6' first insulation pipe 33 pure water tank

[0032] 7' Hydrogen supply pipeline 34 Pure water output pipeline

[0033] 8' second insulation pipe 35 peristaltic pump

[0034] 9' discharge pipe 36 electronic flow meter

[0035] V2 valve 37 nitrogen exhaust port

[0036] 10' Drainage Pipe 4 Heating Chamber

[0037] V3 valve 5 insulation pipe

[0038] 6 Nitrogen branch pipeline

[0039] 61 Nitrogen branch pipeline

[0040] 62 Solenoid Valve DETAILED DESCRIPTION

[0041] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0042] Figure 2 It is a schematic structural diagram of a gas-water supply device for an atmosphere sintering furnace according to the present disclosure.

[0043] Reference Figure 2 The gas and water supply device 100 for an atmosphere sintering furnace according to the present disclosure includes a hydrogen supply pipeline 1 , a nitrogen supply pipeline 2 , a pure water supply pipeline 3 , a heating chamber 4 , and a heat preservation pipeline 5 .

[0044] The hydrogen supply line 1 is used to supply hydrogen to the heating chamber 4. The nitrogen supply line 2 is used to supply nitrogen to the heating chamber 4. The pure water supply line 3 is used to supply a specified amount of water to the heating chamber 4. The heating chamber 4 is used to receive hydrogen from the hydrogen supply line 1, nitrogen from the nitrogen supply line 2, and pure water from the pure water supply line 3, so that the pure water from the pure water supply line 3 is converted into water vapor in the heating chamber 4 and the water vapor is mixed with hydrogen and nitrogen to form a mixed gas of water vapor-hydrogen-nitrogen. The heat-insulating pipe 5 is used to keep the mixed gas warm and lead it to the atmosphere sintering furnace.

[0045] In the gas-water supply device 100 according to the present disclosure, the pure water supply pipeline 3 is used to supply a specified amount of water to the heating chamber 4, so that the amount of water supplied to the heating chamber 4 can be precisely controlled, and then the amount of water passing from the heating chamber 4 to the atmosphere sintering furnace through the insulated pipe 5 can be precisely controlled, so that the dew point of the atmosphere sintering furnace can be precisely controlled.

[0046] In the gas-water supply device 100 according to the present disclosure, the heating chamber 4 receives hydrogen from the hydrogen supply pipeline 1, nitrogen from the nitrogen supply pipeline 2 and pure water from the pure water supply pipeline 3. While the pure water from the pure water supply pipeline 3 is converted into water vapor in the heating chamber 4, the hydrogen from the hydrogen supply pipeline 1 and the nitrogen from the nitrogen supply pipeline 2 are also heated, so that a water vapor-hydrogen-nitrogen mixed gas is formed in situ in the heating chamber 4, and the temperature of the mixed gas can be accurately determined in the heating chamber 4, which avoids the problem in the background technology that the gas-water mixture insulated in the low insulation mixing chamber 5' is not conducive to accurately controlling the dew point of the atmosphere sintering furnace.

[0047] In one example, if Figure 2 As shown, the hydrogen supply pipeline 1 includes a hydrogen supply pipeline 11, a solenoid valve 12 and an electronic flowmeter 13. The hydrogen supply pipeline 11 is connected to the heating chamber 4, and the hydrogen supply pipeline 11 is used to supply hydrogen to the heating chamber 4. The solenoid valve 12 of the hydrogen supply pipeline 11 is arranged on the hydrogen supply pipeline 11, and the solenoid valve 12 of the hydrogen supply pipeline 11 is used to control the connection and closing of the hydrogen supply pipeline 11 and the heating chamber 4 and the flow rate of hydrogen supplied by the hydrogen supply pipeline 11. The electronic flowmeter 13 of the hydrogen supply pipeline 11 is arranged on the hydrogen supply pipeline 11 and is located between the solenoid valve 12 and the heating chamber 4, and the electronic flowmeter 13 of the hydrogen supply pipeline 11 is used to measure the volume flow rate of hydrogen supplied by the hydrogen supply pipeline 11. Through the solenoid valve 12 and the electronic flowmeter 13 of the hydrogen supply pipeline 1, the amount of hydrogen supplied from the hydrogen supply pipeline 1 to the heating chamber 4 can be accurately controlled. The pressure of the hydrogen supplied by the hydrogen supply pipeline 11 can be determined according to the requirements of the atmosphere sintering furnace, for example, 0.2-0.3 MPa.

