Crown block debugging device

Abstract

The utility model discloses a crown block debugging device which comprises a main body frame, a first positioning assembly, a second positioning assembly and a third positioning assembly, one end of the main body frame is fixedly connected to the ground, and the other end is connected with the track; the first positioning assembly, the second positioning assembly and the third positioning assembly are connected to the main body frame, the first positioning assembly comprises a first supporting plate located below the track, and the second positioning assembly comprises a second supporting plate located below the track; the third positioning assembly comprises a third supporting plate located below the track. The height from the first supporting plate to the ground and the height from the second supporting plate to the ground are equal to the highest height of the position, needing to grab materials, of the crown block, and the height from the third supporting plate to the ground is equal to the lowest height of the position, needing to grab the materials, of the crown block. The crown block debugged by the device normally takes and places materials at the material ports of all equipment, and the problems of code reading and material taking and placing failures are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of suspended transport cranes, in particular to a crane debugging device. Background Art

[0002] In semiconductor wafer foundries, Over Head Transport (OHT), also known as a crane, can automate the transfer between wafers and processing equipment. It is one of the key devices for increasing production capacity and improving product qualification rate.

[0003] Due to parts errors, assembly errors and other reasons, each OHT is likely to have problems with inaccurate code reading and material picking and placing positions when it is newly put into use or after maintenance. Specifically, OHT usually includes a gripping mechanism and a lifting mechanism. When the OHT is working, the lifting mechanism will drive the gripping mechanism to rise and fall to pick up and place materials at the material ports of different processing equipment. After the newly put into use OHT or the OHT after maintenance enters the track, when the lifting mechanism drives the gripping mechanism to rise and fall to the position preset by the control program, it is likely that the code reading unit on the gripping mechanism, the gripping unit and the wafer box are misaligned in the horizontal and / or vertical direction, resulting in failure of code reading and material picking and placing. Therefore, OHT needs to be debugged when it is newly put into use or after maintenance to ensure its accuracy in code reading and material picking and placing. Utility Model Content

[0004] In order to overcome the defects in the prior art, an embodiment of the utility model provides an overhead crane debugging device, which is used to solve the above-mentioned problems.

[0005] The embodiment of the present application discloses: a crane debugging device, used for debugging the height at which the crane grabs materials, comprising: a main frame, a first positioning assembly, a second positioning assembly and a third positioning assembly; one end of the main frame is fixedly connected to the ground, and the other end is connected to a track; the first positioning assembly, the second positioning assembly and the third positioning assembly are connected to the main frame, the first positioning assembly comprises a first pallet located below the track, the second positioning assembly comprises a second pallet located below the track, and the third positioning assembly comprises a third pallet located below the track; the height of the first pallet and the second pallet from the ground is equal to the highest height of the position at which the crane needs to grab materials, and the height of the third pallet from the ground is equal to the lowest height of the position at which the crane needs to grab materials.

[0006] Specifically, the main frame includes a first column piece and a second column piece which are arranged opposite to each other, the bottoms of the first column piece and the second column piece are fixedly connected to the ground, and the tops of the first column piece and the second column piece are fixedly connected to the track respectively.

[0007] Specifically, the first positioning assembly further includes a first bracket, the first bracket is fixed on the first column plate, the first support plate is installed on the first bracket, and the first support plate is provided with three first positioning pins for positioning the wafer box.

[0008] Specifically, the second positioning assembly further includes a second bracket, the second bracket is fixed on the second column plate, the second support plate is installed on the second bracket, and the second support plate is provided with three second positioning pins for positioning the wafer box.

[0009] Specifically, the third positioning assembly also includes a first aluminum plate and a plurality of first cross beams, the first cross beams are connected to the first column piece and / or the second column piece, and the first aluminum plate is installed on the first cross beams to carry the third support plate.

[0010] Specifically, the third supporting plate is connected to the first aluminum plate through a plurality of fine-tuning screws.

