Auxiliary correction tool for testing head pressing mechanism of chip testing machine

Abstract

The utility model discloses an auxiliary correction tool of a chip testing machine testing head pressing mechanism, the auxiliary correction tool comprises a substrate, a plurality of positioning holes and a plurality of convex parts, the substrate is provided with a first surface and a second surface which are opposite in position, the positioning holes are distributed on the first surface and are adjacent to the edge position, and the convex parts are arranged on the second surface and protrude out of the surface. The purpose of correcting and adjusting the action position of the testing head pressing mechanism can be achieved through the positioning hole of the auxiliary correction tool and the matched positioning pin.

Description

Technical Field

[0001] The utility model relates to the technical field of an auxiliary correction tool, in particular to an auxiliary correction tool for a pressing mechanism of a test head of a chip tester. Background Art

[0002] Before the chip is officially shipped, it will undergo relevant electrical tests in a chip tester, where the test head is responsible for moving and pressing the chip. Figure 1 As shown, the test head structure can be divided into a pressing mechanism 1 and a test accessory 2 from top to bottom. The pressing mechanism 1 is responsible for driving some components of the test accessory 2 to descend in order to perform electrical testing on the chip. The test accessory 2 is a relative structure according to different test requirements. In this embodiment, the test accessory 2 includes a pressure head 22 and a test seat 23. The pressure head 22 is used to adsorb the chip 3, and then the chip 3 is placed on the test seat 23 for electrical connection and testing. The pressing mechanism 1 includes a first action module 11 and its support member 12, a second action module 13 and its base 14. The first action module 11 is responsible for driving the support member 12 to descend, and the horizontal position of the support member 12 can be corrected and adjusted. The second action module 13 is responsible for driving the base 14 to descend, and the horizontal position of the base 14 can also be corrected and adjusted. In this embodiment, the base 14 is a temperature control module that can produce appropriate high and low temperatures. When the pressing mechanism 1 is in operation, the first action module 11 and the support member 12 drive the pressure head 22 to descend, and the second action module 13 drives the base 14 of the temperature control module to descend a short distance, and the temperature control module of the base 14 provides an appropriate temperature to simulate the high temperature generated during the actual chip operation and perform the test; however, after long-term operation, or when other emergencies occur, it is easy to cause the relative position of the support member 12 of the first action module 11 and the base 14 of the second action module 13 to shift, and eventually cause the central axis 221 of the pressure head 22 to deviate from the central axis 231 of the test seat 23. In this way, during the pressing process of the pressure head 22 to perform chip testing, the positioning column of the pressure head 22 and the positioning hole of the test seat 23 will not match, causing the pressing action to shift, which will lead to problems such as insufficient test yield or increased failure rate. Utility Model Content

[0003] The main purpose of the utility model is to provide an auxiliary calibration tool for a chip tester test head pressing mechanism, the auxiliary calibration tool is used to perform alignment calibration on the test head pressing mechanism, the calibration operation includes individual calibration of the first action module or the second action module, or synchronous calibration of the two, and the use of this auxiliary calibration tool has the advantages of low manufacturing cost, easy use and precise alignment calibration.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0005] The utility model is an auxiliary correction tool for a chip tester test head pressing mechanism, the auxiliary correction tool comprises a substrate, a plurality of positioning holes and a plurality of convex parts, the substrate has a first surface and a second surface in opposite positions, the positioning holes are distributed on the first surface and are adjacent to the edge position, and the convex parts are arranged on the second surface and protrude from the surface.

[0006] As one of the preferred embodiments, the pressing mechanism of the test head includes a first action module and a support member thereof, wherein the first action module is responsible for driving the support member to descend, and the horizontal position of the support member can be adjusted, and the bottom surface of the support member has a plurality of first recessed holes, and the number and positions of the first recessed holes correspond to the positioning holes, and positioning pins are used during calibration and adjustment, and the two ends of the positioning pins are respectively matched with the positioning holes and the first recessed holes, thereby calibrating and adjusting the horizontal position of the support member driven by the first action module to descend.

