Rapid water-cooling furnace body of horizontal diffusion furnace

Abstract

The utility model relates to the technical field of diffusion furnaces, and discloses a rapid water-cooling furnace body of a horizontal diffusion furnace, a water inlet of a furnace body assembly is communicated and connected with a shunt pipe, the middle part of a pipeline of the shunt pipe is communicated and connected with a cooling pipe communicated and connected with a water-cooling cooling assembly, and a water outlet of the furnace body assembly is communicated and connected with a return pipe. And the furnace body assembly is communicated and connected with the water cooling assembly through a return pipe. According to the utility model, the circulating water pump is used as a power source, cooling water is divided and surrounded along the guide plate of the furnace body assembly in a two-strand flow dividing manner through the flow guide combination of the cooling pipe and the flow dividing pipe, and then the two strands of cooling water are kept in an opposite flow manner by utilizing the spiral opposite direction of the guide plate, so that the heating furnace body is subjected to visual water-cooling cooling work; and then the cooled water flow converges at the center of the heating furnace body and is circularly discharged through the return pipe, so that the cooling efficiency is higher, and meanwhile, the cooling characteristic is faster.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a horizontal diffusion furnace with rapid water cooling and temperature reduction. Background Art

[0002] Diffusion furnaces are divided into two types: vertical diffusion furnaces and horizontal (horizontal) diffusion furnaces. The horizontal diffusion furnace is characterized in that the quartz boat is parallel to the horizontal plane. One furnace can have 4 or more process furnace tubes. The average furnace tube occupies a smaller area, and the process parameters between slices are better than those of the vertical diffusion furnace. During the use of the diffusion furnace, since conventional quartz tubes cannot withstand long-term high-temperature heat treatment processes, it is necessary to promptly cool down the diffusion furnace body after use, as shown in the existing patent technology: After searching, the China Patent Network discloses a horizontal diffusion furnace with rapid cooling (public announcement number CN217929808U). When this type of device cools the furnace body, the air will be cooled by the cooling water in the water tank when passing through the serpentine air guide pipe. Therefore, the air entering the gap between the resistance furnace body and the quartz tube through the air inlet pipe uses cold air to cool the furnace body, and the cooling component can keep the water temperature in the water tank at a reduced level for a long time. While having a good cooling effect, it will also reduce water costs.

[0003] However, there are still some shortcomings in the above-mentioned patents and the diffusion furnace cooling method adopted in the existing market: the existing method of cooling the air with water and then introducing the cold air into the furnace body for cooling has the problem of slow cooling efficiency and long cooling time. On the other hand, the single stream of cold air circulates around the furnace body for cooling. When it is directed to the rear end of the furnace body, it is often unable to effectively cool the entire furnace body due to the heat conduction at the front end. To this end, the technicians in this field provide a horizontal diffusion furnace with rapid water cooling to solve the problems raised in the above background technology. Utility Model Content

[0004] The main purpose of the utility model is to provide a horizontal diffusion furnace with a rapid water-cooling temperature-reducing furnace body, which can effectively solve the problem of low furnace body cooling efficiency of existing diffusion furnaces in the background technology.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a horizontal diffusion furnace with rapid water cooling and cooling, comprising a furnace body assembly and a water cooling and cooling assembly, wherein the water inlet of the furnace body assembly is connected to a shunt pipe, and the middle part of the shunt pipe is connected to a cooling pipe connected to the water cooling and cooling assembly, the drain outlet of the furnace body assembly is connected to a return pipe, and the furnace body assembly is connected to the water cooling and cooling assembly through the return pipe;

[0006] The furnace body assembly comprises a furnace cover, a heat preservation furnace jacket is arranged inside the cover of the furnace cover, a heating furnace body is arranged inside the heat insulation jacket of the heat preservation furnace jacket, and a guide plate is symmetrically arranged between the heat preservation furnace jacket and the heating furnace body in the form of a ring sleeve;

[0007] The water-cooling cooling component includes a first air-cooling box and a second air-cooling box installed on the bottom of the first air-cooling box, a first air-cooling fan is provided through the upper end of the box body of the first air-cooling box, and ventilation windows are provided at the front and rear sides of the lower half of the box body of the first air-cooling box, a cooling frame is provided inside the box body of the second air-cooling box, a second air-cooling fan that passes through the second air-cooling box is symmetrically provided on one side of the frame of the cooling frame, and a ventilation pipe opening that passes through the second air-cooling box is symmetrically provided on the other side of the frame of the cooling frame.

