Semiconductor equipment data acquisition method and system supporting standardized communication transformation

Abstract

The invention provides a semiconductor equipment data acquisition method and a semiconductor equipment data acquisition system supporting standardized communication transformation, which are used for realizing data acquisition and process control on different types of semiconductor equipment, formulating corresponding communication rules for equipment conforming to a communication standard, and converting an equipment communication protocol by a cluster system so as to match a standard interface. For equipment which does not completely meet the standard but can realize communication through programming, the trunking system directly acquires required data and converts the required data to meet the standard interface specification. For equipment without communication capability, data is acquired through an equipment interface by adopting an image recognition technology, data input and function operation are realized through simulating keyboard and mouse operation, and finally, protocol conversion from data to a standard interface is completed by a cluster equipment control system. And the equipment data is converted into a message data packet conforming to a standard semiconductor equipment communication interface, so that docking with a semiconductor equipment data analysis and process control system is realized, and the production efficiency and quality of the semiconductor equipment are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment data collection, and in particular to a semiconductor equipment data collection method and system supporting standardized communication transformation. Background Art

[0002] Semiconductor equipment refers to various electronic components made of semiconductor materials, such as transistors, diodes, integrated circuits, etc., which are widely used in computers, communications, consumer electronics, automobiles, aerospace, etc. The production process of semiconductor equipment involves a variety of processes, such as photolithography, etching, diffusion, ion implantation, chemical vapor deposition, physical vapor deposition, chemical mechanical polishing, etc. Each process requires monitoring and control of the equipment's parameters, status, performance, quality, etc. to ensure the yield and reliability of the product.

[0003] In order to monitor and control semiconductor equipment, it is necessary to collect data from the equipment, that is, to obtain equipment data from the equipment end, such as temperature, pressure, current, voltage, frequency, pulse, event, alarm, etc., and then transmit these data to the host computer, such as equipment control system, data analysis system, process control system, etc., to achieve equipment monitoring, management, optimization and maintenance functions. Data collection is an important link in the production process of semiconductor equipment, which directly affects the production efficiency and quality of the equipment.

[0004] At present, there are many types of semiconductor equipment on the market, such as photolithography machines, etchers, diffusion furnaces, ion implanters, chemical vapor deposition machines, physical vapor deposition machines, chemical mechanical polishing machines, etc. These devices have different manufacturers, models, specifications, functions, performances, etc. Therefore, their data collection methods, communication protocols, data formats, etc. are also different, which increases the complexity and difficulty of data collection. At the same time, it also brings difficulties and challenges to data conversion, storage, analysis and processing.

[0005] In order to solve these problems, the industry has proposed some standardized semiconductor equipment communication interfaces, such as SECS, GEM, GEM300, EDA, Ineterface-A, etc. These interfaces define the communication protocol, data structure, message format, service logic, etc. between semiconductor equipment and host computers to achieve equipment data collection, process control, status monitoring, performance tracking and other functions. These interfaces are conducive to improving the interoperability and compatibility of semiconductor equipment, reducing the cost and risk of data collection, and improving the quality and availability of data.

[0006] However, since the introduction and implementation of these standardized semiconductor device communication interfaces requires a certain amount of time and cost, there are still a large number of semiconductor devices on the market that do not adopt these interfaces, or only adopt some interfaces, or adopt different versions of interfaces. As a result, the standardization of data collection is still not high, the consistency and comparability of data are still not strong, and there are still obstacles and difficulties in the use and analysis of data.

[0007] In the publication number CN113868484A, a semiconductor process equipment data acquisition method, device and system are disclosed, the main contents of which are to realize data acquisition and display of semiconductor process equipment and forwarding of control instructions of semiconductor process equipment through a device data acquisition server. The technical problem to be solved is how to obtain equipment data from semiconductor process equipment and forward it to the equipment control system, and how to receive control instructions from other control systems and send them to semiconductor process equipment. The defect is that it does not take into account the diversity and standardization requirements of semiconductor equipment, and can only be applied to semiconductor process equipment with specific communication interfaces and data formats, but not to different types of semiconductor equipment, and cannot achieve docking with semiconductor equipment data analysis and process control systems, thereby failing to improve the production efficiency and quality of semiconductor equipment.

[0008] To this end, the present application provides a semiconductor equipment data collection method that can combine multiple semiconductor equipment data collection methods, support standardized communication transformation, and achieve docking with semiconductor equipment data analysis and process control systems. Summary of the invention

[0009] An object of the present invention is to provide.

[0010] In order to achieve one of the above-mentioned invention objects, the present invention adopts the following technical solution:

[0011] A semiconductor device data collection method supporting standardized communication transformation,

[0012] Implementing a standard semiconductor device communication interface in a cluster device controller system, the interface being used to interface with semiconductor device data analysis and process control systems;

[0013] For different types of semiconductor equipment, data collection and process control of the equipment are realized, as well as the conversion of equipment data to internal system data, including:

[0014] For devices that have communication capabilities that meet semiconductor device communication standards and can communicate with the cluster device controller system through modification, communication rules are formulated, and the cluster device controller system completes the communication protocol conversion from device communication to the standard semiconductor device communication interface;

[0015] For devices that do not have the communication capability that complies with the semiconductor device communication standard, but can achieve communication with the device side through the cluster device controller system development program, the cluster device controller system device side obtains the preset collected data, and the cluster device controller system completes the communication protocol conversion from the device communication to the standard semiconductor device communication interface;

[0016] For devices that do not have any communication capabilities, the data collection of the preset collection is completed by identifying the information on the screen through the acquisition device program interface, and the mouse and keyboard operations are completed through the integrated device of keyboard, video and mouse to achieve switching screens, input data, and operate functional actions. The cluster device controller system completes the communication protocol conversion from device communication to the standard semiconductor device communication interface.

[0017] Furthermore, the method for implementing a standard semiconductor device communication interface in a cluster device controller system is:

[0018] According to the device communication standard protocol set, a high-speed message service communication interface is implemented in the cluster device control system. Domain modeling is performed based on the detailed functional requirements of the general device model, and related entities and domain services are established to realize the secondary message sending and receiving function of device communication.

[0019] According to the set of equipment communication extension standard protocols, domain modeling is performed in the cluster equipment control system according to each standard requirement, and related entities and domain services are established to realize pallet management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions;

[0020] According to the device data collection standard protocol set, a network service-based data collection interface is implemented in the cluster device control system to meet the requirements of general device model, device self-description, client authentication and authorization, data collection management, and common metadata related standards.

[0021] Furthermore, after completing the data collection of different types of equipment using the data collection system, the preset collected data is sent to the cluster equipment controller system according to the cluster equipment controller system interface definition, and the control command of the cluster equipment controller system is forwarded to the equipment, thereby completing the integration and docking of the equipment with the cluster equipment controller system, and finally enabling a variety of equipment with a standard semiconductor equipment communication interface to use the data collection system to collect data from different types of semiconductor equipment;

[0022] The data acquisition system obtains preset collected data and function information of the device from the device side through components such as high-speed message service communication interface, general device model domain service, device communication extension domain service and device data acquisition interface according to different device communication protocols and data formats;

[0023] According to the cluster equipment controller system interface definition, the collected data is sent to the cluster equipment controller system, which is a system for connecting to semiconductor equipment data analysis and process control systems. Through the standard semiconductor equipment communication interface, the data from the data acquisition system is received, and data conversion, storage, analysis and processing are performed to achieve equipment monitoring, management, optimization and maintenance functions;

[0024] The control commands issued by the cluster device controller system are forwarded to the corresponding semiconductor devices. The control commands are instructing the process control, parameter adjustment, state switching, and alarm clearing operations of the equipment based on the results of equipment data analysis and process control. Through the corresponding components of the data acquisition system, the control commands are converted into communication protocols and data formats recognizable by the device side, and sent to the device side through the high-speed message service communication interface to achieve control and feedback of the equipment.

