Wafer taking and placing jig
By designing a wafer pick-and-place fixture containing an anti-laminated structure, the problems of wafer scratches and laminations in the prior art are solved, and a safer and more efficient wafer pick-and-place process is achieved.
Patent Information
- Application Number
- CN202420443048.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-07
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-03-07
AI Technical Summary
Existing wafer pick-up and placement fixtures are prone to cause wafer scratches and laminations during pick-up and placement, increasing operational risks and reducing production yields.
A wafer pick-and-place fixture is designed, adopting a fixed frame, a second insertion board and multiple anti-laminated structures. The anti-laminated structure is located outside the second slot before being placed in the wafer, and is under the wafer when placed in the wafer. Press to the inside of the second slot to block the wafer that is placed in again.
It effectively prevents scratching and lamination of wafers during pick-up and placement, reduces operational risks and optimizes production yields.
Smart Images
Figure CN222507577U_ABST
Abstract
Description
Technical Field
[0001] The disclosed embodiments belong to the technical field of semiconductor fixture equipment, and specifically relate to a wafer pick-and-place fixture. Background Art
[0002] After the wafer is ground, it changes from a bare wafer to a framed wafer, so a special metal basket is needed to place it. During the operation, the wafer needs to be picked up and put back from the basket for batching and inspection, and personnel need to use special fixtures to perform this action to avoid problems such as wafer scratches and collisions during the extraction process. The existing anti-scratch fixture is affected by the height of the 12-inch material box and the slot is too wide, which will lead to incorrect placement of the material box slot without seeing it clearly. It can only prevent scratches on wafers in different slots, but cannot prevent two wafers from being placed in the same slot, which is prone to stacking, increasing operational risks and reducing production yields.
[0003] In view of the above problems, it is necessary to propose a wafer pick-and-place fixture that has a reasonable design and can effectively improve the above problems. Utility Model Content
[0004] The embodiments of the present disclosure aim to solve at least one of the technical problems existing in the prior art and provide a wafer pick-and-place fixture.
[0005] The embodiment of the present disclosure provides a wafer pick-and-place fixture, which is used to be inserted into a wafer basket to pick and place the wafer in the wafer basket, wherein the wafer basket has first plug-in plates arranged opposite to each other, and the first plug-in plates are provided with a plurality of first slots, and the fixture includes:
[0006] Fixed frame;
[0007] A second plug-in board, fixed to the fixed frame, the second plug-in board is used to abut against the first plug-in board when taking and placing the wafer, and the second plug-in board is provided with a plurality of second slots corresponding to the first slots;
[0008] A plurality of anti-overlapping structures are provided on at least one of the second plug-in boards, and each of the anti-overlapping structures is movably inserted into the second slot corresponding thereto; wherein,
[0009] Before the wafer is placed in the wafer, the first end of the anti-stacking structure is located outside the second slot, and the second end of the anti-stacking structure is inserted into the second slot;
[0010] When the wafer is placed in, the wafer presses the second end of the anti-stacking structure to the outside of the second slot, and the first end of the anti-stacking structure is inserted into the second slot to block the wafer from being placed in the second slot again.
[0011] Optionally, it further includes a first magnetic member and a second magnetic member disposed on the outer side of the second plug plate;
[0012] The first magnetic member corresponds to the first end of the anti-lamination structure, and the second magnetic member corresponds to the second end of the anti-lamination structure;
[0013] The first magnetic member is used for adsorbing and fixing the first end of the anti-stacking structure located outside the second slot;
[0014] The second magnetic member is used to absorb and fix the second end of the anti-overlapping structure located outside the second slot.
[0015] Optionally, it further includes a first fixing plate fixed to the second plug plate;
[0016] The first fixing plate is disposed close to the first end of the anti-stacking structure, and the first fixing plate is provided with a plurality of first grooves, wherein the first grooves are used to accommodate the anti-stacking structures corresponding thereto;
[0017] The first magnetic member is disposed at the bottom of the first fixing plate.
[0018] Optionally, it further includes a second fixing plate fixed to the second plug plate;
[0019] The second fixing plate is disposed close to the second end of the anti-stacking structure, and the second fixing plate is provided with a plurality of second grooves, wherein the second grooves are used to accommodate the corresponding anti-stacking structures;
[0020] The second magnetic member is disposed at the bottom of the second fixing plate.
