Wafer probe station display lifting mechanism and wafer detection equipment

Abstract

The utility model relates to a wafer probe station display lifting mechanism and wafer detection equipment, the wafer probe station display lifting mechanism comprises a probe station and a display, and the display can lift relative to the probe station; and the display is used for avoiding a butt joint channel of the test machine and the probe station when moving to a lower limit position so as to avoid butt joint of the test machine and the probe station. According to the technical scheme of the utility model, when the testing machine and the probe station are docked, the display can move to the lower limit position to leave a docking channel between the testing machine and the probe station, so that the stable passing of the testing machine is realized, and the operation process is not influenced. Compared with a display dismounting mode in the prior art, the scheme of the utility model is simple and convenient to operate, and the display does not need to be dismounted, so that the replacement efficiency of the probe card can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer probe stations, in particular to a wafer probe station display lifting mechanism and wafer detection equipment. Background Art

[0002] In the wafer probe test stage, hard docking is a commonly used mechanical docking method between the probe station and the tester. The tester is generally installed on a manipulator. During docking, the tester needs to be raised and moved to directly above the probe station cardholder. During docking, the tester exceeds the height of the monitor. The tester is limited by the travel of the manipulator and may hit the monitor, which is dangerous. Therefore, each time the probe card is replaced, the monitor needs to be removed to facilitate the tester to cross over for docking, which will affect the efficiency of replacing the probe card. Utility Model Content

[0003] In view of this, the utility model provides a wafer probe station display lifting mechanism and a wafer detection device, which mainly solves the technical problem that the display needs to be removed each time the probe card is replaced to facilitate the test machine to cross over and perform docking, which affects the efficiency of probe card replacement.

[0004] In order to achieve the above purpose, the utility model mainly provides the following technical solutions:

[0005] An embodiment of the utility model provides a wafer probe station display lifting mechanism, which includes a probe station and a display, wherein the display can be lifted and lowered relative to the probe station;

[0006] Wherein, the display is used to make way for the docking channel between the test machine and the probe station when it moves to the lower limit position, so as to avoid the docking between the test machine and the probe station.

[0007] In some embodiments, the wafer probe station display lifting mechanism further includes a first locking mechanism, and the first locking mechanism is used to lock the display when the display moves to the lower limit position.

[0008] In some embodiments, the first locking mechanism includes a magnetic structure, and when the display moves to the lower limit position, the first locking mechanism absorbs the display through the magnetic structure to lock the display.

[0009] In some embodiments, the wafer probe station display lifting mechanism further includes a second locking mechanism, and the second locking mechanism is used to lock the display when the display moves to the upper limit position.

[0010] In some embodiments, the second locking mechanism includes a screw rod, which is rotatably disposed on the probe station, and the display has a first connecting block. When the display moves to the upper limit position, the second locking mechanism is threadedly connected to the first connecting block through the screw rod to lock the display.

[0011] In some embodiments, a support block is provided on the probe platform, the screw rod passes through the support block, a second connecting block is provided on the screw rod, a first elastic member is provided between the second connecting block and the support block, and the first elastic member is used to drive the second connecting block to move after the screw rod is disengaged from the first connecting block, so that the second connecting block drives the screw rod to return to its initial position.

[0012] In some embodiments, the wafer probe station display lifting mechanism further includes a second elastic member, and the second elastic member is used to provide an upward force to the display when the display is lowered or raised.

[0013] In some embodiments, a reel is provided on the display, and the display is used to drive the reel to rise and fall together; wherein, the second elastic member is a constant force spring, the constant force spring is sleeved on the reel, one end of the constant force spring is connected to the reel, and the other end of the constant force spring is a fixed end.

[0014] In some embodiments, the wafer probe station display lifting mechanism further includes a guiding mechanism, and the guiding mechanism is used to guide the lifting and lowering of the display;

[0015] Wherein, the guiding mechanism comprises a guide rail, so as to guide the lifting and lowering of the display through the guide rail; the reel is arranged on the bracket shell of the display, and the display is connected with the slider of the guide rail through the bracket shell.