[0025] Furthermore, the communication rules are:

[0026] Four message types are defined: notification, report, command, and request. Each message type is represented by bit and word data and has a corresponding timing process.

[0027] According to the requirements of the standard semiconductor equipment communication interface, a PLC mapping file is developed as the basis for the communication protocol;

[0028] The device side develops a communication program based on the PLC mapping file, performs integration testing with the standardized data acquisition service, and exports a configuration file;

[0029] The standardized data collection service reads the configuration file, periodically scans the messages supported by the device, implements communication with the device, and records the communication log;

[0030] The notification type is a message type that uses one bit to represent an event, and the timing process is:

[0031] When an event occurs, the device sets the bit to On.

[0032] When the event is completed, the device sets the bit to Off.

[0033] The report type uses a pair of bits: a report bit and a reply bit and a group of word data to represent the message type of an event, and the timing process is:

[0034] When an event occurs, the device writes the details to the word data and then sets the report bit to On.

[0035] After the data acquisition program scans and finds that the report bit is On, it reads the word data.

[0036] The data acquisition program sets the reply bit to On, indicating that the reading is complete.

[0037] The device scans and sets the reply bit to On and the report bit to Off.

[0038] The data acquisition program scans and finds that the report bit is Off, and sets the reply bit to Off.

[0039] Report message sending completed;

[0040] If the reading is not completed within the set time, it means that the data acquisition program has timed out. After the timeout, the device will set the report bit to Off to indicate that the data transmission is terminated and record the corresponding error log.

[0041] The command type is represented by a pair of bits: command bit and reply bit and a group of word data to represent the command type sent by a data acquisition program to the device end. The timing process is:

[0042] The data acquisition program writes the details to the word data, and then sets the command bit to On.

[0043] After the device scans and finds that the command bit is On, it reads the word data.

[0044] The device sets the reply bit to On, indicating that the read is complete.

[0045] The data acquisition program scans until the reply bit is set to On and the command bit is set to Off.

[0046] When the device scans and finds that the command bit is Off, it sets the reply bit to Off.

[0047] The command message is sent.

[0048] If the reading is not completed within the set time, it means that the device has timed out receiving data. After the timeout, the data acquisition program will set the command bit to Off to terminate data transmission and record the corresponding error log.

[0049] The request type is represented by a pair of bits: a request bit and a reply bit and a group of word data. The type can be sent in both directions. The timing process is:

[0050] The request side writes the details to the request area of ​​the word data, and then sets the request bit to On. After the response side scans and finds that the request bit is On, it reads the data in the request area of ​​the word data and writes the reply data to the response area of ​​the word data.

[0051] The answering end sets the reply bit to On, indicating that the answer is complete.

[0052] The request end scans and sets the reply bit to On, reads the contents of the word data response area, and sets the request bit to Off.

[0053] When the responder scans and finds that the request bit is Off, it sets the reply bit to Off.

[0054] The request message is sent successfully;

[0055] If the response is not completed within the set time, it means that the responder has timed out. After the timeout, the requester will set the request bit to Off to terminate the request data and record the corresponding error log.

[0056] Furthermore, the method for the cluster device controller system device end to obtain the preset collected data is:

[0057] The cluster equipment controller system establishes a communication connection with the equipment end through a serial port, an Ethernet port or a wireless communication module, sends data acquisition instructions or reads the data buffer area of ​​the equipment end according to the communication protocol and data format of the equipment end, and obtains the data of the equipment end;

[0058] The cluster device controller system device side parses, verifies, converts and encapsulates the acquired data, generates a message data packet that complies with the standard semiconductor device communication interface, and sends it to the cluster device controller system through the high-speed message service communication interface;

[0059] The device side of the cluster device controller system receives the control commands from the cluster device controller system, parses, verifies, converts and encapsulates the control commands, generates control data packets that comply with the communication protocol and data format of the device side, and sends them to the device side through the serial port, network port or wireless communication module to realize control and feedback of the device side.

[0060] Furthermore, the method of completing the preset data collection by identifying the information on the screen through the acquisition device program interface is:

[0061] Connect the keyboard and mouse of the device to the KVM type data acquisition program through the keyboard, mouse and video module, so that the data acquisition program can send keyboard and mouse commands to the device;

[0062] Through the video acquisition hardware module, the device program screen is connected to the KVM type data acquisition program, so that the data acquisition program can collect and analyze the program screen;

[0063] Analyze the device program interface, obtain device information through optical character recognition, pattern matching, and color judgment software algorithms, and organize this information into a collection list;

[0064] According to the collection list, set the steps for switching screens required for each collection project and generate an operation configuration file; according to the collection list, set the type and parameters of the collection screen information required for each collection project, realize information collection through optical character recognition, pattern matching, and color judgment software algorithms, and generate a collection configuration file;

[0065] According to the standard semiconductor equipment communication interface requirements and the equipment software screen functional capabilities, the functions that can be operated through the screen are organized into a control list;

[0066] According to the control list, set the steps of switching screens and operating screens required for each control project, and generate operation configuration files;

[0067] KVM type data collection service reads the operation configuration file and collection configuration file, reads the device status regularly, and realizes data collection of the device;

[0068] The KVM type data collection service reads the operation configuration file, and when the cluster device controller system sends a control command, it completes the automatic operation of the device screen to realize automatic control of the device.

[0069] Furthermore, the standard semiconductor equipment communication interface complies with any one of the SECS, GEM, GEM300, EDA, and Ineterface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

[0070] A semiconductor equipment data acquisition system supporting standardized communication transformation, comprising:

[0071] A cluster equipment controller system for implementing a standard semiconductor equipment communication interface, the interface being used to interface with semiconductor equipment data analysis and process control systems;

[0072] One or more data acquisition systems for performing data acquisition and process control on different types of semiconductor equipment, and for converting equipment data into message data packets that conform to a standard semiconductor equipment communication interface and for communicating with a cluster equipment controller system;

[0073] The data acquisition system adopts different data acquisition methods according to the communication capability of the device, including: for devices that have the communication capability that complies with the communication rules of the semiconductor device communication standard and can communicate with the cluster device controller system through modification, the high-speed message service communication interface is used to complete the communication protocol conversion from the device communication to the standard semiconductor device communication interface according to the device communication rules;

[0074] For devices that do not have the communication capability that complies with the standard communication rules of semiconductor equipment communication, but can communicate with the device side through the cluster device controller system development program, use the serial port, network port or wireless communication module to complete the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface according to the communication protocol and data format of the device side;

[0075] For devices that do not have any communication capabilities, use the keyboard, mouse and video module to complete the preset data acquisition by identifying the information on the screen through the acquisition device program interface, and complete the communication protocol conversion from the device communication to the standard semiconductor device communication interface through optical character recognition, pattern matching, and color judgment software algorithms.

