Manual clamping device for glass substrate

Abstract

The utility model discloses a glass substrate manual clamping device which comprises a device body, the device body comprises a bottom support and is provided with a holding handle, and one end of the holding handle is rigidly connected with a bottom plate making contact with a glass substrate; the clamping part comprises a first clamping piece and a second clamping piece, and the first clamping piece is arranged on the contact surface of the bottom plate and the glass substrate; the at least two second clamping pieces are arranged on the second clamping piece connecting piece in a sleeving manner; the connecting part is fixed with the bottom support and comprises a plane connecting rod mechanism and a guide rod capable of axially displacing, and the plane connecting rod mechanism is respectively connected with the guide rod and the second clamping piece connecting piece; the free end of the guide rod is sleeved with a compression spring, and under the elastic action of the compression spring, the guide rod axially moves to push the plane connecting rod mechanism to move and drive the second clamping piece to rotate with the second clamping piece connecting piece as the axis so that the second clamping piece can be opened and closed relative to the first clamping piece. According to the utility model, the cost is reduced, and the safety and the operation efficiency are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging, in particular to a manual glass substrate clamping device. Background Art

[0002] Glass substrates can provide an extremely flat surface due to their ultra-low flatness, which is very beneficial for improving the depth of focus during the photolithography process. In addition, they allow more through holes to be arranged in the same area, and the spacing between these through holes can be less than 100 microns, which is conducive to improving the integration and performance of the chip. Therefore, glass substrates are widely used in the field of semiconductor packaging.

[0003] During the production and processing of glass substrates, they need to be transported between different processes, which usually requires the use of specific equipment. In addition, the surface of the glass substrate is often coated with photoresist, which has a certain impact on the environment and human health. Therefore, special care is required during the operation to avoid contamination of the photoresist.

[0004] In the prior art, the transportation of glass substrates is usually carried out using automated equipment. These devices can efficiently and accurately complete the transportation of glass substrates, greatly improving production efficiency and reducing errors caused by manual operation. However, these devices are usually expensive and have relatively high maintenance costs. Therefore, for some small enterprises or laboratories, the cost of automated glass substrate gripping and transporting devices is too high and they cannot afford it. In this case, the glass substrates are often transported by manual means. However, the existing manual gripping of glass substrates has the following shortcomings:

[0005] 1. Poor product quality: Manually clamping the glass substrate can easily cause damage to the glass substrate, such as scratches and cracks.

[0006] 2. Low safety: Since the surface of the glass substrate is coated with photoresist, when the operator touches it directly with his hands, it may affect the operator's health and may also cause contamination to the glass substrate.

[0007] 3. Low operating efficiency: The efficiency of manual clamping is too low, which seriously affects production efficiency. Utility Model Content

[0008] In order to solve the above technical problems, the utility model provides a manual glass substrate clamping device, including a device body, the device body comprising:

[0009] The bottom support has a gripping handle, one end of which is rigidly connected to a bottom plate in contact with the glass substrate;

[0010] The clamping part includes a first clamping member and a second clamping member. Among them, the first clamping member is arranged on the contact surface between the bottom plate and the glass substrate; there are at least two second clamping members, and all of them are sleeved on the second clamping member connecting piece; and

[0011] The connecting part fixed to the bottom support includes a planar link mechanism and a guiding rod that can axially displace. Among them, the planar link mechanism is respectively connected to the guiding rod and the second clamping member connecting piece; a compression spring is sleeved on the free end of the guiding rod. Under the elastic force of the compression spring, the guiding rod axially displaces to push the planar link mechanism to move and drive the second clamping member to rotate around the second clamping member connecting piece, so that the second clamping member opens and closes relative to the first clamping member.

[0012] Furthermore, the connecting part is vertically fixed to the bottom support. The connecting part also includes a linear bearing. The linear bearing is fixedly contacted with the bottom support through a bearing fixing piece, and the guiding rod is arranged on the side of the bottom support背离 the linear bearing.

[0013] Furthermore, the planar link mechanism includes a first connecting rod, a second connecting rod, and a third connecting rod that are sequentially connected. The free end of the third connecting rod is connected to the second clamping member connecting piece.

[0014] Furthermore, the first connecting rod is fixedly threaded to the guiding rod, and the third connecting rod is fixedly connected to the second clamping member connecting piece.

[0015] Furthermore, the second clamping member connecting piece is of a smooth shaft structure.

[0016] Furthermore, the second clamping member is of a '丿'-shaped structure, and the free end of the second clamping member contacts the surface of the glass substrate to fix the glass substrate.

[0017] Furthermore, substrate limiting members are spacedly arranged at the edge of the bottom plate close to the holding handle to limit the horizontal clamping depth of the glass substrate.

[0018] Furthermore, the substrate limiting member is made of a soft material.

[0019] Furthermore, the first clamping member is made of a soft material.

