Clean bin and wafer carrying device

Abstract

The utility model provides a clean bin and a wafer carrying device, the clean bin comprises an air filter and a material storage box module, the air filter is arranged at the top of the material storage box module and is used for introducing filtered clean air into the material storage box module; the material storage box module comprises at least one material storage box, and ventilation holes are formed in the material storage box. According to the clean bin provided by the utility model, the air filter is arranged at the top of the material storage box module, the air filter conveys ambient air into the material storage box module from top to bottom through the built-in fan and the filter screen, and continuous clean air supply promotes polluted air to be discharged, and meanwhile, effective isolation of the ambient air can be ensured; therefore, the cleanliness of air in the storage box module is guaranteed, and wafer products are prevented from being polluted in the carrying process.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor handling equipment, in particular to a clean warehouse and a wafer handling device. Background Art

[0002] With the rapid development of science and technology, semiconductor chips have become one of the core components of modern electronic products. In semiconductor manufacturing plants, wafers, as the basis for manufacturing chips and integrated circuits, usually need to be efficiently and precisely transferred between different process modules of each production line. In order to ensure the quality and production efficiency of semiconductor chips, it is necessary to provide wafers with a cleanliness level of up to 100 or even above 10. Therefore, the development of a clean warehouse for storing wafers and a wafer handling device has become a problem that needs to be solved urgently in the industry. Utility Model Content

[0003] The utility model provides a clean room and a wafer transport device, which are used to solve the problem that the wafer transport process is easily contaminated in the prior art and achieve the purpose of transporting the wafer with high cleanliness.

[0004] The utility model provides a clean warehouse, which comprises an air filter and a material storage box module, wherein the air filter is arranged on the top of the material storage box module and is used for introducing filtered clean air into the material storage box module; the material storage box module comprises at least one material storage box, and ventilation holes are arranged on the material storage box.

[0005] According to a clean warehouse provided by the utility model, the material storage box module includes two material storage boxes, and the two material storage boxes are stacked together in a vertical direction.

[0006] According to a clean bin provided by the utility model, the ventilation holes include air inlet holes and air outlet holes, the air inlet holes are arranged on the top plate of the material storage box, and the air outlet holes are arranged on the bottom plate and / or side plate of the material storage box.

[0007] According to a clean bin provided by the utility model, the material storage box adopts a drawer structure.

[0008] According to a clean warehouse provided by the utility model, the storage box module includes a left side plate, a right side plate, a first bottom plate, a second bottom plate, a first front side plate, a first top plate, a second top plate, a second front side plate and a surrounding plate;

[0009] The left side plate and the right side plate are vertically arranged on the first bottom plate; the second bottom plate is slidably arranged between the left side plate and the right side plate on the first bottom plate, and one end of the second bottom plate is connected to the first front side plate to form a first L-shaped structure; the first L-shaped structure can be pushed in or pulled out relative to the first bottom plate;

[0010] The first top plate is fixedly connected between the left side plate and the right side plate and is parallel to the first bottom plate; the second top plate is located between the left side plate and the right side plate and is slidably arranged on the first top plate, and one end of the second top plate is connected to the second front side plate to form a second L-shaped structure; the second L-shaped structure can be pushed in or pulled out relative to the first top plate;

[0011] The air filter is arranged on the top of the left side plate and the right side plate, and the enclosure plate is arranged around the outside of the left side plate, the right side plate and the air filter;

[0012] The left side panel, the right side panel, the second bottom panel, the first front side panel and the surrounding panel constitute a first drawer structure, and the space enclosed by the first drawer structure constitutes a first storage space; the left side panel, the right side panel, the second top panel, the second front side panel and the surrounding panel constitute a second drawer structure, and the space enclosed by the second drawer structure constitutes a second storage space.

[0013] Furthermore, the first bottom plate, the second bottom plate, the first top plate and the second top plate are all provided with the ventilation holes.

[0014] Furthermore, the second bottom plate and the first bottom plate are connected via a slide rail, and the second top plate and the first top plate are connected via a slide rail.

[0015] Furthermore, a vent hole is provided at a position of the enclosure corresponding to the top of the air filter; and a vent hole is provided at a position of the enclosure corresponding to the middle and lower parts of the left plate and the right plate.