[0076] Furthermore, the cluster device controller system includes:

[0077] A high-speed message service communication interface for sending and receiving message data packets with the data acquisition system;

[0078] A generic device model domain service, which is used to perform domain modeling according to the detailed functional requirements of the generic device model, establish related entities and domain services, and implement the secondary message sending and receiving functions of device communication;

[0079] An equipment communication extension domain service, which is used to perform domain modeling according to the requirements of the equipment communication extension standard protocol set, establish related entities and domain services, and implement pallet management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions;

[0080] A data collection interface based on network services, used to implement data collection functions that meet the requirements of common device models, device self-description, client authentication and authorization, data collection management, and common metadata related standards.

[0081] Furthermore, the standard semiconductor equipment communication interface complies with any one of the SECS, GEM, GEM300, EDA, and Ineterface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

[0082] The present invention provides a semiconductor equipment data acquisition method and system that supports standardized communication transformation. Through the data acquisition system, data acquisition and process control of different types of semiconductor equipment are realized, and the equipment data is converted into a message data packet that conforms to the standard semiconductor equipment communication interface, thereby realizing docking with the semiconductor equipment data analysis and process control system, and improving the production efficiency and quality of semiconductor equipment. Specifically, the beneficial effects of the present invention include:

[0083] By receiving the activated data collection plan and acquiring device data from the semiconductor equipment according to the device data information required by the data collection plan, and forwarding the device data to the cluster device controller system, the functions of equipment monitoring, management, optimization and maintenance are realized, thereby improving the production efficiency and quality of semiconductor equipment. At the same time, it also supports data collection and process control of different types of semiconductor equipment, thereby improving the interoperability and compatibility of semiconductor equipment.

[0084] By forwarding the control commands issued by the cluster equipment controller system to the corresponding semiconductor equipment, the equipment's process control, parameter adjustment, state switching, alarm clearing and other operations are realized, thereby improving the controllability and reliability of the semiconductor equipment. At the same time, the connection between the semiconductor equipment data analysis and the process control system is also realized, thereby improving the data utilization and analysis capabilities of the semiconductor equipment and the degree of automation of the semiconductor equipment.

[0085] By implementing a standard semiconductor equipment communication interface in the cluster equipment controller system and connecting it to the semiconductor equipment data analysis and process control system, the data quality and availability of semiconductor equipment are improved. At the same time, support for standardized communication transformation is also achieved, which improves the uniformity and standardization of the communication protocol and data structure of semiconductor equipment.

[0086] By using a high-speed message service communication interface for devices that have communication capabilities that meet semiconductor device communication standards and can be modified to communicate with the cluster device controller system, and according to device communication rules, the communication protocol conversion from device communication to the standard semiconductor device communication interface is completed, thereby improving the communication speed and efficiency of semiconductor devices. At the same time, it also realizes the full utilization and adaptation of semiconductor device communication rules, thereby improving the communication flexibility and adaptability of semiconductor devices.

[0087] By targeting devices that do not have communication capabilities that meet semiconductor equipment communication standards but can communicate with the device side through a cluster device controller system development program, using serial ports, network ports or wireless communication modules, according to the communication protocol and data format of the device side, the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface is completed, thereby improving the communication compatibility and scalability of semiconductor equipment. At the same time, it also achieves a full understanding and conversion of the semiconductor equipment communication protocol and data format, thereby improving the communication accuracy and reliability of semiconductor equipment.

[0088] By using a data collector for devices that do not have any communication capabilities, the device data is collected and stored according to the data collection method on the device side, and then the device data is converted into a message data packet that conforms to the standard semiconductor device communication interface through the data transmitter, and sent to the cluster device controller system through the serial port, network port or wireless communication module, thereby improving the data collection and storage capabilities of the semiconductor device. At the same time, it also realizes the effective acquisition and conversion of semiconductor device data, and improves the data integrity and consistency of the semiconductor device. BRIEF DESCRIPTION OF THE DRAWINGS

[0089] Figure 1 is a structural diagram of a cluster device controller system in an embodiment of the present invention;

[0090] Figure 2 is a system structure diagram of Example 1 in an embodiment of the present invention;

[0091] Figure 3 is a flow chart of Example 1 in an embodiment of the present invention;

[0092] Figure 4 It is the function of the test tool configuration message in the embodiment of the present invention;

[0093] Figure 5 is a system structure diagram of Example 2 in an embodiment of the present invention;

[0094] Figure 6 is a flow chart of Example 2 in an embodiment of the present invention;

[0095] Figure 7 This is an example screen of a customized data acquisition module in Example 2 of an implementation manner of the present invention;

[0096] Figure 8 is a system structure diagram of Example 3 in an embodiment of the present invention;

[0097] Fig. 9 It is a flow chart of Example 3 in the implementation manner of the present invention. DETAILED DESCRIPTION

[0098] The present invention will be described in detail below in conjunction with the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional changes made by a person skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0099] In this embodiment, we elaborate on the specific design and composition of a cluster device controller system (referred to as CTC), such as Figure 1As shown, the system is designed to efficiently integrate and manage equipment data acquisition and process control in the semiconductor manufacturing process. The core of the CTC system consists of the following two main modules:

[0100] Equipment data acquisition module: The equipment data acquisition module in this embodiment focuses on direct interaction with semiconductor production equipment. Its main task is to collect equipment status data in real time and execute corresponding process control commands. According to the communication capabilities and integration requirements of the equipment, this module is further divided into three sub-modules:

[0101] Standardized equipment data collection module: adapted to devices that have complied with industry communication standards, enabling seamless data interaction.

[0102] Customized equipment data acquisition module: data acquisition solutions customized for equipment with special communication requirements or non-standard protocols to ensure accurate data acquisition and effective control.

[0103] KVM type device data acquisition module: For those devices that cannot interact through traditional networks or standard communication ports, control and data acquisition are achieved by simulating human-computer interaction interfaces (keyboard, video, mouse).

[0104] Cluster equipment control module: As the nerve center of the CTC system, the cluster equipment control module in this embodiment is responsible for realizing data interaction with the upper-level business system (such as the EAP / FDC system) and uniformly managing the subordinate data acquisition modules. This module can not only ensure the real-time and accuracy of data, but also support remote monitoring and process control of production equipment, thereby significantly improving production efficiency and product quality.

[0105] Through the CTC system of this embodiment, semiconductor manufacturers can achieve efficient monitoring and management of production equipment, ensure the accuracy of data collection, and improve the automation and intelligence level of production processes. In addition, the high flexibility and scalability of the system also provide a solid foundation for future technological development and capacity expansion.

[0106] Embodiment 1: Data acquisition and control based on standard semiconductor equipment communication interface

[0107] This embodiment describes in detail a method for efficient data exchange, collection and process control between a cluster device controller system (CTC) and semiconductor devices. Using a high-speed message service communication interface, the CTC system ensures compatibility and communication efficiency with a variety of semiconductor devices.

[0108] In this embodiment, the system structure diagram is as follows: Figure 2The figure shows the interaction and hierarchical relationship between the modules in the cluster equipment controller system, thus revealing the system architecture design and how the components are integrated to support the data acquisition and control process of semiconductor equipment. Figure 3 As shown, this flowchart details the serialized steps from device capability confirmation to communication protocol formulation, as well as subsequent communication integration testing and data acquisition.