[0007] As one of the preferred embodiments, the pressing mechanism of the test head includes a second action module and a base thereof, wherein the second action module is responsible for driving the base to descend, and the horizontal position of the base can be adjusted, and the bottom surface of the base has a plurality of second recessed holes, and the number and positions of the second recessed holes correspond to the positioning holes, and a positioning pin is used during calibration and adjustment, and the two ends of the positioning pin are respectively matched with the positioning holes and the second recessed holes, thereby calibrating and adjusting the horizontal position of the base driven by the second action module to descend.

[0008] As one of the preferred embodiments, the substrate is further divided into a first area and a second area on the first surface, the first area is located in the middle position, the second area is located outside the first area, several positioning holes are distributed in the first area, several positioning holes are also distributed in the second area, and several protrusions are located on the second surface.

[0009] As one of the preferred embodiments, the pressing mechanism of the test head includes a first action module and a support member thereof, a second action module and a base thereof, the first action module is responsible for driving the support member to descend, and the horizontal position of the support member can be adjusted, the bottom surface of the support member has a plurality of first recessed holes, the second action module is responsible for driving the base to descend, and the horizontal position of the base can be adjusted, the bottom surface of the base has a plurality of second recessed holes, and positioning pins are used during correction and adjustment, the positioning holes located in the second area are matched with the first recessed holes by the positioning pins, and the positioning holes located in the first area are matched with the second recessed holes by the positioning pins, so as to simultaneously correct and adjust the horizontal position of the support member driven to descend by the first action module and the horizontal position of the base driven to descend by the second action module.

[0010] As one of the preferred embodiments, a test socket calibration fixture is also used. The test socket calibration fixture has a positioning area with several alignment holes. The test socket calibration fixture allows the auxiliary correction tool to be placed in the positioning area, and each of the protrusions is inserted into the corresponding alignment hole.

[0011] Compared with the prior art, the auxiliary calibration tool of the present invention can accurately calibrate the action positions of the first action module and the second action module during pressure testing, and because the auxiliary calibration tool has a simple structure and low production cost, it can obtain good alignment accuracy calibration at a lower cost, which is beneficial to the maintenance of equipment during future factory operation, and can improve the yield and proper operation rate of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of a test head of an existing chip tester;

[0013] Figure 2 It is a three-dimensional diagram of the first embodiment of the utility model;

[0014] Figure 3 It is a three-dimensional diagram of the first embodiment of the utility model from another angle;

[0015] Figure 4 It is a perspective view of the second embodiment of the utility model;

[0016] Figure 5A It is a plan view of the third embodiment of the utility model;

[0017] Figure 5B for Figure 5A Cross-section of the middle AA surface;

[0018] Figure 6 A three-dimensional schematic diagram of the test stand calibration fixture used in the present invention;

[0019] Fig. 7A A three-dimensional diagram of the test head pressing mechanism used in the present utility model;

[0020] Figure 7B A bottom view of the test head pressing mechanism used in the present utility model;

[0021] Figure 8 This is a schematic diagram of the actual use of the first embodiment of the utility model;

[0022] Fig. 9 This is a schematic diagram of the actual use of the second embodiment of the utility model;

[0023] Fig.10 This is a schematic diagram of the actual use of the third embodiment of the utility model;

[0024] Fig.11The first embodiment of the utility model and another test head pressing mechanism used therein are shown in action.

[0025] Description of main reference numerals:

[0026] 1: Pressing mechanism 1A: Pressing mechanism

[0027] 10: Carrier board 11: First action module

[0028] 12: Support member 121: First concave hole

[0029] 122: Screw 13: Second action module

[0030] 14: Base 141: Second concave hole

[0031] 142: Screw 15: Heat insulation board

[0032] 16: Adapter board 2: Test accessories

[0033] 22: pressure head 221: center axis

[0034] 23: Test seat 231: Center axis

[0035] 3: Chip 4: Auxiliary calibration tool

[0036] 4A: Auxiliary correction tool 4B: Auxiliary correction tool

[0037] 41: substrate 411: first surface

[0038] 412: second surface 413: first area

[0039] 414: second area 42: positioning hole

[0040] 43: convex part 5: test seat calibration fixture

[0041] 51: Positioning area 52: Alignment hole

[0042] 6: Locating pin. DETAILED DESCRIPTION

[0043] The technical solution of the utility model will be clearly and completely described below in conjunction with specific embodiments and accompanying drawings. It should be noted that when a component is referred to as being "mounted on or fixed to" another component, it means that it can be directly on the other component or there can also be a central component. When a component is considered to be "connected" to another component, it means that it can be directly connected to the other component or there can be a central component at the same time. In the illustrated embodiments, the directions indicating up, down, left, right, front and back are relative, and are used to explain that the structures and movements of different components in this case are relative. These representations are appropriate when the components are in the positions shown in the figures. However, if the description of the component positions changes, it is believed that these representations will also change accordingly.

