He molecule stripping device with sealing structure

Abstract

The utility model discloses a He molecule stripping device with a sealing structure, which comprises a sealing container and a gas-liquid separator communicated with the sealing container, a monitoring module is fixedly arranged in the sealing container, the monitoring module is connected with a supporting pipe, the supporting pipe extends into the sealing container, the sealing structure comprises a sealing assembly, and the sealing assembly is connected with the gas-liquid separator. The sealing assembly is arranged at the top of the sealed container and located at the mounting position of the monitoring module, and the sealing assembly is used for further sealing the sealed container and preventing dangerous chemicals in the sealed container from leaking; the sealing assembly comprises two sets of locking plates, clamping grooves matched with the monitoring module are formed in the locking plates, the locking plates are installed on the upper surface of the sealed container in a sliding mode, the gas-liquid separator comprises a barrel, and sealing rings are arranged at the positions, connected with the connectors, of the two ends of the barrel. And a lantern ring for fastening the sealing ring is arranged outside the sealing ring, so that the hidden danger that He molecules are leaked through the cylinder body during stripping is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing, and in particular relates to a He molecule stripping device with a sealing structure. Background Art

[0002] In the semiconductor processing industry, many semiconductor devices need to use some liquid gas as raw materials for process reactions, so we need to provide corresponding liquid gas supply equipment. Since the packaging of the liquid source is a closed container, we need to fill the liquid to provide pressure when supplying liquid, and press the liquid into the pipeline to supply it to the machine.

[0003] However, during use, the MFC (Mass Flow Controller) on the machine side occasionally experiences unstable fluctuations during flow control, which causes certain losses to the process production. After analysis, we can determine that there are extremely small amounts of He molecules dissolved in the liquid source gas, which flow into the MFC along with the raw liquid during supply, causing the MFC flow fluctuations.

[0004] Therefore, it is necessary to design a He molecule stripping device in liquid source gas based on MFC flow control, which can strip the He molecules in the liquid source gas, thereby reducing the burden of MFC without affecting the supply of liquid source and preventing liquid source leakage. Utility Model Content

[0005] The purpose of the utility model is to provide a He molecule stripping device with a sealing structure, so as to solve the defects existing in the prior art mentioned in the above background technology.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A He molecule stripping device with a sealing structure, comprising a sealed container and a gas-liquid separator connected to the sealed container, wherein a monitoring module is fixedly installed in the sealed container, the monitoring module is connected to a support tube, the support tube extends into the sealed container, and comprises a sealing component, the sealing component is arranged at the top of the sealed container at the installation position of the monitoring module, and the sealing component is used to further seal the sealed container to prevent leakage of dangerous chemicals in the sealed container;

[0008] The gas-liquid separator comprises a cylinder, both ends of the cylinder are respectively provided with sealing rings at the joint connection positions, and a sleeve ring for fastening the sealing ring is provided outside the sealing ring, thereby avoiding the hidden danger of He molecules leaking through the cylinder during stripping.

[0009] Preferably, the sealing assembly includes two sets of locking plates, wherein the locking plates are provided with slots matching the monitoring module, and the locking plates are slidably mounted on the upper surface of the sealed container.

[0010] Preferably, connecting blocks are symmetrically arranged on both sides of the locking plate, a guide rod is fixedly connected to one side of the connecting block, a guide plate is fixedly connected to the upper surface of the sealed container, the guide rod is slidably connected in the guide plate, a spring is arranged between the connecting block and the guide plate, and the spring is sleeved on the outer surface of the guide rod.

[0011] Preferably, a limit block is symmetrically arranged on the upper surface of the sealed container, a positioning hole is opened in the limit block, a spring plunger is symmetrically installed on one side of the locking plate, the spring plunger and the positioning hole are matched, and a pull groove is opened in the locking plate.

[0012] Preferably, joints are provided at both ends of the cylinder, the joint at one end is connected to a vacuum interface and a raw liquid outlet, and the joint at the other end is connected to a leakage detection interface and a raw liquid inlet, the leakage detection interface is connected to a sealed container for detecting the seepage state, and the vacuum interface is used for connecting to a vacuum pump to evacuate the interior of the cylinder.

[0013] Preferably, the vacuum interface, the raw liquid outlet, the leakage detection interface and the raw liquid inlet all adopt 1 / 4" threaded interfaces.

[0014] Preferably, a float is slidably mounted on the outer surface of the support tube, a detection waveguide rod electrically connected to the monitoring module is arranged inside the support tube, and the detection waveguide rod and the float form a magnetostrictive sensor.

[0015] Preferably, a filter membrane permeation tube is provided in the cylinder, and the filter membrane permeation tube comprises a hollow pipe and a filter membrane sheet embedded in the inner wall of the hollow pipe.