[0048] In one example, if Figure 2 As shown, the nitrogen supply pipeline 2 includes a nitrogen supply pipeline 21, a solenoid valve 22 and an electronic flowmeter 23. The nitrogen supply pipeline 21 is connected to the heating chamber 4, and the nitrogen supply pipeline 21 is used to supply nitrogen to the heating chamber 4. The solenoid valve 22 of the nitrogen supply pipeline 2 is arranged on the nitrogen supply pipeline 21, and the solenoid valve 22 of the nitrogen supply pipeline 2 is used to control the connection and closing of the nitrogen supply pipeline 21 and the heating chamber 4 and the flow rate of nitrogen supplied by the nitrogen supply pipeline 21. The electronic flowmeter 23 of the nitrogen supply pipeline 2 is arranged on the nitrogen supply pipeline 21 and is located between the solenoid valve 22 and the heating chamber 4, and the electronic flowmeter 23 of the nitrogen supply pipeline 2 is used to measure the volume flow rate of nitrogen supplied by the nitrogen supply pipeline 21. Through the solenoid valve 22 and the electronic flowmeter 23 of the nitrogen supply pipeline 2, the amount of nitrogen supplied to the heating chamber 4 by the nitrogen supply pipeline 2 can be accurately controlled. The pressure of nitrogen supplied by the nitrogen supply pipeline 2 can be determined according to the requirements of the atmosphere sintering furnace, for example, 0.2-0.3 MPa.

[0049] In one example, if Figure 2 As shown, the pure water supply pipeline 3 includes a pure water input pipeline 31, a solenoid valve 32, a pure water tank 33, a pure water output pipeline 34, a peristaltic pump 35 and an electronic flow meter 36. The pure water input pipeline 31 is connected to the pure water tank 33, and the pure water input pipeline 31 is used to supply pure water from the outside to the pure water tank 33. The solenoid valve 32 of the pure water supply pipeline 3 is arranged on the pure water input pipeline 31, and the solenoid valve 32 of the pure water supply pipeline 3 is used to control the connection and closing of the pure water input pipeline 31 and the pure water tank 33 and the flow rate of pure water supplied by the pure water input pipeline 31. The pure water tank 33 is used to receive the pure water supplied from the pure water input pipeline 31. The pure water output pipeline 34 connects the pure water tank 33 and the heating chamber 4, and the pure water output pipeline 34 is used to output the pure water in the pure water tank 33 to the heating chamber 4. The peristaltic pump 35 is provided on the pure water output pipeline 34, and is used to quantitatively output the pure water from the pure water tank 33 outputted via the pure water output pipeline 34 to the heating chamber 4. The electronic flowmeter 36 of the pure water supply pipeline 3 is provided on the pure water output pipeline 34 and is located between the peristaltic pump 35 and the heating chamber 4, and is used to measure the volume flow rate of the pure water outputted via the peristaltic pump 35 from the pure water supply pipeline 3. The peristaltic pump 35 and the electronic flowmeter 36 of the pure water supply pipeline 3 can accurately control the amount of pure water supplied from the pure water supply pipeline 3 to the heating chamber 4. The amount of pure water supplied to the pure water tank 33 through the pure water input pipeline 31 can be predetermined by the solenoid valve 32 of the pure water supply pipeline 3, and the amount of pure water supplied from the heating chamber 4 in the pure water tank 33 can be determined by the electronic flow meter 36 of the pure water supply pipeline 3, thereby determining the time and opportunity for the pure water input pipeline 31 to replenish the pure water tank 33, which is beneficial to the mass production of the atmosphere sintering furnace. The accuracy of the peristaltic pump 35 can be purchased or customized according to the requirements of the atmosphere sintering furnace, for example, the accuracy is 0.1mL / min.

[0050] The heating temperature of the heating chamber 4 can be set according to the requirements of the atmosphere sintering furnace. For example, the heating temperature of the heating chamber 4 is between 200°C and 300°C.

