Re-feeding device and single crystal furnace
By setting up buffer parts and adjusting rods in the duplexing device to control the quartz cone, the problem of rapid drop speed of silicon material and damage to the quartz cone is solved, and the accuracy of material drop points and the long life of the quartz cone are achieved.
Patent Information
- Application Number
- CN202420886387.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-26
- Publication Date
- 2025-02-21
- Estimated Expiration
- 2034-04-26
AI Technical Summary
During the feeding process of existing compound feeders, the silicon material drops quickly and causes scattering, which easily falls into the outside of the crucible, causing problems such as ignition and damage to the quartz cone.
A duplicate casting device is designed, including a duplicate casting cylinder, a pallet assembly and a buffer member. The quartz cone is controlled to seal the discharge port by adjusting rod, and an inclined buffer member is installed in the re-casting cylinder to reduce the drop speed of the material and prevent dispersion and impact.
It effectively prevents the silicon material from scattering during the falling process, ensures the accurate landing point of the material, reduces the impact force on the quartz cone, and extends the service life of the quartz cone.
Smart Images
Figure CN222513000U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of crystal preparation equipment, and in particular to a re-investment device and a single crystal furnace. Background Art
[0002] When single crystal furnace processes single crystal silicon melt, it needs to re-feed multiple times. At present, the existing re-feeding feeder has the following problems in the feeding process:
[0003] (1) The silicon material falls quickly in the feeder, causing it to scatter and fall into the outside of the crucible. When the silicon material falls between the crucible and the heater, it will cause ignition, leading to safety accidents.
[0004] (2) The rapid descent of the silicon material will cause a greater impact on the quartz cone, which will make the quartz cone easily damaged. Utility Model Content
[0005] In order to overcome the deficiencies in the prior art, the present application provides a re-investment device and a single crystal furnace.
[0006] This application provides the following technical solutions:
[0007] A reinvestment device, comprising:
[0008] A re-throwing cylinder, one end of which has a discharge port;
[0009] The tray assembly comprises a quartz cone and an adjusting rod; the quartz cone is arranged at the discharge port; the adjusting rod is movably arranged in the re-feeding cylinder, and one end of the adjusting rod is connected to the quartz cone;
[0010] A buffer is obliquely arranged in the re-feeding cylinder and faces the discharge port; the buffer is slidably matched with the adjustment rod.
[0011] In a possible implementation, the re-injection device includes a plurality of the buffer members; the plurality of buffer members are staggeredly arranged along the axial direction of the re-injection cylinder.
[0012] In a possible implementation manner, projections of two adjacent buffer members along the axial direction of the re-delivery tube have an overlapping area.
[0013] In a possible embodiment, the re-investment tube also includes a fixing component; the fixing component includes a limit member and a retaining ring; the limit member is fixed to the inner wall of the re-investment tube; one side of the retaining ring is connected to the limit member, and the side of the retaining ring away from the limit member is connected to the buffer member.
[0014] In a possible implementation, the thickness of the limiting member along the radial direction of the re-feeding cylinder gradually increases from an end of the limiting member away from the discharge port to an end of the limiting member close to the discharge port.
[0015] In a possible implementation manner, the buffer component is disposed on a side close to the inner wall of the re-feeding cylinder and on an end of the limiting component away from the discharge port.
[0016] In a possible embodiment, the re-feeding cylinder includes a first cylinder body, a second cylinder body and a third cylinder body which are detachably connected in sequence; the discharge port is opened at an end of the third cylinder body away from the second cylinder body; the re-feeding device includes a plurality of the buffer parts, and at least one buffer part is provided in each of the first cylinder body, the second cylinder body and the third cylinder body.
[0017] In a possible embodiment, the re-injection device also includes a first connecting member and a second connecting member; the first connecting member is arranged at an end of the second cylinder away from the third cylinder, and one end of the first cylinder is detachably connected to the first connecting member; the second connecting member is arranged at an end of the third cylinder away from the discharge port, and one end of the second cylinder away from the first cylinder is detachably connected to the second connecting member.
[0018] In a possible implementation manner, a matching groove is provided on the buffer member; and the adjusting rod is movably disposed in the matching groove along the axial direction of the re-injection cylinder.
[0019] In a second aspect, the present application also provides a single crystal furnace, comprising the above-mentioned re-investment device.
[0020] Compared with the prior art, the present invention has the following beneficial effects:
[0021] The re-feeding device provided in the present application can control the quartz cone to block the discharge port by controlling the lifting and lowering of the adjusting rod in the re-feeding cylinder. By setting an inclined buffer in the re-feeding cylinder, when the discharge port is opened and the material in the re-feeding cylinder falls, the buffer can reduce the falling speed of the material, thereby effectively preventing the material from scattering during the falling process and ensuring the accurate landing point of the material; and reducing the impact force of the material on the quartz cone and increasing the service life of the quartz cone. The buffer is slidably matched with the adjusting rod to avoid interference between the adjusting rod and the buffer when the adjusting rod is lifted and lowered in the re-feeding cylinder.