[0021] Optionally, a fixing rod is also included;
[0022] Both ends of the fixing rod are fixed to the second plugging plate, and the fixing rod is movably provided with a plurality of the anti-overlapping structures which are distributed at intervals.
[0023] Optionally, the anti-stacking structure includes a movable block, a first stopper and a second stopper;
[0024] The movable block is movably arranged on the fixed rod;
[0025] The first stopper is fixed to the first end of the movable block, and the second stopper is fixed to the second end of the movable block.
[0026] Optionally, the anti-stacking structure further includes a first fastener and a second fastener;
[0027] The first end of the first fastener is fixedly connected to the first end of the movable block, and the second end of the first fastener is fixedly connected to the first stopper;
[0028] The first end of the second fastener is fixedly connected to the second end of the movable block, and the second end of the second fastener is fixedly connected to the second stop block.
[0029] Optionally, a limit block is also included;
[0030] The limiting block is arranged at a corner end of the fixing frame, and the second plugging plate is fixed to the fixing frame through the limiting block.
[0031] Optionally, a limiting groove is provided at the bottom of the limiting block;
[0032] The first plugging plate is inserted into the limiting groove.
[0033] Optionally, a handle is also included;
[0034] The handles are arranged on both sides of the fixing frame along the length direction thereof.
[0035] The wafer pick-and-place fixture of the disclosed embodiment is used to be inserted into a wafer basket to pick and place wafers into the wafer basket. The wafer basket has a first plug plate arranged relatively to each other, and the first plug plate is provided with a plurality of first slots. The fixture is provided with a plurality of anti-stacking structures, and the plurality of anti-stacking structures are provided on at least one second plug plate, and each anti-stacking structure is movably inserted into the second slot corresponding thereto; wherein, before the wafer is placed, the first end of the anti-stacking structure is located outside the second slot, and the second end of the anti-stacking structure is inserted into the second slot; when the wafer is placed, the wafer presses down the second end of the anti-stacking structure to the outside of the second slot, and the first end of the anti-stacking structure is inserted into the second slot to block the wafer from being placed into the second slot again. The wafer pick-and-place fixture can prevent the wafer from being scratched when the wafer is extracted, and can also prevent the wafer from being damaged by placing two wafers in the same slot, thereby reducing the operation risk and optimizing the production yield. BRIEF DESCRIPTION OF THE DRAWINGS
[0036] Figure 1 It is a schematic diagram of the assembly structure of a wafer pick-and-place fixture and a wafer basket according to one embodiment of the present disclosure;
[0037] Figure 2 An exploded view of a wafer pick-and-place fixture and a wafer basket according to another embodiment of the disclosed embodiments;
[0038] Figure 3 An exploded view of a wafer pick-and-place fixture according to another embodiment of the disclosed embodiments;
[0039] Figure 4 It is a structural schematic diagram of an anti-stacking structure of another embodiment of the disclosed embodiment;
[0040] Figure 5It is a plan view of a wafer pick-and-place fixture according to another embodiment of the disclosed embodiments;
[0041] Figure 6 It is a three-dimensional schematic diagram of a wafer pick-and-place fixture of another embodiment of the disclosed embodiments. DETAILED DESCRIPTION
[0042] In order to enable those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure, the embodiments of the present disclosure are further described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0043] like Figure 1 and Figure 2 As shown, the embodiment of the present disclosure provides a wafer pick-and-place fixture 100, which is used to be inserted into a wafer basket 200 to pick up and place wafers in the wafer basket 200. The wafer basket 200 has first plug plates 210 arranged opposite to each other, and the first plug plates 210 are provided with a plurality of first slots 220. Specifically, two first plug plates 210 are arranged opposite to each other on both sides of the wafer basket 200 along its length direction, and each first plug plate 210 is provided with a plurality of first slots 220. Wafers are picked up and placed in the wafer basket 200 along the first slots 220.
[0044] like Figure 1 and Figure 2 As shown, the wafer pick-and-place fixture 100 includes a fixed frame 110, a second plug-in board 120, and a plurality of anti-stack structures 130. The material of the fixed frame 110 can be but is not limited to metal material.
