Extractable flip-up table frame mechanism of laser direct writing photoetching machine

By designing the pull-out upper-flip frame mechanism, the problem of inconvenience in cleaning the frame of the laser direct writing exposure machine is solved, and the convenient extraction and flip of the frame is achieved, and cleaning efficiency and convenience are improved.

CN222529647UActive Publication Date: 2025-02-25SUZHOU JIAN GAOYUAN MICROELECTRONICS EQUIP TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202421386781.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-18
Publication Date
2025-02-25
Estimated Expiration
2034-06-18

AI Technical Summary

Technical Problem

The existing laser direct-write exposure machine's table frame requires cleaning personnel to bend or squat down during cleaning, resulting in inconvenience in cleaning.

Method used

A pull-out upper-type table frame mechanism is designed, which pulls the table frame out of the table frame through the handle, and increases resistance by screwing the threaded shaft pin to flip the table frame to a suitable cleaning angle, so that the cleaning staff can clean it. .

Benefits of technology

It realizes the convenient extraction and flip of the table frame, reduces the physical labor of cleaning personnel, and improves cleaning efficiency and convenience.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 00000000_0000_ABST
    Figure 00000000_0000_ABST
Patent Text Reader

Abstract

The utility model discloses a drawable flip-up table frame mechanism of a laser direct writing lithography machine, which comprises a table frame and a working table frame, connecting plates are arranged on two sides of the front end of the table frame, the surfaces of the connecting plates are rotatably connected with fixing plates through rotating shafts, the working table frame is connected in the bottom of the table frame in a sliding manner, and the working table frame is arranged in the table frame. A rotating plate is rotatably connected to the surface of the fixing plate, a fixing assembly is arranged on the surface of the fixing plate, and a second threaded shaft pin abuts against the workbench frame under continuous screwing, so that the sliding resistance of the workbench frame is increased, and the workbench frame cannot slide in the load-bearing bearing; the workbench frame rotates on the surface of the fixing plate through the rotating plates on the two sides, after the workbench frame is turned over to a proper cleaning angle, the first threaded shaft pin is screwed, the first threaded shaft pin abuts against the workbench frame, the workbench frame cannot be turned over, and therefore cleaning personnel can conveniently clean the top and the bottom of the turned workbench frame; and the operation is convenient.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model belongs to the technical field of laser direct writing exposure machines, and in particular relates to a withdrawable upward-lifting table frame mechanism of a laser direct writing photolithography machine. Background Art

[0002] The stage frame of the laser direct writing exposure machine plays a vital role in the entire exposure process. Specifically, the stage frame is mainly used to support, position and stabilize the material to be exposed to ensure the accuracy and stability of the exposure process. It provides a stable platform for the material to be exposed, allowing the laser beam to accurately etch the template or photographic film, thereby achieving a high-precision exposure effect.

[0003] Currently, the table frame is a key component for supporting and positioning the material to be exposed, and the cleanliness of its surface directly affects the accuracy of the exposure process. If dust, oil or other impurities accumulate on the table frame, it may cause scattering or deviation of the laser beam, thereby reducing the exposure accuracy and affecting the quality of the final product. Therefore, the workbench frame needs to be cleaned regularly. However, when cleaning the workbench frame, since the workbench frame and the frame of the laser direct writing exposure machine are connected by sliding, after the top of the workbench frame is cleaned, when it is necessary to clean the bottom of the workbench frame, the cleaning staff needs to bend over or squat to clean the workbench frame, which makes cleaning inconvenient. Utility Model Content

[0004] The purpose of the utility model is to provide a removable lift-up table frame mechanism for a laser direct writing lithography machine to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a removable lift-up table frame mechanism of a laser direct writing lithography machine, comprising:

[0006] A table frame, wherein connecting plates are provided on both sides of the front end of the table frame, and a fixed plate is rotatably connected to the surface of the connecting plate via a rotating shaft;

[0007] A workbench frame, the workbench frame is slidably connected to the bottom of the table frame, the surface of the fixed plate is rotatably connected with a rotating plate, the surface of the rotating plate is rotatably connected with a plurality of load-bearing bearings, both sides of the workbench frame are rollingly connected with the load-bearing bearings, a bearing guide rail is provided in the slide groove at the bottom of the table frame, and a fixing component for limiting the flipped workbench frame is provided on the surface of the fixed plate, and the first threaded shaft pin of the fixing component is contacted with the workbench frame by screwing, so that the first threaded shaft pin is pressed against the workbench frame under continuous screwing, thereby limiting the flipped workbench frame.

[0008] Preferably, the fixing assembly includes a first threaded barrel, the first threaded barrel is arranged in the fixing plate, and the first threaded shaft pin is threadedly connected to the first threaded barrel.

[0009] Preferably, stainless steel guide rails are provided on both sides of the workbench frame, and the workbench frame is rollingly connected to the load-bearing bearings through the stainless steel guide rails and slides into the bearing guide rails in the slide groove at the bottom of the table frame.

