Cooling plate and target material cooling device

Abstract

The utility model discloses a cooling plate and target material cooling device relates to magnetron sputtering equipment technical field, including box and filter screen plate, the top middle end of box is equipped with servo motor, and the output end of servo motor passes through the box top and is connected with positive and negative tooth screw rod, and the filter screen plate is equipped with the positive and negative tooth screw rod. A first lead screw nut and a second lead screw nut are arranged outside the positive and negative tooth lead screw, a transmission rod is connected to the bottom end of the positive and negative tooth lead screw, a cleaning brush is arranged outside the transmission rod, the filter screen plate is arranged above the cleaning brush, a bearing plate is fixed to the inner side of the box body, and a supporting column is arranged at an opening of the bearing plate in a penetrating mode. According to the cooling plate and the target material cooling device, the two sets of cooling assemblies which are close to each other oppositely through the first lead screw nut and the second lead screw nut are attached to the top face and the bottom face of the target material correspondingly, at the moment, cooling water enters the water channel through the water inlet pipe and leaves from the water outlet pipe after being heated, and the effect of rapidly reducing the temperature of the target material is achieved through heat transfer between a cooling medium and the target material.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering equipment, in particular to a cooling plate and a target material cooling device. Background Art

[0002] Magnetron sputtering is a type of physical vapor deposition. The general sputtering method can be used to prepare metals, semiconductors, insulators and other materials, and has the advantages of simple equipment, easy control, large coating area and strong adhesion. The target material of magnetron sputtering needs to be cooled and cleaned by a cooling device after the heat treatment process to remove stains on the surface of the target material for the next step of processing.

[0003] For example, the utility model with application number CN201921486815.X discloses a target material cooling device. The utility model places the target material on a horizontal placement plate, separates the individual target materials by vertical baffles, then starts the water pump to pump the cleaning liquid in the water storage chamber to the horizontal spray pipe, and finally flushes the cleaning liquid to the target material on the horizontal placement plate through the water outlet hole to achieve cleaning of the target material. The cleaning liquid on the horizontal placement plate leaks down step by step through the second water leakage hole to achieve cleaning and cooling of the target material on the bottom horizontal placement plate, and the cleaning liquid finally flows back to the water storage chamber from the first water leakage hole. However, the cooling intensity of the top and bottom surfaces of the target material is not uniform enough, and the cooling efficiency is not high.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a cooling plate and a target material cooling device are proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a cooling plate and a target material cooling device to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a target material cooling device, comprising a box body and a filter screen plate, a servo motor is installed at the top middle end of the box body, and the output end of the servo motor passes through the top of the box body and is connected to a positive and negative screw rod, a first screw nut and a second screw nut are arranged on the outside of the positive and negative screw rod, and the bottom end of the positive and negative screw rod is connected to a transmission rod, a cleaning brush is arranged on the outside of the transmission rod, the filter screen plate is arranged above the cleaning brush, and a supporting plate is fixed to the inner side of the box body, and a support column is arranged through the opening of the supporting plate.

[0007] Furthermore, the opening size in the middle of the filter screen plate matches the outer diameter of the transmission rod, and the box body and the filter screen plate are fixedly connected.

[0008] Furthermore, a cleaning component is installed at the lower left side of the box body, and the cleaning component includes a water pump and a water pipe, and the output end of the water pump is connected to the water pipe.

[0009] Furthermore, the cleaning component also includes a first flushing nozzle and a second flushing nozzle, and the first flushing nozzle and the second flushing nozzle are installed at the output end of the water pipe, and two of the first flushing nozzle and two of the second flushing nozzle are provided.

[0010] A cooling plate comprises a cooling assembly, wherein the cooling assembly is arranged outside the first screw nut and the second screw nut, and the cooling assembly is provided in two groups.

[0011] Furthermore, the cooling assembly includes a plate body, a water drop hole and a water channel, and the water drop hole is opened on the surface of the plate body, and the water channel is arranged inside the plate body.

[0012] Furthermore, the cooling assembly also includes a water inlet pipe and a water outlet pipe, and both ends of the water channel are respectively connected to the water inlet pipe and the water outlet pipe.