[0008] As a further solution of the utility model: the guide plates are spiral plate structures, and the spiral plates of the two groups of guide plates are arranged symmetrically in forward and reverse directions relative to the center of the heating furnace body.

[0009] As a further solution of the utility model: the upper part of the furnace hood is provided with diverter valves opposite to the guide plates at both ends, the diverter valve is connected to the cooling pipe through a diverter pipe, and the other end of the cooling pipe is connected to the circulating water pump installed at the bottom of the second air-cooled box.

[0010] As a further solution of the utility model: a reflux valve opposite to the guide plate is arranged at the center position of the bottom of the furnace hood, the reflux valve is connected to the reflux pipe, and the other end of the reflux pipe is connected to the reflux ring pipe installed on the upper half of the first air cooling box body, and a plurality of cooling nozzles are arranged along the circumference of the bottom of the water pipe of the reflux ring pipe.

[0011] As a further solution of the utility model: a plurality of groups of filler filters are arranged inside the frame of the cooling frame, and the filler filters adjacent to each other above and below are directly opposite to the ventilation opening between the second air-cooling fan and the ventilation pipe opening.

[0012] As a further solution of the utility model: a feed pipe opening is arranged at one end of the heating furnace body, and an exhaust valve is arranged at the other end of the heating furnace body.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. After the use of the diffusion furnace body of the utility model, by using a circulating water pump as a power source, the cooling water is passed through the guide combination of the cooling pipe and the diversion pipe, and is diverted and surrounded along the guide plate of the furnace body assembly in two diversion modes, and then the spiral opposition of the guide plate is utilized to keep the two cooling waters in a counter-flow mode, so as to directly perform water cooling on the heating furnace body, and then the cooled water flows converge at the center of the heating furnace body and are circulated and discharged through the reflux pipe. On the one hand, it has a more efficient cooling efficiency and can directly cool down the waste heat, and on the other hand, it has a faster cooling characteristic and can save half of the cooling time, and its cooling is more efficient and timely.

[0015] 2. During the water-cooling process of the diffusion furnace body of the utility model, when the cooling water is refluxed, the vertical wind force of the first air-cooling fan in the water-cooling component and the lateral wind force of the second air-cooling fan can be used to blow cold air vertically and horizontally toward the reflux water flow, so as to take away the heat in the water flow and facilitate its circulation cooling use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of a horizontal diffusion furnace with rapid water cooling and cooling of the furnace body according to the utility model;

[0017] Figure 2 It is a structural schematic diagram of a furnace body assembly in a horizontal diffusion furnace with rapid water cooling and cooling according to the utility model;

[0018] Figure 3 The utility model is a schematic structural diagram of a water cooling component in a horizontal diffusion furnace with rapid water cooling.

[0019] In the figure: 1. furnace cover; 2. feed pipe opening; 3. exhaust valve; 4. cooling pipe; 5. diverter pipe; 6. return pipe; 7. first air cooling box; 8. second air cooling box; 9. insulation furnace jacket; 10. heating furnace body; 11. guide plate; 12. diverter valve; 13. return valve; 14. air pressure valve; 15. first air cooling fan; 16. ventilation window; 17. return loop pipe; 18. cooling nozzle; 19. cooling frame; 20. filler filter; 21. ventilation pipe opening; 22. second air cooling fan; 23. circulating water pump. DETAILED DESCRIPTION

[0020] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0021] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] Please refer to Figure 1-3 As shown, a horizontal diffusion furnace with rapid water cooling and cooling furnace body includes a furnace body assembly and a water cooling and cooling assembly. The furnace body assembly includes a furnace hood 1. An insulating furnace jacket 9 is arranged inside the hood of the furnace hood 1. A heating furnace body 10 is arranged inside the insulating jacket of the insulating furnace jacket 9. A feed pipe opening 2 is arranged at one end of the heating furnace body 10, and an exhaust valve 3 is arranged at the other end of the heating furnace body 10. By arranging the feed pipe opening 2 at one end of the heating furnace body 10, it can be used as an inlet and outlet channel for the boat component, and by arranging the exhaust valve 3 at the other end of the heating furnace body 10, it can be used as a circulation channel for high-temperature exhaust gas.