[0044] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0045] like Figure 2 and Figure 3 As shown, it is a three-dimensional diagram and a cross-sectional schematic diagram of the auxiliary correction tool of the first embodiment of the utility model. The auxiliary correction tool 4 includes a substrate 41, a plurality of positioning holes 42 and a plurality of protrusions 43. The substrate 41 is a flat metal plate body, having a first surface 411 and a second surface 412 in opposite positions. The positioning holes 42 are distributed on the first surface 411 and adjacent to the edge. In this embodiment, the number of positioning holes 42 is four and they are evenly distributed at the four corners of the substrate 41. In addition, in this embodiment, the positioning holes 42 are blind holes that are not penetrated, but they can also be through holes that penetrate. The protrusion 43 is arranged on the second surface 412 and protrudes from the surface. In this embodiment, the number of protrusions 43 is two and they are located in the middle of the substrate 41 at two positions relatively close to the edge. The shape and length and width dimensions of the substrate 41 of the utility model, as well as the number and position of the positioning holes 42 correspond to the components to be corrected in the test head pressing mechanism. For example, in this embodiment, the substrate 41 is an I-shaped rectangular plate body. This auxiliary correction tool 4 is used to correct the first action module 11 and the support member 12 connected thereto. This structure is as shown in FIG. Fig. 7A The number and distribution of the protrusions 43 correspond to a test stand calibration fixture.

[0046] like Figure 4, which is a three-dimensional diagram of the auxiliary calibration tool of the second embodiment of the utility model. This auxiliary calibration tool 4A also includes a base plate 41, a plurality of positioning holes 42 and a plurality of protrusions 43. The positioning holes 42 are distributed on the first surface 411 and are adjacent to the edge position. The protrusions 43 are arranged on the second surface 412 and protrude from the surface. The only difference is that the base plate 41 is shaped like a square plate. In this embodiment, this auxiliary calibration tool 4A is used to calibrate and adjust the second action module 13 of the pressing mechanism and the base 14 connected thereto.

[0047] like Figure 5A and Figure 5B As shown, it is a plan view and a cross-sectional view of the auxiliary calibration tool of the third embodiment of the utility model. This auxiliary calibration tool 4B also includes a substrate 41, a plurality of positioning holes 42 and a plurality of protrusions 43. The length and width of this substrate 41 are greater than or equal to the above two embodiments. The substrate 41 is further divided into a first area 413 and a second area 414 on the first surface 411. The first area 413 is located in the middle position and occupies most of the area, and the second area 414 is located outside the first area 413. In this embodiment, the second area 414 is distributed on the left and right sides of the first area 413. A plurality of positioning holes 42 are distributed in both the first area 413 and the second area 414, and a plurality of protrusions 43 are still located on the second surface 412. The distribution positions of the plurality of positioning holes 42 in the first area 413 and the plurality of positioning holes 42 in the second area 414 correspond to different components of the pressing mechanism respectively. Therefore, in this embodiment, this auxiliary calibration tool 4B can be used to calibrate the first action module 11 and the support member 12 connected thereto, and the second action module 13 and the base 14 connected thereto at the same time.

[0048] like Figure 6 As shown, it shows a three-dimensional diagram of the test seat calibration fixture to be used in conjunction with the present utility model. The test seat calibration fixture 5 is to provide the auxiliary calibration tool 4 with a calibration reference position. In the present embodiment, the test seat calibration fixture 5 has a positioning area 51 in the middle. In the present embodiment, the positioning area 51 is a sunken groove seat, and there are several alignment holes 52 in the positioning area 51. The number and position of the alignment holes 52 correspond to the position of the protrusion 43 of the auxiliary calibration tool 4. When in use, the test seat calibration fixture 5 needs to be installed on the machine platform of the chip tester, and the auxiliary calibration tool 4 is then placed on the test seat calibration fixture 5 so that the protrusion 43 is located in the corresponding alignment hole 52, so that the relative positions of the two can be fixed. Therefore, during the calibration and adjustment, the auxiliary calibration tool 4 must generate a calibration reference position with the assistance of the test seat calibration fixture 5, so as to facilitate the subsequent calibration operation of the pressing mechanism.

