Vertical coating machine substrate fixing device and vertical coating machine substrate fixing assembly
By designing a substrate fixing device for a vertical coating machine, using the combination of rotation and linear motion, the problems of long operating time and high temperature deformation of the substrate in the prior art are solved, and the effect of rapid fixing and reducing the risk of crushing is achieved. .
Patent Information
- Application Number
- CN202421205196.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-29
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-05-29
AI Technical Summary
The prior art has a long operating time to fix the substrate on the substrate rack during the coating process, and the substrate is prone to deform under high temperature conditions, increasing the risk of crushing.
A vertical coating machine substrate fixing device is designed, including a bracket, a pressing cylinder, a first coil spring, a cylinder, a rotary guide slider and a pressing bar. The rapid fixing and release of the substrate is achieved through the combination of rotation and linear motion.
The operating time of fixing the substrate to the substrate holder is significantly reduced, working efficiency is improved, labor costs are reduced, and the risk of substrate deformation and crushing is reduced by flexible striping.
Smart Images
Figure CN222499348U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of film coating, and more specifically to a substrate fixing device and a substrate fixing assembly of a vertical film coating machine. Background Art
[0002] Magnetron sputtering is an extremely important coating method in the manufacturing process of photovoltaic, display panel, and electrochromic devices. Magnetron sputtering coating can be divided into vertical magnetron sputtering machines and horizontal magnetron sputtering machines based on the method of wafer feeding. Vertical magnetron sputtering machines refer to machines in which the cathode chamber is at an angle of 3-10° to the ground. The substrate entering the coating chamber is parallel to the cathode target material, which means that the substrate entering the chamber is at an angle of 3-10° to the ground. To ensure that the substrate can enter the coating chamber, a substrate rack is required. The substrate rack is used to support substrates (such as glass). However, due to the aforementioned certain angle of the substrate during transportation in the magnetron sputtering machine over several tens of meters, in order to help secure the substrate on the substrate rack, vertical coating machine substrate fixing devices are often added around the substrate rack to fix the substrate.
[0003] Figure 1 It is a schematic diagram of a substrate fixing assembly of a vertical coating machine in the prior art. Figure 2 yes Figure 1 An enlarged view of the dotted frame portion.
[0004] like Figure 1 and Figure 2 As shown, the conventional vertical coating machine substrate fixing assembly 1000' includes a vertical coating machine substrate fixing device 100' and a substrate rack 200'. The vertical coating machine substrate fixing device 100' includes a steel sheet P and screws S. The steel sheet P is locked around the substrate 2000 on the substrate rack 200' with the screws S.
[0005] In actual production, after the robotic arm places the substrate 2000 onto the substrate rack 200', steel sheets P must be manually fastened around the substrate 2000 on the rack 200' to hold it in place. Assuming it takes 10-20 seconds to manually tighten each screw S, at least four steel sheets P are required around each substrate 2000. Tightening these four sheets takes 40-80 seconds. If a vertical coating machine substrate fixture 100' is added in the middle of each of the four sides of a substrate 2000, tightening all eight sheets P takes 80-160 seconds.
[0006] In addition, with the requirements for film layer properties in photovoltaic, display panel, electrochromic and other devices, the process temperature must reach above 250°C. The substrate 2000 fixed on the substrate frame 200' will be affected by the heat and deformed, and the maximum deformation can reach 5mm. This results in rigid pressing contact between the rigid steel sheet P and the substrate 2000, which greatly increases the risk of breakage when the substrate 2000 is made of brittle material (such as glass). Utility Model Content
[0007] In view of the problems existing in the background technology, an object of the present disclosure is to provide a vertical coating machine substrate fixing device and a vertical coating machine substrate fixing assembly, which can significantly reduce the operation time of fixing the substrate on the substrate rack, thereby improving work efficiency and reducing labor costs.