[0109] Step 101: Confirm semiconductor equipment capabilities

[0110] Before implementing efficient data exchange, collection and process control between cluster equipment controller system (CTC) and semiconductor equipment, in-depth communication with equipment manufacturers is necessary. This preliminary but critical step aims to fully ensure a detailed and accurate understanding of the composition structure, communication mode, operation plan, recipe management, equipment status and alarm function of semiconductor production equipment. This step not only involves the understanding of equipment hardware, but also includes in-depth discussions on multiple dimensions such as software functions, operation interface and customizability, ensuring the accuracy and efficiency of subsequent system design and implementation.

[0111] Confirmation of equipment composition structure: Detailed understanding of the hardware composition of semiconductor equipment, including major components, auxiliary systems, and how they are interconnected. This helps identify data acquisition points and control interfaces, providing a direct physical basis for the design of data acquisition modules.

[0112] Communication method research: Discuss with the equipment manufacturer and confirm the communication protocols, interface types and communication security measures supported by the equipment. In this process, it is necessary to ensure that the communication method adopted can be seamlessly integrated into the CTC system to ensure the reliability and real-time performance of data transmission.

[0113] Operational plan analysis: Understand the daily operation mode of the equipment, efficiency optimization mechanism and possible operation and maintenance challenges, so as to preset corresponding process control and optimization algorithms in the CTC system to support the maximum efficiency of equipment operation.

[0114] Discussion on recipe management mechanism: In-depth understanding of the equipment's recipe management capabilities, including recipe creation, storage, call and modification mechanisms. This is crucial for the dynamic management and automated application of production recipes in the CTC system.

[0115] Equipment status and alarm function verification: Discuss in detail the details of equipment status monitoring and the configuration of the alarm system, including status monitoring parameters, alarm levels, alarm response mechanisms, etc. Ensure that the CTC system can monitor the equipment status in real time and respond quickly to equipment alarms to maintain the stability and safety of the production process.

[0116] Step 102: Create a PLC Map file

[0117] Definition of the address range of each sub-device of semiconductor equipment:

[0118] In step 102 of the cluster device controller system (CTC) development, a PLC (Programmable Logic Controller) Map file that complies with the SEMI standard is developed based on the detailed device capability information provided by the device manufacturer. This file is an important part of achieving device communication standardization, and it defines in detail the communication address range of each unit and module in the semiconductor device.

[0119] The main contents of the PLC Map file:

[0120] Address range definition: A unique address range is specified for each device unit, which covers the read and write operations of data and control signals. For example, in the uploaded machine PLC address mapping table, different control stations and network numbers are assigned to CTC and each unit (Unit1, Unit2, Unit3), and the address ranges of their master storage area (Master Area) and local area (Local Area) are specified. These areas are further subdivided into word and bit level addresses to facilitate precise data access and transmission of control instructions.

[0121] Device name and network information: The mapping table also lists in detail the name of each device and its location information in the network. This information is crucial for the CTC system to identify and locate specific units when communicating between devices.

[0122] Control station confirmation: Identifies whether each equipment unit is a control station, ensuring that the CTC system can identify which equipment units are responsible for executing control commands.

[0123] By accurately formulating the PLC Map file, the CTC system can accurately identify and communicate with different units in the semiconductor equipment to achieve efficient and synchronous data acquisition and control processes. This step provides the CTC system with an infrastructure for inter-device communication, which is a key link in achieving overall automation and optimizing the semiconductor manufacturing process.

[0124] Communication message definitions for semiconductor equipment. Based on SEMI standards, we have developed specific messages related to equipment communication. These message definitions play a vital role in information exchange between the CTC system and semiconductor equipment (EQP).

[0125] In this embodiment, we further integrate and elaborate the communication message definitions of semiconductor equipment, which are based on SEMI standards and define specific communication types and protocols for information exchange between the CTC system and semiconductor equipment (EQP). The following is a fusion of specific communication mechanisms for four main message types, including notification, report, command and request, and a detailed description of the corresponding high-level communication protocols.

[0126] Communication message types and processes

[0127] Commands

[0128] Terminal Text: Allows operators to interact with the device by sending text commands through command bits and data fields.

[0129] Date Time Set: Use command messages to set or synchronize the date and time of the device.

[0130] Recipe Request: Request the device to provide the recipe information currently in use through the request message type.

[0131] Process Control Command: Send process control instructions, such as starting or stopping the production process, adjusting production parameters, etc.

[0132] Port Control Command: Perform operations such as opening or closing the device port.

[0133] Notifications

[0134] CIM Online Notification: When a device is online and ready, the device sends a status update to the CTC system via the Notification message type.

[0135] Auto Mode Notification: When the device's auto mode status changes, the current status is reported to the CTC system via the notification message type.

[0136] Reports

[0137] Machine Status Changed Report: Reports the change of the device status from Idle to Running, using the Report message type.

[0138] Alarm Status Report: Reports the alarm status of a device, including new alarm activations or deactivations of existing alarms.

[0139] Recipe Change Report: When a recipe changes, the CTC system is notified via a report message type.

[0140] Sent Out Job Report: Status report of the workpiece when it leaves the warehouse.

[0141] Received Job Report: Status report when the workpiece is received into the warehouse.

[0142] Tracking Job Report: A report used to track the progress of a job.

[0143] Timing process and communication protocol

[0144] Each message type follows a clear timing process to ensure accurate data transmission and timely response:

[0145] Notification: When an event occurs, the device sets the notification bit to On, and sets it to Off after the event is completed.

[0146] Report: When an event occurs, the device writes detailed information to the word data and sets the report bit to On. After the data acquisition program scans it, it reads the data and sets the reply bit to On. After completion, it clears the report bit and reply bit.

[0147] Command: The data acquisition program initiates the command, sets the command bit to On, and fills in the relevant word data. The device reads and sets the reply bit to On, and clears the two bits after completing the command.

[0148] Request: During the request and response process, the request bit and reply bit are set and cleared as needed to ensure the integrity and accuracy of bidirectional data transmission.

[0149] Timeout handling

[0150] Each message type has a timeout mechanism to ensure system stability and data integrity. If any message is not transmitted or confirmed within the predetermined time, the corresponding bit will be cleared and an error log will be recorded, thus terminating the transmission process.

[0151] Through this detailed message definition and timing control, the CTC system can achieve fine control and optimization of the semiconductor manufacturing process, standardize the communication process, and optimize the efficiency of information transmission to ensure the real-time and accuracy of production control and management.

[0152] Step 103: The device side develops a communication program. The device side develops a communication program according to the PLC Map developed in the previous step;

[0153] This program is the basis for information exchange between the device and the Cluster Equipment Controller System (CTC). It enables the device to understand and execute commands from the CTC, while ensuring that the device status and reports are accurately fed back to the CTC.

[0154] Key elements of device-side communication program development:

[0155] Protocol compatibility: The communication program must be fully compatible with the established PLC Map file, ensuring that all device communication addresses and message definitions comply with SEMI standards and can be correctly identified and parsed by the CTC system.

[0156] Command execution: The program should be able to accurately receive and execute directive messages issued by CTC, such as process control commands or recipe requests, and ensure high accuracy and responsiveness during execution.

[0157] Status feedback: The equipment must be able to monitor its own status in real time and report status changes and alarm information to the CTC through the communication program in accordance with the defined report message format.

[0158] Data accuracy: Ensure the accuracy of the program during data capture and transmission, especially when dealing with sensitive data such as recipe change reports or workpiece tracking reports.