[0011] Specifically, the device also includes a fourth positioning assembly located above the third positioning assembly, the fourth positioning assembly includes a second aluminum plate, a fourth support plate and multiple second beams, the second beams are connected to the first column piece and / or the second column piece, the second aluminum plate is hinged to one of the second beams and is used to support the fourth support plate, and support plates are respectively arranged on the second beams adjacent to the two ends of the second beam hinged to the second aluminum plate, the support plates are used to support the second aluminum plate, and the support plates are provided with a limiting portion for limiting the second aluminum plate.

[0012] Specifically, a connecting plate for fixing the second aluminum plate is provided on the first column piece and / or the second column piece, and the second aluminum plate and the connecting plate are connected by fasteners.

[0013] Specifically, the fourth support plate has a first through hole at its center, and a cross mark is also provided on the fourth support plate, the intersection of the cross mark coincides with the center of the first through hole, and the second through hole is provided on the second aluminum plate, and the second through hole is located below the first through hole.

[0014] Specifically, the device further comprises a fifth positioning assembly connected to the main frame, and the fifth positioning assembly is located between the third positioning assembly and the fourth positioning assembly.

[0015] The utility model has at least the following beneficial effects:

[0016] 1. The debugging device of this embodiment uses the pallets corresponding to each positioning assembly as a reference, and simulates different operating heights and positions of the OHT overhead crane to debug the overhead crane. The overhead crane debugged by this device can take and discharge materials normally at the material ports of each equipment, and there will be no problems with code reading or material taking and discharge failure.

[0017] 2. The debugging device of this embodiment can debug the overhead crane at multiple heights, thereby improving the convenience and efficiency of debugging.

[0018] 3. The aluminum plates and corresponding support plates of each positioning assembly of this embodiment are connected in a detachable manner. When it is necessary to carry out placement and debugging of different types of wafer boxes, it is only necessary to replace the support plate corresponding to the wafer box.

[0019] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a structural schematic diagram of the overhead crane debugging device in the embodiment of the utility model;

[0022] Figure 2 It is a structural schematic diagram of the first positioning component and the second positioning component in the embodiment of the utility model;

[0023] Figure 3 It is a structural schematic diagram of the third positioning assembly in the embodiment of the utility model;

[0024] Figure 4 It is a structural schematic diagram of the fourth positioning assembly in the embodiment of the utility model;

[0025] Figure 5 It is a schematic diagram of the fourth positioning assembly in the embodiment of the utility model placed vertically (standing up);

[0026] Figure 6 It is a schematic diagram of the connection between the second aluminum plate and the fourth support plate in an embodiment of the utility model.

[0027] The figure marks of the above drawings are: 11, first column piece; 12, second column piece; 2, first positioning assembly; 21, first support plate; 22, first bracket; 23, first positioning pin; 3, second positioning assembly; 31, second support plate; 32, second bracket; 33, second positioning pin; 4, third positioning assembly; 41, third support plate; 42, first aluminum plate; 43, first crossbeam; 44, fine-tuning screw; 5, fourth positioning assembly; 51, fourth support plate; 511, first through hole; 52, second aluminum plate; 521, second through hole; 53, second crossbeam; 54, supporting plate; 55, limiting portion; 56, connecting plate; 6, fifth positioning assembly; 10, track; 20, overhead crane. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "fixed", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0030] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being "above", "below" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0031] In the description of this embodiment, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application.

[0032] In addition, the terms "first", "second", etc. are only used to distinguish in description and have no special meaning.