[0051] like Figure 2As shown, the gas-water supply device 100 further includes a nitrogen branch line 6, which is connected between the nitrogen supply line 2 and the pure water tank 33, and is used to supply the nitrogen of the nitrogen supply line 2 to the space above the liquid level of the pure water in the pure water tank 33; the pure water supply line 3 also includes a nitrogen discharge port 37, and the nitrogen discharge port 37 is used to discharge the nitrogen in the pure water tank 33 to the outside. Through the nitrogen branch line 6 and the nitrogen discharge port 37, a dynamically flowing nitrogen flow is formed in the space above the liquid level of the pure water in the pure water tank 33, and the nitrogen flow can prevent the algae from growing due to organic matter in the pure water tank 33, and ensure the quality of the pure water supplied from the pure water tank 33 to the heating chamber 4.

[0052] Furthermore, if Figure 2 As shown, the nitrogen branch line 6 includes a nitrogen branch line 61 and a solenoid valve 62. The nitrogen branch line 61 is connected between the nitrogen supply line 2 and the pure water tank 33, and is used to supply the nitrogen of the nitrogen supply line 2 to the pure water tank 33. The solenoid valve 62 of the nitrogen branch line 6 is arranged on the nitrogen branch line 61, and is used to control the connection and closing of the nitrogen branch line 61 and the pure water tank 33 and the flow rate of the nitrogen supplied by the nitrogen branch line 61. Through the solenoid valve 62, the amount of nitrogen supplied from the nitrogen supply line 2 to the pure water tank 33 can be accurately controlled.

[0053] Furthermore, if Figure 2 As shown, the nitrogen branch line 61 is connected upstream of the solenoid valve 22 of the nitrogen supply line 2 .

[0054] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A gas-water supply device (100) for an atmosphere sintering furnace, characterized in that: The gas-water supply device (100) comprises a hydrogen supply pipeline (1), a nitrogen supply pipeline (2), a pure water supply pipeline (3), a heating chamber (4) and a heat-insulating pipeline (5); The hydrogen supply pipeline (1) is used to supply hydrogen to the heating chamber (4); A nitrogen supply line (2) is used to supply nitrogen to the heating chamber (4); The pure water supply line (3) is used to supply a specified amount of water to the heating chamber (4); The heating chamber (4) is used to receive hydrogen from the hydrogen supply pipeline (1), nitrogen from the nitrogen supply pipeline (2) and pure water from the pure water supply pipeline (3), so that the pure water from the pure water supply pipeline (3) is converted into water vapor in the heating chamber (4) and the water vapor is mixed with the hydrogen and nitrogen to form a mixed gas of water vapor-hydrogen-nitrogen; The heat-insulating pipeline (5) is used to keep the mixed gas warm and lead it into the atmosphere sintering furnace.

2. The air-water supply device (100) according to claim 1, characterized in that: The hydrogen supply pipeline (1) comprises a hydrogen supply pipeline (11), a solenoid valve (12) and an electronic flow meter (13); The hydrogen supply pipeline (11) is connected to the heating chamber (4), and the hydrogen supply pipeline (11) is used to supply hydrogen to the heating chamber (4); The solenoid valve (12) of the hydrogen supply pipeline (11) is arranged on the hydrogen supply pipeline (11); The solenoid valve (12) of the hydrogen supply pipeline (11) is used to control the connection and closing of the hydrogen supply pipeline (11) and the heating chamber (4) and the flow rate of hydrogen supplied by the hydrogen supply pipeline (11); The electronic flow meter (13) of the hydrogen supply pipeline (11) is arranged on the hydrogen supply pipeline (11) and is located between the solenoid valve (12) and the heating chamber (4). The electronic flow meter (13) of the hydrogen supply pipeline (11) is used to measure the volume flow of hydrogen supplied by the hydrogen supply pipeline (11).

3. The air-water supply device (100) according to claim 1, characterized in that: The nitrogen supply pipeline (2) comprises a nitrogen supply pipeline (21), a solenoid valve (22) and an electronic flow meter (23); The nitrogen supply pipeline (21) is connected to the heating chamber (4), and the nitrogen supply pipeline (21) is used to supply nitrogen to the heating chamber (4); The solenoid valve (22) of the nitrogen supply pipeline (2) is arranged on the nitrogen supply pipeline (21); The solenoid valve (22) of the nitrogen supply pipeline (2) is used to control the connection and closing of the nitrogen supply pipeline (21) and the heating chamber (4) and the flow rate of nitrogen supplied by the nitrogen supply pipeline (21); The electronic flow meter (23) of the nitrogen supply pipeline (2) is arranged on the nitrogen supply pipeline (21) and is located between the solenoid valve (22) and the heating chamber (4). The electronic flow meter (23) of the nitrogen supply pipeline (2) is used to measure the volume flow of the nitrogen supplied by the nitrogen supply pipeline (21).

