Cleaning tank
By setting up a flap device in the cleaning tank of the photovoltaic silicon wafer cleaning equipment, the vertical spacing of the graphite boat is realized, which solves the problems of high labor intensity and large space occupation of existing equipment, and realizes the compact structure and high cleaning tank stability.
Patent Information
- Application Number
- CN202421157938.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The existing photovoltaic silicon wafer cleaning equipment has large and heavy flower baskets, which has a high labor intensity for manual handling, which increases the cleaning cost. At the same time, the automatic handling system needs to be used in a suitable flower basket, which limits the application scenarios of the equipment.
A cleaning tank is designed, and by setting a flap device in the length direction of the cleaning chamber, the graphite boat is placed at intervals in the vertical direction, avoiding the additional increase in the width of the cleaning tank, and is suitable for workplaces with limited floor area.
The compact structure of the cleaning tank is realized, suitable for places with limited space, reduces the pressure on the flap device of the graphite boat, improves the stability of the graphite boat, and extends the service life of the flap device.
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Figure CN222483302U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic sheet processing equipment, in particular to a cleaning tank. Background Art
[0002] Photovoltaic silicon wafers usually need to be cleaned during the production process. Usually, multiple photovoltaic silicon wafers are placed in a graphite boat, and then the multiple graphite boats are stacked and placed in a flower basket. Then, the flower baskets are manually placed in multiple cleaning tanks in the cleaning mechanism in turn. Since the flower baskets are large in size and heavy in weight, the labor intensity of manually carrying the flower baskets is high. Even some automatic handling systems must be used with suitable flower baskets, that is, the cleaning mechanism must be used with the flower basket, which undoubtedly increases the cleaning cost of photovoltaic silicon wafers. Patent CN116259564A discloses a cleaning system for photovoltaic silicon wafers, which is used to support the upper graphite boat by setting a reprinting device in the cleaning tank, so that multiple layers of graphite boats can be placed in the cleaning tank to replace the flower basket. However, due to the setting of the reprinting device, the internal space of the cleaning tank is occupied, the width of the cleaning tank is increased, and the cleaning tank cannot be used in places with limited site space. Utility Model Content
[0003] The purpose of the utility model is to provide a cleaning tank to solve the above technical problems.
[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is: a cleaning tank, including a tank body with an upper opening, the tank body defines a cleaning cavity, and a flap device for placing a graphite boat is arranged in the length direction of the cleaning cavity, and the flap device can separate the cleaning cavity to realize the spacing of the graphite boat in the cleaning cavity in the vertical direction. Since the flap device is arranged in the length direction of the cleaning cavity, the width of the cleaning tank will not be increased extra, and the cleaning tank has a compact structure, which is suitable for workplaces with limited floor space for the cleaning tank.
[0005] Furthermore, at least one group of the flipping devices is provided, and two flipping devices mirror-imaged and arranged on both sides of the length direction of the tank body form one group, and the two flipping devices in one group are located at the same height to support both ends of the graphite boat. The supporting components of the flipping devices on both sides support both ends of the graphite boat respectively. Since the flipping devices on both sides support a group of graphite boats at the same time, the pressure of the graphite boat on a group of flipping devices is reduced, the stability of the graphite boat is improved, and the service life of the flipping devices is extended.
[0006] Furthermore, the flip device includes a rotating rod located in the cleaning chamber, and the rotating rod rotates under the drive of a corresponding flip driving member. The flip driving member is fixed on the trough body and is located outside the cleaning chamber. The flip driving member is connected to the rotating rod through the connecting rod assembly to drive the rotating rod to rotate. At least one group of support components that rotate synchronously with the rotating rod to achieve up and down flipping are fixed on the rotating rod. The support assembly is used to support the graphite boat located on the second layer.
[0007] Furthermore, a plurality of groups of support components are fixedly arranged on the rotating rod and rotate synchronously therewith to realize up and down flipping, and the plurality of groups of support components can be located in the same horizontal plane.