[0024] A guide plate 11 is symmetrically arranged in the form of a ring between the insulation furnace jacket 9 and the heating furnace body 10. The guide plate 11 is a spiral plate structure, and the spiral plates of the two groups of guide plates 11 are arranged symmetrically in forward and reverse directions relative to the center of the heating furnace body 10. By utilizing the two groups of guide plates 11 arranged symmetrically in forward and reverse directions and utilizing their spiral characteristics, two streams of cooling water can be circulated along the circumference of the heating furnace body 10 in a spiral convection manner. Compared with the traditional unidirectional circulation method, it can save half the circulation time, thereby improving its cooling timeliness and cooling efficiency.

[0025] The water inlet of the furnace body assembly is connected to the shunt pipe 5, and the middle part of the shunt pipe 5 is connected to the cooling pipe 4 connected to the water cooling assembly. The drain outlet of the furnace body assembly is connected to the return pipe 6, and the furnace body assembly is connected to the water cooling assembly through the return pipe 6. The upper part of the hood of the furnace hood 1 is provided with a shunt valve 12 opposite to the guide plate 11 at both ends. The shunt valve 12 is connected to the cooling pipe 4 through the shunt pipe 5, and the other end of the cooling pipe 4 is connected to the circulating water pump 23 installed at the bottom of the second air cooling box 8. When the diffusion furnace body needs to be cooled after use, the circulating water pump 23 is controlled as The power source draws out the circulating cooling water in the second air-cooled box 8, and guides it to the diverter valve 12 through the combination of the cooling pipe 4 and the diverter pipe 5. The cooling water is diverted in two streams along the spiral structure of the guide plate 11, and the heating furnace body 10 is directly cooled by water. The cooled water flow then converges at the center of the heating furnace body 10 and is discharged through the reflux valve 13. After the heating furnace body 10 is cooled, the air pressure valve 14 can be connected to the air pump equipment in advance, and the residual cooling water pressure between the guide plates 11 can be pushed out by the air pressure to reduce the use of water flow for subsequent heating of the furnace body 10.

[0026] The water cooling component comprises a first air cooling box 7 and a second air cooling box 8 installed at the bottom of the first air cooling box 7. A first air cooling fan 15 is provided through the upper end of the box body of the first air cooling box 7, and ventilation windows 16 are provided at the front and rear positions of the lower half of the box body of the first air cooling box 7. A return valve 13 opposite to the guide plate 11 is provided at the center position of the bottom of the cover body of the furnace hood 1. The return valve 13 is connected to the return pipe 6, and the other end of the return pipe 6 is connected to the return valve 13 installed at the upper half of the box body of the first air cooling box 7. The flow loop 17 is connected and conducted, and a plurality of cooling nozzles 18 are arranged along the circumference of the bottom of the water pipe of the return loop 17. When the water flows through the reflux valve 13 and is discharged, the return pipe 6 is conducted to spray the water through the combination of the return loop 17 and the cooling nozzle 18 to increase the contact area with the cold air and improve the cooling efficiency. The first air-cooling fan 15 is synchronously controlled to work, and the external cold air is circulated and pumped into the first air-cooling box 7 under the conduction of the ventilation window 16 to cool the sprayed water flow.

[0027] A cooling frame 19 is provided inside the box body of the second air-cooling box 8, and a second air-cooling fan 22 that passes through the second air-cooling box 8 is symmetrically provided on one side of the frame of the cooling frame 19, and a ventilation pipe opening 21 that passes through the second air-cooling box 8 is symmetrically provided on the other side of the frame of the cooling frame 19, and a plurality of groups of stuffing filters 20 are arranged inside the frame of the cooling frame 19, and the stuffing filters 20 adjacent to each other above and below are directly opposite to the ventilation openings of the second air-cooling fan 22 and the ventilation pipe opening 21. When water flows into the cooling frame 19 of the second air-cooling box 8, the blocking and filtering effect of the stuffing filter 20 is used to block the water flow and disperse it and drip. At the same time, the second air-cooling fan 22 is controlled to work, and the external cold air is circulated to blow the water flow, and the dripping water flow is cooled again.