[0020] Preferably, the surface of the holding handle is wrapped with a protective sleeve.

[0021] Compared with the prior art, the present utility model has the following beneficial effects:

[0022] 1. The present utility model does not need to use expensive automation equipment, greatly reducing the equipment investment and maintenance costs of enterprises, so that more small enterprises and laboratories can afford it.

[0023] 2. Compared with directly touching the glass substrate with hands, the clamping device provided by the utility model can effectively prevent the operator's hands from directly contacting the photoresist on the glass substrate, thereby avoiding the impact of the photoresist on the operator's health and reducing the risk of contamination of the glass substrate.

[0024] 3. Operators can adjust the operating force more flexibly, avoiding damage to the glass substrate caused by automated equipment during operation, thereby improving product quality.

[0025] 4. The utility model has a simple structure and is easy to operate, which greatly improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure disclosed in the embodiment of the utility model;

[0027] Figure 2 This is a schematic diagram of the usage status disclosed in the embodiment of the utility model.

[0028] In the figure:

[0029] 00. Device body;

[0030] 10. Bottom support; 11. Grip handle; 110. Protective cover; 12. Bottom plate;

[0031] 20. Clamping part; 21. First clamping member; 22. Second clamping member; 220. Second clamping member connecting member; 23. Base plate limiting member;

[0032] 30. Connecting part; 31. Planar connecting rod mechanism; 310. First connecting rod; 311. Second connecting rod; 312. Third connecting rod; 32. Guide rod; 320. Compression spring; 33. Linear bearing; 330. Bearing fixing member. DETAILED DESCRIPTION

[0033] In order to make the technical scheme and technical effect of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments.

[0034] The utility model aims to provide a manual glass substrate clamping device, referring to Figure 1 The manual clamping device includes a device body 00, and the device body 00 includes a base 10, a clamping portion 20 and a connecting portion 30. Specifically:

[0035] Regarding the base 10: The base 10 has a gripping handle 11, and one end of the gripping handle 11 is rigidly connected to a bottom plate 12 that contacts the glass substrate. Preferably, the surface of the gripping handle 11 is wrapped with a protective sleeve 110 for protecting the operator's hand. In the design of the device, considering that it is manually operated, a lightweight design is required while taking into account the mechanical strength of the base 10. Therefore, the gripping handle 11 and the bottom plate 12 can be designed using AL6061; the protective sleeve 110 is made of a soft material, such as rubber, for protecting the hand and facilitating gripping.

[0036] Regarding the clamping part 20: The clamping part 20 includes a first clamping member 21, a second clamping member 22, and a substrate limiting member 23. Among them, the first clamping member 21 is arranged on the contact surface between the bottom plate 12 and the glass substrate; the second clamping member 22 is sleeved on the second clamping member connecting member 220 and there are multiple. Preferably, the first clamping member 21 is made of a soft material, such as rubber. On the one hand, it can increase the friction with the glass substrate to prevent the glass substrate from slipping during the clamping and handling process. On the other hand, it can protect the glass substrate and prevent damage to the glass substrate when clamping it. The second clamping member connecting member 220 is a optical axis structure fixed on the base 10 and can perform rotational movement. The second clamping member 22 has a '丿'-shaped structure, and the free end of the second clamping member 22 contacts the surface of the glass substrate to limit the glass substrate. Substrate limiting members 23 are arranged at intervals on the edge of the bottom plate 12 close to the gripping handle 11. Preferably, the substrate limiting members 23 are made of a soft material, such as rubber, for limiting the glass substrate in the horizontal direction, fixing the clamping depth of the glass substrate, and preventing the upper surface of the glass substrate from being contaminated by the photoresist due to too deep clamping.

[0037] About the connecting part 30: The connecting part 30 is vertically fixed to the base 10, and the connecting part 30 includes a planar connecting rod mechanism 31, a guide rod 32 and a linear bearing 33. The planar connecting rod mechanism 31 is connected to the guide rod 32 and the second clamping member connecting member 220 respectively. Among them, the planar connecting rod mechanism 31 includes a first connecting rod 310, a second connecting rod 311 and a third connecting rod 312 connected in sequence, and the free end of the third connecting rod 312 is connected to the second clamping member connecting member 220. The first connecting rod 310 is threadedly fixed to the guide rod 32, and the third connecting rod 312 is connected and fixed to the second clamping member connecting member 220. The free end of the guide rod 32 is sleeved with a compression spring 320. The linear bearing 33 is contacted and fixed with the base 10 through a bearing fixing member 330, and a guide rod 32 is provided on the side of the base 10 away from the linear bearing 33. The guide rod 32 can be displaced axially along the linear bearing 33. Under the elastic force of the compression spring 320, the guide rod 32 is axially displaced to push the planar linkage mechanism 31 to move and drive the second clamping member 22 to rotate about the second clamping member connecting member 220 as the axis so that the second clamping member 22 is opened and closed relative to the first clamping member 21. When clamping the glass substrate, the compression spring 320 is in a natural state; when the glass substrate needs to be released, the guide rod 32 is pressed, and the compression spring 320 is compressed, so that the guide rod 32 can move upward in the vertical direction along the linear bearing 33, thereby pushing the planar linkage mechanism 31 composed of the first connecting rod 310, the second connecting rod 311 and the third connecting rod 312 to move, and driving the second clamping member 22 to rotate about the second clamping member connecting member 220 as the axis to release the glass substrate.

