Heating chamber of high-temperature vacuum furnace
By setting up a combination of a pumping structure and an intake pipe in the heating chamber of a high-temperature vacuum furnace, rapid cooling is achieved and environmental pollution is reduced. The graphite boat and quartz pipe are prevented from contacting with the quartz pipe through the storage structure, the problems of low cooling efficiency and equipment damage in the prior art are solved, and efficient and safe metal indium treatment is achieved.
Patent Information
- Application Number
- CN202420693864.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-07
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-04-07
AI Technical Summary
When cooling metal indium ingots, the heating chamber of the existing high-temperature vacuum furnace uses nitrogen to speed up the cooling rate, but it can easily lead to a decrease in the oxygen content and cause environmental pollution. The graphite boat is easily in contact with the quartz tube and causing damage when placed.
A heating chamber of a high-temperature vacuum furnace is designed, using a combination of a pumping structure and an intake pipe. Air is extracted through the pumping pipe, and nitrogen is charged to achieve rapid cooling. At the same time, a storage structure is set up to prevent the graphite boat from contacting the quartz tube through the coordination of the connecting rod and the chute.
It effectively improves the treatment efficiency of metal indium, reduces environmental pollution, prevents damage to quartz tubes, and achieves efficient and safe operation of the heating chamber.
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Figure CN222560594U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of heating chambers, in particular to a heating chamber of a high-temperature vacuum furnace. Background Art
[0002] The high-temperature vacuum furnace uses a vacuum system (composed of carefully assembled components such as a vacuum pump, a vacuum measuring device, and a vacuum valve) in a specific space of a furnace cavity (heating chamber) to discharge some of the materials in the furnace cavity, so that the pressure in the furnace cavity is less than a standard atmospheric pressure, and the space in the furnace cavity is thus in a vacuum state. By heating to a certain temperature, indium and impurities are volatilized. After cooling, condensed metal indium is present in both the high-temperature zone and the low-temperature zone. The impurities in the metal indium in each zone are distributed differently, with some zones having fewer impurities and some zones having more impurities, thereby achieving the purpose of purification and removing impurities from the entire indium ingot. The heating chamber of the existing high-temperature vacuum furnace is used in There are certain disadvantages in using it. After the metal indium is treated, it needs to be cooled. Nitrogen or argon can be added to the inside of the heating chamber to speed up the cooling speed. Nitrogen is an inert gas and generally does not react with other substances. However, excessive nitrogen content in the air can easily cause the oxygen content to decrease. When the heating chamber is opened, nitrogen is mixed into the air, causing damage to the environment. During processing, the metal indium ingot is placed in a graphite boat, and the graphite boat is placed in a quartz tube of a vacuum furnace. It is easy for it to contact with the quartz tube due to shaking by the hand, thereby damaging the quartz tube. For this reason, we propose a heating chamber for a high-temperature vacuum furnace. Utility Model Content
[0003] The main purpose of the utility model is to provide a heating chamber of a high-temperature vacuum furnace, which can effectively solve the problems in the background technology.
[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:
[0005] A heating chamber of a high-temperature vacuum furnace comprises a heating chamber body, a surface of the heating chamber body having an exhaust structure fixedly installed near the upper position, an upper surface of the heating chamber body having a cover plate hingedly connected, and an interior of the heating chamber body having a storage structure embedded therein.
[0006] In a preferred embodiment, the air extraction structure includes an air extraction pipe, a fan, and an exhaust pipe. The air extraction pipe is embedded and installed on the upper surface of the fan, and the exhaust pipe is embedded and installed on one side surface of the fan.
[0007] In a preferred embodiment, the cover plate includes a first embedding groove, an air inlet pipe, a plate body, and a second embedding groove. The first embedding groove is provided on the upper surface of the plate body near the edge, and the second embedding groove is provided on the upper surface of the plate body on a side away from the first embedding groove. The air inlet pipe is embedded and installed inside the second embedding groove.
[0008] In a preferred embodiment, the heating chamber body includes an insulation layer, a graphite tube, a heating structure, and a slide groove. The interior of the insulation layer is embedded with a heating structure near the lower position, and the upper surface of the heating structure is fixedly installed with a graphite tube at an edge position, and the graphite tubes are in multiple groups. The inner surface of the insulation layer is provided with a slide groove, and the slide grooves are in two groups.
[0009] In a preferred embodiment, the exhaust structure is fixedly mounted on the surface of the insulation layer near the top through a fan, the exhaust pipe is embedded in the first embedding groove, and the plate body is hinged to the upper surface of the insulation layer.