[0008] Thus, a vertical coating machine substrate fixing device is provided, which includes a bracket, a pressing cylinder, a first coil spring, a cylinder, a rotation guide slider, and a pressure strip; the bracket is used to be installed on the substrate rack, the bracket has a top wall, a bottom wall, at least two opposite side walls, a receiving cavity, and a rotation space, the top wall is provided with a top opening that passes through in the up and down directions, the bottom wall is provided with a bottom opening that passes through in the up and down directions, the side walls are connected between the top wall and the bottom wall, the receiving cavity is surrounded by the top wall, the bottom wall and the side walls, and the rotation space is located below the bottom wall; the bottom end of the pressing cylinder is open, and the pressing cylinder is inserted into the receiving cavity of the bracket through the top opening of the top wall; the cylinder is inserted into the pressing cylinder from the bottom end of the pressing cylinder and passes downward through the bottom opening of the bottom wall of the bracket, and the outer circumferential surface of the part of the cylinder inserted into the pressing cylinder is provided with a rotation guide groove that extends spirally in the up and down directions; the first coil spring is arranged on the pressing cylinder The top end of the first coil spring is fixedly pressed against the inner top surface of the pressing cylinder, and the bottom end of the first coil spring is pressed against the top surface of the cylinder; the rotation guide slider is fixedly arranged on the pressing cylinder and inserted into the rotation guide groove; the pressure bar is fixedly connected to the lower end of the cylinder and is located in the rotation space below the bottom wall, and the height of the rotation space and the spiral length of the rotation guide groove are set to meet the requirements that when the pressing cylinder is pressed downward by force applied thereto, the rotation guide slider is driven by the first coil spring to push the cylinder together with the pressure bar to rotate and move downward linearly so that it can contact and press the substrate on the substrate rack; the first coil spring is used to fix the rotation guide slider in the rotation guide groove through the elastic restoring force when the pressure bar contacts and presses the substrate on the substrate rack while rotating and moving linearly downward, so as to keep the pressure bar pressed against the substrate on the substrate rack.
[0009] A substrate fixing assembly for a vertical coating machine includes a substrate rack and the aforementioned substrate fixing device for the vertical coating machine.
[0010] The beneficial effects of the present disclosure are as follows: compared with the background technology of fixing with steel sheets and screws, in the vertical coating machine substrate fixing device and the vertical coating machine substrate fixing assembly disclosed in the present disclosure, the operator only needs to press the pressing cylinder into place, which can significantly reduce the operation time of fixing the substrate on the substrate rack, thereby improving work efficiency and reducing labor costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 It is a schematic diagram of a substrate fixing assembly of a vertical coating machine in the prior art.
[0012] Figure 2 yes Figure 1 An enlarged view of the dotted frame portion.
[0013] Figure 3 It is a schematic diagram of the substrate fixing assembly of the vertical coating machine according to the present disclosure, wherein the pressure bar is in a state of moving downward and pressing against the substrate after rotating.
[0014] Figure 4 yes Figure 3 Partial view of the substrate holding assembly of a vertical coater.
[0015] Figure 5 yes Figure 4 Front view of the substrate fixing assembly of the vertical coating machine.
[0016] Figure 6 yes Figure 5 A cross-sectional view of the embodiment, wherein the substrate frame is not shown.
[0017] The description of the accompanying drawings is as follows:
[0018] 1000' vertical coating machine substrate fixing assembly 2 pressing cylinder
[0019] 100' vertical coating machine substrate fixing device 21 upper and lower linear guide groove
[0020] P steel sheet 3 first coil spring
[0021] S screw 4 cylinder
[0022] 200' substrate rack 41 rotation guide groove
[0023] 1000 vertical coating machine substrate fixing assembly 5 rotating guide slider
[0024] D 6 strips in the up and down directions
[0025] 100 Vertical Coating Machine Substrate Fixing Device 61 Fixing Bar
[0026] 1 bracket 62 movable bars
[0027] 11 top wall 63 second coil spring
[0028] 111 top opening 7 upper and lower linear guide sliders
[0029] 12 bottom wall 8 sliding pin
[0030] 121 bottom opening 9 stopper
[0031] 13 side wall 200 substrate rack
[0032] 14 Accommodating cavity 200a sliding groove
[0033] 15 Rotation space 200b accommodating groove
[0034] 2000 substrate DETAILED DESCRIPTION
[0035] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, which can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one of ordinary skill in the art to implement the present disclosure in various ways.
[0036] In the description of the present disclosure, unless otherwise specified, the terms “first”, “second”, etc. are only used for the purpose of description and component identification, and should not be understood as relative importance or mutual relationship.
[0037] [Vertical coating machine substrate fixing device]
[0038] Reference Figures 3 to 6 According to the present disclosure, the substrate fixing device 100 of the vertical coating machine includes a bracket 1, a pressing cylinder 2, a first coil spring 3, a cylinder 4, a rotating guide slider 5, and a pressure bar 6.