[0038] When using, refer to Figure 2 , it is necessary to use two sets of manual glass substrate clamping devices provided by the utility model, hold the gripping handle 11 with one hand, and when it is necessary to clamp the glass substrate, press the guide rods 32 of the two sets of clamping devices with the left and right hands respectively, so that the second clamping member 22 rotates with the second clamping member connecting member 220 as the axis, so that a gap is generated between the first clamping member 21 and the second clamping member 22, so that the glass substrate can be clamped in from the opposite ends of the glass substrate respectively, and the two ends of the glass substrate are horizontally limited by the substrate limiting member 23 to prevent the clamping from being too deep and contaminating the photoresist on the upper surface of the glass substrate. After clamping, release the guide rod 32, and the guide rod 32 will return to its original position under the action of the rebound force of the compression spring 320, so that the second clamping member 22 rotates in the opposite direction with the second clamping member connecting member 220 as the axis, so that the second clamping member 22 clamps the glass substrate, and the glass substrate will be clamped between the first clamping member 21 and the second clamping member 22 under the action of friction and will not slip off. When the glass substrate needs to be released, the guide rods 32 of the two sets of clamping devices are pressed again to rotate the second clamping member 22 around the second clamping member connecting member 220, so that a gap is generated between the first clamping member 21 and the second clamping member 22, and the manual clamping device for the glass substrate is pulled out, so that the glass substrate can be released and placed at a specified position.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A manual glass substrate clamping device, comprising a device body (00), characterized in that: The device body (00) includes: A base (10) having a holding handle (11), one end of the holding handle (11) being rigidly connected to a bottom plate (12) that contacts the glass substrate; A clamping part (20) including a first clamping member (21) and a second clamping member (22). Among them, the first clamping member (21) is disposed on the contact surface between the bottom plate (12) and the glass substrate; at least two second clamping members (22) are provided and are all sleeved on a second clamping member connecting member (220); and A connecting part (30) fixed to the base (10), including a planar link mechanism (31) and a guiding rod (32) that can axially displace. Among them, the planar link mechanism (31) is respectively connected to the guiding rod (32) and the second clamping member connecting member (220); a compression spring (320) is sleeved on the free end of the guiding rod (32), and under the elastic force of the compression spring (320), the guiding rod (32) axially displaces to push the planar link mechanism (31) to move and drive the second clamping member (22) to rotate around the second clamping member connecting member (220) so that the second clamping member (22) opens and closes relative to the first clamping member (21).

2. The manual glass substrate clamping device according to claim 1, characterized in that: The connecting part (30) is perpendicularly fixed to the base (10). The connecting part (30) further includes a linear bearing (33), and the linear bearing (33) is fixedly contacted with the base (10) through a bearing fixing member (330). The guiding rod (32) is disposed on a side of the base (10) away from the linear bearing (33).

3. The manual glass substrate clamping device according to claim 1, characterized in that: The planar link mechanism (31) includes a first connecting rod (310), a second connecting rod (311), and a third connecting rod (312) that are sequentially connected. The free end of the third connecting rod (312) is connected to the second clamping member connecting member (220).

4. The manual glass substrate clamping device according to claim 3, characterized in that: The first connecting rod (310) is threadedly fixed to the guiding rod (32), and the third connecting rod (312) is fixedly connected to the second clamping member connecting member (220).

5. The manual glass substrate clamping device according to claim 1, characterized in that: The second clamping member connecting member (220) has an optical axis structure.

6. The manual glass substrate clamping device according to claim 1, characterized in that: The second clamping member (22) has a shape like a reverse L, and the free end of the second clamping member (22) contacts the surface of the glass substrate to fix the glass substrate.

7. The manual glass substrate clamping device according to claim 1, characterized in that: Substrate limiting members (23) are spaced at the edge of the bottom plate (12) near the holding handle (11) to limit the clamping depth of the glass substrate on the horizontal surface.

8. The manual glass substrate clamping device according to claim 7, characterized in that: The substrate limiting members (23) are made of soft materials.

9. The manual glass substrate clamping device according to claim 1, characterized in that: The first clamping member (21) is made of soft materials.

10. The manual glass substrate clamping device according to claim 1, characterized in that: The surface of the holding handle (11) is wrapped with a protective sleeve (110).

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