[0010] In a preferred embodiment, the storage structure includes a placement plate, a lifting rod, a connecting rod, and a connecting plate. The surface of the placement plate is fixedly installed with a connecting plate. The connecting plates are divided into two groups. The upper surface of the connecting plate is located near one side and a connecting rod is fixedly installed. The upper surface of the connecting rod is fixedly connected to the lifting rod.
[0011] In a preferred embodiment, the storage structure is embedded and installed in the slide groove through a connecting rod and a connecting plate.
[0012] In summary, due to the adoption of the above technical solution, the beneficial effects of this application are:
[0013] In the utility model, through the provided exhaust pipe and the air inlet pipe, the user can exhaust the air through the exhaust pipe and inflate the air through the air inlet pipe, which is beneficial to improve the processing efficiency of metal indium. Through the provided connecting rod and the slide groove, the user can embed the connecting rod into the interior of the slide groove for sliding, so that the placement plate can move down and up smoothly, preventing the placement plate from hitting the quartz tube during movement and causing damage. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a schematic diagram of the overall structure of a heating chamber of a high-temperature vacuum furnace of the utility model;
[0015] Figure 2 This is a detailed diagram of a cover plate of a heating chamber of a high-temperature vacuum furnace of the utility model;
[0016] Figure 3 This is a top view of the insulation layer of a heating chamber of a high-temperature vacuum furnace of the utility model;
[0017] Figure 4 This is a cross-sectional view of the insulation layer of a heating chamber of a high-temperature vacuum furnace of the utility model;
[0018] Figure 5 The utility model is a heating chamber of a high temperature vacuum furnace Figure 4 A magnified detail of point A.
[0019] In the figure: 1. exhaust structure; 101. exhaust pipe; 102. fan; 103. exhaust pipe; 2. cover plate; 201. first embedded groove; 202. air inlet pipe; 203. plate body; 204. second embedded groove; 3. heating chamber body; 301. insulation layer; 302. graphite tube; 303. heating structure; 304. slide groove; 4. storage structure; 401. placement plate; 402. lifting rod; 403. connecting rod; 404. connecting plate. DETAILED DESCRIPTION
[0020] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in combination with the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0021] Reference Figure 1-5 A heating chamber of a high-temperature vacuum furnace comprises a heating chamber body 3, a suction structure 1 is fixedly installed on the surface of the heating chamber body 3 near the upper position, a cover plate 2 is hingedly connected to the upper surface of the heating chamber body 3, and a storage structure 4 is embedded and installed inside the heating chamber body 3, and the storage structure 4 is made of high-temperature resistant material;
[0022] The exhaust structure 1 includes an exhaust pipe 101, a fan 102, and an exhaust pipe 103. The exhaust pipe 101 is embedded and installed on the upper surface of the fan 102, and the exhaust pipe 103 is embedded and installed on one side of the fan 102; the cover plate 2 includes a first embedding groove 201, an air inlet pipe 202, a plate body 203, and a second embedding groove 204. The upper surface of the plate body 203 is provided with the first embedding groove 201 near the edge, and the upper surface of the plate body 203 is located on the side away from the first embedding groove 201. A second embedding groove 204 is provided, and an air inlet pipe 202 is embedded and installed inside the second embedding groove 204. Both the exhaust pipe 101 and the air inlet pipe 202 are provided with a one-way valve to facilitate gas circulation, and the exhaust pipe 101 and the air inlet pipe 202 are in a closed state when not in use; the heating chamber body 3 includes a heat preservation layer 301, a graphite tube 302, a heating structure 303, and a slide groove 304. The interior of the heat preservation layer 301 is located near the bottom and the heating structure 303 is embedded and installed. The upper surface of the structure 303 is fixedly installed with a graphite tube 302 at the edge position, and the graphite tube 302 is in multiple groups. The inner surface of the insulation layer 301 is provided with a slide groove 304, and the slide groove 304 is in two groups. The exhaust structure 1 is fixedly installed on the surface of the insulation layer 301 through the fan 102, and is located near the upper position. The exhaust pipe 101 is embedded in the inside of the first embedded groove 201, and the plate body 203 is hinged on the upper surface of the insulation layer 301. When in use, the plate body 203 is sealed and fixed on the insulation layer. 301; the storage structure 4 includes a placement plate 401, a lifting rod 402, a connecting rod 403, and a connecting plate 404. The surface of the placement plate 401 is fixedly installed with a connecting plate 404. The connecting plates 404 are divided into two groups. The upper surfaces of the connecting plates 404 are fixedly installed with connecting rods 403 near one side, and the upper surfaces of the connecting rods 403 are fixedly connected with the lifting rods 402. The storage structure 4 is embedded and installed in the interior of the slide groove 304 through the connecting rods 403 and the connecting plates 404.