[0008] Furthermore, the connecting rod assembly includes a bearing, which is sleeved on a rotating rod that passes through the side wall of the cleaning tank, and the bearing is located in a through hole of the tank body to connect the tank body and the rotating rod. By setting the bearing, the friction between the rotating rod and the side wall of the cleaning tank is reduced during the rotation of the rotating rod, which is conducive to the flipping of the flip assembly.
[0009] Furthermore, the support assembly includes a support rod and a support plate connected to the support rod, the two support rods are symmetrically arranged on both sides of the support plate and connected to the rotating rod, and the support plate is provided with a through hole.
[0010] Furthermore, the flip driving member includes a telescopic shaft, the flip driving member is hinged to the trough body, the telescopic shaft is connected to the connecting rod assembly, and the telescopic shaft can drive the connecting assembly to move.
[0011] Furthermore, the connecting rod assembly includes a swing rod 1, a rotating rod, a swing rod 2, a linkage rod and a swing rod 3 connected in sequence, one end of the swing rod 1 is hinged to the telescopic shaft, the other end of the swing rod 1 is fixedly connected to the rotating rod, the rotating rod passes through the trough body, the swing rod 2 is arranged parallel to the swing rod 1 and one end is fixedly connected to the part of the rotating rod located in the cleaning tank, the other end is hinged to the end of the linkage rod, the other end of the linkage rod is hinged to one end of the swing rod 3, and the other end of the swing rod 3 is fixedly connected to the rotating rod.
[0012] The beneficial effects of the utility model are:
[0013] 1) Since the reversing device is arranged in the length direction of the cleaning chamber, the width of the cleaning tank will not be increased additionally, and the cleaning tank has a compact structure, which is suitable for workplaces with limited floor space for the cleaning tank.
[0014] 2) The supporting components of the turning devices on both sides support the two ends of the graphite boat respectively. Since the turning devices on both sides support a group of graphite boats at the same time, the pressure of the graphite boat on a group of flap devices is reduced, the stability of the graphite boat is improved, and the service life of the turning device is extended. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and the description thereof are used to explain the present invention and do not constitute an improper limitation on the present invention.
[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0017] Figure 1 A three-dimensional diagram of a cleaning tank according to an embodiment of the present invention;
[0018] Figure 2 A cross-sectional view of a cleaning tank according to an embodiment of the present utility model;
[0019] Figure 3 A three-dimensional diagram of a cleaning tank after removing a group of graphite boats from an embodiment of the utility model;
[0020] Figure 4 It is a three-dimensional diagram of a flap device according to an embodiment of the utility model.
[0021] In the figure: 1. trough body; 11. cleaning chamber; 2. graphite boat; 3. flap device; 31. flip drive member; 32. connecting rod assembly; 321. swing rod one; 322. rotating rod; 323. swing rod two; 324. connecting rod; 325. swing rod three; 326. bearing; 33. rotating rod; 34. support assembly; 341. support rod; 342. support plate; 3421. through hole. DETAILED DESCRIPTION
[0022] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.
[0023] See attached Figure 1-3As shown, a cleaning tank in this embodiment includes a tank body 1 with an opening at the upper end, and the tank body 1 defines a cleaning chamber 11, and a graphite boat 2 is placed in the cleaning chamber 11 for cleaning. A flap device 3 is provided in the length direction of the cleaning chamber 11 for placing the graphite boat 2. Since the volume of the cleaning chamber 11 is relatively large, if only one layer of graphite boat 2 is placed, the cleaning chamber 11 will undoubtedly be wasted. Therefore, by providing a flap device 3, the flap device 3 can separate the cleaning chamber 11 to achieve the vertical spacing of the graphite boat 2 in the cleaning chamber 11, and the graphite boat 2 will not come into contact during the stacking process. This improves the utilization rate of the cleaning chamber 11. In addition, since a flap device is provided in the length direction of the cleaning chamber 11, the width of the cleaning tank will not be increased additionally, and the cleaning tank has a compact structure, which is suitable for workplaces with limited floor space for the cleaning tank.