[0016] The embodiment of the utility model further provides a wafer inspection device, which may include any one of the wafer probe station display lifting mechanisms described above.

[0017] By means of the above technical solution, the wafer probe station display lifting mechanism and wafer inspection equipment of the utility model have at least the following beneficial effects:

[0018] 1. When the tester and the probe station are docking, the display can move to the lower limit position to clear the docking channel between the tester and the probe station, so that the tester can pass stably without affecting the operation process. Compared with the method of disassembling the display in the prior art, the solution of the utility model is easy to operate and does not require disassembly of the display, thereby improving the efficiency of replacing the probe card.

[0019] 2. The first locking mechanism can lock the display when the display moves to the lower limit position, thereby preventing the display from bouncing up during the docking process of the test machine and improving safety.

[0020] 3. The second locking mechanism can lock the display when the display moves to the upper limit position, thereby preventing the display from falling and improving the stability of the display when it is in the upper limit position.

[0021] 4. When the display is lowered, the second elastic member provides an upward force to the display, which can prevent the display from falling suddenly and being damaged. When the display is raised, the second elastic member provides an upward force to the display, which can assist the operator in lifting the display, thus saving effort and allowing the operator to lift the display to the upper limit position with one hand.

[0022] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0024] Figure 1 It is a schematic diagram of docking of a test machine and a probe station provided by an embodiment of the utility model;

[0025] Figure 2 It is a schematic diagram of a wafer probe station display lifting mechanism provided by one embodiment of the utility model;

[0026] Figure 3 yes Figure 2 The enlarged schematic diagram of point A in the middle;

[0027] Figure 4 yes Figure 2 The enlarged schematic diagram of point B in the middle;

[0028] Figure 5 It is a schematic diagram reflecting the connection between the display and the slider of the reel and the guide rail.

[0029] Figure numerals: 1. testing machine; 2. probe station; 3. display; 4. constant force spring; 5. magnetic attraction structure; 6. guide rail; 7. screw; 8. first elastic member; 9. reel; 21. support block; 31. bracket housing; 32. first connecting block; 33. connecting part; 41. the other end of the constant force spring; 61. slider; 71. handle; 72. second connecting block. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0032] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0033] like Figure 1 As shown, an embodiment of the utility model proposes a wafer probe station display lifting mechanism, which includes a probe station 2 and a display 3. The display 3 can be raised and lowered relative to the probe station 2. Among them, the display 3 is used to move to the lower limit position to make way for the docking channel between the test machine 1 and the probe station 2, so as to avoid the docking between the test machine 1 and the probe station 2.

[0034] In the above example, when the test machine 1 and the probe station 2 are docking, the display 3 can move to the lower limit position to clear the docking channel between the test machine 1 and the probe station 2, so as to achieve stable passage of the test machine 1 without affecting the operation process. Compared with the method of disassembling the display 3 in the prior art, the solution of the utility model is easy to operate and does not require disassembly of the display 3, thereby improving the efficiency of replacing the probe card.

[0035] In some embodiments, the aforementioned wafer probe station display lifting mechanism may include a first locking mechanism, which is used to lock the display 3 when the display 3 moves to the lower limit position, thereby preventing the display 3 from bouncing up during the docking process of the test machine 1 and improving safety.

[0036] In order to realize the function of the aforementioned first locking mechanism, in a specific application example, Figure 2 and Figure 4 As shown, the aforementioned first locking mechanism may include a magnetic structure 5 . When the display 3 moves to the lower limit position, the first locking mechanism absorbs the display 3 through the magnetic structure 5 to lock the display 3 .

[0037] The above-mentioned magnetic attraction structure 5 may include a magnetic part, and the magnetic part is relatively fixed to the probe station 2, for example, the magnetic part can be fixed on the probe station 2. A connecting portion 33 is provided on the display 3, and the connecting portion 33 can be fixed on the display 3, for example, the connecting portion 33 can be fixed on the bracket shell 31 of the display 3. The connecting portion 33 can be made of a metal material that can be adsorbed by the magnetic part. Among them, when the display 3 moves to the lower limit position, the connecting portion 33 on the display 3 is against the magnetic part, and the magnetic attraction part adsorbs the connecting portion 33 to achieve locking of the display 3.