[0016] The utility model also provides a wafer handling device, which comprises the clean room, the robot arm assembly, the automatic guided vehicle and the clamping assembly as described in any one of the above items;

[0017] The clean chamber and the robotic arm assembly are both arranged on the automatic guided vehicle, and the clamping assembly is arranged at the end of the robotic arm in the robotic arm assembly; the clean chamber is used to store wafers, and the robotic arm assembly is used to drive the clamping assembly to move, and the clamping assembly is used to clamp wafers from the clean chamber or place wafers into the clean chamber, and the automatic guided vehicle is used to carry the clean chamber and the robotic arm assembly for movement.

[0018] According to a wafer handling device provided by the utility model, the robotic arm assembly includes a driving mechanism, a carrier and a robotic arm, the driving mechanism is arranged in the carrier, the robotic arm is installed on the top of the carrier through a base, the driving mechanism is used to drive the robotic arm to move, and the robotic arm is used to drive the clamping assembly to clamp the wafer from the clean chamber or place the wafer into the clean chamber.

[0019] In the clean bin provided by the utility model, an air filter is arranged on the top of the storage box module. The air filter transports ambient air from top to bottom to the storage box module through the built-in fan and filter. The continuous supply of clean air prompts the polluted air to be discharged while ensuring the effective isolation of the ambient air, thereby ensuring the cleanliness of the air inside the storage box module and avoiding contamination of the wafer products. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 This is one of the structural schematic diagrams of the clean room provided by the utility model;

[0022] Figure 2 This is the second structural schematic diagram of the clean room provided by the utility model;

[0023] Figure 3 It is a structural schematic diagram of a wafer transport device provided by the utility model.

[0024] Reference numerals:

[0025] 1. Air filter;

[0026] 2. Material storage box module; 21. Left side plate; 22. Right side plate; 23. First bottom plate; 24. Second bottom plate; 25. First front side plate; 26. First top plate; 27. Second top plate; 28. Second front side plate;

[0027] 29. Coaming; 291. Ventilation hole;

[0028] 3. Ventilation holes;

[0029] 10. Clean warehouse;

[0030] 20. Robotic arm assembly; 201. Carrying body; 202. Robotic arm;

[0031] 30. Automatic guided vehicle; 40. Gripping assembly. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] Wafers are thin, light, brittle and have high requirements for environmental cleanliness. In order to reduce the risk of wafers being contaminated during transportation, they need to be stored in a clean warehouse for transportation.

[0034] Combine the following Figure 1-Figure 3 The utility model describes a clean room and a wafer transport device.

[0035] like Figure 1 and Figure 2 As shown, the clean room provided by the utility model is used for storing wafers, and comprises an air filter 1 and a storage box module 2, wherein the air filter 1 is arranged on the top of the storage box module 2, and is used to pass filtered clean air into the storage box module 2. The storage box module 2 comprises at least one storage box, and a ventilation hole 3 is arranged on the storage box to facilitate the entry of new air and the discharge of polluted air.

[0036] In this embodiment, the material storage box module 2 may include two material storage boxes, and the two material storage boxes are stacked together in the vertical direction.

[0037] Specifically, the ventilation holes 3 include an air inlet and an air outlet. The air inlet can be arranged on the top plate of the material storage box, and the air outlet can be arranged on the bottom plate of the material storage box or on the side plate of the material storage box.

[0038] The air filter 1 is used to pass filtered clean air into the storage box through the air inlet hole, and the polluted air and part of the filtered clean air are discharged from the air outlet hole.

[0039] Ambient air is passed into the air filter 1 for filtration, and the air filter 1 transports the filtered air from top to bottom to the storage box or the storage box module 2. The continuous supply of clean air prompts the polluted air to be discharged from the storage box or the storage box module 2 while ensuring the effective isolation of the ambient air, thereby ensuring the cleanliness of the air in the storage space and avoiding contamination of the wafer products in the storage space.

