Helium detection auxiliary device

Abstract

The utility model discloses a helium detection auxiliary device, and particularly relates to the technical field of helium mass spectrometer leak detector application, which comprises a main pipeline, a helium mass spectrometer leak detector, a digital display vacuum gauge, a nitrogen pipeline, a vacuum pump and a helium detection pipe, and is characterized in that the helium mass spectrometer leak detector, the digital display vacuum gauge, the nitrogen pipeline and the vacuum pump are respectively connected with the main pipeline through independent pipelines; the main pipeline is also provided with a reserved pipeline, the reserved pipeline is connected with a second valve, and a third valve is installed on the pipeline between the main pipeline and the helium mass spectrometer leak detector. According to the helium detection auxiliary device, the helium detection operation of a vacuum method can be met, the helium detection operation of a positive pressure method can be met, the operation of two different helium detection methods can be met through one system, switching is convenient, operation is easy and fast, multiple source bottles can be detected at the same time, the working efficiency is improved, and the helium detection auxiliary device is suitable for popularization and application. And meanwhile, the device can also be used for helium detection operation of steel cylinders of various sizes and types.

Description

Technical Field

[0001] The utility model relates to the technical field of application of helium mass spectrometer leak detectors, in particular to a helium detection auxiliary device. Background Art

[0002] With the rapid development of semiconductor technology, the purity requirements for various materials are getting higher and higher, from the previous 5N to the current 6N, 7N and even 9N. The requirements for materials are getting higher and higher, and the requirements for the sealing of containers and joints are also getting higher. Conventional leak detection methods can no longer meet the needs of the industry. Helium detection method is used in the semiconductor industry with its high sensitivity.

[0003] As a standard universal leak detection instrument, the helium mass spectrometer leak detector has limited vacuuming capacity. When a large-volume workpiece needs to be vacuumed for leak detection using the negative pressure method, or when a vacuum box method is used for leak detection, the vacuuming capacity of the leak detector itself is insufficient due to the large volume of the workpiece or the volume of the vacuum box. Either it takes a long time to vacuum, shortening the effective service life of the leak detector, or it cannot be vacuumed at all, and there is no way to perform leak detection. Therefore, a helium detection auxiliary device is proposed. Utility Model Content

[0004] The main purpose of the utility model is to provide a helium detection auxiliary device, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A helium detection auxiliary device comprises a main pipeline, a helium mass spectrometer leak detector, a digital vacuum gauge, a nitrogen pipeline, a vacuum pump, and a helium detection tube. The helium mass spectrometer leak detector, the digital vacuum gauge, the nitrogen pipeline, and the vacuum pump are respectively connected to the main pipeline through separate pipelines. A reserved pipeline is also provided on the main pipeline, and a second valve is connected to the reserved pipeline. A third valve is installed on the pipeline between the main pipeline and the helium mass spectrometer leak detector, a fourth valve is installed on the pipeline between the digital vacuum gauge and the main pipeline, a fifth valve and a sixth valve are installed on the pipeline between the nitrogen pipeline and the main pipeline, and a seventh valve is installed on the pipeline between the vacuum pump and the main pipeline.

[0007] Preferably, the helium detection tube is connected to the main pipeline via a first valve, and a plurality of 1 / 4 VCR connectors are provided on the helium detection tube.

[0008] Preferably, the second valve is connected to the high-pressure helium cylinder through a pipeline.

[0009] Preferably, the first valve, the second valve, the third valve, the fourth valve, the fifth valve and the seventh valve are all diaphragm valves.

[0010] Preferably, the sixth valve is a ball valve.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] The utility model discloses a helium detection auxiliary device. The auxiliary device can meet the requirements of vacuum helium detection operation and positive pressure helium detection operation. One system can meet the requirements of two different helium detection methods. The switch is convenient and the operation is simple and fast. At the same time, multiple source bottles can be detected at the same time to improve work efficiency. At the same time, the auxiliary device can also be used for helium detection operations of steel cylinders of various sizes and types. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0014] In the figure: 1. Main pipeline; 2. Helium mass spectrometer leak detector; 3. Digital vacuum gauge; 4. Nitrogen pipeline; 5. Vacuum pump; 6. High-pressure helium cylinder; 7. First valve; 8. Second valve; 9. Third valve; 10. Fourth valve; 11. Fifth valve; 12. Sixth valve; 13. Seventh valve; 14. Helium detection tube; 15. 1 / 4VCR connector. DETAILED DESCRIPTION