[0038] The aforementioned wafer probe station display lifting mechanism may also include a second locking mechanism, which is used to lock the display 3 when the display 3 moves to the upper limit position, thereby preventing the display 3 from falling and improving the stability of the display 3 at the upper limit position.

[0039] In order to realize the function of the second locking mechanism, Figure 2 and Figure 3 As shown, the aforementioned second locking mechanism may include a screw 7, which is rotatably disposed on the probe station 2. The display 3 has a first connecting block 32, which can be relatively fixed with the display 3, for example, the first connecting block 32 can be fixed on the bracket housing 31 of the display 3. When the display 3 moves to the upper limit position, the aforementioned second locking mechanism is threadedly connected to the first connecting block 32 through the screw 7 to lock the display 3.

[0040] In the above example, when the display 3 moves to the upper limit position, the operator can screw the screw 7 to thread the screw 7 into the first connecting block 32 on the display 3. In this way, the screw 7 can be kept relatively fixed with the display 3 through the first connecting block 32, thereby achieving the purpose of fixing the display 3 located at the upper limit position on the probe station 2.

[0041] It should be noted here that: Figure 3 As shown, the aforementioned screw rod 7 may be provided with a handle 71 to facilitate operators to screw the screw rod 7 through the handle 71 .

[0042] In some embodiments, Figure 3 As shown, the aforementioned probe station 2 may be provided with a support block 21, and the support block 21 may be fixed on the probe station 2. The aforementioned screw rod 7 passes through the support block 21, and a second connecting block 72 is provided on the screw rod 7, and the second connecting block 72 may be fixed on the screw rod 7. A first elastic member 8 is provided between the second connecting block 72 and the aforementioned support block 21, and the first elastic member 8 may be a spring or a flexible plastic, etc. The first elastic member 8 is used to drive the second connecting block 72 to move after the screw rod 7 is disengaged from the first connecting block 32, so that the second connecting block 72 drives the screw rod 7 to return to its initial position. Specifically, when the screw rod 7 is disengaged from the first connecting block 32, the first elastic member 8 can push the screw rod 7 out to its initial position to facilitate the operator's next use.

[0043] The aforementioned wafer probe station display lifting mechanism may further include a second elastic member, which is used to provide an upward force to the display 3 when the display 3 is lowered or raised. Specifically, when the display 3 is lowered, the second elastic member provides an upward force to the display 3, which can prevent the display 3 from suddenly falling and being damaged. When the display 3 is raised, the second elastic member provides an upward force to the display 3, which can assist the operator in lifting the display 3, thus having a labor-saving effect, so that the operator can lift the display 3 to the upper limit position with one hand.

[0044] In order to realize the function of the second elastic member, Figure 4 As shown, the aforementioned display 3 may be provided with a reel 9, which may be arranged on a bracket housing 31 of the display 3, and the reel 9 is rotatable. The display 3 is used to drive the reel 9 to rise and fall together. Among them, the aforementioned second elastic member is a constant force spring 4, which is sleeved on the reel 9, and one end of the constant force spring 4 is connected to the reel 9. The other end 41 of the constant force spring is a fixed end, for example, the other end 41 of the constant force spring can be fixed on the probe station 2.

[0045] In the above example, when the display 3 descends, the display 3 drives the reel 9 to descend together, the constant force spring 4 on the reel 9 is unwound, and the constant force spring 4 provides an upward thrust to the display 3 under the action of its other end 41 to prevent the display 3 from falling suddenly and being damaged. When the display 3 rises, the display 3 drives the reel 9 to rise together, the constant force spring 4 on the reel 9 is rewound, and the constant force spring 4 provides an upward thrust to the display 3 under the action of its other end 41 to assist the operator in lifting the display 3.