[0033] Combination Figures 1 to 3 As shown, the overhead crane debugging device of this embodiment mainly includes: a main frame, a first positioning assembly 2, a second positioning assembly 3 and a third positioning assembly 4. One end of the main frame is fixedly connected to the ground, and the other end is connected to the track 10. The first positioning assembly 2, the second positioning assembly 3 and the third positioning assembly 4 are connected to the main frame, the first positioning assembly 2 includes a first pallet 21 located below the track 10, the second positioning assembly 3 includes a second pallet 31 located below the track 10, and the third positioning assembly 4 includes a third pallet 41 located below the track 10. Among them, the height of the first pallet 21 and the second pallet 31 from the ground is equal to the highest height of the position where the overhead crane needs to grab the material, and the height of the third pallet 41 from the ground is equal to the lowest height of the position where the overhead crane needs to grab the material. Specifically, the debugging device is applied to the daily working place of the overhead crane 20, the track 10 to which the debugging device is connected is the track 10 on which the overhead crane 20 operates daily, the position height of the first pallet 21 and the second pallet 31 corresponds to the height of the OHB (Overhead Buffer), if there is no OHB, the position height of the first pallet 21 and the second pallet 31 corresponds to the height of the stocker material port (the highest height of all ground equipment), and the position height of the third pallet 41 corresponds to the height of the station material port (the lowest height of all equipment).

[0034] Specifically, Figure 1 As shown, the main frame of this embodiment includes a first column piece 11 and a second column piece 12 which are arranged opposite to each other, and the first column piece 11 and the second column piece 12 are assembled from profiles. The bottom of the first column piece 11 and the bottom of the second column piece 12 are fixedly connected to the ground by expansion screws, respectively, and the top of the first column piece 11 and the top of the second column piece 12 can be fixedly connected to the track 10 by bolts.

[0035] like Figure 2As shown, the first positioning assembly 2 also includes a first bracket 22. The first bracket 22 is fixedly connected to the first column sheet 11, and is used to install the first support plate 21. The first support plate 21 is provided with three first positioning pins 23 for positioning the wafer box. The second positioning assembly 3 also includes a second bracket 32. The second bracket 32 ​​is fixedly connected to the second column sheet 12, and is used to install the second support plate 31. The second support plate 31 is provided with second positioning pins 33 for positioning the wafer box. Preferably, flanges are provided on both sides of the first support plate 21 and the second support plate 31, respectively, to protect the wafer box and prevent the wafer box from falling.

[0036] like Figure 3 As shown, the third positioning assembly 4 of this embodiment also includes a first aluminum plate 42 and a plurality of first crossbeams 43. The first crossbeam 43 is connected to the first column piece 11 and / or the second column piece 12. More specifically, this embodiment includes four first crossbeams 43, one first crossbeam 43 connects two profiles of the first column piece 11, one first crossbeam 43 connects two profiles of the second column piece 12, two first crossbeams 43 are used to connect the first column piece 11 and the second column piece 12, and the upper side walls of the four first crossbeams 43 generally surround a plane for mounting the first aluminum plate 42. The third support plate 41 is mounted on the first aluminum plate 42. Preferably, the third support plate 41 is detachably connected to the first aluminum plate 42 through a plurality of fine-tuning screws 44. On the one hand, the fine-tuning screw 44 can facilitate the adjustment of the height of the third pallet 41 and improve the levelness of the third pallet 41; on the other hand, different third pallets 41 can be designed according to different wafer boxes. When it is necessary to debug the placement and placement of different wafer boxes, only the corresponding third pallet 41 needs to be used.

[0037] Furthermore, the connection between the first cross beam 43 and the first column piece 11 or the second column piece 12 is a detachable connection, so as to adjust the position of the first cross beam 43 on the first column piece 11 and the second column piece 12, that is, to adjust the vertical position of the first positioning component 2 to adapt to debugging requirements at different heights.

[0038] like Figure 1 As shown, the adjusting device of this embodiment further includes a fourth positioning component 5 , and the fourth positioning component 5 is located above the third positioning component 4 along the vertical direction.