[0016] Technical effects and advantages of the utility model: The He molecule stripping device in the liquid source gas based on MFC flow control proposed by the utility model has the following advantages compared with the prior art:

[0017] 1. The utility model combines the detection principle of the liquid level sensor. Its detection waveguide rod is non-contact and uses magnetic field for measurement, which perfectly meets the control requirements of hazardous chemical liquids. It extends into the interior of the Bubbler Tank through a 316L stainless steel pipeline, inserts the magnetic ring float into the pipeline, and slides up and down, and is completely sealed to ensure that the leakage test is qualified. Finally, the tank is sealed as a whole, and the detection main waveguide rod is inserted into the inner tube of the 316L stainless steel tube and finally fixed. In this way, when the liquid level inside the tank changes up and down, the magnetic ring float also floats up and down. Then the magnetic ring float combines with the main waveguide rod to output the corresponding signal. Finally, through data conversion and signal conversion, liquid level measurement is achieved and applied to process production;

[0018] 2. In the present invention, a sealing assembly is provided at the only opening of the connection position between the sealed container and the monitoring module. The sealing assembly presses and seals the installation position of the monitoring module through two sets of locking plates elastically connected to the upper surface of the sealed container to prevent gas source leakage and avoid safety hazards;

[0019] 3. In the utility model, joints are provided in the joints at both ends of the cylinder, and a ring is sleeved on the surface of the cylinder. A sealing ring is provided at the joint connection position, and a groove matching the sealing ring is opened on the inner wall of the ring, so that the ring is wrapped around the surface of the sealing ring, and the connecting end of the cylinder is further sealed to prevent gas leakage and avoid safety hazards. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0021] Figure 2 It is a schematic diagram of a partial three-dimensional structure of a gas-liquid separator of the utility model;

[0022] Figure 3 It is a partial cross-sectional structural schematic diagram of the sealed container of the utility model;

[0023] Figure 4 This is a schematic diagram of the three-dimensional structure of the sealing component of the utility model in a semi-open state;

[0024] Figure 5 For the utility model Figure 4 A schematic diagram of the enlarged structure of part A in the figure.

[0025] In the figure: 1. Sealed container; 2. Monitoring module; 3. Support tube; 4. Float; 5. Locking plate; 6. Limit block; 7. Positioning hole; 8. Connecting block; 9. Spring; 10. Guide rod; 11. Guide plate; 12. Spring plunger; 13. Slot; 14. Slot; 15. Cylinder; 16. Vacuum interface; 17. Raw liquid outlet; 18. Leakage detection interface; 19. Raw liquid inlet; 20. Ring; 21. Sealing ring; 22. Connector. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the utility model for which protection is sought, but merely represents the selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0027] In the description of the present invention, it is necessary to understand that the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances of the specification.

[0029] The utility model provides Figure 1-5 A He molecule stripping device with a sealing structure is shown;

[0030] Embodiment 1:

[0031] A He molecule stripping device with a sealing structure comprises a sealed container 1 and a gas-liquid separator connected to the sealed container 1, a monitoring module 2 is fixedly installed in the sealed container 1, the monitoring module 2 is connected to a support tube 3, the support tube 3 extends into the sealed container 1, a float 4 is slidably installed on the outer surface of the support tube 3, a detection waveguide rod electrically connected to the monitoring module 2 is arranged in the support tube 3, and the detection waveguide rod and the float 4 form a magnetostrictive sensor.

[0032] In this embodiment, the sealed container 1 is filled with a raw liquid MO source. Since the MO source product requires extremely high purity, and most MO source compounds are extremely sensitive to oxygen and water vapor, they can spontaneously combust when in contact with air, explode when in contact with water, and are highly toxic, corrosive, flammable, and toxic. In the process of production, it is necessary to effectively detect the liquid level inside the sealed container 1. The detection waveguide rod in the magnetostrictive sensor has the characteristic of not needing to contact the liquid, and cooperates with the float 4 to detect the liquid level.

[0033] It should be noted that the float 4 is made of stainless steel, preferably 316L stainless steel, which is chemically treated to achieve corrosion resistance, and can be immersed in corrosive liquids. Specifically, the density of trichlorosilane liquid is 1.342g / cm3, and the float 4 can float up and down in liquids greater than 0.7g / cm3.

[0034] In this embodiment, a sealing component is provided. The sealing component is arranged at the top of the sealed container 1 at the installation position of the monitoring module 2. The sealing component is used to further seal the sealed container 1 to prevent leakage of hazardous chemicals inside the sealed container 1.