[0040] In a specific embodiment, two material storage boxes can be provided, and the two material storage boxes are stacked together in the vertical direction to form a vertical material storage box module 2. Among them, the air filter 1 is arranged on the top of the material storage box module 2, and the clean air filtered by the air filter 1 can be continuously passed into the material storage box module 2. Specifically, the material storage box can adopt a drawer structure, and the material storage box can be opened by pushing and pulling, so as to push out the wafers stored in the material storage box.

[0041] In another specific embodiment, the storage box module 2 includes a left side plate 21, a right side plate 22, a first bottom plate 23, a second bottom plate 24, a first front side plate 25, a first top plate 26, a second top plate 27, a second front side plate 28 and a surrounding plate 29.

[0042] Wherein, the left side plate 21 and the right side plate 22 are vertically arranged on the first bottom plate 23; the second bottom plate 24 is slidably arranged on the first bottom plate 23 between the left side plate 21 and the right side plate 22, and one end of the second bottom plate 24 is connected to the first front side plate 25 to form a first L-shaped structure. The first top plate 26 is fixedly connected between the left side plate 21 and the right side plate 22 and is parallel to the first bottom plate 23. The second top plate 27 is slidably arranged on the first top plate 26 between the left side plate 21 and the right side plate 22, and one end of the second top plate 27 is connected to the second front side plate 28 to form a second L-shaped structure. The air filter 1 is arranged on the top of the left side plate 21 and the right side plate 22, and the enclosure 29 is arranged around the outside of the left side plate 21, the right side plate 22 and the air filter 1.

[0043] The left side plate 21, the right side plate 22, the second bottom plate 24, the first front side plate 25 and the surrounding plate 29 constitute a first drawer structure, and the space enclosed by the first drawer structure constitutes a first material storage space. The left side plate 21, the right side plate 22, the second top plate 27, the second front side plate 28 and the surrounding plate 29 constitute a second drawer structure, and the space enclosed by the second drawer structure constitutes a second material storage space. Wafers can be stored in both the first material storage space and the second material storage space.

[0044] The first L-shaped structure can slide relative to the first bottom plate 23 to be pushed in or pulled out. The second L-shaped structure can slide relative to the first top plate 26 to be pushed in or pulled out.

[0045] The first bottom plate 23, the second bottom plate 24, the first top plate 26 and the second top plate 27 are all provided with ventilation holes, so that the clean air filtered by the air filter 1 can continuously flow into the first material storage space and the second material storage space.

[0046] In this embodiment, the second bottom plate 24 and the first bottom plate 23 are connected via a slide rail, and the second top plate 27 and the first top plate 26 are connected via a slide rail.

[0047] In this embodiment, in order to facilitate the entry of ambient air into the air filter 1, the enclosing plate 29 is provided with a vent 291 at the position corresponding to the top of the air filter 1. In order to facilitate the discharge of polluted air from the storage box module 2, the enclosing plate 29 is provided with a vent 291 at the position corresponding to the middle and lower part of the left plate 21 and the right plate 22.

[0048] Based on the clean room provided by the utility model, the utility model also provides a wafer transport device.

[0049] like Figure 3 As shown, the wafer handling device provided by the utility model includes a clean chamber 10, a robot arm assembly 20, an automatic guided vehicle 30 and a gripping assembly 40. Among them, the clean chamber 10 and the robot arm assembly 20 are both arranged on the automatic guided vehicle 30, and the end of the robot arm in the robot arm assembly 20 is provided with a gripping assembly 40. The clean chamber 10 is used to store wafers, the robot arm assembly 20 is used to drive the gripping assembly 40 to move, the gripping assembly 40 is used to grip wafers from the clean chamber 10 or place wafers into the clean chamber 10, and the automatic guided vehicle 30 is used to carry the clean chamber 10 and the robot arm assembly 20 for movement.

[0050] Specifically, the robot arm assembly 20 includes a driving mechanism (not shown in the figure), a carrier body 201 and a robot arm 202, wherein the driving mechanism is arranged in the carrier body 201, and the robot arm 202 is installed on the top of the carrier body 201 through a base, and the driving mechanism is used to drive the robot arm 202 to move, and the robot arm 202 is used to drive the clamping assembly 40 to move, so that the clamping assembly 40 clamps the wafer from the clean chamber 10 or places the wafer into the clean chamber 10.