[0039] Bracket 1 is mounted on substrate holder 200 and comprises a top wall 11, a bottom wall 12, at least two opposing side walls 13, a receiving cavity 14, and a rotational space 15. Top wall 11 is provided with a top opening 111 extending therethrough in the vertical direction D, while bottom wall 12 is provided with a bottom opening 121 extending therethrough in the vertical direction D. Side walls 13 are connected between top and bottom walls 11, 12. Receiving cavity 14 is enclosed by top, bottom, and side walls 13, with rotational space 15 located below bottom wall 12. The bottom end of pressing cylinder 2 is open and inserted into receiving cavity 14 of bracket 1 through top opening 111 of top wall 11. Cylinder 4 is inserted into pressing cylinder 2 from its bottom end and downwardly passes through bottom opening 121 of bottom wall 12 of bracket 1. The outer circumferential surface of the portion of cylinder 4 inserted into pressing cylinder 2 is provided with a rotation guide groove 41 extending helically in the vertical direction D. The first coil spring 3 is arranged in the pressing cylinder 2, and the top end of the first coil spring 3 is fixedly pressed against the inner top surface of the pressing cylinder 2, and the bottom end of the first coil spring 3 is pressed against the top surface of the cylinder 4. The rotation guide slider 5 is fixedly arranged in the pressing cylinder 2 and inserted into the rotation guide groove 41. The pressure strip 6 is fixedly connected to the lower end of the cylinder 4 and is located in the rotation space 15 below the bottom wall 12. The height of the rotation space 15 and the spiral length of the rotation guide groove 41 are set to meet the requirements that when the pressing cylinder 2 is pressed downward by the force applied thereto, the first coil spring 3 drives the rotation guide slider 5 to push the cylinder 4 and the pressure strip 6 to rotate along the rotation guide groove 41 of the cylinder 4 while moving linearly downward to contact and press against the substrate 2000 on the substrate rack 200. The first coil spring 3 is used to fix the rotary guide slider 5 in the rotary guide groove 41 through elastic restoring force when the pressure bar 6 that rotates and moves linearly downward contacts and presses against the substrate 2000 on the substrate rack 200 and the force applied to the pressing cylinder 2 is released to keep the pressure bar 6 pressed against the substrate 2000 on the substrate rack 200.
[0040] When the pressing cylinder 2 is fixed on the substrate 2000, the pressing cylinder 2 is pressed downward by the operator, and the pressing cylinder 2 is driven by the first coil spring 3 to drive the rotating guide slider 5 along the rotating guide groove 41 of the cylinder 4 to push the cylinder 4 and the pressure bar 6 to rotate and move downward linearly. The pressure bar 6 rotates and moves downward linearly in the rotating space 15, and the downward linear movement of the pressure bar 6 approaches the substrate 2000. At the same time, the rotating pressure bar 6 can make the pressure bar 6 move from a position that does not overlap with the edge of the substrate 2000 to a position that overlaps with the edge of the substrate 2000 above. When the pressure bar 6 that rotates and moves downward linearly contacts and presses against the substrate 2000 on the substrate rack 200 and the operator releases the force applied to the pressing cylinder 2, the elastic restoring force of the first coil spring 3 makes the rotating guide slider 5 fixed in the rotating guide groove 41 to keep the pressure bar 6 pressed against the substrate 2000 on the substrate rack 200, thus completing the fixing operation of the substrate 2000 on the substrate rack 200.
[0041] When the substrate 2000 on the substrate rack 200 needs to be released (for example, coating is completed), the operator applies an upward pulling force to the pressing cylinder 2 to perform the opposite operation to the above. The pressing bar 6 is lifted linearly and rotated back into the rotation space 15.
[0042] Compared to the prior art method of fixing with steel sheets and screws, the disclosed vertical coating machine substrate fixing device 100 only requires the operator to press down the pressing cylinder 2 until it is in place. This significantly reduces the time required to secure the substrate 2000 to the substrate rack 200, thereby improving work efficiency and reducing labor costs. Similarly, when the fixation needs to be canceled, the operator only needs to pull up the pressing cylinder 2 to return it to its original position. This significantly reduces the time required to release the substrate 2000, thereby improving work efficiency and reducing labor costs.
[0043] In one example, the projection of the rotation guide groove 41 in the vertical direction D forms a groove rotated 90 degrees. In other words, the initial posture of the holding bar 6 is orthogonal to the posture of the holding bar 6 pressing against the substrate 2000 on the substrate holder 200. The cylinder 4 can be solid or hollow. When the cylinder 4 is hollow, the rotation guide groove 41 can radially penetrate the wall of the hollow cylinder 4.
[0044] Reference Figure 6 In one example, the pressure bar 6 has a fixing bar 61. The fixing bar 61 is connected to the lower end of the cylinder 4; the fixing bar 61 is used to contact and press against the substrate 2000 on the substrate rack 200. In an alternative example, referring to Figure 6 The holding bar 6 further includes a movable bar 62 and a plurality of second coil springs 63. The movable bar 62 is located below the fixed bar 61. The upper ends of the plurality of second coil springs 63 are fixedly connected to the fixed bar 61, and the lower ends of the plurality of second coil springs 63 are fixedly connected to the movable bar 62. The movable bar 62 is configured to contact and press against the substrate 2000 on the substrate holder 200. The provision of the plurality of second coil springs 63 ensures that, even if the holding bar 6 is made of a rigid material, the pressing contact between the holding bar 6 and the substrate 2000 is flexible, significantly reducing the risk of breakage when the substrate 2000 is made of a brittle material (such as glass).
