Buckling mechanism for ion implantation loading drum

Abstract

The utility model provides a buckling mechanism for an ion implantation loading drum, which comprises a supporting and assembling component, a switching guide component, a shielding cover component, a buckling and locking component, a buffer matching component and a vacuum communication component, and is characterized in that a sealing ring is embedded on the surface of a buckling flange of the buckling mechanism; the sealing ring can effectively prevent gas or liquid from leaking from the joint portion of the buckling flange and the loading drum, the sealing ring is tightly attached to the edge of the loading drum, the sealing performance of the joint portion is ensured, when the locking bolt head abuts against the outer wall of the loading drum, certain pressure can be applied, the buckling flange and the loading drum are more tightly attached, and the sealing performance of the loading drum is improved. The sealing effect is further enhanced, the pressure acts on the sealing ring in a balanced mode, the stability of the sealing state can be guaranteed, due to the design of the buffering oil cylinder, when the tail end of the piston rod abuts against the inner wall of the loading drum, buffering force can be applied, balance of the sealing state can be maintained, the ion implantation quality can be guaranteed, and the performance of an integrated circuit finished product is improved.

Description

Technical Field

[0001] The utility model relates to an ion implanter, in particular to a loading drum used for the ion implanter. Background Art

[0002] Patent document CN111128665A discloses a loading drum device for ion implantation, which includes a base, a rotating platform, a wafer carrier, a sliding fixture, etc. The base can provide support for the rotating platform and the wafer carrier, and provide an angle change between the wafer carrier and the injection axis to meet the angle requirements of the implantation process. The rotating platform can provide an angle change and rotational movement around the center of the wafer carrier. The wafer carrier can load silicon wafers, and the wafer carrier is designed with water cooling to meet the cooling requirements during ion implantation. The sliding fixture can achieve silicon wafer clamping of specified specifications, and can achieve silicon wafer clamping firmly and without damaging the silicon wafer during the movement of the wafer carrier. This loading drum needs to be sealed with a buckling mechanism during operation, and is connected to a vacuum device to achieve an internal vacuum state. The commonly used buckling mechanism uses a deflection structure for opening and closing operations. After long-term use, the sealing states of the proximal and distal parts of the rotating shaft will be different, affecting the quality of ion implantation. Therefore, it is necessary to optimize its structure to overcome the above-mentioned defects. Utility Model Content

[0003] The utility model aims to provide a buckling mechanism for an ion implantation loading drum, so as to improve the opening and closing convenience and ensure the sealing performance.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A fastening mechanism for an ion implantation loading drum, comprising:

[0006] A support assembly component, wherein the support assembly component has an installation space, and cooperates with a lifting mechanism, and the lifting mechanism can carry the support assembly component up or down;

[0007] A transfer guide assembly is installed in the support assembly and can rise or fall together with the support assembly. It cooperates with the guide frame and guides the rise or fall of the support assembly by the transfer guide assembly;

[0008] A shielding cover assembly is installed in the supporting assembly assembly and can be raised or lowered together with the supporting assembly assembly. The shielding cover assembly is adapted to the shape of the loading drum and can be buckled with the loading drum to shield the loading drum;

[0009] A buckle locking assembly, which is installed in the shield cover assembly through a movable connection structure, can rise or fall together with the shield cover assembly, and is adapted to the shape of the loading drum. The buckle locking assembly locks the loading drum and the shield cover assembly;

[0010] A buffer adapter assembly is installed in the shield cover assembly and can be raised or lowered together with the shield cover assembly. It is adapted to the shape of the loading drum and corresponds to the position of the buckle locking assembly, and can buffer the joint between the buckle locking assembly and the loading drum;

[0011] The vacuum communication component is installed in the shield cover component and the support assembly component, and cooperates with the loading drum and the vacuum system to form a vacuum state between the loading drum and the shield cover component.

[0012] Specifically, the support assembly includes:

[0013] A supporting vertical plate, which is arranged in a vertical direction, and a shield cover assembly is installed on the front side of the supporting vertical plate;

[0014] The assembly support is provided with two groups, each group of the assembly supports is respectively installed on the back of the supporting upright plate and protrudes to the rear of the supporting upright plate, and the transfer guide component is installed on the assembly support.

[0015] The transfer guide assembly includes:

[0016] A pair of guide posts are provided, each guide post is installed in an assembly support respectively, and the guide posts are parallel to each other.

[0017] The shroud cover assembly includes:

[0018] A shielding shell plate, which is connected to the front side of the supporting vertical plate and is adapted to the shape of the loading drum and can shield the loading drum;

[0019] A buckling flange is formed on the edge of the shield shell plate, extends along the circumference of the shield shell plate, and protrudes toward the front of the shield shell plate, and can be engaged with the edge of the loading drum;

[0020] The assembly protrusion is formed on the outer wall of the buckling flange and protrudes outward of the buckling flange. The buckling locking component and the buffer matching component are installed on the assembly protrusion.

