Low-energy-consumption CVD heater

Abstract

The utility model relates to a low-energy-consumption CVD (Chemical Vapor Deposition) heater and belongs to the field of CVD heaters. The heater comprises a heating cylinder which is provided with a first clamping groove, a reaction cavity and a first groove, and the reaction cavity is located in the middle of the heating cylinder; the heating wire is located in the first clamping groove, and the free end is provided with a connector; the cylinder cover is detachably connected to the surface of the heating cylinder and is provided with a flow guide pipe and a second groove; and when the heating wire is clamped in the first clamping groove and the cylinder cover is fixed on the surface of the heating cylinder, the first groove and the second groove are combined to form a second clamping groove which is in interference fit with the connector. By opening the barrel cover and directly taking out the heating wire from the first clamping groove, the heating wire can be conveniently maintained and replaced, the situation that after long-time use, the resistance of the heating wire is increased under high temperature and large current, and consequently energy consumption is continuously increased is prevented, operation is easy, use is convenient, meanwhile, the situation that the whole heater is replaced can be avoided, and cost is reduced. And only the heating wire needs to be replaced, so that resources are saved.

Description

Technical Field

[0001] The utility model relates to a CVD heater, in particular to a low-energy consumption CVD heater. Background Art

[0002] CVD (Chemical vapor deposition) is a chemical technology that mainly uses one or more gas phase compounds or single substances containing thin film elements to react chemically on the substrate surface under medium or high temperature conditions to form a thin film. The reactor of the CVD device in the prior art is heated by an electric heater. In order to prevent the process gas from reacting with the nickel in the stainless steel heating wire, the heating wire needs to be sealed in an aluminum plate. The resistance of the heating wire increases over time, especially at high temperature and large current, which is more likely to cause the resistance to increase, thereby increasing energy consumption. Therefore, a low-energy CVD heater is urgently needed. Utility Model Content

[0003] Based on this, it is necessary to provide a low-energy CVD heater to address the problem that the resistance of the CVD heater in the prior art increases over time, especially at high temperatures and large currents, which is more likely to cause resistance to increase, thereby causing energy consumption to continue to increase.

[0004] The utility model provides a low-energy consumption CVD heater, comprising:

[0005] The heating cylinder has a first slot, a reaction chamber and a first groove, wherein the reaction chamber is located in the middle of the heating cylinder;

[0006] A heating wire, located in the first slot, and having a connector at a free end;

[0007] A cylinder cover, which is detachably connected to the surface of the heating cylinder and has a flow guide pipe and a second groove;

[0008] When the heating wire is clamped in the first clamping groove and the tube cover is fixed on the surface of the heating tube, the first groove and the second groove are combined to form a second clamping groove that is interference-fitted with the connecting head.

[0009] In one embodiment, the heating wire includes a curved portion and a vertical portion, wherein the vertical portion and the curved portion are arranged in a circular array in the first slot, and adjacent vertical portions are connected by the curved portion, wherein the free ends of two vertical portions are fixed with a curved portion, and the free ends of the curved portions are fixed to the connecting head.

[0010] In one embodiment, the first card slot is a polygonal slot, and the number of sides of the first card slot is consistent with the number of vertical portions.

[0011] In one embodiment, the heating tube includes an inner shell and an outer shell, a heat preservation cavity is provided between the inner shell and the outer shell, and the first card slot is located on the inner shell.

[0012] In one embodiment, the outer walls of the heating cylinder and the cylinder cover are both provided with mounting holes, and bolts are threadedly connected in the mounting holes.

[0013] In one embodiment, a sealing groove is provided on the heating cylinder and the cylinder cover, and a sealing gasket is provided in the sealing groove.

[0014] In one embodiment, one end of the flow guide tube is fixedly connected with a docking joint.

[0015] In one embodiment, a dust cover is threadedly connected to the outer wall of the docking joint.

[0016] The above-mentioned low-energy CVD heater can be easily repaired and replaced by opening the tube cover and directly taking out the heating wire from the first card slot after being used for a period of time, thereby preventing the heating wire from increasing in resistance under high temperature and large current after being used for a long time, thereby causing the energy consumption to continue to increase. The operation is simple and easy to use. At the same time, it can avoid replacing the entire heater and only need to replace the heating wire, thus saving resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic diagram of an explosion structure of a low-energy CVD heater in one embodiment;

[0019] Figure 2 is a schematic diagram of the structure of a low-energy CVD heater in one embodiment;

[0020] Figure 3 Schematic diagram of the heating wire structure in one embodiment.

[0021] Reference numerals:

[0022] 100, heating tube; 110, first card slot; 120, reaction chamber; 130, first groove; 140, sealing groove; 150, liner; 160, outer shell; 170, insulation chamber; 200, heating wire; 210, connector; 220, vertical portion; 230, curved portion; 240, bent portion; 300, tube cover; 310, flow guide tube; 320, second groove; 330, second card slot; 340, mounting hole; 350, bolt; 360, dust cover; 370, sealing gasket; 380, docking joint. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of the utility model are for illustrative purposes only and do not represent the only implementation method.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0026] In the present utility model, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0027] Unless otherwise defined, all technical and scientific terms used in the specification of the present utility model have the same meaning as those commonly understood by technicians in the technical field of the present utility model. The terms used in the specification of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. The term "and / or" used in the specification of the present utility model includes any and all combinations of one or more related listed items.