[0046] The aforementioned wafer probe station display lifting mechanism may also include a guiding mechanism, which is used to guide the lifting of the display 3 to improve the lifting accuracy of the display 3. In a specific application example, Figure 5 As shown, the guide mechanism may include a guide rail 6 to guide the lifting of the display 3 through the guide rail 6. The aforementioned reel 9 may be arranged on a bracket housing 31 of the display 3, and the display 3 is connected to a slider 61 of the guide rail through the bracket housing 31, so that both the display 3 and the reel 9 can be lifted and lowered through the slider 61.

[0047] The embodiment of the utility model also provides a wafer detection device, which can include any of the above-mentioned wafer probe station display lifting mechanisms. In this example, because the wafer detection device adopts the above-mentioned wafer probe station display lifting mechanism, when the test machine 1 and the probe station 2 are docking, the display 3 can move to the lower limit position to make way for the docking channel between the test machine 1 and the probe station 2, so as to achieve stable passage of the test machine 1 without affecting the operation process. Compared with the method of disassembling the display 3 in the prior art, the solution of the utility model is easy to operate, and the display 3 does not need to be disassembled, thereby improving the replacement efficiency of the probe card.

[0048] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A wafer probe station display lifting mechanism, characterized in that: It comprises a probe station (2) and a display (3), wherein the display (3) can be raised and lowered relative to the probe station (2); Wherein, the display (3) is used to clear the docking channel between the test machine (1) and the probe station (2) when it moves to the lower limit position, so as to avoid the docking between the test machine (1) and the probe station (2); The wafer probe station display lifting mechanism further comprises a first locking mechanism, wherein the first locking mechanism is used to lock the display (3) when the display (3) moves to the lower limit position; The wafer probe station display lifting mechanism further comprises a second locking mechanism, wherein the second locking mechanism is used to lock the display (3) when the display (3) moves to an upper limit position.

2. The wafer probe station display lifting mechanism according to claim 1, characterized in that: The first locking mechanism comprises a magnetic attraction structure (5), and when the display (3) moves to the lower limit position, the first locking mechanism absorbs the display (3) through the magnetic attraction structure (5) to lock the display (3).

3. The wafer probe station display lifting mechanism according to claim 1, characterized in that: The second locking mechanism comprises a screw rod (7), which is rotatably arranged on the probe station (2); the display (3) has a first connecting block (32); when the display (3) moves to the upper limit position, the second locking mechanism is threadedly connected to the first connecting block (32) through the screw rod (7) to lock the display (3).

4. The wafer probe station display lifting mechanism as claimed in claim 3, characterized in that: The probe station (2) is provided with a support block (21), the screw rod (7) passes through the support block (21), a second connecting block (72) is provided on the screw rod (7), a first elastic member (8) is provided between the second connecting block (72) and the support block (21), and the first elastic member (8) is used to drive the second connecting block (72) to move after the screw rod (7) is separated from the first connecting block (32), so that the second connecting block (72) drives the screw rod (7) to return to an initial position.

5. The wafer probe station display lifting mechanism according to any one of claims 1 to 4, characterized in that: It also comprises a second elastic member, wherein the second elastic member is used to provide an upward force to the display (3) when the display (3) is lowered or raised.

6. The wafer probe station display lifting mechanism as claimed in claim 5, characterized in that: The display (3) is provided with a reel (9), and the display (3) is used to drive the reel (9) to rise and fall together; wherein the second elastic member is a constant force spring (4), and the constant force spring (4) is sleeved on the reel (9), one end of the constant force spring (4) is connected to the reel (9), and the other end (41) of the constant force spring is a fixed end.

7. The wafer probe station display lifting mechanism according to claim 6, characterized in that: It also includes a guiding mechanism, which is used to guide the lifting and lowering of the display (3); The guide mechanism comprises a guide rail (6) for guiding the lifting and lowering of the display (3) through the guide rail (6); the reel (9) is arranged on a bracket shell (31) of the display (3), and the display (3) is connected to a slider (61) of the guide rail through the bracket shell (31).

8. A wafer inspection device, characterized in that: A wafer probe station display lifting mechanism comprising any one of claims 1 to 7.

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