[0015] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0016] like Figure 1 As shown, a helium detection auxiliary device includes a main pipeline 1, a helium mass spectrometer leak detector 2, a digital vacuum gauge 3, a nitrogen pipeline 4, a vacuum pump 5, and a helium detection tube 14. The helium mass spectrometer leak detector 2, the digital vacuum gauge 3, the nitrogen pipeline 4 and the vacuum pump 5 are respectively connected to the main pipeline 1 through separate pipelines. The main pipeline 1 is still provided with a reserved pipeline, and a second valve 8 is connected to the reserved pipeline. A third valve 9 is installed on the pipeline between the main pipeline 1 and the helium mass spectrometer leak detector 2, and a fourth valve 10 is installed on the pipeline between the digital vacuum gauge 3 and the main pipeline 1. The digital vacuum gauge 3 can truly reflect the vacuum state in the system. A fifth valve 11 and a sixth valve 12 are installed on the pipeline between the nitrogen pipeline 4 and the main pipeline 1, and a seventh valve 13 is installed on the pipeline between the vacuum pump 5 and the main pipeline 1. The vacuum pump 5 is used to initially evacuate the cavity and container to be inspected, which saves time and protects the helium mass spectrometer.

[0017] The helium detection tube 14 is connected to the main pipeline 1 via a first valve 7. The helium detection tube 14 is provided with a plurality of 1 / 4 VCR connectors 15, so that a plurality of source bottles can be detected at the same time, thereby improving work efficiency.

[0018] The second valve 8 is connected to the high-pressure helium cylinder 6 through a pipeline, so that it can be used for positive pressure detection.

[0019] The first valve 7, the second valve 8, the third valve 9, the fourth valve 10, the fifth valve 11 and the seventh valve 13 are all diaphragm valves, which can be pneumatic or manual. If pneumatic valves are selected, the entire panel can be made into a PLC central control, which is easier to operate.

[0020] The sixth valve 12 is a ball valve.

[0021] The working principle of the utility model is:

[0022] 1) Before helium testing, please check whether all valves of the helium testing device are in the closed state;

[0023] 2) The source bottle should be initially evacuated before helium detection; turn on the helium mass spectrometer leak detector 2 switch and the digital vacuum gauge 3 switch;

[0024] 3) The startup of the helium mass spectrometer leak detector 2 includes program loading and self-testing, which takes several minutes. After the startup is completed, the helium mass spectrometer leak detector 2 enters the standby state. Observe whether the equipment is working normally. If the helium mass spectrometer leak detector 2 fails to enter the normal working state, stop further work, turn off the helium mass spectrometer leak detector 2, turn off the digital vacuum gauge 3, and report the situation to the department head;

[0025] 4) If the helium mass spectrometer leak detector 2 works normally, connect the source bottle to be tested to the 1 / 4 VCR connector 15 (use a new VCR gasket); decide whether to open the manual valve according to the part to be tested (if it is necessary to test whether the manual valve has internal leakage, close the manual valve; if the part to be tested is the cylinder itself, open the manual valve); some cylinders use pneumatic valves to replace (or increase) manual valves. When the pneumatic valve needs to be opened, it is necessary to connect the driving nitrogen with the help of the sixth valve 12 to open the pneumatic valve;

[0026] 5) The pneumatic valve on the source bottle is generally a normally closed valve with a quick-connect connector for connecting a plastic hose and opening under a certain gas pressure. When the pneumatic valve needs to be opened, open the sixth valve 12 on the panel; when the pneumatic valve needs to be closed, close the sixth valve 12 and unplug the pneumatic valve air pipe;

[0027] 6) Then, the first valve 7 and the seventh valve 13 are opened in sequence, and the vacuum pump 5 performs initial evacuation of the space to be inspected (source bottle / cavity, etc.);

[0028] 7) When the digital vacuum gauge 3 reads about 10Pa, prepare to start the helium test. First close the seventh valve 13, then click the green "Start" button on the control screen of the helium mass spectrometer leak detector 2 to enter the test mode (remember: do not use the vacuum pump 5 and the helium mass spectrometer leak detector 2 to pump the space to be tested at the same time, otherwise it will cause irreversible damage);

[0029] 8) The helium mass spectrometer leak detector 2 will automatically switch from "initial extraction" to "normal" and then to "Hi.Sens.", and wait for the reading to slowly stabilize (generally it will stay at around 1X10-9 mbar.L / s (if the reading keeps decreasing, even reaching 5X10-12mbar.L / s, the device may be in a false working state. You can try to click the "Start" button to restore to the standby state, and then click the "Auto Calibration" button to recalibrate the device. After the calibration is completed, click the "Start" button again to enter the detection mode). (Remember: Do not let the helium mass spectrometer leak detector 2 contact atmospheric pressure in the detection mode, otherwise it will cause irreversible damage);