[0159] Fault handling: The communication program should have a certain self-diagnosis and error reporting mechanism, which can promptly notify the CTC system when a communication failure occurs and take appropriate recovery measures.

[0160] Performance optimization: The program's operating efficiency and resource usage should be considered during the development process to ensure that the communication program does not adversely affect the normal production operation of the equipment.

[0161] Testing and Verification: At all stages of developing a communication program, rigorous testing should be performed to verify that the program functions as expected and to ensure stable operation under a variety of working conditions.

[0162] Through these comprehensive development elements, step 103 not only completes the development of the device-side communication program, but also lays the foundation for efficient and stable communication between the device and the CTC system, thereby providing important support for the automation and intelligence of the entire production process.

[0163] Step 104: Communication Integration Test

[0164] In the development of CTC system, step 104 focuses on communication integration testing to ensure the correctness and stability of all communication protocols. The cluster device controller system provides a special test tool that can establish a communication connection with the device's PLC and configure various messages defined in the PLC Map. The test operation is performed manually and covers the testing of all predefined messages to verify the accuracy of the communication connection and the correctness of the device response. The operation interface of this test tool is detailed in Figure 4 The interface of the PLC message configuration tool is shown. The tool can set PLC messages according to the specified PLC Map and perform test export and other operations. It enables testers to verify the messages in the PLC Map one by one and confirm that the transmission and reception of each message are executed as expected.

[0165] Step 105: Generate configuration file:

[0166] After successfully completing the communication integration test, proceed to step 105, where the task is to export all verified communication protocols and message formats from the test tool and generate a comprehensive configuration file. This file will become a navigation map for the standardized device data acquisition module, detailing the specific structure and expected behavior of each message and command. Its role is not only to guide the subsequent data acquisition and device control process, but also to provide accurate communication details for the CTC system to ensure that information is transmitted correctly with various semiconductor devices.

[0167] Step 106: Complete data collection and device control:

[0168] The core of step 106 is to enable and run the standardized equipment data acquisition module, which operates according to the configuration file generated in step 105. After loading the configuration file, the module can automatically identify the specific protocols and instruction sets of different semiconductor devices, and can collect data and issue control instructions without further human intervention. The key to this step is to ensure the real-time and accuracy of the data, as well as the timely response of the control instructions, which is crucial to maintaining the optimal state of equipment operation and production efficiency. In this process, the module must also have the ability to handle anomalies and deviations to ensure the robust operation of the system.

[0169] Step 107: Complete semiconductor communication standard interface integration:

[0170] Step 107 marks the completion of the integration and debugging phase of the entire communication system. In this step, the cluster equipment control module and the standardized equipment data acquisition module undergo a series of rigorous integration tests to ensure the compatibility and performance of all modules in the actual production environment. The test not only covers the individual functions of each module, but also includes the interface integration and data exchange process between them. The success of the test shows that the semiconductor equipment has fully integrated the SEMI communication standard interface. The CTC system can now efficiently manage and monitor the production line, improve the automation and production efficiency of the entire manufacturing process, and provide guarantees for the reliability of the equipment and the convenience of maintenance.

[0171] Embodiment 2: Data collection method for non-standard communication equipment

[0172] This embodiment describes in detail how to achieve data collection and device control by developing customized data collection services for semiconductor devices that do not support standardized communication interface modification. Figure 5 The specific implementation steps are shown in Figure 6 Detailed explanation is given in .

[0173] Step 201: Confirm device communication capabilities and parameters

[0174] In step 201 of embodiment 2, the first task is to fully confirm and evaluate the existing communication capabilities of semiconductor devices. Close communication with device manufacturers is the core of this process, with the aim of ensuring that all relevant communication methods and protocols are fully understood and recorded.

[0175] Communication protocol verification: Carefully check all communication protocols supported by the device, including but not limited to serial communication, Ethernet protocols, or any device-specific custom protocols.

[0176] Communication method assessment: Evaluate the communication interfaces of the equipment, such as RS232, RS485, TCP / IP, etc., as well as their configuration settings and network topology.

[0177] Device Architecture Analysis: Get a detailed understanding of the device’s hardware and software architecture, including sensor layout, control units, actuators, and any associated user interfaces.

[0178] Operational solution discussion: Explore the standard operating modes and processes of the equipment, such as startup sequence, shutdown process, operation and maintenance plan, and how to manage and optimize through communication.

[0179] Recipe Management Mechanism Assessment: Assess the device’s ability to manage recipes and understand the recipe storage, retrieval, editing, and deletion mechanisms, as well as how they can be remotely controlled through communication protocols.

[0180] Condition monitoring and alarm system confirmation: Confirm the monitoring parameters, alarm trigger conditions, alarm levels provided by the equipment, and communication responses when specific events occur.

[0181] Step 202: Develop customized data collection services

[0182] After gaining a deep understanding of the communication capabilities of semiconductor devices, step 202 is dedicated to developing a fully customized data acquisition service. The goal of this service is to ensure seamless data communication with existing devices, even if these devices use non-standardized communication methods and protocols. During the development process, the following key aspects need to be considered:

[0183] Communication interface adaptation: Based on the communication protocol and mode identified in step 201, the data acquisition module is designed to ensure that it is compatible with the existing communication interface of the device. This includes but is not limited to adjusting the module to support different physical connections and data transmission protocols.

[0184] Functional customization: Customize the data collection service functions according to the equipment's operational needs, recipe management, and the characteristics of the condition monitoring and alarm system. This involves precisely adjusting the data collection frequency, selecting key operating parameters, and setting triggers for specific events.

[0185] User interface design: Develop an intuitive and fully functional user interface to facilitate operators to monitor the data collection process, manage equipment recipes, and respond to equipment status changes. The interface design should take into account the user experience, making the information easy to read and the operation simple and clear.

[0186] Testing and optimization: During the development process, the module function testing and performance optimization are continuously carried out to ensure the stability and efficiency of the data collection service. At the same time, the accuracy and real-time performance of the data need to be verified to ensure the smooth progress of the production process.

[0187] Documentation and support: Provide detailed development documentation and user manuals, including installation guides, operating instructions, and troubleshooting methods. At the same time, set up technical support channels to deal with technical problems that may be encountered later.

[0188] The development of customized data collection services is a comprehensive project, which requires the development team to have not only deep technical knowledge, but also a deep understanding of the actual operating environment and operation process of the equipment. Through careful design and development, this service will greatly improve the data management capabilities and production efficiency of the equipment. Example screen of customized module program, such as Figure 7 The display provides users with a clear reference view, showing the basic functions of the data collection service and the layout of the user interaction interface. Figure 7It is a data collection test program. The left side of the program is the operation area, and the right side is the log display area. The operation area is divided into 4 parts. The first part is the connection status of the CTC service and the data collection program. The second part Normal Flow is the process test operation area, which can simulate the device sending various event messages to CTC to complete the process test operation. The third part Command is the operation of CTC data query setting, and the fourth part Scenario Test is the normal process simulation operation.

[0189] Step 203: Perform communication integration testing

[0190] After the development of the customized data acquisition service is completed, step 203 focuses on comprehensive communication integration testing. The main task of this stage is to verify the communication capabilities between the newly developed customized data acquisition module and the target device, as well as to test the integrity and reliability of the data acquisition and device control functions. During the testing process, the following aspects are focused on:

[0191] Compatibility test of communication protocols: Ensure that the customized data acquisition module can accurately parse and respond to the specific communication protocol used by the device, including adaptation of message format, data encoding and transmission rate.

