Double-end-face interference thickness measuring device

Abstract

The utility model discloses a double-end-face interference thickness measuring device. The double-end-face interference thickness measuring device comprises an optical platform and a shell. Comprising an optical base (1) and a shell (2), a helium-neon laser (3), a reflector 1 (4), a reflector 2 (5), a beam expander (6), a convergent lens (7) and a reflector 3 (8) are arranged on the optical base (1), a spectroscope 1 (9) is distributed on one side in an S shape, the spectroscope 1 (9), the reflector 4 (10), the reflector 5 (11), a clamping body (12) and the reflector 6 (13) are distributed in an isosceles triangle shape, and a reticle (14) and a CCD camera (15) are distributed on the other side of the isosceles triangle. The clamping body comprises two spectroscopes (7) and a clamping part, and a motor is installed at the bottom of the clamping body. According to the invention, non-contact non-lapping-in double-end-face measurement of the material to be measured is carried out by using the partial wave surface interference concentric circular ring, so that the precision and the efficiency can be improved, the environmental requirement cost is saved, decimal overlap method operation is omitted, detection automation is facilitated, and direct traceability with national standard meter definition is realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of thickness value measurement, and specifically relates to a double-end surface interference thickness measuring device. Background Art

[0002] Thickness measurement is an important field of modern science and technology. It plays an extremely important role in many fields such as precision machining, aerospace, military and communication. Its accuracy will directly affect the quality and life of related products. Optical measurement has attracted much attention due to its non-contact, high accuracy and high sensitivity. The emergence of laser light sources and precision sensors has brought the thickness measurement accuracy and sensitivity to a very high level, and made it possible to measure online.

[0003] For example, Chinese patent document with publication number CN87210250U discloses a small laser precision instrument, whose laser interferometer optical path is a fine beam interferometer optical path without a beam expansion telescope, and the precision guide rails use two cylindrical guide rails, and the transmission screw and the two cylindrical guide rails are placed parallel to three axes and distributed in a stepped manner.

[0004] A Chinese patent document with publication number CN216348233U discloses a comparator for detecting the size of a workpiece, comprising a base and an inclined frame fixed on the base, wherein the base and the frame form a triangle, a support frame is provided at the upper end of the frame, a lever gear comparator is plugged into the support frame, a rod-shaped detection head is connected to the end of the lever gear comparator, a ball is provided at the end of the detection head away from the lever gear comparator, an auxiliary device 1 and an auxiliary device 2 are provided on the frame, the auxiliary device 1 is movably arranged on one side of the frame, and the auxiliary device 2 is installed at the bottom of the frame, an elongated slot is opened on the frame, and the auxiliary device 2 can move vertically along the slot.

[0005] At present, thickness gauges are widely used in the field of gauge block thickness measurement, and the development of related instruments is endless. So far, they can be summarized as follows: 1) light wave interferometers based on the principle of decimal superposition law, 2) contact laser gauge block length measuring instruments, and 3) automated comparators based on the principles of inductive micrometers, cameras, and gratings. These instruments have all been successful, and some have improved the resolution and performance of the instruments compared to the original contact interferometers. However, these instruments are all traditional single-end measurement schemes, that is, the gauge block and the base flat crystal need to be ground together during the gauge block measurement process. This will inevitably cause wear of the gauge block and the flat crystal, reduce the accuracy of the gauge block, and shorten its life. Secondly, the automated calibration of gauge blocks, especially the batch automatic sorting grades of gauge block manufacturers, are in urgent need of the research and development of non-grinding technology. Based on this, the present application discloses a double-end interference thickness measuring device. Summary of the invention

[0006] In order to solve the above technical problems, the utility model provides a double-end surface interference thickness measuring device.