[0045] The second plug board 120 is fixed to the fixed frame 110 . The second plug board 120 is used to abut against the first plug board 210 when taking or placing a wafer. The second plug board 120 is provided with a plurality of second slots 140 corresponding to the first slots 220 .
[0046] Specifically, Figure 1 and Figure 2 As shown, the second plug plate 120 is relatively arranged along the length direction of the fixed frame 110. When taking and placing the wafer, the second plug plate 120 corresponds to and abuts against the first plug plate 210, and the second plug plate 120 is provided with a plurality of second slots 140 corresponding to the first slots 220. When taking and placing the wafer, the wafer enters or is taken out of the wafer basket 200 along the second slots 140 and the first slots 220 in sequence.
[0047] It should be noted that the second plug board 120 is made of plastic material, which can prevent static electricity from being generated when the wafer is taken and placed.
[0048] A plurality of anti-stacking structures 130 are provided on at least one second plug board 120, and each anti-stacking structure 130 is movably inserted into the corresponding second slot 140. In other words, the second plug board 120 is provided with a through slot 121 at the position corresponding to the anti-stacking structure 130, and the through slot 121 allows the anti-stacking structure 130 to be movably inserted into the inner side and the outer side of the corresponding second slot 140.
[0049] Before the wafer is placed, the first end of the anti-stacking structure 130 is located outside the second slot 140, and the second end of the anti-stacking structure 130 is inserted into the second slot 140. Specifically, before the wafer is placed, the first end of the anti-stacking structure 130 can be manually moved to the outside of the second slot 140, and the corresponding second end of the anti-stacking structure 130 is inserted into the second slot 140.
[0050] When a wafer is placed in, the wafer presses the second end of the anti-stacking structure 130 to the outside of the second slot 140 , and the first end of the anti-stacking structure 130 is inserted into the second slot 140 to block the wafer from being placed in the second slot 140 again.
[0051] It should be noted that multiple anti-stacking structures 130 may be provided on both second plug-in boards 120, or multiple anti-stacking structures 130 may be provided on only one second plug-in board 120. In this embodiment, considering the weight of the wafer pick-and-place fixture 100, multiple anti-stacking structures 130 are provided on only one second plug-in board 120. The number of anti-stacking structures 130 is not specifically limited in this embodiment, and may be provided according to the number of second slots 140, which is not specifically limited in this embodiment.
[0052] It should be further explained that each anti-stacking structure 130 can be movably inserted into the second slot 140 corresponding thereto. Preferably, in this embodiment, the anti-stacking structures 130 are movably inserted into the second slots 140 at intervals, that is, only one of the two adjacent second slots 140 is movably inserted with the anti-stacking structure 130, which can further reduce the operation risk and further avoid placing two wafers in the same slot. In other words, the corresponding anti-stacking structure 130 is only set in the second slot 140 where the wafer is placed.
[0053] It should be noted that, in the present embodiment, the first end of the anti-lamination structure 130 is the top end of the anti-lamination structure 130 , and the second end of the anti-lamination structure 130 is the bottom end of the anti-lamination structure 130 .
[0054] Specifically, when a wafer needs to be placed in the wafer basket 200, the wafer pick-and-place jig 100 is inserted into the top opening of the wafer basket 200. The first end of the anti-stacking structure 130 is manually moved to the outside of the second slot 140, and the corresponding second end of the anti-stacking structure 130 is inserted into the second slot 140. When the wafer is placed, the wafer presses the second end of the anti-stacking structure 130 to the outside of the second slot 140, and the corresponding first end of the anti-stacking structure 130 is inserted into the second slot 140 to block the wafer from being placed in the second slot 140 again.
[0055] The wafer pick-and-place fixture of the disclosed embodiment is provided with a plurality of anti-stacking structures, which are provided on at least one second plug-in plate, and each anti-stacking structure is movably inserted into the second slot corresponding thereto; wherein, before the wafer is placed, the first end of the anti-stacking structure is located outside the second slot, and the second end of the anti-stacking structure is inserted into the second slot; when the wafer is placed, the wafer presses the second end of the anti-stacking structure to the outside of the second slot, and the first end of the anti-stacking structure is inserted into the second slot to block the wafer from being placed into the second slot again. The wafer pick-and-place fixture can prevent the wafer from being scratched when the wafer is extracted, and can also prevent the wafer from being damaged by placing two wafers in the same slot, thereby reducing the operation risk and optimizing the production yield.