[0023] The implementation principle of the heating chamber embodiment of the high-temperature vacuum furnace of the present application is as follows: when in use, the graphite boat containing metal indium is placed in the interior of the heating chamber body 3 by the placement structure 4, the heating chamber body 3 is sealed by the cover plate 2, and the exhaust structure 1 performs exhaust treatment; the graphite boat is placed on the placement plate 401, and the connecting plate 404 is embedded in the interior of the slide groove 304, and is slowly lowered downward, the plate body 203 is covered and sealed, the fan 102 is started, and the air in the insulation layer 301 is extracted through the exhaust pipe 101, and the heating structure 303 is started, and the insulation layer 301 is exhausted by the graphite tube 302. The interior of the thermal layer 301 is heated so that the metal indium and impurities on the surface of the metal indium are volatilized due to the high temperature. After the treatment is completed, nitrogen is input into the interior of the thermal insulation layer 301 through the air inlet pipe 202 inside the second embedded groove 204, so that the interior of the thermal insulation layer 301 is quickly cooled down, and condensed metal indium appears at this time. After cooling is completed, the fan 102 is started, and the exhaust pipe 103 is connected to the collection box to collect the nitrogen inside the thermal insulation layer 301. After opening the plate body 203, hold the lifting rod 402 and lift it upward, and the placement plate 401 can be taken out through the connecting rod 403.
[0024] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims
1. A heating chamber of a high temperature vacuum furnace, characterized in that: The heating chamber body (3) comprises a heating chamber body, wherein an exhaust structure (1) is fixedly installed on the surface of the heating chamber body (3) near the upper position, a cover plate (2) is hingedly connected to the upper surface of the heating chamber body (3), and a storage structure (4) is embedded and installed inside the heating chamber body (3).
2. The heating chamber of a high temperature vacuum furnace according to claim 1, characterized in that: The air extraction structure (1) comprises an air extraction pipe (101), a fan (102), and an exhaust pipe (103); the air extraction pipe (101) is embedded and installed on the upper surface of the fan (102), and the exhaust pipe (103) is embedded and installed on one side surface of the fan (102).
3. The heating chamber of a high temperature vacuum furnace according to claim 2, characterized in that: The cover plate (2) comprises a first embedding groove (201), an air intake pipe (202), a plate body (203), and a second embedding groove (204); the first embedding groove (201) is provided on the upper surface of the plate body (203) near the edge; the second embedding groove (204) is provided on the upper surface of the plate body (203) at a side away from the first embedding groove (201); the air intake pipe (202) is embedded and installed inside the second embedding groove (204).
4. The heating chamber of a high temperature vacuum furnace according to claim 3, characterized in that: The heating chamber body (3) comprises a heat-insulating layer (301), a graphite tube (302), a heating structure (303), and a slide groove (304); the interior of the heat-insulating layer (301) is embedded with a heating structure (303) at a position close to the bottom; the upper surface of the heating structure (303) is fixedly mounted with a graphite tube (302) at an edge position; the graphite tube (302) is provided in multiple groups; the inner surface of the heat-insulating layer (301) is provided with a slide groove (304); the slide groove (304) is provided in two groups.
5. The heating chamber of a high temperature vacuum furnace according to claim 4, characterized in that: The exhaust structure (1) is fixedly mounted on the surface of the thermal insulation layer (301) near the top through a fan (102); the exhaust pipe (101) is embedded in the first embedding groove (201); and the plate body (203) is hinged to the upper surface of the thermal insulation layer (301).
6. The heating chamber of a high temperature vacuum furnace according to claim 5, characterized in that: The storage structure (4) comprises a placement plate (401), a lifting rod (402), a connecting rod (403), and a connecting plate (404); the surface of the placement plate (401) is fixedly mounted with a connecting plate (404); the connecting plates (404) are in two groups; the upper surfaces of the connecting plates (404) are fixedly mounted with a connecting rod (403) located near one side; the upper surfaces of the connecting rods (403) are fixedly connected with the lifting rod (402).
7. The heating chamber of a high temperature vacuum furnace according to claim 6, characterized in that: The storage structure (4) is embedded and installed inside the slide groove (304) via a connecting rod (403) and a connecting plate (404).