[0022] In order to make the above-mentioned objects, features and advantages of the present application more obvious and understandable, preferred embodiments are given below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0024] Figure 1 A schematic diagram of a reinvestment device according to an embodiment of the present application is shown;
[0025] Figure 2 A schematic diagram of the projection inside the re-projection device according to an embodiment of the present application is shown;
[0026] Figure 3 A partially exploded schematic diagram of a reinvestment device according to an embodiment of the present application is shown;
[0027] Figure 4 Shows Figure 3 A magnified schematic diagram of center A.
[0028] Description of main component symbols:
[0029] 100-re-feeding device; 110-re-feeding cylinder; 111-first cylinder; 112-second cylinder; 113-third cylinder; 114-discharging port; 120-tray assembly; 121-adjusting rod; 122-quartz cone; 123-sheath; 124-fixing member; 130-buffer; 140-fixing assembly; 141-limiting member; 142-clamping ring; 150-protective assembly; 151-limiting plate; 152-assembly member; 153-connecting rod; 154-positioning member; 160-first connecting member; 170-second connecting member. DETAILED DESCRIPTION
[0030] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.
[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0033] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0034] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0035] Embodiment 1
[0036] See also Figures 1 to 4 In one embodiment of the present application, a re-investment device 100 is provided. The re-investment device 100 is used in a single crystal furnace.
[0037] See also Figure 1 The re-injection device 100 includes a re-injection tube 110, a tray assembly 120 and a buffer 130.
[0038] Among them, the re-feeding cylinder 110 is cylindrical; the two ends of the re-feeding cylinder 110 are respectively provided with a feed port and a discharge port 114; the operator can add materials into the re-feeding cylinder 110 through the feed port, and when re-feeding is needed, the material can fall from the discharge port 114 into the crucible in the single crystal furnace.
[0039] The tray assembly 120 includes a quartz cone 122 and an adjusting rod 121 ; the quartz cone 122 is disposed at the discharge port 114 ; the adjusting rod 121 is movably disposed in the re-injection cylinder 110 , and one end of the adjusting rod 121 is connected to the quartz cone 122 .
[0040] The re-feeding device 100 of this embodiment can control the quartz cone 122 to block the discharge port 114 by controlling the lifting and lowering of the adjustment rod 121 in the re-feeding tube 110, thereby controlling the normal progress of the re-feeding process.
[0041] The buffer 130 is obliquely disposed in the re-feeding cylinder 110, and the buffer 130 faces the discharge port 114. When the adjusting rod 121 controls the height of the quartz cone 122 to drop so that the discharge port 114 is opened and the material in the re-feeding cylinder 110 falls, the buffer 130 can reduce the falling speed of the material. This effectively prevents the material from scattering during the falling process, ensures that the material falls accurately, and reduces the impact force of the material on the quartz cone 122, thereby increasing the service life of the quartz cone 122.
[0042] The buffer member 130 is slidably matched with the adjusting rod 121 to prevent the adjusting rod 121 from interfering with the buffer member 130 when the adjusting rod 121 is raised or lowered in the re-dumping cylinder 110 .
[0043] In some embodiments, see Figure 1 The re-feeding device 100 includes a plurality of buffer members 130 ; the plurality of buffer members 130 are staggeredly arranged along the axial direction of the re-feeding cylinder 110 to improve the ability to reduce the falling speed of the material.
[0044] In some embodiments, the vertical distances between two adjacent buffers 130 along the axial direction of the re-throw barrel 110 are the same. However, it is not limited thereto, and it can be understood that in other embodiments, the vertical distances between two adjacent buffers 130 along the axial direction of the re-throw barrel 110 may also be different.
[0045] See also Figure 1 and Figure 2A matching groove is formed on a side of the buffer member 130 away from the inner wall of the re-throwing cylinder 110 ; and the adjusting rod 121 is movably disposed in the matching groove along the axial direction of the re-throwing cylinder 110 .
[0046] In some embodiments, the projections of two adjacent buffers 130 along the axial direction of the re-feeding cylinder 110 are both semicircular, and the shapes of the two projections are symmetrical, thereby effectively ensuring that the material falls after being decelerated by at least one of the buffers 130 .
[0047] In some embodiments, the projections of two adjacent buffer members 130 along the axial direction of the re-dosing cylinder 110 have an overlapping area, thereby effectively increasing the contact surface between the buffer member 130 and the material.
[0048] In some embodiments, see Figure 1 The angle between the buffer member 130 and the inner wall of the re-dose tube 110 is α.