[0010] Preferably, a second threaded barrel is provided in the rotating plate and a second threaded shaft pin is threadedly connected in the second threaded barrel.

[0011] Preferably, positioning cylinders are provided on both sides of the top of the table frame, a card-type lock is provided at one end of the fixing plate, and a card block on the surface of the card-type lock is card-engaged with a card groove on the surface of the table frame.

[0012] Preferably, a handle is provided on the surface of the workbench frame.

[0013] Compared with the prior art, the beneficial effect of the utility model is that when the workbench frame needs to be cleaned, the workbench frame is pulled out of the bearing guide rail in the platform frame by the handle, so that the workbench frame is slidably pulled out of the platform frame, and the second threaded shaft pin is screwed to rotate in the second threaded cylinder, so that the second threaded shaft pin continues to move toward the workbench frame and contacts the workbench frame, and under continuous screwing, the second threaded shaft pin is tightly pressed against the workbench frame, thereby increasing the resistance of the workbench frame to slide, so that the workbench frame cannot slide in the load-bearing bearing. At this time, the workbench frame can be lifted up, so that the workbench frame can rotate on the surface of the fixed plate through the rotating plates on both sides. After the workbench frame is flipped to a suitable cleaning angle, the first threaded shaft pin in the first threaded cylinder is screwed, so that the first threaded shaft pin is tightly pressed against the workbench frame under continuous screwing, so that the first threaded shaft pin increases the resistance to the flipping of the workbench frame, and the workbench frame cannot be flipped, thereby making it convenient for cleaning personnel to clean the top and bottom of the flipped workbench frame, which is more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model when it is working;

[0015] Figure 2 It is a schematic diagram of the structure of the utility model when it is pulled out;

[0016] Figure 3 It is a schematic diagram of the structure of the utility model after flipping;

[0017] Figure 4 It is a bottom view of the utility model after being turned over.

[0018] In the figure: 1. table frame; 2. connecting plate; 3. rotating shaft; 4. fixed plate; 5. working table frame; 6. rotating plate; 7. load-bearing bearing; 8. first threaded shaft pin; 9. first threaded cylinder; 10. bearing guide; 11. stainless steel guide; 12. second threaded cylinder; 13. second threaded shaft pin; 14. positioning cylinder; 15. card lock; 16. card slot; 17. handle; 18. groove; 19. opening. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] The utility model provides Figure 1-4 The removable flip-up table frame mechanism of the laser direct writing lithography machine shown in the figure comprises:

[0021] A table frame 1, wherein connecting plates 2 are provided on both sides of the front end of the table frame 1, and a fixing plate 4 is rotatably connected to the surface of the connecting plate 2 via a rotating shaft 3;

[0022] A workbench frame 5 is slidably connected to the bottom of the table frame 1. The surface of the fixed plate 4 is rotatably connected to a rotating plate 6. The surface of the rotating plate 6 is rotatably connected to a plurality of load-bearing bearings 7. Both sides of the workbench frame 5 are rollingly connected to the load-bearing bearings 7. A bearing guide rail 10 is provided in the slide groove at the bottom of the table frame 1. The surface of the fixed plate 4 is provided with a fixing component for limiting the flipped workbench frame 5. The first threaded shaft pin 8 of the fixing component is screwed into contact with the workbench frame 5 so that the first threaded shaft pin 8 is pressed against the workbench frame 5 under continuous screwing, thereby limiting the flipped workbench frame 5.

[0023] The fixing assembly includes a first threaded barrel 9 , which is disposed in the fixing plate 4 , and a first threaded shaft pin 8 is threadedly connected to the first threaded barrel 9 .

[0024] Stainless steel guide rails 11 are provided on both sides of the workbench frame 5 . The workbench frame 5 is rollingly connected to the load-bearing bearing 7 through the stainless steel guide rails 11 and slides into the bearing guide rails 10 in the sliding groove at the bottom of the table frame 1 .

[0025] A second threaded barrel 12 is disposed in the rotating plate 6 , and a second threaded shaft pin 13 is threadedly connected to the second threaded barrel 12 .

[0026] Positioning cylinders 14 are provided on both sides of the top of the table frame 1, and a card-type lock 15 is provided at one end of the fixing plate 4, and the card block on the surface of the card-type lock 15 is carded with the card groove 16 on the surface of the table frame 1, and the piston rod of the positioning cylinder 14 movably penetrates the table frame 1. When the workbench frame 5 slides into the table frame 1, the positioning cylinder 14 is started and controls the piston rod of the positioning cylinder 14 to contact with the workbench frame 5 to position the workbench frame 5.

[0027] The surface of the workbench frame 5 is provided with a handle 17 , and the workbench frame 5 can be conveniently pulled out of the platform frame 1 and lifted up by pulling the handle 17 .

