Sealing and lifting mechanism for semiconductor equipment

Abstract

The utility model belongs to the technical field of semiconductors, in particular to a semiconductor equipment sealing and lifting mechanism, which comprises a support column and a sealing device, the upper surface of the support column is fixedly connected with a tray, and the surfaces of the support column and the tray are provided with through holes; a sealing device is arranged on the surfaces of the supporting column and the tray and comprises a main cover and an auxiliary cover, the surfaces of the supporting column and the tray are sleeved with the main cover and the auxiliary cover, two fixing blocks are fixedly connected to the positions, close to the main cover, of the side wall of the auxiliary cover, and auxiliary devices are arranged on the surfaces of the main cover and the auxiliary cover and comprise four clamping grooves. The four clamping grooves are uniformly formed in the surfaces of the main cover and the auxiliary cover, rubber rings are inserted into the inner walls of the clamping grooves of the main cover and the auxiliary cover, and two limiting grooves are formed in the surface of the supporting column; and by arranging the main cover and the auxiliary cover, the sealing performance of the whole mechanism can be improved, meanwhile, the position between the main cover and the auxiliary cover can be fixed through the inserting block and the fixing block, and the stability of the mechanism in the using process is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a sealing and lifting mechanism for semiconductor equipment. Background Art

[0002] Semiconductors refer to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. Common semiconductor materials include silicon, germanium, gallium arsenide, etc. Silicon is the most influential semiconductor material in various applications.

[0003] A Chinese patent application CN217947541U discloses a sealing lifting mechanism and a semiconductor device, the key points of the technical solution are: by arranging the first sealing member and the second sealing member in the first channel, with the first sealing member close to and facing the internal chamber, and the second sealing member away from and facing away from the internal chamber, a multi-layer sealing effect is achieved by the first sealing member and the second sealing member, which improves the sealing performance of the sealing lifting mechanism and is also conducive to the installation or removal of the first sealing member and the second sealing member.

[0004] With respect to the above-mentioned and existing related technologies, the inventors believe that the following defects often exist: when semiconductor production is carried out, a lifting mechanism is generally used for transportation, and a sealing assembly is provided on the lifting mechanism. Since the traditional sealing assembly lacks a mechanical fixing mechanism, the problem of unstable fixing may occur in actual use; therefore, a semiconductor equipment sealing lifting mechanism is proposed to address the above-mentioned problems. Utility Model Content

[0005] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0006] The technical solution adopted by the utility model to solve its technical problems is: the semiconductor equipment sealing lifting mechanism described in the utility model includes a support column and a sealing device, the upper surface of the support column is fixedly connected with a tray, and the surfaces of the support column and the tray are provided with through holes; the surfaces of the support column and the tray are provided with a sealing device, and the sealing device includes a main cover and a sub-cover, the main cover and the sub-cover are sleeved on the surfaces of the support column and the tray, the side wall of the sub-cover is fixedly connected with two fixed blocks near the main cover, the inner wall of the main cover is slidably connected with an insert block near the fixed block, and the insert block is inserted into the inner wall of the fixed block, when the main cover and the sub-cover need to be fixed, the main cover and the sub-cover are fitted to the support column and the tray, and the sealing of the support column and the tray can be increased by setting the main cover and the sub-cover.

[0007] Preferably, a plug hole is provided on the surface of the fixed block, and the plug block is inserted into the inner wall of the plug hole of the fixed block. When the plug block slides, the plug block is inserted into the inner wall of the plug hole of the fixed block, and the opening of the plug hole can accommodate the plug block.

[0008] Preferably, a storage groove is provided on the surface of the main cover near the plug block, and the inner wall of the storage groove of the main cover is slidably connected to the surface of the plug block. When the plug block slides, the plug block slides on the inner wall of the storage groove of the main cover. The opening of the storage groove can facilitate the movement of the plug block.

[0009] Preferably, the side wall of the plug block is fixedly connected with a moving rod, the surface of the moving rod and the inner wall of the storage groove of the main cover are slidably connected, the side wall of the plug block and the inner surface of the storage groove of the main cover are fixedly connected with a spring, the spring is sleeved on the surface of the moving rod, and the spring will rebound when the moving rod is released, and the spring drives the plug block and the moving rod to move, and the plug block is inserted into the inner wall of the fixed block. The spring can drive the plug block to move and limit the position of the plug block at the same time.