[0045] like Figure 3 and Figure 4 As shown, in one example, the lengths of the fixed bar 61 and the movable bar 62 are set to be able to press against the two substrates 2000 on the substrate rack 200 at both ends, so as to improve work efficiency.
[0046] like Figures 3 to 5As shown, in one example, the pressing cylinder 2 has upper and lower linear guide grooves 21 extending in the up-down direction D and radially penetrating the pressing cylinder 2. The vertical coating machine substrate fixing device 100 further includes upper and lower linear guide sliders 7, which are disposed on the top wall 11 of the bracket 1 and inserted into the upper and lower linear guide grooves 21. The upper and lower linear guide grooves 21 improve the stability of the pressing cylinder 2 being pressed downwardly and the downward linear movement of the rotating guide slider 5, the cylinder 4, and the holding bar 6.
[0047] Specifically, in one example, there are two upper and lower linear guide grooves 21, dividing the circumference of the pressing cylinder 2 into 180-degree equal parts, and there are two upper and lower linear guide sliders 7, each corresponding to the two upper and lower linear guide grooves 21. In the example shown in the figure, there are four upper and lower linear guide grooves 21, dividing the circumference of the pressing cylinder 2 into 90-degree equal parts, and there are four upper and lower linear guide sliders 7, each corresponding to the four upper and lower linear guide grooves 21. The number of upper and lower linear guide grooves 21 is not limited to two or four, and can be three or more.
[0048] [Vertical coating machine substrate fixing assembly]
[0049] Reference Figures 3 to 6 According to the present disclosure, the substrate fixing assembly 1000 of the vertical coating machine includes the aforementioned vertical coating machine substrate fixing device 100 and the substrate rack 200 .
[0050] The structure, operation and effect of the aforementioned vertical coating machine substrate fixing device 100 will not be repeated here.
[0051] like Figure 3 and Figure 4 As shown, in one example, the substrate rack 200 is provided with a sliding groove 200a and a receiving groove 200b, wherein the receiving groove 200b is located below the sliding groove 200a and is in communication with the sliding groove 200a. The substrate fixing assembly 1000 of the vertical coating machine further includes two sliding pins 8 and two stoppers 9. The two sliding pins 8 are mounted on opposite sides of the rotation space 15 of the bracket 1. The two sliding pins 8 are inserted into the sliding groove 200a and can slide along the sliding groove 200a of the substrate rack 200; the two stoppers 9 are respectively fixedly connected to the bottom ends of the two sliding pins 8. The two stoppers 9 are located in the receiving groove 200b and are used to prevent the two sliding pins 8 from slipping upward out of the two sliding grooves 200a.
[0052] The above detailed description is used to describe a number of exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein may be combined to form multiple additional combinations that are not shown for the sake of brevity.
Claims
1. A substrate fixing device for a vertical coating machine, characterized in that: A substrate fixing device (100) for a vertical coating machine comprises a bracket (1), a pressing cylinder (2), a first coil spring (3), a cylinder (4), a rotating guide slider (5), and a pressure strip (6); The bracket (1) is used for being installed on a substrate rack (200), and the bracket (1) comprises a top wall (11), a bottom wall (12), at least two opposite side walls (13), a receiving cavity (14), and a rotation space (15); the top wall (11) is provided with a top opening (111) penetrating along the up-down direction (D); the bottom wall (12) is provided with a bottom opening (121) penetrating along the up-down direction (D); the side wall (13) is connected between the top wall (11) and the bottom wall (12); the receiving cavity (14) is surrounded by the top wall (11), the bottom wall (12) and the side wall (13); and the rotation space (15) is located below the bottom wall (12); The bottom end of the pressing cylinder (2) is open, and the pressing cylinder (2) is inserted into the receiving cavity (14) of the bracket (1) through the top opening (111) of the top wall (11); The cylindrical body (4) is inserted into the pressing cylinder (2) from the bottom end of the pressing cylinder (2) and passes downward through the bottom opening (121) of the bottom wall (12) of the bracket (1), and the outer peripheral surface of the portion of the cylindrical body (4) inserted into the pressing cylinder (2) is provided with a rotation guide groove (41) extending spirally in the up-down direction (D); The first coil spring (3) is arranged in the pressing cylinder (2), the top end of the first coil spring (3) is fixedly pressed against the inner top surface of the pressing cylinder (2), and the bottom end of the first coil spring (3) is pressed against the top surface of the cylinder (4); The rotary guide slider (5) is fixedly arranged on the pressing cylinder (2) and inserted into the rotary guide groove (41); The pressure strip (6) is fixedly connected to the lower end of the cylinder (4) and is located in a rotation space (15) below the bottom wall (12). The height of the rotation space (15) and the spiral length of the rotation guide groove (41) are set to meet the requirements that when the pressing cylinder (2) is pressed downward, the first spiral spring (3) drives the rotation guide slider (5) along the rotation guide groove (41) of the cylinder (4) to push the cylinder (4) and the pressure strip (6) to rotate and move linearly downward at the same time, so that they can contact and press against the substrate (2000) on the substrate frame (200); The first coil spring (3) is used to fix the rotary guide slider (5) in the rotary guide groove (41) through elastic restoring force to keep the pressing bar (6) pressed against the substrate (2000) on the substrate frame (200) when the pressing bar (6) that rotates and moves linearly downward contacts and presses against the substrate (2000) on the substrate frame (200) and after the force applied to the pressing cylinder (2) is released.