[0049] Fig. 7A and Figure 7BAs shown, it is a three-dimensional view and a bottom view of the test head pressing mechanism used in the present invention. The test head pressing mechanism 1 used in the present invention includes a first action module 11, a support member 12, a second action module 13 and a base 14. In this example, the base 14 is a temperature control module. The first action module 11 is used to drive the support member 12 to descend, and the horizontal position of the support member 12 can be adjusted. In this embodiment, the support member 12 is a structure similar to the letter "ㄇ". The bottom surface of the support member 12 has a plurality of first recessed holes 121. In addition, in this embodiment, a heat insulation board 15 is also provided between the first action module 11 and the support member 12. The heat insulation board 15 is provided with a plurality of screws 122 for locking the support member 12. When the screws 122 are loosened, the horizontal position of the support member 12 can be adjusted. The second action module 13 is used to drive the base 14 to descend, and the horizontal position of the base 14 can be adjusted. The bottom of the base 14 has a plurality of second recessed holes 141. The second motion module 13 is installed at the middle position of the bottom of the support member 12. In this embodiment, an adapter plate 16 is provided between the second motion module 13 and the base 14. The adapter plate 16 is provided with a plurality of screws 142 for locking the base 14. When the screws 142 are loosened, the horizontal position of the base 14 can be adjusted. The first motion module 11 and the second motion module 13 can be various drive cylinder groups capable of linear movement to generate the required downward pressing action.

[0050] like Figure 8 As shown, it is a schematic diagram of the first embodiment of the utility model and the operation of the pressing mechanism. For the convenience of explanation, in this figure and the subsequent schematic diagrams, the first concave hole 121, the second concave hole 141, the positioning hole 42, the protrusion 43 and the alignment hole 52 are temporarily drawn in the same vertical orientation, but in fact, each component is located in a corresponding different orientation. The auxiliary calibration tool 4 of the first embodiment of the utility model is used to calibrate the first action module 11 and the support member 12 of the pressing mechanism 1. Before the test operation is carried out, the test seat calibration fixture 5 is installed on the machine platform of the chip tester, and the auxiliary calibration tool 4 is installed in the alignment hole 52 of the test seat calibration fixture 5 through the protrusion 43 to generate a calibration reference. Use several positioning pins 6, and the positioning pins 6 need to be located in any one of the positioning holes 42 of the auxiliary correction tool 4 or the first recessed hole 121 of the support member 12. In the present embodiment, the positioning pin 6 is first located in the positioning hole 42, and the test head is manually operated to move the pressing mechanism downward to match the auxiliary correction tool 4. At this time, it can be determined whether there is an offset that needs to be corrected. When the positioning pin 6 cannot smoothly dock with the first recessed hole 121 of the support member 12, it can be determined that the support member 12 has an offset and needs to be corrected. At this time, loosen the screw 122, adjust the torsional offset position of the support member 12 (moving the first recessed hole 121 in conjunction), so that the positioning pin 6 can match the first recessed hole 121, fix the screw 122, and then re-drive the pressing mechanism 1 to confirm that the positioning pin 6 can smoothly (without any resistance) dock with the first recessed hole 121. In this way, the calibration operation of the first action module 11 and its support member 12 is completed.

[0051] like Fig. 9 As shown, it is a schematic diagram of the actual use of the second embodiment of the utility model. The auxiliary correction tool 4A of the second embodiment of the utility model is used to correct the second action module 13 and its base 14 of the pressing mechanism 1. Before the test operation is carried out, the test seat calibration tool 5 is installed on the machine table of the chip tester, and the auxiliary correction tool 4A is also installed in the alignment hole 52 of the test seat calibration tool 5 through the protrusion 43 to generate a correction reference. Use a number of positioning pins 6, and the positioning pins 6 must be located in any one of the positioning holes 42 of the auxiliary correction tool 4A or the second recessed hole 141 of the base 14. In this embodiment, the positioning pins 6 are first located in the second recessed hole 141. Manually operate the test head to make the pressing mechanism 1 move downward to match the auxiliary correction tool 4A, and it can be determined whether there is an offset that needs to be corrected. When the positioning pin 6 cannot smoothly dock with the positioning hole 42 of the auxiliary correction tool 4A, it can be determined that the base 14 has an offset and needs to be corrected. At this time, loosen the screw 142, adjust the offset position of the base 14 (and move the positioning pin 6) so that the positioning pin 6 can match the positioning hole 42 and then lock the screw 142. Then drive the pressing mechanism 1 again to confirm that the positioning pin 6 can smoothly (without any resistance) dock with the positioning hole 42. In this way, the calibration operation of the second action module 13 and its base 14 is completed.