4. The air-water supply device (100) according to claim 1, characterized in that: The pure water supply pipeline (3) comprises a pure water input pipeline (31), a solenoid valve (32), a pure water tank (33), a pure water output pipeline (34), a peristaltic pump (35) and an electronic flow meter (36); The pure water input pipeline (31) is connected to the pure water tank (33), and the pure water input pipeline (31) is used to supply pure water from the outside into the pure water tank (33); The solenoid valve (32) of the pure water supply pipeline (3) is arranged on the pure water input pipeline (31), and the solenoid valve (32) of the pure water supply pipeline (3) is used to control the connection and closing between the pure water input pipeline (31) and the pure water tank (33) and the flow rate of pure water supplied by the pure water input pipeline (31); The pure water tank (33) is used to contain pure water supplied from the pure water input pipeline (31); The pure water output pipeline (34) connects the pure water tank (33) and the heating chamber (4), and the pure water output pipeline (34) is used to output the pure water in the pure water tank (33) to the heating chamber (4); The peristaltic pump (35) is arranged on the pure water output pipeline (34), and the peristaltic pump (35) is used to quantitatively output the pure water from the pure water tank (33) outputted through the pure water output pipeline (34) to the heating chamber (4); The electronic flow meter (36) of the pure water supply pipeline (3) is arranged on the pure water output pipeline (34) and is located between the peristaltic pump (35) and the heating chamber (4). The electronic flow meter (36) of the pure water supply pipeline (3) is used to measure the volume flow of pure water output from the pure water supply pipeline (3) via the peristaltic pump (35).

5. The air-water supply device (100) according to claim 4, characterized in that: The gas-water supply device (100) further comprises a nitrogen branch pipeline (6), which is connected between the nitrogen supply pipeline (2) and the pure water tank (33), and is used to supply nitrogen from the nitrogen supply pipeline (2) to the space above the liquid level of pure water in the pure water tank (33); The pure water supply pipeline (3) also includes a nitrogen exhaust port (37), which is used to discharge the nitrogen in the pure water tank (33) to the outside.

6. The air-water supply device (100) according to claim 5, characterized in that: The nitrogen branch pipeline (6) comprises a nitrogen branch pipeline (61) and a solenoid valve (62). The nitrogen branch pipeline (61) is connected between the nitrogen supply pipeline (2) and the pure water tank (33), and the nitrogen branch pipeline (61) is used to supply the nitrogen from the nitrogen supply pipeline (2) to the pure water tank (33); The solenoid valve (62) of the nitrogen branch pipeline (6) is arranged on the nitrogen branch pipeline (61), and the solenoid valve (62) of the nitrogen branch pipeline (6) is used to control the connection and closing of the nitrogen branch pipeline (61) and the pure water tank (33) and the flow rate of nitrogen supplied by the nitrogen branch pipeline (61).

7. The air-water supply device (100) according to claim 6, characterized in that: The nitrogen supply pipeline (2) comprises a nitrogen supply pipeline (21), a solenoid valve (22) and an electronic flow meter (23); The nitrogen supply pipeline (21) is connected to the heating chamber (4), and the nitrogen supply pipeline (21) is used to supply nitrogen to the heating chamber (4); The solenoid valve (22) of the nitrogen supply pipeline (2) is arranged on the nitrogen supply pipeline (21); The solenoid valve (22) of the nitrogen supply pipeline (2) is used to control the connection and closing of the nitrogen supply pipeline (21) and the heating chamber (4) and the flow rate of nitrogen supplied by the nitrogen supply pipeline (21); The electronic flow meter (23) of the nitrogen supply pipeline (2) is arranged on the nitrogen supply pipeline (21) and is located between the solenoid valve (22) and the heating chamber (4). The electronic flow meter (23) of the nitrogen supply pipeline (2) is used to measure the volume flow of the nitrogen supplied by the nitrogen supply pipeline (21); The nitrogen branch line (61) is connected upstream of the solenoid valve (22) of the nitrogen supply line (2).

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