[0056] For example, Figure 1 and Figure 5 As shown, the wafer pick-and-place fixture 100 further includes a first magnetic member 151 and a second magnetic member 152 disposed outside the second plug-in plate 120 .
[0057] The first magnetic member 151 corresponds to the first end of the anti-lamination structure 130 , and the second magnetic member 152 corresponds to the second end of the anti-lamination structure 130 .
[0058] The first magnetic member 151 is used to absorb and fix the first end of the anti-stacking structure 130 located outside the second slot 140. Specifically, before the wafer is placed, the first magnetic member 151 absorbs and fixes the first end of the anti-stacking structure 130 located outside the second slot 140, so that the second end of the anti-stacking structure 130 is firmly inserted into the inner side of the second slot 140.
[0059] The second magnetic member 152 is used to absorb and fix the second end of the anti-stacking structure 130 located outside the second slot 140. Specifically, when a wafer is placed, the wafer presses the second end of the anti-stacking structure 130 to the outside of the second slot 140, and the second magnetic member 152 absorbs and fixes the second end of the anti-stacking structure 130 located outside the second slot 140, so that the first end of the anti-stacking structure 130 is firmly inserted into the inner side of the second slot 140.
[0060] It should be noted that, in the present embodiment, both the first magnetic member 151 and the second magnetic member 152 are magnets, and other magnetic members may also be used, which can be selected according to actual needs.
[0061] It should be noted that, in this embodiment, the second magnetic part 152 corresponds to the central position of the anti-stacking structure 130. Because pressure is applied to the second end of the anti-stacking structure 130 when the wafer is inserted, it only needs to be adsorbed and fixed by the second magnetic part 152. Therefore, the specific position of the second magnetic part 152 is not specifically limited, as long as it can fix the second end of the anti-stacking structure 130.
[0062] In this embodiment, the first magnetic part and the second magnetic part respectively adsorb and fix the anti-overlapping structure located on the outside of the second slot when taking and placing the wafer, which can better prevent the wafer from being scratched when the wafer is extracted, and can also better prevent the wafer from being damaged by placing two wafers in the same slot, thereby reducing operational risks and optimizing production yields.
[0063] For example, Figure 1 and Figure 5 As shown, the wafer pick-and-place fixture 100 also includes a first fixing plate 161 fixed to the second plug plate 120. The first fixing plate 161 is arranged near the first end of the anti-stacking structure 130, and the first fixing plate 161 is provided with a plurality of first grooves 162, and the first grooves 162 are used to accommodate the corresponding anti-stacking structures 130. A first magnetic member 151 is arranged at the bottom of the first fixing plate 161.
[0064] It should be noted that the first fixing plate 161 is fixed to the edge area of the second plug plate 120 by screws, and the first magnetic member 151 is fixed to the bottom of the first fixing plate 161 by screws.
[0065] In this embodiment, the first fixing plate is provided to fix the first magnetic member on the one hand, and to fix the second plug plate on the other hand, so that the wafer placement fixture will not shake or loosen when placing and taking the wafer.
[0066] For example, Figure 1 and Figure 5 As shown, the wafer pick-and-place fixture 100 also includes a second fixing plate 163 fixed to the second plug plate 120. The second fixing plate 163 is arranged near the second end of the anti-stacking structure 130, and the second fixing plate 163 is provided with a plurality of second grooves 164, and the second grooves 164 are used to accommodate the corresponding anti-stacking structures. A second magnetic member 152 is arranged at the bottom of the second fixing plate 163.
[0067] It should be noted that the second fixing plate 163 is fixed to the edge area of the second plug plate 120 by screws, and the second magnetic member 152 is fixed to the bottom of the second fixing plate 163 by screws.
[0068] In this embodiment, a second fixing plate is provided to fix the second magnetic member on the one hand, and to fix the second plug plate on the other hand, so that the wafer placement fixture will not shake or become loose when placing and taking the wafer.
[0069] For example, Figure 1 , Figure 3 and Figure 5 As shown, a third fixing plate 165 is disposed on the top of the second plugboard 120, and the third fixing plate 165 is disposed on the upper part of the first fixing plate 161. Both ends of the third fixing plate 165 are fixed to the edge area of the second plugboard 120, which plays a role in fixing and stabilizing the second plugboard 120.