[0039] like Figure 4As shown, the fourth positioning assembly 5 specifically includes a second aluminum plate 52, a fourth support plate 51 and a plurality of second crossbeams 53. The second crossbeam 53 is connected to the first column sheet 11 and / or the second column sheet 12. Specifically, this embodiment has four second crossbeams 53, and the installation method of the four second crossbeams 53 on the first column sheet 11 and the second column sheet 12 is substantially the same as that of the first crossbeam 43. The second aluminum plate 52 is hinged to one of the second crossbeams 53 for mounting the fourth support plate 51. The size of the second aluminum plate 52 is smaller than the size of the quadrilateral surrounded by the four second crossbeams 53, so the second aluminum plate 52 can be rotated to achieve horizontal and vertical placement. Support plates 54 for supporting the second aluminum plate 52 are respectively provided on the two second crossbeams 53 adjacent to the two ends of the second crossbeam 53 for hinged connection of the second aluminum plate 52, and each support plate 54 is provided with a limiting portion 55 for limiting the second aluminum plate 52. With the above solution, when the fourth positioning assembly 5 is needed to debug the overhead travelling crane 20, the second aluminum plate 52 is rotated to a horizontal position; when the third positioning assembly 4 is needed to debug the overhead travelling crane 20, the second aluminum plate 52 is rotated to a vertical position (standing up) (e.g. Figure 5 As shown), so that the grabbing mechanism of the overhead traveling vehicle 20 can pass to the top of the third positioning assembly 4. The limiting portion 55 can ensure that the second aluminum plate 52 can be put down at the same position each time, ensuring accuracy.

[0040] like Figure 4 and Figure 5 As shown, a connecting plate 56 for fixing the second aluminum plate 52 is provided on the first column sheet 11 and / or the second column sheet 12, and the second aluminum plate 52 and the connecting plate 56 are connected by fasteners such as bolts and nuts. Specifically, when the second aluminum plate 52 needs to be erected, the second aluminum plate 52 can be fixed to the connecting plate 56 by bolts to prevent the second aluminum plate 52 from rotating.

[0041] like Figure 6As shown, the fourth support plate 51 of this embodiment has a first through hole 511 at its center, and a cross mark is also provided on the fourth support plate 51, and the intersection of the cross mark coincides with the center of the first through hole 511. Correspondingly, the second aluminum plate 52 is provided with a second through hole 521, and the second through hole 521 is located below the first through hole 511. Preferably, the second through hole 521 is coaxial with the first through hole 511, and the diameter of the second through hole 521 is not less than the diameter of the first through hole 511. Correspondingly, a through hole and a cross mark are also provided on the third support plate 41. The first through hole 511, the cross mark and the second through hole 521 are used to adjust the position of the fourth positioning assembly 5 and the third positioning assembly 4. Specifically, when adjusting the position, a cross laser is used to irradiate from above the fourth positioning component 5. The laser is first aligned with the cross mark on the fourth support plate 51, and then the laser passes through the first through hole 511 and the second through hole 521 to irradiate the third support plate 41. The third support plate 41 is adjusted until the cross mark is aligned with the cross laser.

[0042] Preferably, if Figure 1 As shown, the device of this embodiment also includes a fifth positioning assembly 6 connected to the main frame, and the fifth positioning assembly 6 is located between the third positioning assembly 4 and the fourth positioning assembly 5 in the vertical direction. The structure of the fifth positioning assembly 6 is the same as that of the fourth positioning assembly 5, and the connection method of the fifth positioning assembly 6 to the main frame is also substantially the same. The method of adjusting its position is the same as that of the third positioning assembly 4.

[0043] To facilitate adjustment, the first positioning assembly 2, the second positioning assembly 3, the third positioning assembly 4, the fourth positioning assembly 5 and the fifth positioning assembly 6 are all detachably connected to the main frame.

[0044] In summary, the method of using the adjustment device of this embodiment is as follows:

[0045] Step 1: Determine the installation height of each positioning component: the position height of the first pallet 21 and the second pallet 31 corresponds to the height of the overhead buffer (OHB), the position height of the third pallet 41 corresponds to the height of the station material port (the lowest height of all equipment), the position height of the fourth pallet 51 corresponds to the height of the stocker material port (the highest height of all ground equipment), and the position height of the fifth pallet is the height where most of the remaining ground equipment is concentrated.