[0052] Although the above application method is to calibrate individual components of the pressing mechanism 1, in the actual calibration operation, the auxiliary calibration tool 4 of the first embodiment and the auxiliary calibration tool 4A of the second embodiment can also be used in sequence to perform calibration on the support member 12 and the base 14 in sequence, so that both the support member 12 and the base 14 can achieve accurate alignment calibration to facilitate the operation of subsequent testing operations.

[0053] like Fig.10As shown, it is a schematic diagram of the actual use of the third embodiment of the utility model. The auxiliary correction tool 4B of the third embodiment of the utility model can simultaneously perform alignment correction on the first action module 11 and its support member 12, the second action module 13 and its base 14 of the pressing mechanism. Before the test operation is carried out, the test seat calibration fixture 5 is installed on the machine table of the chip tester, and the auxiliary correction tool 4B is also installed in the alignment hole 52 of the test seat calibration fixture 5 through the protrusion 43 to generate a correction reference. Using several positioning pins 6, different positioning pins 6 are respectively located in the positioning holes 42 of the first area 413 and the second area 414 of the auxiliary correction tool 4B, or in the holes of the first concave hole 121 and the second concave hole 141. The test head is manually operated to make the pressing mechanism 1 move downward to match the auxiliary correction tool 4B, and it can be determined whether there is an offset that needs to be corrected. In this embodiment, the positioning pins 6 are both located in the first concave hole 121 and the second concave hole 141. After being lowered, if the positioning pins 6 cannot be smoothly docked with the positioning holes 42 at different positions of the auxiliary calibration tool 4B, it can be determined whether the support 12 or the base 14 is offset according to whether the positioning holes 42 are in the first area 413 or the second area 414. At this time, loosening the screws 122 or 142 can synchronously perform the calibration of the support 12 or the base 14, and finally synchronously complete the alignment calibration of the support 12 and the base 14.

[0054] like Fig.11 As shown, a cross-sectional schematic diagram of another pressing mechanism used in the test head of the utility model. This pressing mechanism 1A includes a carrier plate 10, a first action module 11 and its support member 12, a second action module 13 and its base 14. The first action module 11 is responsible for driving the support member 12 to descend and fixing the position of the support member 12 via a plurality of screws 122. Loosening the screws 122 can also adjust the position of the support member 12. The second action module 13 is responsible for driving the base 14 to descend and also fixing the position of the base 14 with a plurality of screws 142. Loosening the screws 142 can also adjust the position of the base 14. The bottom surface of the support member 12 has a plurality of first recessed holes 121, and the bottom of the base 14 has a plurality of second recessed holes 141. The difference of this embodiment is that the support member 12 is a plurality of separate components, so the position of the support member 12 on one side can be adjusted by loosening the screws 122 on that side, which is more convenient during calibration.

[0055] The pressing mechanism 1A can also be applied to the auxiliary correction tools 4, 4A and 4B of the three different embodiments of the present invention. Since the operation mode is the same, the present invention only describes the use of the auxiliary correction tool 4. Fig.11As shown, before the test operation is carried out, the test seat calibration fixture 5 is installed on the machine table of the chip tester, and the auxiliary calibration tool 4 is installed in the alignment hole 52 of the test seat calibration fixture 5 through the protrusion 43 to generate a calibration reference. Use a number of positioning pins 6, and the positioning pins 6 must be located in any one of the positioning holes 42 of the auxiliary calibration tool 4 or the first recessed hole 121 of the support member 12. In this embodiment, the positioning pins 6 are first located in the positioning holes 42. When the test head is manually operated to make the pressing mechanism 1A move downward to match the auxiliary calibration tool 4, it can be determined whether there is an offset that needs to be corrected. When the positioning pin 6 cannot smoothly dock with the first recessed hole 121 of the support member 12, it can be determined that the support member 12 has an offset and needs to be corrected. At this time, loosen the single side screw 122, adjust the offset position of the support member 12 (and move the first recessed hole 121), so that the positioning pin 6 can match the first recessed hole 121, and then fix the screw 122. In this way, the calibration operation of the first action module 11 and its support member 12 is completed. It can be seen from this that the auxiliary calibration tool of the utility model can be widely used in the pressing mechanisms of various test heads.