[0035] Specifically, the sealing assembly includes two sets of locking plates 5, each of which is provided with a slot 14 matching the monitoring module 2, and the locking plates 5 are slidably mounted on the upper surface of the sealed container 1. In this embodiment, the slidably mounted locking plates 5 can be used to perform sealing and pressing at the installation position of the monitoring module 2 after the monitoring module 2 and the sealed container 1 are installed.

[0036] The locking plate 5 is symmetrically provided with connecting blocks 8 on both sides, and a guide rod 10 is fixedly connected to one side of the connecting block 8. A guide plate 11 is fixedly connected to the upper surface of the sealed container 1, and the guide rod 10 is slidably connected in the guide plate 11. A spring 9 is provided between the connecting block 8 and the guide plate 11, and the spring 9 is sleeved on the outer surface of the guide rod 10. The upper surface of the sealed container 1 is symmetrically provided with limit blocks 6, and a positioning hole 7 is provided in the limit blocks 6. A spring plunger 12 is symmetrically installed on one side of the locking plate 5, and the spring plunger 12 is matched with the positioning hole 7. A pull groove 13 is provided in the locking plate 5.

[0037] In this embodiment, in order to facilitate the rapid opening and closing of the locking plate 5 and improve the disassembly and sealing connection efficiency of the monitoring module 2, an elastic connection structure is provided on the locking plate 5 and the upper surface of the sealed container 1. The two groups of locking plates 5 are pulled apart through the internally arranged pulling groove 13. Due to the guiding effect of the guide rod 10, the locking plate 5 slides along the upper surface of the sealed container 1 until the spring plunger 12 is inserted into the positioning hole 7 in the limit block 6, and the open position of the locking plate 5 can be locked. After the installation of the monitoring module 2 is completed, the locking plate 5 is pulled to make the spring plunger 12 disengage from the positioning hole 7. Under the elastic reset effect of the spring 9, the two groups of locking plates 5 complete the pressing of the monitoring module 2, and a rubber pad is provided at the position of the card slot 14 opened in the locking plate 5 to further seal the installation position of the monitoring module 2 to prevent gas leakage and avoid safety hazards.

[0038] The gas-liquid separator comprises a cylinder 15, in which a filter membrane permeation tube is arranged. The filter membrane permeation tube comprises a hollow pipe and a filter membrane sheet embedded in the inner wall of the hollow pipe.

[0039] It should be noted that the membrane permeation tube is a spiral structure or a loop structure. The membrane permeation tube is made of PFA-HP material, with an outer diameter of 6.15-6.55mm and a thickness of 0.80-1.2mm. According to the test requirements of ASTM D3307, the tensile strength value is required to be greater than or equal to 160kfg / cm 2 , the elongation requirement is greater than or equal to 160%, according to the test requirements of ASTM D792, the density requirement is 2.12-2.17g / cm 3 .

[0040] Specifically, the permeable filter membrane tube includes a hollow pipe and a filter membrane sheet embedded in the inner wall of the hollow pipe, and the filter membrane sheet is filled with permeable filter material holes at equal intervals. Optionally, the permeable filter material holes are used to fill activated carbon, not limited to activated carbon filter material.

[0041] In this embodiment, the filter membrane is filled with activated carbon filter material to form a thicker activated carbon filter material coating. The raw liquid flows through the activated carbon filter material coating and evenly and slowly penetrates through the filter material holes in the filter membrane. The raw liquid fully contacts the filter material to form micro-permeation, which more effectively peels off the molecules to be processed.

[0042] Joints 22 are provided at both ends of the cylinder 15. The joint 22 at one end is connected to the vacuum interface 16 and the raw liquid outlet 17, and the joint 22 at the other end is connected to the leakage detection interface 18 and the raw liquid inlet 19. The leakage detection interface 18 is connected to the sealed container 1 to detect the state of liquid seepage. The vacuum interface 16 is used to connect the vacuum pump to evacuate the interior of the cylinder 15. The vacuum interface 16, the raw liquid outlet 17, the leakage detection interface 18 and the raw liquid inlet 19 all use 1 / 4" threaded interfaces.

[0043] The stock solution containing the carrier gas He flows into the permeation filter membrane tube through the stock solution inlet 19. After the cavity of the cylinder 15 is evacuated by a vacuum pump, the He molecules are discharged to the outside of the filter membrane through the pressure difference between the filter membrane and the inside of the permeation filter membrane tube, and then pumped to the outside to obtain the degassed stock solution. The degassed stock solution flows into the process pipeline through the stock solution outlet 17.

[0044] The utility model uses an osmotic filter membrane tube to realize the device-liquid separation function, combines the detection principle of the liquid level sensor, utilizes the magnetic field to measure the leakage, and strips the He molecules in the liquid source gas. While reducing the burden of the flow meter, it does not affect the stable supply of the liquid source and can prevent the liquid source from leaking, meeting the control requirements of hazardous chemical liquids.