[0010] Preferably, the surfaces of the main cover and the auxiliary cover are provided with auxiliary devices, and the auxiliary devices include four card slots, and the four card slots are evenly opened on the surfaces of the main cover and the auxiliary cover, and rubber rings are inserted into the inner walls of the card slots of the main cover and the auxiliary cover, and two limiting grooves are opened on the surface of the support column, and the rubber rings are inserted into the inner walls of the limiting grooves of the support column. The rubber rings are inserted into the inner walls of the limiting grooves of the support column, and the sealing between the main cover, the auxiliary cover and the support column can be increased by setting the rubber rings.

[0011] Preferably, the upper and lower ends of the rubber ring are fixedly connected with fixing strips, a collecting groove is opened on the surface of the sub-cover near the fixing strip, the fixing strip is inserted into the inner wall of the collecting groove of the sub-cover, and the fixing strip is inserted into the collecting groove. The setting of the fixing strip can reduce the situation where the rubber ring falls out of the sub-cover when the sub-cover moves.

[0012] The utility model is beneficial in that:

[0013] 1. When the support column and the tray are used, the utility model uses an insert rod to insert the insert rod into the inner wall of the moving rod, pushes the insert rod to drive the moving rod to move, the moving rod drives the insert block to slide, the moving rod and the insert block slide on the inner wall of the storage groove, and the sliding of the insert block drives the spring to stretch. After the insert block slides to a suitable position, the main cover and the auxiliary cover are put on the surface of the support column and the tray, and the movement of the auxiliary cover drives the fixed block to slide, and the fixed block is inserted into the inner wall of the storage groove of the main cover. When the insert rod is released, the spring will rebound, and the spring drives the insert block to slide, and the insert block is inserted into the inner wall of the insertion hole of the fixed block. By setting the main cover and the auxiliary cover, the sealing of the entire mechanism can be increased. At the same time, the insert block and the fixed block can fix the position between the main cover and the auxiliary cover, and the spring can reduce the number of operating steps.

[0014] 2. When the main cover and the auxiliary cover are used, the utility model inserts the rubber ring into the card slot of the main cover or the auxiliary cover. When the rubber ring moves, it drives the fixing bar to slide. The fixing bar is inserted into the collecting groove. When the main cover or the auxiliary cover moves, it drives the rubber ring to move. The rubber ring is inserted into the inner wall of the limiting groove of the support column. By setting the rubber ring, the sealing between the main cover or the auxiliary cover and the support column can be increased. At the same time, the fixing bar can fix the position of the rubber ring to reduce the possibility of the rubber ring falling off. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the support column in the sealing lifting mechanism of the semiconductor equipment;

[0017] Figure 2 Sealing lift mechanism for semiconductor equipment Figure 1 A schematic diagram of the structure at A;

[0018] Figure 3 It is a side view structural schematic diagram of a support column in a sealing lifting mechanism of a semiconductor device;

[0019] Figure 4 Sealing lift mechanism for semiconductor equipment Figure 3 Schematic diagram of the structure at point B.

[0020] In the figure: 1. support column; 2. tray; 3. through hole; 4. sealing device; 41. main cover; 42. auxiliary cover; 43. fixing block; 44. plug-in block; 45. plug-in hole; 46. storage slot; 47. spring; 48. moving rod; 5. auxiliary device; 51. card slot; 52. rubber ring; 53. limit slot; 54. fixing strip; 55. collecting slot. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-4As shown, a semiconductor equipment sealing lifting mechanism comprises a support column 1 and a sealing device 4, wherein a tray 2 is fixedly connected to the upper surface of the support column 1, and through holes 3 are provided on the surfaces of the support column 1 and the tray 2; a sealing device 4 is provided on the surfaces of the support column 1 and the tray 2, and the sealing device 4 comprises a main cover 41 and a sub-cover 42, wherein the main cover 41 and the sub-cover 42 are sleeved on the surfaces of the support column 1 and the tray 2, and two fixing blocks 43 are fixedly connected to the side wall of the sub-cover 42 near the main cover 41, and the inner wall of the main cover 41 is close to the main cover 41. An insert block 44 is slidably connected near the fixed block 43, and the insert block 44 is inserted into the inner wall of the fixed block 43; when working, the main cover 41 and the auxiliary cover 42 are fitted against the support column 1 and the tray 2, and when the auxiliary cover 42 moves, it will drive the fixed block 43 to be inserted into the inner wall of the main cover 41, and then the insert block 44 is moved to allow the insert block 44 to be inserted into the inner wall of the fixed block 43. By setting the main cover 41 and the auxiliary cover 42, the sealing of the support column 1 and the tray 2 can be increased, and at the same time, the insert block 44 and the fixed block 43 can fix the positions of the main cover 41 and the auxiliary cover 42.