[0013] The utility model provides a cooling plate and a target material cooling device, which have the following beneficial effects:

[0014] 1. The servo motor of the utility model drives the positive and negative threaded screws to rotate, so that the first screw nut and the second screw nut are displaced in opposite directions along the outside of the positive and negative threaded screws to adjust the support column until the protruding plate contacts the target material. At this time, the water at the bottom of the box body is pumped into the water pipe by the water pump, and sprayed to the top and bottom surfaces of the target material by the first flushing nozzle and the second flushing nozzle, while taking away stains and residual heat.

[0015] 2. The utility model relies on the first screw nut and the second screw nut to form two sets of cooling components that are close to each other and are respectively fitted with the top and bottom surfaces of the target material. At this time, cooling water enters the water channel through the water inlet pipe, leaves from the water outlet pipe after being heated, and heat is transferred between the cooling medium and the target material, thereby achieving the effect of rapidly reducing the temperature of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of a cooling plate and a target material cooling device of the utility model;

[0017] Figure 2 It is a schematic diagram of a cross-sectional three-dimensional structure of a cooling plate and a target material cooling device of the utility model;

[0018] Figure 3 The utility model is a schematic diagram of the bottom structure of a cooling plate and a carrier plate of a target material cooling device.

[0019] In the figure: 1. Box body; 2. Servo motor; 3. Positive and negative threaded screw; 4. First screw nut; 5. Second screw nut; 6. Cooling assembly; 601. Plate body; 602. Drain hole; 603. Water channel; 604. Water inlet pipe; 605. Water outlet pipe; 7. Filter screen plate; 8. Load-bearing plate; 9. Support column; 10. Cleaning assembly; 1001. Water pump; 1002. Water pipe; 1003. First flushing nozzle; 1004. Second flushing nozzle; 11. Transmission rod; 12. Cleaning brush. DETAILED DESCRIPTION

[0020] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0021] like Figure 1 and Figure 3 As shown, a target material cooling device includes a box body 1 and a filter screen plate 7, a servo motor 2 is installed at the top middle end of the box body 1, and the output end of the servo motor 2 passes through the top of the box body 1 and is connected to a positive and negative threaded screw 3, a first screw nut 4 and a second screw nut 5 are arranged outside the positive and negative threaded screw 3, and a transmission rod 11 is connected to the bottom end of the positive and negative threaded screw 3, a cleaning brush 12 is arranged outside the transmission rod 11, the filter screen plate 7 is arranged above the cleaning brush 12, and a bearing plate 8 is fixed to the inner side of the box body 1, a support column 9 is arranged through the opening of the bearing plate 8, and the middle of the filter screen plate 7 The opening size is consistent with the outer diameter of the transmission rod 11, and the box body 1 and the filter screen plate 7 are fixedly connected, and a cleaning component 10 is installed at the lower left side of the box body 1, and the cleaning component 10 includes a water pump 1001 and a water pipe 1002, and the output end of the water pump 1001 is connected to the water pipe 1002. The cleaning component 10 also includes a first flushing nozzle 1003 and a second flushing nozzle 1004, and the output end of the water pipe 1002 is installed with the first flushing nozzle 1003 and the second flushing nozzle 1004, and two of the first flushing nozzle 1003 and the second flushing nozzle 1004 are respectively provided.

[0022] The specific operation is as follows: the servo motor 2 drives the forward and reverse screws 3 to rotate, so that the first screw nut 4 and the second screw nut 5 are displaced in opposite directions along the outside of the forward and reverse screws 3 to adjust the support column 9 to the protruding plate 601 to contact the target material. At this time, the water at the bottom of the box body 1 is pumped into the water pipe 1002 by the water pump 1001, and sprayed onto the top and bottom surfaces of the target material by the first flushing nozzle 1003 and the second flushing nozzle 1004, while taking away stains and residual heat.

[0023] like Figure 2As shown, a cooling plate includes a cooling component 6, which is arranged outside the first screw nut 4 and the second screw nut 5. The cooling component 6 is provided with two groups. The cooling component 6 includes a plate body 601, a drain hole 602 and a water channel 603. The drain hole 602 is opened on the surface of the plate body 601, and the water channel 603 is arranged inside the plate body 601. The cooling component 6 also includes a water inlet pipe 604 and a water outlet pipe 605, and the two ends of the water channel 603 are respectively connected to the water inlet pipe 604 and the water outlet pipe 605.