[0070] For example, Figure 3 and Figure 4 As shown, the wafer pick-and-place fixture 100 further includes a fixing rod 170. Both ends of the fixing rod 170 are fixed to the second plug-in board 120, and the fixing rod 170 is movably provided with a plurality of anti-stacking structures 130 that are spaced apart. Specifically, each anti-stacking structure 130 can rotate around the fixing rod 170, so that the anti-stacking structure 130 can be rotated to the inside of the second slot 140 or the outside of the second slot 140.
[0071] For example, Figure 3 and Figure 4 As shown, the anti-stack structure 130 includes a movable block 131, a first stopper 132 and a second stopper 133. The movable block 131 is movably arranged on the fixed rod 170. The first stopper 132 is fixed to the first end of the movable block 131, and the second stopper 133 is fixed to the second end of the movable block 131.
[0072] Specifically, in this embodiment, the movable block 131 is in a boat shape, and the length direction of the movable block 131 is consistent with the direction of wafer placement. The movable block 131 is made of metal material, and the first stopper 132 and the second stopper 133 are made of plastic material. The first stopper 132 and the second stopper 133 are made of plastic material, which can prevent static electricity from being generated when the wafer is placed and taken, thereby preventing the wafer from being damaged.
[0073] When in use, before inserting the wafer, manually move the movable block 131 so that the first stopper 132 is located outside the second slot 140, and the first end of the movable block 131 is fixed by the first magnetic member 151, and the second stopper 133 is inserted into the second slot 140. Figure 5 and Figure 6As shown, when the wafer is placed, the wafer presses the first stopper 132 to the outside of the second slot 140, the corresponding movable block 131 rotates, and the second end of the movable block is fixed by adsorbing the second magnetic member 152, so that the second stopper 133 is inserted into the second slot 140 to prevent the wafer from being placed into the second slot 140 again.
[0074] For example, Figure 4 As shown, the anti-stacking structure 130 also includes a first fastener 134 and a second fastener 135. The first end of the first fastener 134 is fixedly connected to the first end of the movable block 131, and the second end of the first fastener 134 is fixedly connected to the first stopper 132. The first end of the second fastener 135 is fixedly connected to the second end of the movable block 131, and the second end of the second fastener 135 is fixedly connected to the second stopper 133.
[0075] It should be noted that the first stopper 132 is connected to the first end of the movable block 131 through two first fasteners 134, and the second stopper 133 is connected to the second end of the movable block 131 through two second fasteners 135. The first fasteners 134 and the second fasteners 135 can both be screws, and the specific structures of the first fasteners 134 and the second fasteners 135 are not specifically limited in this embodiment and can be selected according to actual needs.
[0076] For example, Figures 1 to 3 , Figure 5 and Figure 6 As shown, the wafer pick-and-place fixture 100 further includes a stopper 180, which is disposed at a corner end of the fixed frame, and the second plug-in board 120 is fixed to the fixed frame through the stopper 180. Specifically, there are four stopper blocks 180, which are respectively located at the four corner ends of the fixed frame, and the stopper blocks 180 at the edge areas of the second plug-in board 120 are fixed to the fixed frame 110.
[0077] In this embodiment, the limiting block 180 has a limiting and fixing function for the second plugging plate 120 , so as to prevent the second plugging plate 120 from shaking when taking or placing the wafer.
[0078] For example, Figure 3 and Figure 6 As shown, a limiting groove 181 is provided at the bottom of the limiting block 180. A first plug plate 210 is inserted into the limiting groove 181. Specifically, when placing and taking a wafer, the wafer placing and taking jig 100 is inserted into the upper opening of the wafer cradle 200, that is, the first plug plate 210 is inserted into the limiting groove 181, so that the top of the first plug plate 210 abuts against the bottom of the second plug plate 120.
[0079] In this embodiment, a limit groove is provided at the bottom of the limit block, and the limit groove is used to insert the first plug plate, thereby fixing the first plug plate, so that the wafer placement fixture and the wafer basket are tightly fitted together without shaking or looseness, thereby reducing operational risks and optimizing production yield.