[0023] The surface of the fixing block 43 is provided with an insertion hole 45 , and the insertion block 44 is inserted into the inner wall of the insertion hole 45 of the fixing block 43 ; when working, the insertion block 44 is inserted into the inner wall of the insertion hole 45 of the fixing block 43 , and the opening of the insertion hole 45 can accommodate the insertion block 44 .

[0024] A receiving groove 46 is provided on the surface of the main cover 41 near the plug block 44, and the inner wall of the receiving groove 46 of the main cover 41 is slidably connected to the surface of the plug block 44; when working, the plug block 44 slides on the inner wall of the receiving groove 46 of the main cover 41, and the opening of the receiving groove 46 can facilitate the movement of the plug block 44.

[0025] The side wall of the plug block 44 is fixedly connected with a moving rod 48, and the surface of the moving rod 48 is slidably connected to the inner wall of the storage groove 46 of the main cover 41. The side wall of the plug block 44 and the inner surface of the storage groove 46 of the main cover 41 are fixedly connected with a spring 47, and the spring 47 is sleeved on the surface of the moving rod 48; when working, the moving rod 48 is pushed to allow the moving rod 48 to drive the plug block 44 to slide, and the plug block 44 drives the spring 47 to stretch, and when the fixed block 43 moves to a suitable position, the moving rod 48 is released and the spring 47 rebounds, and the spring 47 drives the plug block 44 and the moving rod 48 to move, and the plug block 44 is inserted into the inner wall of the fixed block 43. The spring 47 can drive the plug block 44 to move and limit the position of the plug block 44 at the same time.

[0026] The surfaces of the main cover 41 and the auxiliary cover 42 are provided with an auxiliary device 5, and the auxiliary device 5 includes four card slots 51, and the four card slots 51 are evenly arranged on the surfaces of the main cover 41 and the auxiliary cover 42, and the inner walls of the card slots 51 of the main cover 41 and the auxiliary cover 42 are inserted with rubber rings 52, and the surface of the support column 1 is provided with two limiting grooves 53, and the rubber ring 52 is inserted into the inner wall of the limiting groove 53 of the support column 1; when working, a plurality of rubber rings 52 are respectively inserted into the inner wall of the card slots 51 of the main cover 41 and the auxiliary cover 42, and when the main cover 41 and the auxiliary cover 42 move, the rubber ring 52 will be driven to move, and the rubber ring 52 is inserted into the inner wall of the limiting groove 53 of the support column 1, and the sealing between the main cover 41, the auxiliary cover 42 and the support column 1 can be increased by setting the rubber ring 52.

[0027] The upper and lower ends of the rubber ring 52 are fixedly connected with fixing strips 54, and a collecting groove 55 is opened on the surface of the sub-cover 42 near the fixing strip 54, and the fixing strip 54 is inserted into the inner wall of the collecting groove 55 of the sub-cover 42; when working, the rubber ring 52 will drive the fixing strip 54 to move, and the fixing strip 54 is inserted into the collecting groove 55. The setting of the fixing strip 54 can reduce the situation where the rubber ring 52 falls from the sub-cover 42 when the sub-cover 42 moves.