[0024] See attached Figure 4 As shown, each flap device 3 includes at least one rotating rod 33 located in the cleaning chamber 11, and the rotating rod 33 rotates under the drive of the corresponding flip driving member 31, and the flip driving member 31 is fixed on the tank body 1 and is located outside the cleaning chamber 11. The flip driving member 31 is connected to the rotating rod 33 through a connecting rod assembly 32 to drive the rotating rod 33 to rotate. A support assembly 34 is fixed on the rotating rod 33 to rotate synchronously with it to achieve up and down flipping. The support assembly 34 is used to support the graphite boat 2 located on the second layer. When the graphite boat 2 located below the support assembly 34 is taken and placed, the support assembly 34 swings to a vertical state to avoid interfering with the taking and placing of the graphite boat 2 below. When the support assembly 34 swings to a horizontal state, the graphite boat 2 can be placed on the support assembly 34.
[0025] The flip device 3 is used to support the graphite boat 2 through a pair of support assemblies 34 that can be flipped up and down. When the graphite boat 2 under the support assembly 34 is placed, the flip driving member 31 drives the support assembly 34 to flip upward to a vertical state. The support assembly 34 now makes way for the graphite boat 2 below, and the graphite boat 2 can be placed under the support assembly 34. After the graphite boat 2 under the support assembly 34 is placed, the flip driving member 31 drives the support assembly 34 to flip downward to a horizontal state. At this time, the support assembly 34 separates the cleaning chamber 11, and the graphite boat 2 can be placed on the support assembly 34, so that the graphite boat 2 can be placed in multiple layers in the cleaning chamber 11.
[0026] In some embodiments, at least one group of flap devices 3 is provided, and two flip devices 3 mirror-imaged and arranged on both sides of the tank body 1 in the length direction form a group, and the two flip devices 3 in a group are located at the same height, and a group of flip devices 3 divides the cleaning tank into two layers, upper and lower layers, to support both ends of the graphite boat 2. The support components 34 of the flip devices 3 on both sides support both ends of the graphite boat 2 respectively. Since the flip devices 3 on both sides support a group of graphite boats at the same time, the pressure of the graphite boat 2 on a group of flip devices 3 is reduced, the stability of the graphite boat 2 is improved, and the service life of the flip devices 3 is extended.
[0027] In some embodiments, N groups of flipping devices 3 of different heights are provided. The support assembly 34 on each group of flipping devices 3 has a different height, and the support assembly 34 can divide the cleaning chamber 11 into N+1 layers, and the graphite boats 2 can be placed in the cleaning chamber 11 in N+1 layers from bottom to top. During the placement of the graphite boats 2, the support assembly 34 swings from bottom to top to a horizontal position in sequence.
[0028] In some embodiments, each set of flap devices 3 has two pairs of support components 34, so that the flap devices 3 can support two graphite boats 2 at the same time. When the graphite boat 2 is placed at the bottom of the cleaning tank, the support components 34 of the two sets of flap devices 3 are in a vertical state. After the two graphite boats 2 are placed at the bottom of the tank, the support components 34 of the two sets of flap devices 3 are flipped down to a horizontal state. When the support components 34 are flipped to a horizontal state, two more graphite boats 2 can be placed on the two sets of flap devices 3. When the cleaning is completed, the unloading device first takes out the graphite boat 2 on the flap device 3, and then the support components 34 of the flap device 3 swing to a vertical state, and the unloading device then takes out the graphite boat 2 at the bottom of the tank. Each set of flap devices 3 can also have three, four or five pairs of support components 34. The specific number of support components 34 set on each flip device 3 depends on the actual situation and is not limited in this application.