[0021] The snap-fit ​​locking assembly includes:

[0022] A locking hook body, which is mounted on the assembly protrusion via a rotating shaft and can be deflected on the assembly protrusion, with its end extending toward the loading drum;

[0023] The locking bolt head is screwed to the end of the locking hook body and can be extended and retracted in the locking hook body. The end of the locking bolt head can be pressed against the outer wall of the loading drum so that the buckling flange is tightly buckled with the loading drum.

[0024] The buffer adapter assembly includes:

[0025] The buffer oil cylinder is installed on the assembly protrusion and corresponds to the position of the locking hook body. The end of its piston rod is in contact with the inner wall of the loading drum, and a buffer force can be applied between the buckling flange and the loading drum.

[0026] The vacuum connection kit includes:

[0027] A connecting core hole is provided in the supporting vertical plate and the shield shell plate. A switching valve of the vacuum system can be installed in the connecting core hole to connect the space between the shield shell plate and the loading drum with the vacuum system.

[0028] The advantages of the utility model are:

[0029] The fastening mechanism has a sealing ring embedded on the surface of the fastening flange. The sealing ring can effectively prevent gas or liquid from leaking from the joint between the fastening flange and the loading drum, and ensures the sealing of the joint by closely fitting against the edge of the loading drum. When the locking bolt head is in contact with the outer wall of the loading drum, a certain pressure is applied to make the fastening flange and the loading drum fit more closely, further enhancing the sealing effect. This pressure acts evenly on the sealing ring to ensure the stability of the sealing state. The design of the buffer cylinder enables a buffer force to be applied when the end of the piston rod is in contact with the inner wall of the loading drum. This buffer force can prevent the locking bolt head from causing damage to the joint between the fastening flange and the loading drum due to excessive pressure, thereby maintaining the balance of the sealing state, which is beneficial to ensuring the quality of ion implantation and improving the performance of integrated circuit products. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a structural schematic diagram of the buckling mechanism for the ion implantation loading drum proposed by the utility model;

[0031] Figure 2 is a schematic diagram of the back structure of the buckling mechanism;

[0032] Figure 3 It is a schematic diagram of the cross-sectional structure of the buckling mechanism. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0034] like Figure 1 to Figure 3 As shown, the buckling mechanism for the ion implantation loading drum proposed by the utility model includes a supporting assembly component, a transfer guide component, a shield cover component, a buckling locking component, a buffer matching component and a vacuum connecting component. The supporting assembly component has an installation space, which cooperates with the lifting mechanism, and the lifting mechanism can carry the supporting assembly component to rise or fall. The transfer guide component is installed in the supporting assembly component and can rise or fall together with the supporting assembly component. It cooperates with the guide seat frame, and the transfer guide component guides the rising or falling process of the supporting assembly component. The shield cover component is installed in the supporting assembly component and can rise or fall together with the supporting assembly component. It is adapted to the shape of the loading drum and can be The loading drum is buckled to cover the loading drum. The buckling and locking assembly is installed in the protective cover cover assembly through a movable connection structure, and can rise or fall together with the protective cover cover assembly. It is adapted to the shape of the loading drum. The loading drum and the protective cover cover assembly are locked by the buckling and locking assembly. The buffer matching assembly is installed in the protective cover cover assembly and can rise or fall together with the protective cover cover assembly. It is adapted to the shape of the loading drum and corresponds to the position of the buckling and locking assembly. The joint between the buckling and locking assembly and the loading drum can be buffered. The vacuum communication assembly is installed in the protective cover cover assembly and the supporting assembly assembly. It cooperates with the loading drum and the vacuum system to form a vacuum state between the loading drum and the protective cover cover assembly.

[0035] In this embodiment, the supporting assembly component includes a supporting upright plate 110 and an assembly support 120. The supporting upright plate is arranged vertically, the shielding cover assembly is installed on the front of the supporting upright plate, and the assembly support is provided with two groups. Each group of assembly supports is respectively installed on the back of the supporting upright plate and protrudes to the rear of the supporting upright plate, and the transfer guide assembly is installed on the assembly support.

[0036] In this embodiment, the supporting plate cooperates with the lifting mechanism through the transmission structure and can rise or fall in the ion implanter.

[0037] The transfer guide assembly includes a pair of guide posts 200 , each guide post is installed in an assembly support, and the guide posts are parallel to each other.

[0038] In this embodiment, the guide column cooperates with the guide sleeve in the guide seat frame to guide the rising or falling process of the supporting plate.

[0039] The shield cover assembly includes a shield shell plate 310, a snap-fit ​​flange 320 and an assembly protrusion 330. The shield shell plate is connected to the front side of the supporting vertical plate, which is adapted to the shape of the loading drum and can shield the loading drum. The snap-fit ​​flange is formed on the edge of the shield shell plate, extends along the circumference of the shield shell plate, and protrudes toward the front of the shield shell plate, and can engage with the edge of the loading drum. The assembly protrusion is formed on the outer wall of the snap-fit ​​flange and protrudes toward the outside of the snap-fit ​​flange. The snap-fit ​​locking assembly and the buffer matching assembly are installed on the assembly protrusion.