[0030] 9) After entering the detection mode, open the third valve 9, mark the source bottle to be inspected position (1 / 4VCR connector 15) with label paper, and use the helium inspection spray gun to spray helium at the to-be-inspected position (1 / 4VCR connector 15). Before using the spray gun, confirm the reading of the helium bottle pressure gauge (generally between 0.5 and 1 bar. Since there is a leak in the manual valve of the helium cylinder, there is no need to open the valve, and there is always helium in the spray gun pipeline). After spraying helium, wait for half a minute to one minute to observe whether the reading of the helium mass spectrometer leak detector 2 increases. If there is no increase, it means that there is no leakage at this site; if there is an increase, it means that there is a possibility of leakage at this site. When the reading increases to the maximum value, record the value. If the detected part is 1 / 4 VCR joint 15, after finding leakage, try to tighten the interface slightly to prepare for re-measuring the site when spraying helium. Try to keep the valve / source bottle to be tested away from the helium detection device. Some interfaces on the helium detection device are ferrule interfaces or O-ring sealing interfaces with poor air tightness. If helium enters the pipeline from these interfaces, it will cause misreading of the leak rate (not from the detection site);

[0031] 10) After the test is completed, close the third valve 9, fill in the helium test result on the cylinder card that comes with the cylinder, fill in "OK" if the helium test is passed, click the "Start" button on the display panel of the helium mass spectrometer leak detector 2 to enter the standby state, and then turn off the power of the helium mass spectrometer leak detector 2;

[0032] 11) If high-purity nitrogen needs to be injected into the source bottle, after confirming that the third valve 9 and the seventh valve 13 are closed, the fourth valve 10 can be opened, and the reading of the digital vacuum gauge 3 can be observed until the required pressure in the bottle is reached, and the manual valve of the source bottle, the fifth valve 11, and the fourth valve 10 are closed; if high-purity nitrogen does not need to be injected into the source bottle, the manual valve of the source bottle can be directly closed, and then the first valve 7 can be closed;

[0033] 12) Confirm whether the seventh valve 13 is in a closed state;

[0034] 13) Turn off the digital vacuum gauge 3, remove the source bottle, and plug the 1 / 4 VCR connector 15 with a plug (remember to put a VCR gasket);

[0035] 14) After the helium test is completed, please confirm that: all valves on the helium test device are closed; the helium mass spectrometer leak detector 2 is powered off, the vacuum pump 5 is turned off; and the 1 / 4 VCR connector 15 has been plugged with a plug.

[0036] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A helium detection auxiliary device, characterized in that: The invention comprises a main pipeline (1), a helium mass spectrometer leak detector (2), a digital vacuum gauge (3), a nitrogen pipeline (4), a vacuum pump (5), and a helium detection tube (14). The helium mass spectrometer leak detector (2), the digital vacuum gauge (3), the nitrogen pipeline (4), and the vacuum pump (5) are respectively connected to the main pipeline (1) through separate pipelines. A reserved pipeline is also provided on the main pipeline (1), and a second valve (8) is connected to the reserved pipeline. A third valve (9) is installed on the pipeline between the main pipeline (1) and the helium mass spectrometer leak detector (2). A fourth valve (10) is installed on the pipeline between the digital vacuum gauge (3) and the main pipeline (1). A fifth valve (11) and a sixth valve (12) are installed on the pipeline between the nitrogen pipeline (4) and the main pipeline (1). A seventh valve (13) is installed on the pipeline between the vacuum pump (5) and the main pipeline (1).

2. A helium detection auxiliary device according to claim 1, characterized in that: The helium detection tube (14) and the main pipeline (1) are connected via a first valve (7), and a plurality of 1 / 4 VCR connectors (15) are provided on the helium detection tube (14).

3. A helium detection auxiliary device according to claim 1, characterized in that: The second valve (8) is connected to the high-pressure helium cylinder (6) via a pipeline.

4. A helium detection auxiliary device according to claim 2, characterized in that: The first valve (7), the second valve (8), the third valve (9), the fourth valve (10), the fifth valve (11) and the seventh valve (13) are all diaphragm valves.

5. A helium detection auxiliary device according to claim 1, characterized in that: The sixth valve (12) is a ball valve.

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