[0029] In some embodiments, the support assemblies 34 on the same rotating rod 33 are arranged in parallel, that is, all the support assemblies 34 can be located in the same horizontal plane, that is, the cleaning chamber 11 can be divided into two layers, upper and lower. In some embodiments, the support assembly 34 includes a support rod 341 and a support plate 342 connected to the support rod 341, and the two support rods 341 are symmetrically arranged on both sides of the support plate 342 and connected to the rotating rod 33. The rotating rod 33 can drive the support plate 342 to flip. The graphite boat 2 is supported by the support plate 342. By setting the support plate 342, graphite boats 2 of different specifications can be supported, thereby improving the application range of the cleaning tank.
[0030] In some embodiments, a through hole 3421 is provided on the surface of the support plate 342 against the boat foot, and the through hole 3421 connects the boat foot and the cleaning tank. Since the cleaning tank stores cleaning agent during cleaning, the through hole 3421 is provided on the support assembly 34 so that the cleaning agent can clean the boat foot and avoid the occurrence of a cleaning dead corner when the graphite boat 2 is cleaned.
[0031] In some embodiments, the connecting rod assembly 32 includes a swing rod 1 321, a rotating rod 322, a swing rod 2 323, a linkage rod 324 and a swing rod 3 325 connected in sequence. The flip driving member 31 includes a telescopic shaft, the flip driving member 31 is hinged to the tank body 1, one end of the swing rod 1 321 is hinged to the telescopic shaft of the flip driving member 31, and the other end of the swing rod 1 321 is fixedly connected to the rotating rod 322. The rotating rod 322 vertically passes through the cleaning tank and is located at the upper end of the cleaning tank. The swing rod 2 323 is arranged parallel to the swing rod 1 321 and one end is fixedly connected to the part of the rotating rod 322 located in the cleaning tank, and the other end is hinged to the end of the linkage rod 324, the other end of the linkage rod 324 is hinged to one end of the swing rod 325, and the other end of the swing rod 325 is fixedly connected to the rotating rod 33.
[0032] When the flip driving member 31 is extended and retracted up and down, the swing rod 322 is pushed to rotate by the swing rod 1 321, thereby driving the swing rod 322 to rotate along its own axis. During the rotation process, the swing rod 322 drives the swing rod 2 323 to flip up and down synchronously with the swing rod 1 321. During the flip process, the swing rod 2 323 drives the swing rod 3 325 to flip up and down through the connecting rod 324. Since the swing rod 3 325 and the rotating rod 33 are fixed, the swing rod 3 325 drives the rotating rod 33 to rotate along its own axis during the up and down swing process, thereby realizing the up and down flipping of the support assembly 34. The flip driving member 31 is located outside the cleaning chamber 11, and drives the rotating rod 33 located in the cleaning chamber 11 to rotate (that is, the support assembly 34 swings) through the connecting rod assembly 32. Moreover, through the connecting rod assembly 32, the rotating rod 322 located above the cleaning liquid can drive the rotating rod 33 located in the cleaning liquid to rotate, thereby preventing the cleaning liquid from leaking from the rotating rod 322.
[0033] In some embodiments, the connecting rod assembly 32 further includes a bearing 326, which is sleeved on the rotating rod 322 and is located in the through hole of the tank body 1 when the rotating rod 322 passes through the tank body 1, connecting the tank body 1 and the rotating rod 322. The arrangement of the bearing 326 reduces the friction between the rotating rod 322 and the tank body 1 during the rotation process, which facilitates the flipping of the flip assembly 3.
[0034] Working process: The graphite boat 2 is directly clamped by the manipulator and placed in the cleaning tank. A flipping device is provided in the cleaning tank, and the support plate 342 is driven to flip by the flipping drive 31. When the graphite boat 2 located under the support plate 342 is taken and placed, the support plate 342 swings to a vertical state to avoid interference with the taking and placing of the graphite boat 2 below. When the support plate 342 swings to a horizontal state, the graphite boat 2 can be placed on the support plate 342, which greatly improves the utilization rate of the cleaning tank. After cleaning, the graphite boat 2 is taken out of the cleaning tank by the transfer mechanism.