[0028] Combine the following Figure 1-Figure 3 The utility model is described as a low energy consumption CVD heater.

[0029] like Figure 1 and Figure 2 As shown, in one embodiment, a low energy consumption CVD heater includes a heating cylinder 100 , a heating wire 200 and a cylinder cover 300 .

[0030] The heating cylinder 100 has a first slot 110, a reaction chamber 120 and a first groove 130. The reaction chamber 120 is located in the middle of the heating cylinder 100. The heating wire 200 is located in the first slot 110, and the free end of the heating wire 200 has a connector 210. The cylinder cover 300 is detachably connected to the surface of the heating cylinder 100, and the cylinder cover 300 has a guide tube 310 and a second groove 320. The guide tube 310 is used to transport one or more gas phase compounds or single substances containing film elements into the reaction chamber 120.

[0031] When the heating wire 200 is clamped in the first clamping groove 110 and the tube cover 300 is fixed on the surface of the heating tube 100 , the first groove 130 and the second groove 320 are combined to form a second clamping groove 330 which is interference-fitted with the connector 210 .

[0032] After the heater has been used for a period of time, the barrel cover 300 is opened, and the heating wire 200 is directly taken out from the first card slot 110, so that the heating wire 200 can be conveniently repaired and replaced, and the heating wire 200 can be prevented from increasing resistance under high temperature and large current after being used for a long time, thereby continuously increasing energy consumption. The operation is simple and easy to use. At the same time, it can avoid replacing the entire heater, and only the heating wire 200 needs to be replaced, saving resources.

[0033] For details, see Figure 3 The heating wire 200 includes a bending portion 230 and a vertical portion 220. The vertical portion 220 and the bending portion 230 are arranged in a circular array in the first slot 110. Adjacent vertical portions 220 are connected by the bending portion 230. The free ends of the two vertical portions 220 are fixed with a bending portion 240. The free ends of the bending portions 240 are fixed to the connector 210, thereby making it convenient to make the temperature in the reaction chamber 120 more uniform and improving the coating quality of the workpiece.

[0034] It should be supplemented that the first slot 110 is a polygonal slot, and the number of sides of the first slot 110 is consistent with the number of the vertical portions 220 , which can effectively prevent the heating wire 200 from being displaced in the first slot 110 .

[0035] Specifically, the heating tube 100 includes an inner shell 150 and an outer shell 160, and an insulation chamber 170 is provided between the inner shell 150 and the outer shell 160. The first card slot 110 is located on the inner shell 150, and the double-layer structure is combined with the insulation chamber 170 to reduce heat loss and further reduce energy consumption.

[0036] In this embodiment, the outer walls of the heating tube 100 and the tube cover 300 are both provided with mounting holes 340 , and bolts 350 are threadedly connected to the mounting holes 340 , thereby facilitating assembly and disassembly between the heating tube 100 and the tube cover 300 .

[0037] In order to improve the sealing performance of the heater, a sealing groove 140 is provided on the heating cylinder 100 and the cylinder cover 300 , and a sealing gasket 370 is provided in the sealing groove 140 .

[0038] In this embodiment, one end of the guide tube 310 is fixedly connected to a docking joint 380, and the outer wall of the docking joint 380 is threadedly connected to a dust cover 360. The dust cover 360 can prevent external dust from entering the docking joint 380 during transportation and storage, thereby affecting the use effect of the CVD heater.

[0039] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0040] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the attached claims.

Claims

1. A low energy consumption CVD heater, characterized in that: include: The heating cylinder has a first slot, a reaction chamber and a first groove, wherein the reaction chamber is located in the middle of the heating cylinder; A heating wire, located in the first slot, and having a connector at a free end; A cylinder cover, which is detachably connected to the surface of the heating cylinder and has a flow guide pipe and a second groove; When the heating wire is clamped in the first clamping groove and the tube cover is fixed on the surface of the heating tube, the first groove and the second groove are combined to form a second clamping groove that is interference-fitted with the connecting head.

2. The low energy consumption CVD heater according to claim 1, characterized in that: The heating wire includes a curved portion and a vertical portion, wherein the vertical portion and the curved portion are arranged in a circular array in the first slot, and adjacent vertical portions are connected via the curved portion, wherein the free ends of the two vertical portions are fixed with a curved portion, and the free ends of the curved portions are fixed to the connecting head.

3. The low energy consumption CVD heater according to claim 2, characterized in that: The first card slot is a polygonal slot, and the number of sides of the first card slot is consistent with the number of vertical portions.

4. The low energy consumption CVD heater according to claim 1, characterized in that: The heating cylinder comprises an inner shell and an outer shell, a heat preservation cavity is arranged between the inner shell and the outer shell, and the first card slot is located on the inner shell.

5. The low energy consumption CVD heater according to claim 1, characterized in that: The outer walls of the heating cylinder and the cylinder cover are both provided with mounting holes, and bolts are threadedly connected in the mounting holes.

6. The low energy consumption CVD heater according to claim 1, characterized in that: The heating cylinder and the cylinder cover are both provided with sealing grooves, and sealing pads are arranged in the sealing grooves.

7. The low energy consumption CVD heater according to any one of claims 1 to 6, characterized in that: One end of the flow guide pipe is fixedly connected with a butt joint.

8. The low energy consumption CVD heater according to claim 7, characterized in that: The outer wall of the joint is threadedly connected with a dust cover.

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