[0028] Working principle, when using the support column 1 and the tray 2, use the insertion rod to insert the insertion rod into the inner wall of the moving rod 48, push the insertion rod to let the insertion rod drive the moving rod 48 to move, the moving rod 48 drives the insertion block 44 to slide, the moving rod 48 and the insertion block 44 slide on the inner wall of the storage groove 46, and the insertion block 44 will drive the spring 47 to stretch when it slides. After the insertion block 44 slides to a suitable position, the main cover 41 and the auxiliary cover 42 are put on the surface of the support column 1 and the tray 2. When the auxiliary cover 42 moves, it will drive the fixed block 43 to slide, and the fixed block 43 is inserted into the inner wall of the storage groove 46 of the main cover 41. When the insertion rod is released, the spring 47 will rebound, and the spring 47 drives the insertion block 44 to slide, and the insertion block 44 is inserted into the inner wall of the socket 45 of the fixed block 43. By setting the main cover 41 and the auxiliary cover 42, it can increase The sealing of the entire mechanism is enhanced, and at the same time, the insert block 44 and the fixing block 43 can fix the position between the main cover 41 and the auxiliary cover 42, and the spring 47 can reduce the number of operating steps; when using the main cover 41 and the auxiliary cover 42, the rubber ring 52 is inserted into the card slot 51 of the main cover 41 or the auxiliary cover 42, and the rubber ring 52 will drive the fixing strip 54 to slide when it moves, and the fixing strip 54 is inserted into the collecting groove 55. When the main cover 41 or the auxiliary cover 42 moves, it will drive the rubber ring 52 to move, and the rubber ring 52 is inserted into the inner wall of the limiting groove 53 of the support column 1. By setting the rubber ring 52, the sealing between the main cover 41 or the auxiliary cover 42 and the support column 1 can be increased, and at the same time, the fixing strip 54 can fix the position of the rubber ring 52 to reduce the possibility of the rubber ring 52 falling off.

[0029] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0030] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A semiconductor equipment sealing and lifting mechanism, comprising a support column (1) and a sealing device (4), wherein a tray (2) is fixedly connected to the upper surface of the support column (1), and through holes (3) are provided on the surfaces of the support column (1) and the tray (2); characterized in that: The surfaces of the support column (1) and the tray (2) are provided with a sealing device (4), the sealing device (4) comprising a main cover (41) and a sub-cover (42), the main cover (41) and the sub-cover (42) being sleeved on the surfaces of the support column (1) and the tray (2), the side wall of the sub-cover (42) being fixedly connected to two fixed blocks (43) at a position close to the main cover (41), the inner wall of the main cover (41) being slidably connected to an insert block (44) at a position close to the fixed block (43), the insert block (44) being inserted into the inner wall of the fixed block (43).

2. The semiconductor device sealing and lifting mechanism according to claim 1, characterized in that: The surface of the fixing block (43) is provided with an insertion hole (45), and the insertion block (44) is inserted into the inner wall of the insertion hole (45) of the fixing block (43).

3. The semiconductor device sealing and lifting mechanism according to claim 1, characterized in that: A receiving groove (46) is provided on the surface of the main cover (41) at a position close to the insert block (44), and the inner wall of the receiving groove (46) of the main cover (41) is slidably connected to the surface of the insert block (44).

4. The semiconductor device sealing and lifting mechanism according to claim 3, characterized in that: The side wall of the insert block (44) is fixedly connected with a moving rod (48), the surface of the moving rod (48) is slidably connected to the inner wall of the receiving groove (46) of the main cover (41), and the side wall of the insert block (44) and the inner surface of the receiving groove (46) of the main cover (41) are fixedly connected with a spring (47), and the spring (47) is sleeved on the surface of the moving rod (48).

5. The semiconductor device sealing and lifting mechanism according to claim 1, characterized in that: The surfaces of the main cover (41) and the auxiliary cover (42) are provided with auxiliary devices (5), and the auxiliary devices (5) include four card slots (51), and the four card slots (51) are evenly arranged on the surfaces of the main cover (41) and the auxiliary cover (42), and the inner walls of the card slots (51) of the main cover (41) and the auxiliary cover (42) are both inserted with rubber rings (52), and the surface of the support column (1) is provided with two limit grooves (53), and the rubber ring (52) is inserted into the inner wall of the limit groove (53) of the support column (1).

6. The semiconductor device sealing and lifting mechanism according to claim 5, characterized in that: The upper and lower ends of the rubber ring (52) are fixedly connected to fixing strips (54), a collecting groove (55) is provided on the surface of the auxiliary cover (42) near the fixing strip (54), and the fixing strip (54) is inserted into the inner wall of the collecting groove (55) of the auxiliary cover (42).

Images