[0192] Functional integrity verification: By simulating various scenarios of equipment operation, test whether the data acquisition module can accurately capture changes in equipment status, collect key operation data, and execute control instructions.

[0193] Data accuracy and response speed assessment: Collect and analyze sample data during the data acquisition process to assess the accuracy and completeness of the data. At the same time, measure the delay from sending control instructions to device response to ensure that the system's response speed meets production requirements.

[0194] Abnormal situation handling test: simulate abnormal situations such as communication failures and equipment alarms to verify the processing logic and stability of the data acquisition module when encountering errors or abnormalities.

[0195] User interface and operation process testing: Ensure the friendliness of the user interface and the rationality of the operation process, so that operators can easily monitor the data collection status, adjust the collection parameters and handle abnormal events.

[0196] Through this series of integration tests, we can not only ensure the technical performance and functional integrity of the customized data collection service, but also have an expectation of its performance in the actual production environment. The test results will directly guide the subsequent tuning and improvement work, ensuring that the data collection service can run stably after deployment, improving production efficiency and product quality.

[0197] Step 204: Implement data collection and equipment control operations

[0198] After thorough communication integration test verification, step 204 marks the official deployment and operation of the customized data acquisition module, at which point the module will begin real-time data exchange and device control operations with the target device. The key task at this stage is to ensure efficient data collection and precise control of the device, thereby optimizing the production process and improving product quality. To achieve these goals, the following aspects need special attention:

[0199] Automated data collection: The data collection module will automatically perform preset data collection tasks, including but not limited to monitoring equipment operating status, collecting production parameters and recording key events in the production process. In this process, the continuity and real-time nature of data collection are crucial.

[0200] Precise execution of equipment control: In addition to data collection, the customized module also needs to automatically send control instructions to the equipment based on real-time data and preset conditions, such as starting or stopping the production process, adjusting production parameters, etc., to ensure the accuracy and timeliness of equipment operation.

[0201] Data integration and analysis: The collected data will be integrated and analyzed to generate real-time production reports and trend analysis, which is of great value for timely discovering potential problems in production and guiding production adjustments and optimization.

[0202] Abnormal monitoring and response: The data acquisition module also has the function of monitoring abnormal equipment status and processing equipment alarms. It can respond promptly when abnormalities are detected, take necessary control measures or notify relevant personnel to minimize production interruptions and losses.

[0203] User interaction and feedback: Through a friendly user interface, operators can monitor the status of data acquisition and equipment control in real time, adjust acquisition and control strategies, and make quick decisions based on system feedback.

[0204] Step 205: Implement comprehensive integration of communication interfaces

[0205] With the successful deployment and operation of the customized data acquisition module, step 205 focuses on ensuring the perfect integration and communication between the module and the cluster equipment control module (CTC). The core of this step is to conduct comprehensive integration testing to verify that the interface between the two modules can be seamlessly connected, data flow is unimpeded, and control instructions are accurately transmitted, thereby ensuring the stability and efficiency of the entire system.

[0206] Integration test strategy: Design a comprehensive integration test plan, including the construction of test scenarios, the development of test cases, and the execution of test processes, aiming to simulate various situations that may be encountered in the actual production environment and ensure that the communication and data exchange between the customized data acquisition module and the CTC can operate stably under various conditions.

[0207] Interface compatibility verification: Focus on testing the data interface compatibility between the data acquisition module and the CTC system, including data format, transmission rate and protocol specifications, to ensure that both parties can accurately understand and process the data and instructions sent by the other party.

[0208] Data synchronization and consistency check: By real-time monitoring of the data transmission process, the synchronization and consistency of data transmission between the customized module and the CTC system are checked to ensure the integrity and accuracy of the data in the entire system.

[0209] Exception handling and stability testing: Simulate various abnormal situations to test the system's abnormal detection, alarm and handling mechanisms, as well as its stability and recovery capabilities under extreme conditions, to ensure that the system can respond to various abnormalities in a timely manner and maintain continuous and stable operation.

[0210] User operation and feedback loop: Through the user-involved testing process, collect feedback from operators on the use of the system, evaluate the user-friendliness and ease of operation of the system, and optimize the user interface and operation process based on the feedback.

[0211] After completing this series of integration tests and verifications, it is ensured that the customized data acquisition module can not only be efficiently integrated with the CTC system, but also perfectly support non-standardized communication equipment. Through a unified monitoring and management platform, even equipment that has not been standardized can be seamlessly integrated into the CTC system to achieve efficient and stable operation, greatly improving the automation level and production efficiency of the semiconductor manufacturing process.

[0212] Embodiment 3: Data collection method for semiconductor devices without communication capabilities

[0213] This embodiment describes in detail an innovative method for realizing data acquisition and control for semiconductor devices without communication interfaces. The system architecture and specific operation process are respectively described in Figure 8 and Fig. 9 A graphic illustration is provided to demonstrate the comprehensiveness and systematic nature of the method.

[0214] System architecture overview Figure 8 As shown,

[0215] The core of the system is the cluster device controller system (CTC), which acts as the brain of the entire data acquisition and device control system and is responsible for overall coordination and management. In order to achieve interaction with devices without communication capabilities, the system uses a KVM hardware module that is directly connected to the target device to achieve the purpose of remote device control by capturing video output and simulating keyboard and mouse input.

[0216] At the same time, the system introduces a video acquisition module in parallel with the KVM module, which is responsible for capturing the device screen image in real time. These image data are further sent to the image processing unit. In this unit, advanced image processing technologies such as OCR and color recognition are applied to extract key information from the device's GUI, such as the device's operating status and alarm information.

[0217] In addition, as an important part of the system, the configuration file manager maintains all configuration information including device control instructions and data acquisition parameters. The data processing and analysis unit is responsible for further processing and analysis of the collected data, generating reports or triggering alarms as needed.

[0218] The specific implementation steps are as follows: Fig. 9 As shown,

[0219] Device capability and interface analysis: First, conduct an in-depth analysis of the program interface of the target device to determine the type of information that can be identified by image recognition technology, and develop a list of data collection and control operations based on this analysis result.

[0220] KVM and Video Capture Module Integration: Shows the process of integrating KVM and video capture modules into the CTC system and details how to configure these modules to match the needs of specific equipment.

[0221] Creation of configuration files: Based on the above analysis, create a data collection list and a control command list, and convert these lists into system-recognizable configuration files to provide guidance for automated operations.

[0222] Run data collection service: Start the data collection module and automatically perform data collection and device control tasks according to the configuration file without manual intervention.

[0223] Data processing and analysis and system integration testing: After data collection is completed, the data is processed and analyzed, necessary reports are generated, and system integration testing is performed to ensure system stability and data accuracy.

[0224] Step 301: Device interface and operation process analysis

[0225] This step involves a detailed analysis of the program interface of the target semiconductor device, aiming to identify and record the device status information that can be extracted through image processing technologies such as OCR (optical character recognition) and color recognition. This information, including machine status, alarm signals, etc., will be compiled into a detailed data collection list. At the same time, the interface operation functions of the device, such as start, stop, recipe selection, etc., are analyzed to form an operation control list.

