Integrated circuit wet process recycling energy-saving device

Abstract

The utility model relates to an integrated circuit wet process recycling energy-saving device in the technical field of integrated circuit wet process, which comprises an inner tank, an outer tank is fixedly arranged outside the inner tank, and a stirring motor is mounted on the upper portion of the inner tank. Through the design of the inner and outer groove structure, high-temperature heat energy in the photoresist removing waste liquid is effectively recycled. Before the old degumming liquid is discharged, heat energy carried by the old degumming liquid is transferred to the new degumming liquid, so that dependence on external energy is reduced, and the new degumming liquid reaches a certain temperature before entering equipment through the preheating effect of the heat exchanger, so that the time and energy consumption required by heating the equipment end to the working temperature are greatly shortened, and the energy consumption is reduced. Compared with the prior art, the device has the advantages that the production cost is effectively reduced, the preheated new degumming liquid can reach the required working temperature more quickly, the temperature rise time is shortened, the operation efficiency of a production line is improved, and the liquid medicine is prevented from being heated in advance in the acid supply room, so that the liquid medicine is prevented from going bad due to over-high temperature, and the service life of the liquid medicine is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit wet process, in particular to an integrated circuit wet process recycling and energy-saving device. Background Art

[0002] In the wet process of integrated circuits, the discharge of degumming liquid is usually discharged directly into the waste liquid recovery barrel at the factory end through the discharge pipeline at the rear of the equipment. The temperature of these degumming liquids when discharged ranges from 60 to 80 degrees Celsius, and then they will gradually cool down to room temperature in the waste liquid recovery barrel. The degumming liquid inlet process is to transport the room temperature liquid to the equipment end through the CDS acid supply system, and then the heating function at the equipment end will heat the liquid to the required 60 to 80 degrees Celsius.

[0003] In the bumping degumming process, when the production reaches a certain amount or the service life of the liquid medicine expires, the degumming liquid will enter the discharge pipeline through the discharge port and eventually be recycled into the waste liquid recycling barrel at the factory end. At this time, the degumming liquid is still at a high temperature, and the heat energy in this process is not effectively recovered, resulting in energy waste.

[0004] At present, when high-temperature waste liquid is discharged, the heat energy in the waste liquid is not processed in any way, but is directly discharged into the waste liquid recovery barrel at the factory end to cool down. At the same time, the new liquid is usually at room temperature when it is supplied in the acid supply room. If the liquid is heated in advance in the acid supply room, it may cause the liquid to deteriorate, thereby reducing its performance. Utility Model Content

[0005] The utility model aims to solve the shortcomings of the prior art and proposes an integrated circuit wet process recycling energy-saving device.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an integrated circuit wet process recycling and energy-saving device, comprising an inner tank, an outer tank is fixedly arranged outside the inner tank, a stirring motor is installed on the upper part of the inner tank, the output end of the stirring motor is fixedly connected to a stirring shaft, the stirring shaft passes through the top of the inner tank and is rotatably connected to the inner tank, a plurality of stirring blades are fixedly connected to the bottom of the stirring shaft, a new degumming liquid inlet is arranged on one side of the upper part of the inner tank, a new degumming liquid outlet is arranged on the side of the upper part of the inner tank away from the new degumming liquid inlet, an old degumming liquid inlet is arranged at the bottom of the outer tank, and an old degumming liquid outlet is arranged on the upper part of one side of the outer tank.

[0007] As a further description of the above technical solution:

[0008] The inner tank stores and preheats new degumming liquid.

[0009] As a further description of the above technical solution:

[0010] The new degumming liquid enters the inner tank from the new degumming liquid inlet and leaves the inner tank from the new degumming liquid outlet.

[0011] As a further description of the above technical solution:

[0012] The outer tank stores old degumming liquid for heat exchange.

[0013] As a further description of the above technical solution:

[0014] The old glue removing liquid enters the outer tank from the old glue removing liquid inlet and leaves the outer tank from the old glue removing liquid outlet.

[0015] As a further description of the above technical solution:

[0016] The temperature of the old degumming solution in the outer tank is higher than the temperature of the new degumming solution in the inner tank.

[0017] The utility model has the following beneficial effects:

[0018] This device realizes the effective recovery of high-temperature heat energy in the degumming waste liquid through the design of the internal and external tank structure. Before the old degumming liquid is discharged, the heat energy it carries is transferred to the new degumming liquid, thereby reducing the dependence on external energy. Through the preheating effect of the heat exchanger, the new degumming liquid has reached a certain temperature before entering the equipment, which greatly shortens the time and energy consumption required for the equipment end to heat to the working temperature, effectively reducing the production cost. The preheated new degumming liquid can reach the required working temperature faster, reducing the heating time, thereby improving the operating efficiency of the production line. By avoiding the early heating of the liquid in the acid supply room, the liquid is prevented from deteriorating due to excessive temperature, and the service life of the liquid is extended. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of the integrated circuit wet process recycling and energy-saving device proposed by the utility model.

[0020] Legend:

[0021] 1. Inner tank; 2. Outer tank; 3. Stirring motor; 4. Stirring shaft; 5. Stirring blades; 6. Inlet of new degumming liquid; 7. Outlet of new degumming liquid; 8. Inlet of old degumming liquid; 9. Outlet of old degumming liquid. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Reference Figure 1 The utility model provides an embodiment: an integrated circuit wet process recycling and energy-saving device, including an inner tank 1, an outer tank 2 is fixedly arranged outside the inner tank 1, the outer tank 2 forms an annular structure outside the inner tank 1, a stirring motor 3 is installed on the upper part of the inner tank 1, and a stirring shaft 4 is fixedly connected to the output end of the stirring motor 3. The stirring shaft 4 passes through the top of the inner tank 1 and is rotatably connected to the inner tank 1. A plurality of stirring blades 5 are fixedly connected to the bottom of the stirring shaft 4. The stirring motor 3, the stirring shaft 4, and the stirring blades 5 are arranged to ensure that the new degumming liquid flows fully in the inner tank 1 to improve the efficiency and uniformity of heat exchange.