[0049] In some embodiments, the angle α between the buffer 130 and the inner wall of the re-dose tube 110 is between 40 degrees and 60 degrees, that is, 40°≤α≤60°.
[0050] Preferably, when α is 50°, the buffer member 130 can achieve a better buffering effect when the material falls.
[0051] In some embodiments, see Figure 3 and Figure 4 The re-throw barrel 110 further includes a fixing assembly 140 ; the fixing assembly 140 is used to fix the buffer member 130 in the re-throw barrel 110 .
[0052] The fixing assembly 140 includes a limiter 141 and a snap ring 142 ; the limiter 141 is fixed to the inner wall of the re-throwing tube 110 ; one side of the snap ring 142 is connected to the limiter 141 , and the side of the snap ring 142 away from the limiter 141 is connected to the buffer 130 .
[0053] The buffer 130 is connected to the limiter 141 fixed on the inner wall of the re-throwing tube 110 through the clamping ring 142, so as to fix the position of the buffer 130 in the re-throwing tube 110. The limiter 141 can limit the movement of the buffer 130 in the re-throwing tube 110 along the axial direction of the re-throwing tube 110.
[0054] Exemplarily, the limiting member 141 is welded to the inner wall of the re-dose cylinder 110 .
[0055] See also Figure 4The thickness of the limiting member 141 along the radial direction of the re-dumping cylinder 110 gradually increases from the end of the limiting member 141 away from the discharge port 114 to the end of the limiting member 141 close to the discharge port 114, so as to facilitate the inclined setting of the buffer member 130 in the re-dumping cylinder 110.
[0056] The angle between the limiting member 141 and the inner wall of the re-injection tube 110 is β.
[0057] The angle β between the stopper 141 and the inner wall of the re-injection tube 110 is between 8 degrees and 15 degrees, that is, 8°≤β≤15°.
[0058] The operator can select the corresponding limiting member 141 according to actual needs to meet the requirement of the tilt angle of the buffer member 130 .
[0059] In some embodiments, the buffer 130 is disposed on one side of the inner wall of the re-dose cylinder 110 and on an end of the limiter 141 away from the discharge port 114 , so that the limiter 141 can effectively prevent the buffer 130 from moving along the axial direction of the re-dose cylinder 110 .
[0060] See also Figure 3 In some embodiments, the re-dosing cylinder 110 includes a first cylinder 111, a second cylinder 112 and a third cylinder 113 which are detachably connected in sequence; the discharge port 114 is opened at one end of the third cylinder 113 away from the second cylinder 112; the re-dosing device 100 includes a plurality of buffer components 130, and at least one buffer component 130 is provided in each of the first cylinder 111, the second cylinder 112 and the third cylinder 113.
[0061] The re-injection device 100 of this embodiment can replace damaged cylinders individually by configuring the re-injection cylinder 110 to be a segmented structure, thereby effectively reducing replacement costs; and can effectively reduce the difficulty of replacing the buffer member 130 .
[0062] The re-injection device 100 also includes a first connecting member 160 and a second connecting member 170; the first connecting member 160 is arranged at one end of the second cylinder 112 away from the third cylinder 113, and one end of the first cylinder 111 is detachably connected to the first connecting member 160; the second connecting member 170 is arranged at one end of the third cylinder 113 away from the discharge port 114, and one end of the second cylinder 112 away from the first cylinder 111 is detachably connected to the second connecting member 170.
[0063] Exemplarily, the first connecting member 160 is welded to one end of the second cylinder 112 away from the third cylinder 113 ; the second connecting member 170 is welded to one end of the third cylinder 113 away from the discharge port 114 .
[0064] In some embodiments, the first connecting member 160 and the second connecting member 170 are both cylindrical. The inner wall of the first connecting member 160 is provided with a first internal thread, and the outer wall of one end of the first cylinder 111 is provided with a first external thread corresponding to the first internal thread; the first cylinder 111 is threadedly connected to the first connecting member 160.
[0065] The inner wall of the second connecting member 170 is provided with a second internal thread, and the outer wall of the second cylinder 112 at one end away from the first cylinder 111 is provided with a second external thread corresponding to the second internal thread; the second cylinder 112 is threadedly connected to the second connecting member 170 .
[0066] In some embodiments, the first connecting member 160 and the first tube body 111 are detachably connected via a snap-fit structure; the second connecting member 170 and the second tube body 112 are also detachably connected via a snap-fit structure.
[0067] See also Figure 1 The tray assembly 120 further includes a sheath 123; the sheath 123 is disposed outside the adjusting rod 121. The sheath 123 is used to prevent the adjusting rod 121 from contaminating materials.
[0068] Preferably, the sheath 123 is a quartz sheath.