2. The substrate fixing device of the vertical coating machine according to claim 1 is characterized in that: The projection of the rotation guide groove (41) in the up-down direction (D) forms a groove rotated by 90 degrees.
3. The substrate fixing device of the vertical coating machine according to claim 1 is characterized in that: The pressure strip (6) has a fixing strip (61); The fixing strip (61) is connected to the lower end of the cylinder (4); The fixing bar (61) is used to contact and press against the substrate (2000) on the substrate rack (200).
4. The substrate fixing device of the vertical coating machine according to claim 3 is characterized in that: The pressure strip (6) also has a movable strip (62) and a plurality of second coil springs (63); The movable bar (62) is located below the fixed bar (61); The upper ends of the plurality of second coil springs (63) are fixedly connected to the fixed bar (61), and the lower ends of the plurality of second coil springs (63) are fixedly connected to the movable bar (62), and the movable bar (62) is used to contact and press against the substrate (2000) on the substrate frame (200).
5. The substrate fixing device of the vertical coating machine according to claim 4 is characterized in that: The lengths of the fixed bar (61) and the movable bar (62) are set so as to be able to press against two substrates (2000) on the substrate frame (200) at both ends.
6. The substrate fixing device of the vertical coating machine according to claim 1, characterized in that: The pressing cylinder (2) has upper and lower linear guide grooves (21) extending in the upper and lower directions (D) and penetrating the pressing cylinder (2) in the radial direction; The vertical coating machine substrate fixing device (100) also includes upper and lower linear guide sliders (7), which are arranged on the top wall (11) of the bracket (1) and inserted into the upper and lower linear guide grooves (21).
7. The substrate fixing device of the vertical coating machine according to claim 6, characterized in that: There are two upper and lower linear guide grooves (21), which divide the circumference of the pressing cylinder (2) into 180 degrees; There are two upper and lower linear guide slide blocks (7) which correspond to the two upper and lower linear guide grooves (21) respectively.
8. The substrate fixing device of the vertical coating machine according to claim 6, characterized in that: There are four upper and lower linear guide grooves (21), which divide the circumference of the pressing cylinder (2) into 90 degrees; There are four upper and lower linear guide slide blocks (7) which correspond to the four upper and lower linear guide grooves (21) respectively.
9. A substrate fixing assembly for a vertical coating machine, comprising a substrate rack (200); It is characterized in that It also includes the vertical coating machine substrate fixing device (100) as described in any one of claims 1-8.
10. The substrate fixing assembly of the vertical coating machine according to claim 9, characterized in that: The substrate frame (200) is provided with a sliding groove (200a) and a receiving groove (200b), wherein the receiving groove (200b) is located below the sliding groove (200a) and is in communication with the sliding groove (200a); The vertical coating machine substrate fixing assembly (1000) further comprises two sliding pins (8) and two stoppers (9), wherein the two sliding pins (8) are mounted on opposite sides of the rotation space (15) of the bracket (1), and the two sliding pins (8) are inserted into the sliding groove (200a) and are capable of sliding along the sliding groove (200a) of the substrate rack (200); The two stoppers (9) are respectively fixedly connected to the bottom ends of the two sliding pins (8). The two stoppers (9) are located in the accommodating grooves (200b). The two stoppers (9) are used to prevent the two sliding pins (8) from escaping upward from the two sliding grooves (200a).