[0007] The technical solution adopted by the utility model to solve its technical problems is:

[0008] A double-end-face interferometer thickness measuring device, characterized in that it comprises an optical base (1) and a housing (2); the optical base (1) is provided with a helium-neon laser (3), a reflector 1 (4), a reflector 2 (5), a beam expander (6), a converging lens (7), a reflector 3 (8), and a beam splitter 1 (9) which are arranged in an "S" shape on one side; the beam splitter 1 (9), a reflector 4 (10), a reflector 5 (11), a clamping body (12), and a reflector 6 (13) are arranged in an isosceles triangle; and a graticule (14) and a CCD camera (15) are arranged on the other side of the isosceles triangle.

[0009] The reflector comprises a basic base, a straight rod is inserted into the basic base, the height of which can be adjusted, the vertical rod is connected to the auxiliary mirror frame, the reflector is embedded in the main mirror frame and is connected to the auxiliary mirror frame by a spring, and the angle between the reflector and the main mirror frame is adjusted by screws.

[0010] The clamping body comprises a clamping base, a spectroscope, a spectroscope, a fixture for placing the material to be tested, and the material to be tested.

[0011] The clamping base of the clamping body comprises a driving motor, a slide rail and a moving platform. The moving platform is arranged on the slide rail, and the driving motor is used for driving the moving platform to move on the slide rail.

[0012] The beam splitter of the clamping body includes a straight rod, a short cross rod, a long vertical rod, a long cross rod and a mirror frame. The bottom of the straight rod is connected to the short cross rod, the short cross rod can drive the mirror frame to move on the bottom long vertical rod, and the long vertical rod can drive the short cross rod and the mirror frame to move on the long cross rod.

[0013] The fixture of the clamping body includes a sub-frame, a positioning frame, a displacement frame and a positioning rod. The positioning frame is connected to the sub-frame through springs and screws and the angle is adjusted. The displacement frame is connected to the positioning frame through the positioning rod and moves on it. The material to be tested is clamped by the positioning frame and the displacement frame.

[0014] Preferably, two handles are provided on the optical platform.

[0015] Beneficial effects of the utility model:

[0016] The present invention improves efficiency and reduces wear of the material to be tested by using a non-contact and non-grinding method.

[0017] The present invention improves the replacement efficiency of the measured material by a non-contact and non-grinding method.

[0018] The present invention uses a dual-end-face simultaneous measurement method to improve the measurement accuracy of the material to be measured.

[0019] The invention adopts the concentric ring interference theory to obtain the interval, thereby improving the measurement accuracy of the material to be measured.

[0020] The present invention adopts a virtual coherent light source to obtain interference concentric rings, which improves the accuracy while appropriately relaxing the requirements on environmental conditions, thus saving the cost of environmental conditions.

[0021] The present invention adopts a non-contact and non-grinding optical measurement method, which is easy to realize automatic and semi-automatic measurement; in particular, when a material production plant to be measured sorts a large number of materials of the same size, the effect of automatic measurement is more apparent.

[0022] The present invention does not need to predict material thickness, does not need to use multi-wavelength decimal coincidence measurement or phase shift technology, reduces calculation procedures and improves efficiency.

[0023] The present invention links the gauge block measurement value with the national reference meter definition through the medium refractive index and the light source wavelength, etc., and can achieve self-traceability of the gauge block measurement.

[0024] The present invention can design other optical elements except the light source S separately and integrally, and the point light source S can be introduced through optical fiber to achieve measurement requirements in different occasions.

[0025] The only requirement for the posture of the material to be tested involved in the present invention is to ensure that the two beams of light are vertically incident on the two end surfaces of the material to be tested. Therefore, the application requirements of various plane reflections in different occasions can be met.

[0026] The present invention can realize the distance, inclination, translation, vibration, refractive index of transparent materials, and two-dimensional scanning measurement of a single end surface.

[0027] The present invention does not require laboratory-level working conditions during the measurement process, and provides an excellent alternative solution for the automation of related measurements. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0029] Figure 2 This is a schematic diagram of the structure of a He-Ne laser according to an embodiment of the present application;

[0030] Figure 3 A schematic diagram of the structure of the glasses frame according to an embodiment of the present application;

[0031] Figure 4 This is a schematic diagram of the clamping body structure of an embodiment of the present application.