[0028] When the workbench frame 5 needs to be cleaned, the workbench frame 5 is pulled out of the bearing guide rail 10 in the workbench frame 1 by the handle 17, so that the workbench frame 5 is slid out of the workbench frame 1, and the second threaded shaft pin 13 is rotated in the second threaded cylinder 12, so that the second threaded shaft pin 13 continues to move toward the workbench frame 5 and contacts the workbench frame 5, and the second threaded shaft pin 13 is pressed against the workbench frame 5 under continuous screwing, thereby increasing the sliding resistance of the workbench frame 5 so that the workbench frame 5 cannot be moved under the load-bearing The workbench frame 5 slides in the bearing 7. At this time, the workbench frame 5 can be lifted up to rotate on the surface of the fixed plate 4 through the rotating plates 6 on both sides. After the workbench frame 5 is turned over to a suitable cleaning angle, the first threaded shaft pin 8 in the first threaded cylinder 9 is screwed so that the first threaded shaft pin 8 and the workbench frame 5 are pressed tightly under continuous screwing, so that the first threaded shaft pin 8 increases the resistance of the workbench frame 5 to the turning over, making the workbench frame 5 unable to turn over, thereby making it convenient for cleaning personnel to clean the top and bottom of the turned workbench frame 5, which is more convenient.

[0029] By placing the raw materials into the groove 18 on the surface of the workbench frame 5 and sliding the workbench frame 5 into the table frame 1, the stainless steel guide rails 11 on both sides of the workbench frame 5 slide in the load-bearing bearing 7 and continue to slide into the bearing guide rails 10 in the table frame 1, so that the workbench frame 5 slides into the table frame 1, and the fixed plate 4 is rotated on the surface of the connecting plate 2 with the rotating shaft 3 as the center point, so that the fixed plate 4 and the connecting plate 2 are in a 90° folded state to prevent interference with the operation of other components, and after the fixed plate 4 is folded, the block on the surface of the card-type lock 15 is card-connected and locked with the card groove 16 on the surface of the table frame 1, so that the workbench frame 5 is limited into the table frame 1 by the folded fixed plate 4, thereby preventing the workbench frame 5 from vibrating during operation, and after the workbench frame 5 slides into the table frame 1, the raw materials can be processed through the opening 19.

[0030] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A removable flip-up table frame mechanism for a laser direct writing lithography machine, characterized in that: include: A table frame (1), wherein connecting plates (2) are provided on both sides of the front end of the table frame (1), and a fixed plate (4) is rotatably connected to the surface of the connecting plate (2) via a rotating shaft (3); A workbench frame (5), wherein the workbench frame (5) is slidably connected to the bottom of the table frame (1), the surface of the fixed plate (4) is rotatably connected to a rotating plate (6), the surface of the rotating plate (6) is rotatably connected to a plurality of load-bearing bearings (7), both sides of the workbench frame (5) are rollingly connected to the load-bearing bearings (7), a bearing guide rail (10) is provided in a slide groove at the bottom of the table frame (1), and a fixing component for limiting the workbench frame (5) after flipping is provided on the surface of the fixed plate (4), and the first threaded shaft pin (8) of the fixing component is screwed into contact with the workbench frame (5), so that the first threaded shaft pin (8) is pressed against the workbench frame (5) under continuous screwing, thereby limiting the workbench frame (5) after flipping.

2. The removable flip-up table frame mechanism of the laser direct writing lithography machine according to claim 1 is characterized in that: The fixing assembly comprises a first threaded barrel (9), the first threaded barrel (9) is arranged in the fixing plate (4), and the first threaded shaft pin (8) is threadedly connected to the first threaded barrel (9).

3. The removable flip-up table frame mechanism of the laser direct writing lithography machine according to claim 1 is characterized in that: Stainless steel guide rails (11) are provided on both sides of the workbench frame (5). The workbench frame (5) is rollingly connected to the load-bearing bearing (7) through the stainless steel guide rails (11) and slides into the bearing guide rails (10) in the sliding groove at the bottom of the table frame (1).

4. The removable flip-up table frame mechanism of the laser direct writing lithography machine according to claim 1 is characterized in that: A second threaded barrel (12) is provided inside the rotating plate (6), and a second threaded shaft pin (13) is threadedly connected inside the second threaded barrel (12).

5. The removable flip-up table frame mechanism of the laser direct writing lithography machine according to claim 1, characterized in that: Positioning cylinders (14) are provided on both sides of the top of the table frame (1), and a card-type lock buckle (15) is provided at one end of the fixing plate (4), and a card block on the surface of the card-type lock buckle (15) is card-engaged with a card slot (16) on the surface of the table frame (1).

6. The removable flip-up table frame mechanism of the laser direct writing lithography machine according to claim 1, characterized in that: A handle (17) is provided on the surface of the workbench frame (5).