[0024] A new degumming liquid inlet 6 is provided on one side of the upper part of the inner tank 1, and the new degumming liquid inlet 6 is used to introduce new degumming liquid at room temperature. A new degumming liquid outlet 7 is provided on the side of the upper part of the inner tank 1 away from the new degumming liquid inlet 6, and the new degumming liquid outlet 7 is used to transport the preheated new degumming liquid to the equipment end for subsequent wet process operations.

[0025] The bottom of the outer tank 2 is provided with an old degumming liquid inlet 8, and the upper part of one side of the outer tank 2 is provided with an old degumming liquid outlet 9. The old degumming liquid inlet 8 is used to receive the old degumming liquid at high temperature, and the old degumming liquid outlet 9 is used to discharge the old degumming liquid after heat exchange for subsequent treatment or recycling.

[0026] The inner tank 1 stores and preheats new degumming liquid. The new degumming liquid enters the inner tank 1 from the new degumming liquid inlet 6 and leaves the inner tank 1 from the new degumming liquid outlet 7.

[0027] The outer tank 2 stores the old glue removal liquid for heat exchange. The old glue removal liquid enters the outer tank 2 from the old glue removal liquid inlet 8 and leaves the outer tank 2 from the old glue removal liquid outlet 9.

[0028] The temperature of the old degumming liquid in the outer tank 2 is higher than that of the new degumming liquid in the inner tank 1. The old degumming liquid in the outer tank 2 (high temperature state) and the new degumming liquid in the inner tank 1 (normal temperature state) perform heat exchange through the contact surface between the outer tank 2 and the inner tank 1. This design utilizes the high temperature heat energy carried by the old degumming liquid during the discharge process and transfers it to the new degumming liquid, thereby realizing the recovery and reuse of heat energy.

[0029] Working principle:

[0030] Heat energy recovery: During the discharge and inlet process of the degumming liquid, the device uses the old degumming liquid (high temperature state) in the outer tank 2 to preheat the new degumming liquid (normal temperature state) in the inner tank 1. When the old degumming liquid is discharged through the outer tank 2, the heat energy it carries is transferred to the new degumming liquid in the inner tank 1 through heat exchange, thereby realizing heat energy recovery.

[0031] Preheating process: The new degumming liquid is pre-stored in the inner tank 1. When the old degumming liquid (high temperature) in the equipment needs to be discharged, it will be guided to the outer tank 2. At this time, the high-temperature old degumming liquid in the outer tank 2 transfers heat to the new degumming liquid in the inner tank 1 through the heat exchange device to heat it up.

[0032] Stirring effect: In order to improve the heat exchange efficiency, a stirring motor 3 and a stirring blade 5 are installed in the inner tank 1. The stirring effect allows the new degumming liquid to flow, thereby accelerating the transfer and uniform distribution of heat energy.

[0033] Transportation and use: After the preheated new degumming liquid reaches the required temperature, it is transported to the equipment end through the new degumming liquid outlet 7 for use in the wet process of integrated circuits.

[0034] Discharge and circulation: After completing the heat exchange, the old degumming liquid in the outer tank 2 is discharged through the old degumming liquid outlet 9, and at the same time, the new old degumming liquid continues to enter the outer tank 2 to maintain the continuity of the heat exchange process.

[0035] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An integrated circuit wet process recycling and energy-saving device, comprising an inner tank (1), characterized in that: An outer tank (2) is fixedly arranged outside the inner tank (1); a stirring motor (3) is installed on the upper part of the inner tank (1); a stirring shaft (4) is fixedly connected to the output end of the stirring motor (3); the stirring shaft (4) passes through the top of the inner tank (1) and is rotatably connected to the inner tank (1); a plurality of stirring blades (5) are fixedly connected to the bottom of the stirring shaft (4); a new degumming liquid inlet (6) is arranged on one side of the upper part of the inner tank (1); a new degumming liquid outlet (7) is arranged on the side of the upper part of the inner tank (1) away from the new degumming liquid inlet (6); an old degumming liquid inlet (8) is arranged on the bottom of the outer tank (2); and an old degumming liquid outlet (9) is arranged on the upper part of one side of the outer tank (2).

2. The integrated circuit wet process recycling and energy-saving device according to claim 1, characterized in that: The inner tank (1) stores and preheats new degumming liquid.

3. The integrated circuit wet process recycling and energy-saving device according to claim 2, characterized in that: The new degumming liquid enters the inner tank (1) from the new degumming liquid inlet (6) and leaves the inner tank (1) from the new degumming liquid outlet (7).

4. The integrated circuit wet process recycling and energy-saving device according to claim 3, characterized in that: The outer tank (2) stores old degumming liquid for use in cold and hot exchange.

5. The integrated circuit wet process recycling and energy-saving device according to claim 4, characterized in that: The old glue removal liquid enters the outer tank (2) from the old glue removal liquid inlet (8) and leaves the outer tank (2) from the old glue removal liquid outlet (9).

6. The integrated circuit wet process recycling and energy-saving device according to claim 5, characterized in that: The temperature of the old degumming liquid in the outer tank (2) is higher than the temperature of the new degumming liquid in the inner tank (1).

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