[0032] Among them: 1. optical base; 2. shell; 3. He-Ne laser; 31. basic base; 32. vertical rod; 33. laser body; 4. reflector 1; 42. vertical rod; 43. secondary mirror frame; 44 reflector lens; 45. main mirror frame; 46. screw 1; 47. screw 2; 5. reflector 2; 6. beam expander; 7. converging lens; 8. reflector 3; 9. beam splitter 1; 10. reflector 4; 11. reflector 5; 12. clamping body; 121. clamping base; 1211. drive motor; 1212 , slide rail; 1213 moving platform; 122, spectroscope 2; 1221, straight rod; 1222, short horizontal rod; 1223, long vertical rod; 1224, long horizontal rod; 1225, mirror frame; 123, spectroscope 3; 124, fixture; 1241, sub-frame; 1242, positioning frame; 1243, displacement frame; 1244, positioning rod; 1245, positioning rod; 125, material to be tested; 13, reflector 6; 14, graticule; 15, CCD camera; 16, handle 1; 17, handle 2. DETAILED DESCRIPTION

[0033] In order to deepen the understanding of the present invention, the present invention will be further described in detail below in conjunction with embodiments. The embodiments are only used to explain the present invention and do not limit the protection scope of the present invention.

[0034] Example:

[0035] Reference Figure 1 As shown, a double-end-face interferometer thickness measuring device disclosed in the present application includes an optical base 1 and a housing 2. The optical base 1 is provided with a helium-neon laser 3, a reflector 14, a reflector 25, a beam expander 6, a converging lens 7, a reflector 38, and a beam splitter 19 which are distributed in an "S" shape on one side. The beam splitter 19, the reflector 410, the reflector 511, the clamping body 12, and the reflector 613 are distributed in an isosceles triangle. The graticule 14 and the CCD camera 15 are distributed on the other side of the isosceles triangle. The sample is placed on the fixture 124, the clamping body 12 drives the sample to move, and the sample thickness is detected and processed by the CCD camera 15. The optical base 1 is provided with a handle 116 and a handle 217.

[0036] refer to Figure 1 to Figure 2 The He-Ne laser 3 includes a basic base 31 connected to the optical base plate 1 by screws, and a vertical rod 32. The laser body 33 is connected to the basic base 31 by the vertical rod 32 and the screws to achieve vertical movement.

[0037] refer to Figure 1 and Figure 3The reflector 14 is connected to the optical base plate 1 by screws, a straight rod 42 is inserted into the basic base 31, and the sub-mirror frame is connected to the straight rod. The height is adjusted by screws and the basic base 31. The reflector lens 44 is embedded in the main mirror frame 45 and is connected to the sub-mirror frame 43 by a spring. The angle between the reflector lens 44 and the main mirror frame 45 is adjusted by large screws 146 and 247 so that the mirror surface is perpendicular to the optical base plate 1.

[0038] refer to Figure 1 and Figure 4 , adjust the reflector 410, the beam splitter 2122, the mirror frame 123, the beam splitter 3123, and the reflector 613 to be in a straight line.

[0039] The structures and adjustment methods of the reflector 25 , the converging lens 7 , the reflector 38 , the beam splitter 19 , the reflector 410 , the reflector 511 , and the reflector 613 refer to those of the reflector 14 .

[0040] The structure and adjustment method of the beam expander 6 and the graticule 14 refer to the helium-neon laser.

[0041] The front and rear surfaces of the material to be tested 125 are coated with a reflective film.

[0042] refer to Figure 1 , He-Ne laser 3, mirror 14, mirror 25, beam expander 6, converging lens 7, mirror 38, beam splitter 19, mirror 410, mirror 511, beam splitter 122, beam splitter 123, material to be tested 124, mirror 613, graticule 14, and CCD camera 15 are adjusted to the same height.

[0043] refer to Figure 1 Adjustment is made so that the laser light emitted by the He-Ne laser 3 enters the beam expander 6 through the reflectors 14 and 25, is converged by the converging lens 7 and reflected by the reflector 38, and is then split by the beam splitter into transmitted light and reflected light, forming a point light source on the reflectors 410 and 511.