[0024] The specific operation is as follows: the two groups of cooling components 6 that are close to each other by relying on the first screw nut 4 and the second screw nut 5 are respectively attached to the top and bottom surfaces of the target material. At this time, cooling water enters the water channel 603 through the water inlet pipe 604, and leaves from the water outlet pipe 605 after being heated. The heat is transferred between the cooling medium and the target material, so as to achieve the effect of rapidly reducing the temperature of the target material.

[0025] In summary, when the cooling plate and the target material cooling device are used, the target material is first placed between the two groups of cooling components 6, and the servo motor 2 drives the positive and negative threaded screws 3 to rotate, and the first screw nut 4 and the second screw nut 5 each drive a group of cooling components 6 to move in opposite directions along the outside of the positive and negative threaded screws 3 until the target material is clamped and fixed. At this time, the cooling water enters the water channel 603 through the water inlet pipe 604 and flows in the water channel 603 until it leaves the water outlet pipe 605 after being heated. In this way, the heat transfer between the cooling medium and the target material is achieved to achieve the effect of rapidly reducing the temperature of the target material;

[0026] After the temperature of the target material drops significantly, the servo motor 2 drives the positive and negative threaded screws 3 to rotate, and the first threaded screw nut 4 and the second threaded screw nut 5 each drive a group of cooling components 6 to move in opposite directions along the outside of the positive and negative threaded screws 3, so as to adjust the support column 9 until the protruding plate 601 contacts the target material;

[0027] Then, the water pump 1001 is started to pump water from the lower part of the box body 1 into the water pipe 1002, and the water is sprayed to the top and bottom of the target material through the first flushing nozzle 1003 and the second flushing nozzle 1004 in opposite output directions, respectively, to remove the stains and the remaining heat, and the water generated by the cleaning falls through the water drop hole 602 to the filter screen plate 7 for filtration and returns to the lower part of the box body 1, which can be used for secondary cleaning, thereby reducing the waste of water resources;

[0028] The transmission rod 11 which moves synchronously with the positive and negative threaded rods 3 will drive the cleaning brush 12 to continuously brush the surface of the filter screen plate 7, thereby achieving the effect of automatically cleaning the filter screen plate 7 and ensuring the normal operation of the device.

[0029] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A target material cooling device, comprising a housing (1) and a filter screen (7), characterized in that: A servo motor (2) is installed at the middle of the top of the box body (1), and the output end of the servo motor (2) passes through the top of the box body (1) and is connected to a positive and negative threaded rod (3), a first threaded rod nut (4) and a second threaded rod nut (5) are arranged outside the positive and negative threaded rod (3), and a transmission rod (11) is connected to the bottom end of the positive and negative threaded rod (3), a cleaning brush (12) is arranged outside the transmission rod (11), the filter screen plate (7) is arranged above the cleaning brush (12), and a bearing plate (8) is fixed to the inner side of the box body (1), and a support column (9) is arranged through the opening of the bearing plate (8).

2. A target material cooling device according to claim 1, characterized in that: The size of the opening in the middle of the filter screen plate (7) matches the outer diameter of the transmission rod (11), and the box body (1) and the filter screen plate (7) are fixedly connected.

3. A target material cooling device according to claim 1, characterized in that: A cleaning component (10) is installed at the lower left side of the box body (1), and the cleaning component (10) comprises a water pump (1001) and a water pipe (1002), and the output end of the water pump (1001) is connected to the water pipe (1002).

4. A target material cooling device according to claim 3, characterized in that: The cleaning assembly (10) further comprises a first flushing nozzle (1003) and a second flushing nozzle (1004), and the output end of the water pipe (1002) is provided with the first flushing nozzle (1003) and the second flushing nozzle (1004), and two of the first flushing nozzle (1003) and the second flushing nozzle (1004) are provided.

5. A cooling plate, comprising a cooling assembly (6), characterized in that: The cooling assembly (6) is arranged outside the first screw nut (4) and the second screw nut (5) as claimed in claim 1, and two groups of the cooling assembly (6) are provided.

6. A cooling plate according to claim 5, characterized in that: The cooling assembly (6) comprises a plate body (601), a water drop hole (602) and a water channel (603), wherein the water drop hole (602) is provided on the surface of the plate body (601), and the water channel (603) is provided inside the plate body (601).

7. A cooling plate according to claim 6, characterized in that: The cooling assembly (6) further comprises a water inlet pipe (604) and a water outlet pipe (605), and the two ends of the water channel (603) are respectively connected to the water inlet pipe (604) and the water outlet pipe (605).

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