[0040] In this embodiment, a sealing ring 321 is embedded on the surface of the fastening flange, and the sealing ring can seal the joint between the fastening flange and the loading drum.

[0041] The snap-fit ​​locking assembly includes a locking hook body 410 and a locking bolt head 420. The locking hook body is installed on the assembly protrusion through a rotating shaft and can be deflected on the assembly protrusion. Its end extends toward the loading drum. The locking bolt head is screwed to the end of the locking hook body and can be retracted in the locking hook body. Its end can be pressed against the outer wall of the loading drum, so that the snap-fit ​​flange is tightly snapped with the loading drum.

[0042] The buffer matching assembly includes a buffer cylinder 500, which is installed on the assembly protrusion and corresponds to the position of the locking hook body. The end of its piston rod is in contact with the inner wall of the loading drum, and a buffer force can be applied between the fastening flange and the loading drum to prevent the locking bolt head from causing damage to the joint between the fastening flange and the loading drum due to excessive pressure, so that the force at the joint between the fastening flange and the loading drum is balanced.

[0043] The vacuum connecting component includes a connecting core hole 700, which is opened in the supporting vertical plate and the shield shell plate. The switching valve of the vacuum system can be installed in the connecting core hole to connect the space between the shield shell plate and the loading drum with the vacuum system.

[0044] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A snap-fit ​​mechanism for an ion implantation loading drum, characterized in that: include: A support assembly component, wherein the support assembly component has an installation space, and cooperates with a lifting mechanism, and the lifting mechanism can carry the support assembly component up or down; A transfer guide assembly is installed in the support assembly and can rise or fall together with the support assembly. It cooperates with the guide frame and guides the rise or fall of the support assembly by the transfer guide assembly; A shielding cover assembly is installed in the supporting assembly assembly and can be raised or lowered together with the supporting assembly assembly. The shielding cover assembly is adapted to the shape of the loading drum and can be buckled with the loading drum to shield the loading drum; A buckle locking assembly, which is installed in the shield cover assembly through a movable connection structure, can rise or fall together with the shield cover assembly, and is adapted to the shape of the loading drum. The buckle locking assembly locks the loading drum and the shield cover assembly; A buffer adapter assembly is installed in the shield cover assembly and can be raised or lowered together with the shield cover assembly. It is adapted to the shape of the loading drum and corresponds to the position of the buckle locking assembly, and can buffer the joint between the buckle locking assembly and the loading drum; The vacuum communication component is installed in the shield cover component and the support assembly component, and cooperates with the loading drum and the vacuum system to form a vacuum state between the loading drum and the shield cover component.

2. The buckling mechanism for an ion implantation loading drum according to claim 1, characterized in that: The support assembly includes: A supporting vertical plate, which is arranged in a vertical direction, and a shield cover assembly is installed on the front side of the supporting vertical plate; The assembly support is provided with two groups, each group of the assembly supports is respectively installed on the back of the supporting upright plate and protrudes to the rear of the supporting upright plate, and the transfer guide component is installed on the assembly support.

3. The buckling mechanism for an ion implantation loading drum according to claim 2, characterized in that: The transfer guide assembly includes: A pair of guide posts are provided, each guide post is installed in an assembly support respectively, and the guide posts are parallel to each other.

4. The buckling mechanism for an ion implantation loading drum according to claim 3, characterized in that: The shroud cover assembly includes: A shielding shell plate, which is connected to the front side of the supporting vertical plate and is adapted to the shape of the loading drum and can shield the loading drum; A buckling flange is formed on the edge of the shield shell plate, extends along the circumference of the shield shell plate, and protrudes toward the front of the shield shell plate, and can be engaged with the edge of the loading drum; The assembly protrusion is formed on the outer wall of the buckling flange and protrudes outward of the buckling flange. The buckling locking component and the buffer matching component are installed on the assembly protrusion.

5. The buckling mechanism for an ion implantation loading drum according to claim 4, characterized in that: The snap-fit ​​locking assembly includes: A locking hook body, which is mounted on the assembly protrusion via a rotating shaft and can be deflected on the assembly protrusion, with its end extending toward the loading drum; The locking bolt head is screwed to the end of the locking hook body and can be extended and retracted in the locking hook body. The end of the locking bolt head can be pressed against the outer wall of the loading drum so that the buckling flange is tightly buckled with the loading drum.

6. The buckling mechanism for an ion implantation loading drum according to claim 5, characterized in that: The buffer adapter assembly includes: The buffer oil cylinder is installed on the assembly protrusion and corresponds to the position of the locking hook body. The end of its piston rod is in contact with the inner wall of the loading drum, and a buffer force can be applied between the buckling flange and the loading drum.

7. The buckling mechanism for an ion implantation loading drum according to claim 4, characterized in that: The vacuum feed-through kit includes: A connecting core hole is provided in the supporting vertical plate and the shield shell plate. A switching valve of the vacuum system can be installed in the connecting core hole to connect the space between the shield shell plate and the loading drum with the vacuum system.

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