[0226] Step 302: Introduce KVM and video capture modules

[0227] In order to enable the cluster equipment controller system (CTC) to access and control these devices without communication capabilities, this step introduces the KVM hardware module and video acquisition module. These modules enable the CTC system to directly capture the image information of the device screen and realize remote control of the device by simulating keyboard and mouse input.

[0228] Step 303: Prepare a data collection list and generate a configuration file

[0229] Based on the previous analysis of the device program interface and operation process, we carefully developed a list of key data collection items and their corresponding collection technologies. This list serves as a blueprint for the automated data collection process, providing detailed guidance on how to capture key information about the device operation through image recognition technology. The generated configuration file not only lists the types of data to be collected, but also specifies the applicable collection methods to ensure accurate data capture and efficient processing.

[0230] The sample collection checklist shows several typical data collection items and how to implement them:

[0231] Machine State: Uses OCR technology combined with color recognition to identify the current machine operating status from the device interface, such as "running", "idle" or "fault".

[0232] Alarm information (A1arm): Use OCR technology to identify alarm information on the device interface so as to respond to abnormal status of the device in a timely manner.

[0233] Port State: Use OCR technology to read the status of each port from the device interface, such as "occupied", "idle" or "faulty".

[0234] Recipe information: Use OCR technology to obtain the currently loaded recipe name and related parameters from the device's program interface to ensure the correctness of the recipe during the production process.

[0235] Job Data: The current job data of the equipment is collected through OCR technology, including job number, job status and related production parameters.

[0236] The generated configuration file lists these data collection items and their collection methods in detail, forming a structured guidance document. This not only provides a clear operating guide for data collection, but also optimizes the settings of the collection process, improving collection efficiency and data accuracy.

[0237] Step 304: Create a control command list and generate a configuration file

[0238] After completing the compilation of the data collection list, we further developed a command control list for devices without communication capabilities. This list is based on the device operation interface and functions analyzed and determined in step 301, and lists in detail the automated control commands implemented through image processing technology. Then, these control commands are accurately converted into instructions in the configuration file, aiming to achieve remote control of the device through the KVM type device data collection service.

[0239] The control list example lists several key control commands and their descriptions in detail to guide the implementation of automation equipment control:

[0240] Job Control (Job Start / Stop / Abort): Contains commands to start, stop or terminate the current product batch processing, allowing the production process to be flexibly adjusted according to real-time needs.

[0241] Port Control: involves opening, closing or adjusting the material input or output ports of the equipment to ensure that the material flow enters or leaves the production line at the right time.

[0242] Recipe Select: Allows remote change or selection of new production recipes to configure the correct production parameters for different products or batches.

[0243] Alarm Reset: When an abnormal alarm occurs in the device, the alarm can be reset remotely to restore the normal operation of the device.

[0244] The generated configuration file accurately describes the implementation details of each control command, including the conditions for command triggering, the specific steps for execution, and the expected effects. By systematizing these control commands and incorporating them into configuration files, the KVM-type device data collection service can accurately execute these instructions and achieve fine control over the device.

[0245] Step 305: Run KVM type data collection service

[0246] With the help of the KVM hardware module, the data collection service is started. The service automatically performs data collection and device control tasks according to the previously generated configuration files without manual intervention, thus achieving efficient management of non-communication devices.

[0247] Step 306: Complete system integration and testing

[0248] Finally, integration testing is performed to ensure the perfect integration between the data acquisition module, KVM hardware and CTC system, verifying the stability of the entire system and the accuracy of data acquisition and control. After the successful completion of the test, the semiconductor equipment has achieved the integration of the data communication interface through the CTC system, and even the equipment that originally did not have any communication function can be effectively monitored and managed.

[0249] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned implementation modes, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned implementation modes, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various implementation modes of the present invention.

Claims

1. A semiconductor device data collection method supporting standardized communication transformation, characterized in that: Implementing a standard semiconductor device communication interface in a cluster device controller system, the interface being used to interface with semiconductor device data analysis and process control systems; For different types of semiconductor equipment, data collection and process control of the equipment are realized, as well as the conversion of equipment data to internal system data, including: For devices that have communication capabilities that meet semiconductor device communication standards and can communicate with the cluster device controller system through modification, communication rules are formulated, and the cluster device controller system completes the communication protocol conversion from device communication to the standard semiconductor device communication interface; For devices that do not have the communication capability that complies with the semiconductor device communication standard, but can achieve communication with the device side through the cluster device controller system development program, the cluster device controller system device side obtains the preset collected data, and the cluster device controller system completes the communication protocol conversion from the device communication to the standard semiconductor device communication interface; For devices without any communication capabilities, the program interface of the acquisition device is used to identify the information on the screen to complete the preset data acquisition. The integrated device of keyboard, mouse and video is used to complete the mouse and keyboard operation to switch the screen, input data, and operate the function action. The cluster device controller system completes the communication protocol conversion from the device communication to the standard semiconductor device communication interface. After completing the data collection of different types of equipment using the data collection system, the preset collected data is sent to the cluster equipment controller system according to the cluster equipment controller system interface definition, and the control command of the cluster equipment controller system is forwarded to the equipment, thereby completing the integration and docking of the equipment with the cluster equipment controller system, and finally enabling a variety of equipment to have a standard semiconductor equipment communication interface, and using the data collection system to collect data for different types of semiconductor equipment; The data acquisition system obtains preset collected data and device function information from the device side through the high-speed message service communication interface, the general device model domain service, the device communication extension domain service and the device data acquisition interface component according to different device communication protocols and data formats; According to the cluster equipment controller system interface definition, the collected data is sent to the cluster equipment controller system, which is a system for connecting to semiconductor equipment data analysis and process control systems. Through the standard semiconductor equipment communication interface, the data from the data acquisition system is received, and data conversion, storage, analysis and processing are performed to realize equipment monitoring, management, optimization and maintenance functions; The control commands issued by the cluster device controller system are forwarded to the corresponding semiconductor devices. The control commands are instructing the process control, parameter adjustment, state switching, and alarm clearing operations of the equipment based on the results of equipment data analysis and process control. Through the corresponding components of the data acquisition system, the control commands are converted into communication protocols and data formats recognizable to the device side, and sent to the device side through the device communication interface to achieve control and feedback of the equipment.

2. A semiconductor device data collection method supporting standardized communication transformation according to claim 1, characterized in that: The method for implementing a standard semiconductor device communication interface in a cluster device controller system is: According to the semiconductor equipment communication standard protocol set, a high-speed message service communication interface is implemented in the cluster equipment control system, and domain modeling is performed based on the detailed functional requirements of the general equipment model, and related entities and domain services are established to realize the secondary message sending and receiving function of equipment communication; According to the semiconductor equipment communication standard set, domain modeling is performed in the cluster equipment control system according to each standard requirement, and related entities and domain services are established to realize carrier management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions; According to the semiconductor equipment data collection standard set, a network service-based data collection interface is implemented in the cluster equipment control system to meet the requirements of the general equipment model, equipment self-description, client authentication and authorization, data collection management, and common metadata related standards.