[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.
[0036] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.
Claims
1. A cleaning tank, characterized in that: The invention comprises a trough body (1) with an opening at the upper end, wherein the trough body (1) defines a cleaning chamber (11), and a flap device (3) for placing a graphite boat (2) is arranged in the length direction of the cleaning chamber (11), wherein the flap device (3) can separate the cleaning chamber (11) so as to enable the graphite boat (2) to be placed at intervals in the vertical direction within the cleaning chamber (11).
2. The cleaning tank according to claim 1, characterized in that: At least one group of the flap devices (3) is provided, and two flap devices (3) mirror-imaged and arranged on both sides of the length direction of the trough body (1) form a group, and the two flap devices (3) in a group are located at the same height to support both ends of the graphite boat (2).
3. The cleaning tank according to claim 1, characterized in that: The flap device (3) comprises a rotating rod (33) located in the cleaning chamber (11), the rotating rod (33) rotating under the drive of a correspondingly arranged flipping driving member (31), the flipping driving member (31) being fixed on the tank body (1) and located outside the cleaning chamber (11), the flipping driving member (31) being connected to the rotating rod (33) via a connecting rod assembly (32) to drive the rotating rod (33) to rotate, at least one group of supporting assemblies (34) being fixedly arranged on the rotating rod (33) and rotating synchronously with the rotating rod (33) to realize up and down flipping, the supporting assemblies (34) being used to support the graphite boat (2) located on the second layer.
4. The cleaning tank according to claim 3, characterized in that: The rotating rod (33) is fixedly provided with a plurality of groups of support components (34) which rotate synchronously with the rotating rod to achieve up and down flipping, and the plurality of groups of support components (34) are located on the same horizontal plane.
5. The cleaning tank according to claim 3, characterized in that: The connecting rod assembly (32) comprises a bearing (326), the bearing (326) being sleeved on a rotating rod (322) penetrating the slot body (1), and the bearing (326) being located in a through hole of the slot body (1) to connect the slot body (1) and the rotating rod (322).
6. The cleaning tank according to claim 3, characterized in that: The support assembly (34) comprises a support rod (341) and a support plate (342) connected to the support rod (341); the two support rods (341) are symmetrically arranged on both sides of the support plate (342) and connected to the rotating rod (33); and a through hole (3421) is arranged on the support plate (342).
7. The cleaning tank according to claim 3, characterized in that: The flip driving member (31) comprises a telescopic shaft, the flip driving member (31) is hinged to the trough body (1), the telescopic shaft is connected to the connecting rod assembly (32), and the telescopic shaft can drive the connecting rod assembly (32) to move.
8. The cleaning tank according to claim 7, characterized in that: The connecting rod assembly (32) comprises a swing rod 1 (321), a rotating rod (322), a swing rod 2 (323), a linkage rod (324) and a swing rod 3 (325) which are connected in sequence, one end of the swing rod 1 (321) being hinged to the telescopic shaft, the other end of the swing rod 1 (321) being fixedly connected to the rotating rod (322), the rotating rod (322) passing through the tank body (1), one end of the swing rod 2 (323) being fixedly connected to a portion of the rotating rod (322) located in the cleaning tank, and the other end being hinged to an end of the linkage rod (324), the other end of the linkage rod (324) being hinged to one end of the swing rod 3 (325), and the other end of the swing rod 3 (325) being fixedly connected to the rotating rod (33).
9. The cleaning tank according to claim 8, characterized in that: The second swing rod (323) is arranged in parallel with the first swing rod (321).
Citation Information
Patent Citations
Cleaning system for photovoltaic silicon wafer
CN116259564A