[0051] In this embodiment, the clean chamber 10 is fixedly connected to the top of the carrier 201 via the first bottom plate 23 .

[0052] The wafer handling device provided by the utility model can ensure the access level in the storage space and protect the wafers from contamination by adding an air filter 1 on the top of the storage box to continuously introduce filtered clean air into the storage box or the storage box module 2.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A clean warehouse, characterized in that: It comprises an air filter and a material storage box module, wherein the air filter is arranged on the top of the material storage box module and is used to introduce filtered clean air into the material storage box module; the material storage box module comprises at least one material storage box, and ventilation holes are arranged on the material storage box.

2. The clean room according to claim 1, characterized in that: The material storage box module comprises two material storage boxes, and the two material storage boxes are stacked together in a vertical direction.

3. The clean room according to claim 1, characterized in that: The ventilation holes include air inlet holes and air outlet holes, wherein the air inlet holes are arranged on the top plate of the material storage box, and the air outlet holes are arranged on the bottom plate and / or side plate of the material storage box.

4. The clean room according to claim 1, characterized in that: The material storage box adopts a drawer structure.

5. The clean room according to claim 1, characterized in that: The material storage box module comprises a left side plate, a right side plate, a first bottom plate, a second bottom plate, a first front side plate, a first top plate, a second top plate, a second front side plate and a surrounding plate; The left side plate and the right side plate are vertically arranged on the first bottom plate; the second bottom plate is slidably arranged between the left side plate and the right side plate on the first bottom plate, and one end of the second bottom plate is connected to the first front side plate to form a first L-shaped structure; the first L-shaped structure can be pushed in or pulled out relative to the first bottom plate; The first top plate is fixedly connected between the left plate and the right plate and is parallel to the first bottom plate; The second top plate is located between the left side plate and the right side plate, and is slidably arranged on the first top plate, and one end of the second top plate is connected to the second front side plate to form a second L-shaped structure; The second L-shaped structure can be pushed in or pulled out relative to the first top plate; The air filter is arranged on the top of the left side plate and the right side plate, and the enclosure plate is arranged around the outside of the left side plate, the right side plate and the air filter; The left side panel, the right side panel, the second bottom panel, the first front side panel and the surrounding panel constitute a first drawer structure, and the space enclosed by the first drawer structure constitutes a first storage space; the left side panel, the right side panel, the second top panel, the second front side panel and the surrounding panel constitute a second drawer structure, and the space enclosed by the second drawer structure constitutes a second storage space.

6. The clean room according to claim 5, characterized in that: The first bottom plate, the second bottom plate, the first top plate and the second top plate are all provided with ventilation holes.

7. The clean room according to claim 5, characterized in that: The second bottom plate is connected to the first bottom plate via a slide rail, and the second top plate is connected to the first top plate via a slide rail.

8. The clean room according to claim 5, characterized in that: The portion of the enclosure corresponding to the top of the air filter is provided with a vent hole; the portion of the enclosure corresponding to the middle and lower portions of the left side plate and the right side plate is provided with a vent hole.

9. A wafer transport device, characterized in that: It comprises a clean room, a robot arm assembly, an automatic guided vehicle and a gripping assembly as described in any one of claims 1 to 8; The clean room and the mechanical arm assembly are both arranged on the automatic guided vehicle, and the clamping assembly is arranged at the end of the mechanical arm in the mechanical arm assembly; The clean chamber is used to store wafers, the robotic arm assembly is used to drive the clamping assembly to move, the clamping assembly is used to clamp wafers from the clean chamber or place wafers into the clean chamber, and the automatic guided vehicle is used to carry the clean chamber and the robotic arm assembly for movement.

10. The wafer transport device according to claim 9, characterized in that: The robotic arm assembly includes a driving mechanism, a carrier and a robotic arm, wherein the driving mechanism is disposed in the carrier, and the robotic arm is mounted on the top of the carrier through a base, and the driving mechanism is used to drive the robotic arm to move, and the robotic arm is used to drive a clamping assembly to clamp a wafer from a clean chamber or place a wafer into the clean chamber.

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