[0044] refer to Figure 1 Adjustment is performed so that the interference ring formed by the point light sources on the reflectors 410 and 511 and the beam splitter 2122 , the beam splitter 3123 and the material to be tested 125 is displayed on the graticule 14 via the beam splitter 19 and the reflector 613 and recorded by the CCD camera 15 .

[0045] The above implementation examples should not limit the present utility model in any way, and all technical solutions obtained by equivalent replacement or equivalent conversion are implemented within the protection scope of the present utility model.

Claims

1. A double-end-face interferometer thickness measuring device, characterized in that: The invention comprises an optical base (1) and a housing (2). The optical base (1) is provided with a helium-neon laser (3), a reflector 1 (4), a reflector 2 (5), a beam expander (6), a converging lens (7), a reflector 3 (8), and a beam splitter 1 (9) which are arranged in an "S" shape on one side, and the beam splitter 1 (9), a reflector 4 (10), a reflector 5 (11), a clamping body (12), and a reflector 6 (13) are arranged in an isosceles triangle. A graticule (14) and a CCD camera (15) are arranged on the other side of the isosceles triangle.

2. The double-end-face interferometer thickness measuring device according to claim 1, characterized in that: The optical base (1) is provided with a handle 1 (16) and a handle 2 (17).

3. The double-end-face interferometer thickness measuring device according to claim 1, characterized in that: The reflector 1 (4) comprises a base (31), a straight rod (42) is inserted into the base, and the height can be adjusted. The vertical rod is connected to the auxiliary mirror frame (43). The reflector lens (44) is embedded in the main mirror frame (45) and is connected to the auxiliary mirror frame (43) by a spring. The angle between the reflector lens (44) and the main mirror frame (45) is adjusted by two screws (46) (47).

4. The double-end-face interferometer thickness measuring device according to claim 1, characterized in that: The clamping body (12) comprises a clamping base (121), a spectroscope 2 (122), a spectroscope 3 (123), a fixture (124) for placing a material to be tested, and a material to be tested (125).

5. The dual-end-face interferometer thickness measuring device according to claim 4, characterized in that: The clamping base (121) of the clamping body (12) comprises a driving motor (1211), a slide rail (1212) and a moving platform (1213); the moving platform is arranged on the slide rail (1212); and the driving motor is used to drive the moving platform (1213) to move on the slide rail (1212).

6. The dual-end-face interferometer thickness measuring device according to claim 4, characterized in that: The beam splitter 2 (122) of the clamping body (12) comprises a straight rod (42), a short cross rod (1222), a long vertical rod (1223), a long cross rod (1224) and a mirror frame (1225); the bottom of the straight rod (1221) is connected to the short cross rod (1222); the short cross rod can drive the mirror frame to move on the long vertical rod (1223) at the bottom; and the long vertical rod (1223) can drive the short cross rod (1222) and the mirror frame to move on the long cross rod (1224).

7. The dual-end-face interferometer thickness measuring device according to claim 4, characterized in that: The beam splitter 3 (123) of the clamping body (12) has the same structure as the beam splitter 2 (122).

8. The dual-end-face interferometer thickness measuring device according to claim 4, characterized in that: The clamp (124) of the clamping body (12) comprises a sub-frame (1241), a positioning frame (1242), a displacement frame (1243) and a positioning rod (1244) (1245); the positioning frame (1242) is connected to the sub-frame (1241) by springs and screws and the angle thereof can be adjusted; the displacement frame is connected to the positioning frame by positioning rods (1244) (1245) and moves thereon; the material (125) to be tested is clamped by the positioning frame (1242) and the displacement frame (1243).

9. The dual-end-face interferometer thickness measuring device according to claim 1, characterized in that: The helium-neon laser (3) comprises a basic base (31), a vertical rod (32) and a laser body (33); the laser body (33) is connected to the base (31) by means of the vertical rod (32) and can move up and down.

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