3. The semiconductor device data collection method supporting standardized communication transformation according to claim 1, characterized in that: The communication rules are: Four message types are defined: notification, report, command, and request. Each message type is represented by bit and word data and has a corresponding timing process. According to the requirements of the standard semiconductor equipment communication interface, a PLC address specification document is developed as the basis for the communication protocol; The device side develops a communication program based on the PLC address specification file, performs integration testing with the standardized data acquisition service, and exports a configuration file; The standardized data collection service reads the configuration file, periodically scans the messages supported by the device, implements communication with the device, and records the communication log; The notification type is a message type that uses one bit to represent an event, and the timing process is: When an event occurs, the device sets the bit to On. When the event is completed, the device sets the bit to Off. The report type uses a pair of bits: a report bit and a reply bit and a group of word data to represent the message type of an event, and the timing process is: When an event occurs, the device writes the details to the word data and then sets the report bit to On. After the data acquisition program scans and finds that the report bit is On, it reads the word data. The data acquisition program sets the reply bit to On, indicating that the reading is complete. The device scans and sets the reply bit to On and the report bit to Off. The data acquisition program scans and finds that the report bit is Off, and sets the reply bit to Off. Report message sending completed; If the reading is not completed within the set time, it means that the data acquisition program has timed out. After the timeout, the device will set the report bit to Off to indicate that the data transmission is terminated and record the corresponding error log. The command type is represented by a pair of bits: command bit and reply bit and a group of word data to represent the command type sent by a data acquisition program to the device end. The timing process is: The data acquisition program writes the details to the word data, and then sets the command bit to On. After the device scans and finds that the command bit is On, it reads the word data. The device sets the reply bit to On, indicating that the read is complete. The data acquisition program scans until the reply bit is set to On and the command bit is set to Off. When the device scans and finds that the command bit is Off, it sets the reply bit to Off. The command message is sent. If the reading is not completed within the set time, it means that the device has timed out receiving data. After the timeout, the data acquisition program will set the command bit to Off to terminate data transmission and record the corresponding error log. The request type is represented by a pair of bits: a request bit and a reply bit and a group of word data. The type can be sent in both directions. The timing process is: The request side writes the details to the request area of ​​the word data, and then sets the request bit to On. After the response end scans and finds that the request bit is On, it reads the data in the request area of ​​the word data and writes the reply data to the response area of ​​the word data. The answering end sets the reply bit to On, indicating that the answer is complete. The request end scans and sets the reply bit to On, reads the contents of the word data response area, and sets the request bit to Off. When the responder scans and finds that the request bit is Off, it sets the reply bit to Off. The request message is sent successfully; If the response is not completed within the set time, it means that the responder has timed out. After the timeout, the requester will set the request bit to Off to terminate the request data and record the corresponding error log.

4. The semiconductor device data collection method supporting standardized communication transformation according to claim 1, characterized in that: The method for the cluster device controller system device end to obtain preset collected data is: The cluster equipment controller system establishes a communication connection with the equipment end through a serial port, an Ethernet port or a wireless communication module, sends data acquisition instructions or reads the data buffer area of ​​the equipment end according to the communication protocol and data format of the equipment end, and obtains the data of the equipment end; The cluster equipment controller system equipment side parses, verifies, converts and encapsulates the acquired data, generates a message data packet that complies with the standard semiconductor equipment communication interface, and sends it to the semiconductor equipment data analysis and process control system through the high-speed message service communication interface; The cluster equipment controller system receives control commands from the semiconductor process control system, parses, verifies, converts and encapsulates the control commands, generates control data packets that comply with the communication protocol and data format of the equipment, and sends them to the equipment through the serial port, network port or wireless communication module to achieve control and feedback of the equipment.

5. The semiconductor device data collection method supporting standardized communication transformation according to claim 1, characterized in that: The method of completing the data collection of preset collection by identifying the information on the screen through the acquisition device program interface is: Connect the keyboard and mouse of the device to the KVM type data acquisition program through the keyboard, mouse and video module, so that the data acquisition program can send keyboard and mouse commands to the device; Through the video acquisition hardware module, the device program screen is connected to the KVM type data acquisition program, so that the data acquisition program can collect and analyze the program screen; Analyze the device program interface, obtain device information through optical character recognition, pattern matching, and color judgment software algorithms, and organize this information into a collection list; According to the collection list, set the steps for switching screens required for each collection item and generate an operation configuration file; According to the collection list, set the type and parameters of the collection screen information required for each collection project, realize information collection through optical character recognition, pattern matching, and color judgment software algorithms, and generate a collection configuration file; According to the standard semiconductor equipment communication interface requirements and the equipment software screen functional capabilities, the functions that can be operated through the screen are organized into a control list; According to the control list, set the steps of switching screens and operating screens required for each control project, and generate operation configuration files; KVM type data collection service reads the operation configuration file and collection configuration file, reads the device status regularly, and realizes data collection of the device; The KVM type data collection service reads the operation configuration file, and when the cluster device controller system sends a control command, it completes the automatic operation of the device screen to realize automatic control of the device.

6. The semiconductor device data collection method supporting standardized communication transformation according to claim 1, characterized in that: The standard semiconductor equipment communication interface complies with any one of the SECS / GEM, GEM300, EDA, and Ineterface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

7. A semiconductor device data acquisition system supporting standardized communication transformation, applying any one of the semiconductor device data acquisition methods supporting standardized communication transformation described in claims 1-6, characterized in that: include: A cluster equipment controller system for implementing a standard semiconductor equipment communication interface, the interface being used to interface with semiconductor equipment data analysis and process control systems; One or more data acquisition systems for performing data acquisition and process control on different types of semiconductor equipment, and for converting equipment data into message data packets that conform to a standard semiconductor equipment communication interface and for communicating with a cluster equipment controller system; The data acquisition system adopts different data acquisition methods according to the communication capability of the equipment, including: for equipment that has the communication capability that meets the semiconductor equipment communication standard and can communicate with the cluster equipment controller system through modification, the high-speed message service communication interface is used to complete the communication protocol conversion from the equipment communication to the standard semiconductor equipment communication interface according to the equipment communication rules; For devices that do not have the communication capability that meets the semiconductor equipment communication standards but can communicate with the device side through the cluster device controller system development program, use the serial port, network port or wireless communication module to complete the communication protocol conversion from the device communication to the standard semiconductor equipment communication interface according to the communication protocol and data format of the device side; For devices that do not have any communication capabilities, use the keyboard, mouse and video module to complete the preset data acquisition by identifying the information on the screen through the acquisition device program interface, and complete the communication protocol conversion from the device communication to the standard semiconductor device communication interface through optical character recognition, pattern matching, and color judgment software algorithms.

8. The semiconductor equipment data acquisition system supporting standardized communication transformation according to claim 7, characterized in that: The cluster device controller system comprises: A high-speed message service communication interface for sending and receiving message data packets with the data acquisition system; A generic device model domain service, which is used to perform domain modeling according to the detailed functional requirements of the generic device model, establish related entities and domain services, and implement the secondary message sending and receiving functions of device communication; An equipment communication extension domain service, which is used to perform domain modeling according to the requirements of the semiconductor 300mm equipment communication extension standard protocol set, establish related entities and domain services, and realize carrier management, process operation or control operation management, substrate tracking, equipment availability and maintenance status, and equipment performance tracking functions; A data collection interface based on network services, used to implement data collection functions that meet the requirements of common device models, device self-description, client authentication and authorization, data collection management, and common metadata related standards.

9. A semiconductor equipment data acquisition system supporting standardized communication transformation according to claim 7 or 8, characterized in that: The standard semiconductor equipment communication interface complies with any one of the SECS / GEM, GEM300, EDA, and Ineterface-A standard protocol sets, and is used to connect to the EAP or FDC business system of the semiconductor equipment.

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