[0069] The tray assembly 120 also includes a fixing part 124; the end of the adjusting rod 121 away from the feed port is penetrated by the quartz cone 122; the fixing part 124 is arranged at the end of the quartz cone 122 away from the sheath 123, and is fixedly connected to the end of the adjusting rod 121 away from the feed port, so that the quartz cone 122 is fixedly connected to the adjusting rod 121.
[0070] Exemplarily, the fixing member 124 is a nut; the fixing member 124 can be threadedly connected to the adjusting rod 121 .
[0071] See also Figure 1 and Figure 3 The re-investment device 100 further includes a protection component 150. The protection component 150 is used to limit the rising height of the adjustment rod 121 and prevent the adjustment rod 121 from being pulled out of the re-investment tube 110 when the adjustment rod 121 is accidentally separated from the quartz cone 122.
[0072] The protection assembly 150 is disposed at one end of the re-feeding cylinder 110 away from the discharge port 114. The protection assembly 150 includes a limit plate 151, an assembly part 152, a connecting rod 153 and a positioning member 154; the assembly part 152 is disposed at one end of the first cylinder 111 away from the second cylinder 112; the limit plate 151 is connected to the assembly part 152 through the connecting rod 153, so that the limit plate 151 is disposed at a side of the assembly part 152 away from the discharge port 114; the positioning member 154 is fixed on the adjusting rod 121 and disposed between the limit plate 151 and the protective sleeve 123.
[0073] When the adjusting rod 121 is lifted upward to a certain height, the positioning member 154 can abut against a side of the limiting plate 151 close to the assembly member 152 , thereby limiting the lifting height of the adjusting rod 121 .
[0074] Embodiment 2
[0075] The present application also provides a single crystal furnace, comprising the above-mentioned re-investment device 100.
[0076] The single crystal furnace can prepare single crystal silicon by Czochralski method. The re-feeding device 100 can feed materials into the crucible of the single crystal furnace to improve the output of the single crystal furnace.
[0077] The single crystal furnace provided in this embodiment has the re-feeding device 100 provided in any of the above embodiments, and therefore has all the beneficial effects of the re-feeding device 100 provided in any of the above embodiments, which will not be described one by one here.
[0078] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0079] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.
Claims
1. A reinvestment device, characterized in that: include: A re-throwing cylinder, one end of which has a discharge port; The tray assembly comprises a quartz cone and an adjusting rod; the quartz cone is arranged at the discharge port; the adjusting rod is movably arranged in the re-feeding cylinder, and one end of the adjusting rod is connected to the quartz cone; A buffer is obliquely arranged in the re-feeding cylinder and faces the discharge port; the buffer is slidably matched with the adjustment rod.
2. The reinvestment device according to claim 1, characterized in that: The re-injection device includes a plurality of the buffer members; the plurality of the buffer members are arranged in a staggered manner along the axial direction of the re-injection cylinder.
3. The reinvestment device according to claim 2, characterized in that: The projections of two adjacent buffer members along the axial direction of the re-projection cylinder have an overlapping area.
4. The reinvestment device according to any one of claims 1 to 3, characterized in that: The re-investment tube also includes a fixing assembly; the fixing assembly includes a limiter and a clamping ring; the limiter is fixed on the inner wall of the re-investment tube; one side of the clamping ring is connected to the limiter, and the side of the clamping ring away from the limiter is connected to the buffer.
5. The reinvestment device according to claim 4, characterized in that: The thickness of the limiting member along the radial direction of the re-feeding cylinder gradually increases from an end of the limiting member away from the material outlet to an end of the limiting member close to the material outlet.
6. The reinvestment device according to claim 5, characterized in that: The buffer is located at a side close to the inner wall of the re-feeding cylinder and is arranged on an end of the limiting member away from the discharge port.
7. The reinvestment device according to any one of claims 1 to 3, characterized in that: The re-feeding cylinder includes a first cylinder body, a second cylinder body and a third cylinder body which are detachably connected in sequence; the discharge port is opened at an end of the third cylinder body away from the second cylinder body; the re-feeding device includes a plurality of the buffer parts, and at least one buffer part is provided in each of the first cylinder body, the second cylinder body and the third cylinder body.
8. The reinvestment device according to claim 7, characterized in that: The re-feeding device also includes a first connecting member and a second connecting member; the first connecting member is arranged at an end of the second cylinder away from the third cylinder, and one end of the first cylinder is detachably connected to the first connecting member; the second connecting member is arranged at an end of the third cylinder away from the discharge port, and one end of the second cylinder away from the first cylinder is detachably connected to the second connecting member.
9. The reinvestment device according to any one of claims 1 to 3, characterized in that: The buffer member is provided with a matching groove; the adjusting rod is movably arranged in the matching groove along the axial direction of the re-dispensing cylinder.
10. A single crystal furnace, characterized in that: It comprises the re-investment device described in any one of claims 1-9.