[0045] Embodiment 2:

[0046] Based on the first embodiment, since the sealed container involved in the use of the He molecule stripping device includes a sealed container 1 and a cylinder 15, only the sealed container 1 is sealed and the liquid level is detected, and the Mo gas source cannot be completely sealed and controlled. Therefore, in this embodiment, a structure with a sealing function is also provided on the outer wall of the cylinder 15, specifically including:

[0047] Sealing rings 21 are provided at both ends of the cylinder 15 and at the joint connection positions, and a sleeve ring 20 for fastening the sealing ring 21 is provided outside the sealing ring 21, thereby avoiding the hidden danger of He molecules leaking through the cylinder 15 during stripping.

[0048] In this embodiment, joints 22 are provided in the joints at both ends of the cylinder 15, and an annular groove is provided at the connection position between the joint 22 and the cylinder 15 to facilitate the embedding of the sealing ring 21. At the same time, a ring 20 is sleeved on the surface of the cylinder 15, and a groove matching the sealing ring 21 is provided on the inner wall of the ring 20, so that the ring 20 is wrapped around the surface of the sealing ring 21, further sealing the connection end of the cylinder 15 to prevent gas leakage and avoid safety hazards.

[0049] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

[0050] It should be noted that, in this article, the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

Claims

1. A He molecule stripping device with a sealing structure, comprising a sealed container (1) and a gas-liquid separator connected to the sealed container (1), wherein a monitoring module (2) is fixedly installed in the sealed container (1), and the monitoring module (2) is connected to a support tube (3), and the support tube (3) extends into the sealed container (1), characterized in that: It comprises a sealing component, which is arranged at the top of the sealed container (1) at the installation position of the monitoring module (2), and is used to further seal the sealed container (1) to prevent the dangerous chemicals in the sealed container (1) from leaking; The gas-liquid separator comprises a cylinder (15), and sealing rings (21) are respectively arranged at both ends of the cylinder (15) and at the joint connection positions. A sleeve ring (20) for fastening the sealing ring (21) is arranged outside the sealing ring (21), thereby avoiding the hidden danger of He molecules leaking through the cylinder (15) when stripping.

2. The He molecule stripping device with a sealing structure according to claim 1, characterized in that: The sealing assembly comprises two sets of locking plates (5), wherein a card slot (14) matching the monitoring module (2) is provided in the locking plate (5), and the locking plate (5) is slidably mounted on the upper surface of the sealed container (1).

3. The He molecule stripping device with a sealing structure according to claim 2, characterized in that: Connecting blocks (8) are symmetrically arranged on both sides of the locking plate (5); a guide rod (10) is fixedly connected to one side of the connecting block (8); a guide plate (11) is fixedly connected to the upper surface of the sealed container (1); the guide rod (10) is slidably connected inside the guide plate (11); a spring (9) is arranged between the connecting block (8) and the guide plate (11); and the spring (9) is sleeved on the outer surface of the guide rod (10).

4. The He molecule stripping device with a sealing structure according to claim 3, characterized in that: A limit block (6) is symmetrically arranged on the upper surface of the sealed container (1), a positioning hole (7) is provided in the limit block (6), a spring plunger (12) is symmetrically installed on one side of the locking plate (5), the spring plunger (12) and the positioning hole (7) are matched, and a shifting groove (13) is provided in the locking plate (5).

5. The He molecule stripping device with a sealing structure according to claim 1, characterized in that: Joints (22) are provided at both ends of the cylinder (15); the joint (22) at one end is connected to a vacuum interface (16) and a raw liquid outlet (17); the joint (22) at the other end is connected to a liquid leakage detection interface (18) and a raw liquid inlet (19); the liquid leakage detection interface (18) is connected to the sealed container (1) for detecting the state of liquid seepage; the vacuum interface (16) is used for connecting to a vacuum pump to evacuate the interior of the cylinder (15).

6. The He molecule stripping device with a sealing structure according to claim 5, characterized in that: The vacuum interface (16), the raw liquid outlet (17), the liquid leakage detection interface (18) and the raw liquid inlet (19) all adopt 1 / 4" threaded interfaces.

7. The He molecule stripping device with a sealing structure according to claim 1, characterized in that: A floating ball (4) is slidably mounted on the outer surface of the support tube (3), a detection waveguide rod electrically connected to the monitoring module (2) is arranged inside the support tube (3), and the detection waveguide rod and the floating ball (4) form a magnetostrictive sensor.

8. The He molecule stripping device with a sealing structure according to claim 1, characterized in that: A filter membrane permeation tube is arranged in the cylinder (15), and the filter membrane permeation tube comprises a hollow pipe and a filter membrane sheet embedded in the inner wall of the hollow pipe.

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