[0028] The working principle of the utility model is as follows: when the diffusion furnace body needs to be cooled after use, the circulating water pump 23 can be controlled as a power source to extract the circulating cooling water in the second air cooling box 8, and guide it to the diverter valve 12 through the combination of the cooling pipe 4 and the diverter pipe 5, and guide the cooling water in two diverted ways along the spiral guide plate 11 with a spiral structure, so as to directly cool the heating furnace body 10 with water, and then the cooled water flow converges at the central part of the heating furnace body 10 and is discharged through the reflux valve 13. When the water flow is discharged through the reflux valve 13, the water flow is passed through the reflux loop pipe 11 by utilizing the conduction of the reflux pipe 6. 7 and the cooling nozzle 18 are sprayed out, and the first air-cooling fan 15 is synchronously controlled to work. Under the conduction of the ventilation window 16, the external cold air is circulated and pumped into the first air-cooling box 7, and the sprayed water flow is cooled by air. Then, when the water flow falls into the cooling frame 19 of the second air-cooling box 8, the blocking and filtering effect of the filler filter 20 is used to block the water flow and make it dispersed and drip. At the same time, the second air-cooling fan 22 is controlled to work, and the external cold air is circulated to blow the water flow, and the dripping water flow is cooled again. The cooling water after double cooling flows back to the bottom of the second air-cooling box 8 for circulation by the circulating water pump 23.

[0029] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A horizontal diffusion furnace with rapid water cooling, characterized in that: It comprises a furnace body component and a water cooling component, wherein the water inlet of the furnace body component is conductively connected to a shunt pipe (5), and the middle part of the shunt pipe (5) is conductively connected to a cooling pipe (4) conductively connected to the water cooling component, the drain outlet of the furnace body component is conductively connected to a return pipe (6), and the furnace body component is conductively connected to the water cooling component via the return pipe (6); The furnace body assembly comprises a furnace cover (1), a heat-insulating furnace jacket (9) is arranged inside the cover of the furnace cover (1), a heating furnace body (10) is arranged inside the heat-insulating jacket of the heat-insulating furnace jacket (9), and a guide plate (11) is symmetrically arranged between the heat-insulating furnace jacket (9) and the heating furnace body (10) in the form of a ring sleeve; The water-cooling cooling component comprises a first air-cooling box (7) and a second air-cooling box (8) installed at the bottom of the first air-cooling box (7); a first air-cooling fan (15) is provided through the upper end of the box body of the first air-cooling box (7); and ventilation windows (16) are provided at the front and rear sides of the lower half of the box body of the first air-cooling box (7); a cooling frame (19) is provided inside the box body of the second air-cooling box (8); a second air-cooling fan (22) penetrating the second air-cooling box (8) is symmetrically provided on one side of the frame of the cooling frame (19); and a ventilation pipe opening (21) penetrating the second air-cooling box (8) is symmetrically provided on the other side of the frame of the cooling frame (19).

2. The rapid water cooling furnace body of a horizontal diffusion furnace according to claim 1 is characterized in that: The guide plates (11) are of a spiral plate structure, and the spiral plates of the two groups of guide plates (11) are arranged symmetrically in forward and reverse directions relative to the center of the heating furnace body (10).

3. The rapid water cooling furnace body of a horizontal diffusion furnace according to claim 1 is characterized in that: A diverter valve (12) is provided at both ends of the upper part of the furnace hood (1) and is opposite to the guide plate (11); the diverter valve (12) is connected to the cooling pipe (4) through a diverter pipe (5); and the other end of the cooling pipe (4) is connected to a circulating water pump (23) installed at the bottom of the second air cooling box (8).

4. The rapid water cooling furnace body of a horizontal diffusion furnace according to claim 1 is characterized in that: A return valve (13) is provided at a central position at the bottom of the furnace hood (1) and is opposite to the guide plate (11); the return valve (13) is connected to the return pipe (6); and the other end of the return pipe (6) is connected to a return loop pipe (17) installed on the upper half of the first air cooling box (7); and a plurality of cooling nozzles (18) are arranged along the circumference of the water pipe bottom of the return loop pipe (17).

5. The rapid water cooling furnace body of a horizontal diffusion furnace according to claim 1 is characterized in that: A plurality of groups of filler filters (20) are arranged inside the frame of the cooling frame (19), and the filler filters (20) adjacent to each other above and below are located directly opposite to the ventilation opening between the second air-cooling fan (22) and the ventilation pipe opening (21).

6. The rapid water cooling furnace body of a horizontal diffusion furnace according to claim 1 is characterized in that: A feed pipe opening (2) is provided at one end of the heating furnace body (10), and an exhaust valve (3) is provided at the other end of the heating furnace body (10).

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