[0046] Step 2: Determine the horizontal position of each pallet: Use a cross laser to irradiate from above the fourth positioning component 5. First, align the laser with the cross mark on the fourth pallet 51. Then, the laser passes through the first through hole 511 and the second through hole 521 to irradiate the pallet of the fifth positioning component 6 and the third pallet 41 of the third positioning component 4. Adjust the pallet of the fifth positioning component 6 and the third pallet 41 until the cross mark is aligned with the cross laser.

[0047] Step 3: Start each positioning assembly of the overhead crane 20 on the debugging device to perform material loading and unloading operations. When the fourth positioning assembly 5 and the fifth positioning assembly 6 are needed to debug the overhead crane 20, the corresponding aluminum plate is rotated to a horizontal state. When the third positioning assembly 4 is needed to debug the overhead crane 20, the second aluminum plate 52 and the aluminum plate corresponding to the fifth positioning assembly 6 are rotated to a vertical state.

[0048] The present invention uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A crane debugging device, used to adjust the height of the crane grabbing materials, characterized in that: include: A main frame, a first positioning assembly, a second positioning assembly and a third positioning assembly; one end of the main frame is fixedly connected to the ground, and the other end is connected to the track; The first positioning assembly, the second positioning assembly and the third positioning assembly are connected to the main frame, the first positioning assembly includes a first support plate located below the track, the second positioning assembly includes a second support plate located below the track, and the third positioning assembly includes a third support plate located below the track; The height of the first and second pallets from the ground is equal to the highest height of the position where the overhead crane needs to grab materials, and the height of the third pallet from the ground is equal to the lowest height of the position where the overhead crane needs to grab materials.

2. The overhead crane debugging device according to claim 1, characterized in that: The main frame includes a first column piece and a second column piece which are arranged opposite to each other. The bottoms of the first column piece and the second column piece are fixedly connected to the ground, and the tops of the first column piece and the second column piece are fixedly connected to the rails respectively.

3. The overhead crane debugging device according to claim 2, characterized in that: The first positioning assembly also includes a first bracket, the first bracket is fixed on the first column plate, the first support plate is installed on the first bracket, and the first support plate is provided with three first positioning pins for positioning the wafer box.

4. The overhead crane debugging device according to claim 2, characterized in that: The second positioning assembly also includes a second bracket, the second bracket is fixed on the second column plate, the second support plate is installed on the second bracket, and the second support plate is provided with three second positioning pins for positioning the wafer box.

5. The overhead crane debugging device according to claim 2, characterized in that: The third positioning assembly also includes a first aluminum plate and a plurality of first cross beams, wherein the first cross beams are connected to the first column piece and / or the second column piece, and the first aluminum plate is mounted on the first cross beams for supporting the third support plate.

6. The overhead crane debugging device according to claim 5, characterized in that: The third supporting plate is connected to the first aluminum plate via a plurality of fine-tuning screws.

7. The overhead crane debugging device according to claim 5, characterized in that: The device also includes a fourth positioning assembly located above the third positioning assembly, the fourth positioning assembly includes a second aluminum plate, a fourth support plate and multiple second beams, the second beams are connected to the first column piece and / or the second column piece, the second aluminum plate is hinged to one of the second beams and is used to carry the fourth support plate, and support plates are respectively arranged on the second beams adjacent to the two ends of the second beam hinged to the second aluminum plate, the support plates are used to support the second aluminum plate, and the support plates are provided with limiting portions for limiting the second aluminum plate.

8. The overhead crane debugging device according to claim 7, characterized in that: A connecting plate for fixing the second aluminum plate is provided on the first column piece and / or the second column piece, and the second aluminum plate and the connecting plate are connected by fasteners.

9. The overhead crane debugging device according to claim 7, characterized in that: The fourth support plate has a first through hole at its center, and a cross mark is also provided on the fourth support plate, the intersection of the cross mark coincides with the center of the first through hole, and the second through hole is provided on the second aluminum plate, and the second through hole is located below the first through hole.

10. The overhead crane debugging device according to claim 7, characterized in that: The device also includes a fifth positioning assembly connected to the main frame, and the fifth positioning assembly is located between the third positioning assembly and the fourth positioning assembly.

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