[0080] For example, Figures 1 to 3 , Figure 5 and Figure 6 As shown, the wafer pick-and-place fixture 100 also includes a handle 190, which is disposed on both sides of the fixed frame 110 along its length direction. The material of the handle 190 can be but is not limited to plastic. In this embodiment, by providing a handle, the wafer pick-and-place fixture 100 can be conveniently picked up and placed.
[0081] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the embodiments of the present disclosure, but the embodiments of the present disclosure are not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the embodiments of the present disclosure, and these modifications and improvements are also considered to be within the protection scope of the embodiments of the present disclosure.
Claims
1. A wafer pick-and-place fixture, used for inserting into a wafer basket to pick up and place the wafer in the wafer basket, the wafer basket having first plug-in plates arranged opposite to each other, the first plug-in plates being provided with a plurality of first slots, characterized in that: The fixtures include: Fixed frame; A second plug-in board, fixed to the fixed frame, the second plug-in board is used to abut against the first plug-in board when taking and placing the wafer, and the second plug-in board is provided with a plurality of second slots corresponding to the first slots; A plurality of anti-overlapping structures are provided on at least one of the second plug-in boards, and each of the anti-overlapping structures is movably inserted into the second slot corresponding thereto; wherein, Before the wafer is placed in the wafer, the first end of the anti-stacking structure is located outside the second slot, and the second end of the anti-stacking structure is inserted into the second slot; When the wafer is placed in, the wafer presses the second end of the anti-stacking structure to the outside of the second slot, and the first end of the anti-stacking structure is inserted into the second slot to block the wafer from being placed in the second slot again.
2. The wafer pick-and-place fixture according to claim 1, characterized in that: Also includes a first magnetic member and a second magnetic member disposed on the outer side of the second plug plate; The first magnetic member corresponds to the first end of the anti-lamination structure, and the second magnetic member corresponds to the second end of the anti-lamination structure; The first magnetic member is used for adsorbing and fixing the first end of the anti-stacking structure located outside the second slot; The second magnetic member is used to absorb and fix the second end of the anti-overlapping structure located outside the second slot.
3. The wafer pick-and-place fixture according to claim 2, characterized in that: Also includes a first fixing plate fixed to the second plug plate; The first fixing plate is disposed close to the first end of the anti-stacking structure, and the first fixing plate is provided with a plurality of first grooves, wherein the first grooves are used to accommodate the anti-stacking structures corresponding thereto; The first magnetic member is disposed at the bottom of the first fixing plate.
4. The wafer pick-and-place fixture according to claim 2, characterized in that: Also includes a second fixing plate fixed to the second plug plate; The second fixing plate is disposed close to the second end of the anti-stacking structure, and the second fixing plate is provided with a plurality of second grooves, wherein the second grooves are used to accommodate the corresponding anti-stacking structures; The second magnetic member is disposed at the bottom of the second fixing plate.
5. The wafer pick-and-place fixture according to any one of claims 1 to 4, characterized in that: Also included is a fixing rod; Both ends of the fixing rod are fixed to the second plugging plate, and the fixing rod is movably provided with a plurality of the anti-overlapping structures which are distributed at intervals.
6. The wafer pick-and-place fixture according to claim 5, characterized in that: The anti-stacking structure includes a movable block, a first stopper and a second stopper; The movable block is movably arranged on the fixed rod; The first stopper is fixed to the first end of the movable block, and the second stopper is fixed to the second end of the movable block.
7. The wafer pick-and-place fixture according to claim 6, characterized in that: The anti-lamination structure further includes a first fastener and a second fastener; The first end of the first fastener is fixedly connected to the first end of the movable block, and the second end of the first fastener is fixedly connected to the first stopper; The first end of the second fastener is fixedly connected to the second end of the movable block, and the second end of the second fastener is fixedly connected to the second stop block.
8. The wafer pick-and-place fixture according to any one of claims 1 to 4, characterized in that: Also includes a limit block; The limiting block is arranged at a corner end of the fixing frame, and the second plugging plate is fixed to the fixing frame through the limiting block.
9. The wafer pick-and-place fixture according to claim 8, characterized in that: A limiting groove is provided at the bottom of the limiting block; The first plugging plate is inserted into the limiting groove.
10. The wafer pick-and-place fixture according to any one of claims 1 to 4, characterized in that: Also includes handles; The handles are arranged on both sides of the fixing frame along the length direction thereof.