[0056] In summary, the auxiliary calibration tool for the chip tester test head pressing mechanism of the utility model is low-cost and easy to install, and the design can be easily modified according to needs to reduce costs. During the calibration process, the interaction between the positioning pin and the positioning hole can quickly complete the alignment and calibration of the pressing mechanism. The calibrated structure has excellent accuracy, which can improve the yield rate of the chip tester in the test operation and the equipment availability rate.

[0057] However, the above embodiments are only illustrative of the effects of the present invention, and are not intended to limit the present invention. Any person skilled in the art may modify and change the above embodiments without violating the spirit and scope of the present invention. In addition, the number of components in the above embodiments is only illustrative, and is not intended to limit the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. An auxiliary calibration tool for a chip tester test head pressing mechanism, characterized in that: The auxiliary correction tool includes a substrate, a plurality of positioning holes and a plurality of protrusions. The substrate has a first surface and a second surface in opposite positions. The positioning holes are distributed on the first surface and are adjacent to the edge. The protrusions are arranged on the second surface and protrude from the surface.

2. The auxiliary calibration tool for the chip tester test head pressing mechanism as claimed in claim 1, characterized in that: The downward pressing mechanism of the test head includes a first action module and a support part thereof. The first action module is responsible for driving the support part to descend, and the horizontal position of the support part can be adjusted. The bottom surface of the support part has several first recessed holes, and the number and positions of the first recessed holes correspond to the positioning holes. Positioning pins are used during calibration and adjustment, and the two ends of the positioning pins are respectively matched with the positioning holes and the first recessed holes, thereby calibrating and adjusting the horizontal position of the support part driven by the first action module to descend.

3. The auxiliary calibration tool for the chip tester test head pressing mechanism as claimed in claim 1, characterized in that: The downward pressing mechanism of the test head includes a second action module and a base thereof. The second action module is responsible for driving the base to descend, and the horizontal position of the base can be adjusted. The bottom surface of the base has a plurality of second recessed holes, and the number and positions of the second recessed holes correspond to the positioning holes. A positioning pin is used during calibration and adjustment, and the two ends of the positioning pin are respectively matched with the positioning holes and the second recessed holes, thereby calibrating and adjusting the horizontal position of the base driven by the second action module to descend.

4. The auxiliary calibration tool for the chip tester test head pressing mechanism as claimed in claim 1, characterized in that: The substrate is further divided into a first area and a second area on the first surface, the first area is located in the middle position, the second area is located outside the first area, a plurality of positioning holes are distributed in the first area, a plurality of positioning holes are also distributed in the second area, and a plurality of protrusions are still located on the second surface.

5. The auxiliary calibration tool for the chip tester test head pressing mechanism as claimed in claim 4, characterized in that: The pressing mechanism of the test head includes a first action module and its support, a second action module and its base, the first action module is responsible for driving the support to descend, and the horizontal position of the support can be adjusted, the bottom surface of the support has several first recessed holes, the second action module is responsible for driving the base to descend, and the horizontal position of the base can be adjusted, the bottom surface of the base has several second recessed holes, and positioning pins are used during calibration and adjustment, the positioning pins on the positioning holes in the second area will match the first recessed holes, and the positioning pins on the positioning holes in the first area will match the second recessed holes, so as to simultaneously calibrate and adjust the horizontal position of the support driven by the first action module and the horizontal position of the base driven by the second action module.

6. The auxiliary calibration tool for the chip tester test head pressing mechanism as claimed in claim 1, characterized in that: A test seat calibration fixture is also used, the test seat calibration fixture has a positioning area, the positioning area has a plurality of alignment holes, the test seat calibration fixture is used to place the auxiliary correction tool in the positioning area, and each of the protrusions is inserted into the corresponding alignment hole.

Images