Novel mask library

Abstract

The utility model discloses a novel mask plate library, which comprises a static electricity eliminator, a mask plate box, a demonstrator and a plate library junction box, the static electricity eliminator is fixedly arranged at the top of the mask plate box, the demonstrator is arranged on one of two sides of the mask plate box, and the top of the plate library junction box is fixedly arranged at the bottom of the mask plate box. When the mask plate box is plugged into the storage position, the mask plate box is possibly rubbed with metal to generate electricity, so that the surface of the mask plate has static electricity, in order to prevent the mask plate from having static electricity before being fed into an objective lens, the static electricity eliminator is arranged above a mask plate taking-out opening of the plate library, and an ion air outlet of the static electricity eliminator blows ion air downwards all the time. In the process of taking out the mask plate, the ionic wind can be uniformly blown to each position on the surface of the mask plate, so that static electricity on the surface of the mask plate is eliminated; the debugging time of the version library is greatly shortened, the debugging efficiency is improved, and the visual operation of version library debugging is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of mask library, in particular to a novel mask library. Background Art

[0002] With the vigorous development of semiconductor industry technology and the increasing demand for production capacity in the semiconductor chip industry, improving the installation and debugging speed and efficiency inside the lithography machine has gradually become an urgent need.

[0003] The mask warehouse is an important part of the mask transmission mechanism of the lithography machine. In the past, the mask warehouse was not equipped with an anti-static device, which made it impossible to avoid the risk of static electricity on the surface of the mask during the process of leaving the warehouse and storing it.

[0004] In the past, library debugging was mainly done by changing the library parameters on the PC of the main control system. To change key parameters and the opening position during debugging, the debugging personnel had to run back and forth between the main control computer monitor and the mechanism many times to change the setting parameters, or the debugging work required the cooperation of multiple people.

[0005] Therefore, how to provide a new type of mask library is a problem that those skilled in the art need to solve urgently. Utility Model Content

[0006] One purpose of the utility model is to propose a novel mask library. When the mask box of the utility model is inserted into the library, there is a possibility of frictional electricity generated by the friction between the mask box and the metal, so that the surface of the mask is charged with static electricity. In order to avoid static electricity on the mask before it is sent into the objective lens, an electrostatic eliminator is installed above the mask removal port of the library. The ion air outlet of the electrostatic eliminator blows ion wind downward all the time. During the mask removal process, the ion wind will be evenly blown on every position on the mask surface, thereby eliminating the static electricity on the mask surface.

[0007] A new type of mask library according to an embodiment of the utility model includes an electrostatic eliminator, a mask box, a teaching pendant and a library junction box, wherein the electrostatic eliminator is fixedly installed on the top of the mask box, the teaching pendant is located on one of the two sides of the mask box, and the top of the library junction box is fixedly installed on the bottom of the mask box.

[0008] Furthermore, a storage position indicator light is fixedly arranged at the front end of the mask box, and a storage position is opened at the bottom of the mask box.

[0009] Furthermore, a motor is provided on a side of the mask box away from the teaching pendant, a module is provided on a side of the mask box away from the teaching pendant, and a rotating end of the motor is mounted on the module.

[0010] Furthermore, a lower limit position is fixedly provided on the inner bottom of the mask box, and an upper limit position is fixedly provided on the inner top of the mask box.

[0011] Furthermore, a box opening device is slidably provided inside the mask box in the height direction, and the box opening device is located between a lower limit position and an upper limit position.

[0012] Furthermore, one end of a teaching pendant connecting line is fixedly provided on one side of the teaching pendant close to the library junction box, and a teaching pendant plug is fixedly provided on the other end of the teaching pendant connecting line.

[0013] Furthermore, a teach pendant socket is fixedly provided on one side of the library junction box close to the teach pendant.

[0014] Furthermore, the teaching pendant plug is plugged into the teaching pendant socket.

[0015] The beneficial effects of the utility model are:

[0016] When the mask box of the utility model is inserted into the storage position, there is a possibility of frictional electricity generated by the friction between the mask box and the metal, which makes the surface of the mask carry static electricity. In order to avoid static electricity on the mask before it is sent into the objective lens, an anti-static eliminator is installed above the mask removal port of the magazine. The ion air outlet of the anti-static eliminator blows ion wind downward all the time. During the process of taking out the mask, the ion wind will be evenly blown on every position on the surface of the mask, thereby eliminating the static electricity on the surface of the mask.

[0017] The utility model greatly reduces the debugging time of the version library, improves the debugging efficiency, and realizes the visual operation of the version library debugging. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0019] Figure 1 A schematic diagram of the structure of a novel mask library proposed by the utility model;

[0020] Figure 2 The present invention is a schematic structural diagram of a novel mask library proposed by the present invention.

[0021] In the figure: 1. Static eliminator; 2. Mask box; 3. Storage position indicator light; 4. Storage position; 5. Teach pendant; 6. Teach pendant connecting line; 7. Teach pendant plug; 8. Teach pendant socket; 9. Motor; 10. Module; 11. Lower limit; 12. Upper limit; 13. Mask library junction box; 14. Box opening device. DETAILED DESCRIPTION

[0022] Now the utility model is further described in detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the utility model in a schematic manner, and therefore only show the components related to the utility model.

[0023] Please refer to Figure 1 to Figure 2 The utility model provides a new type of mask library, including an electrostatic eliminator 1, a mask box 2, a teaching pendant 5 and a library junction box 13, wherein the electrostatic eliminator 1 is fixedly installed on the top of the mask box 2, and the electrostatic eliminator 1 is used to eliminate static electricity. The mask box 2 is made of plastic, and the mask box 2 includes a mask, which is made of glass. The teaching pendant 5 is located on one of the two sides of the mask box 2, and the teaching pendant 5 is provided with a. The top of the library junction box 13 is fixedly installed on the bottom of the mask box 2.

[0024] Specifically, a storage position indicator light 3 is fixedly provided at the front end of the mask box 2, and the storage position indicator light 3 is used to detect the situation in the mask box 2. A storage position 4 is opened at the bottom of the mask box 2, and a motor 9 is provided on the side of the mask box 2 away from the teaching pendant 5. The motor 9 is used to provide power. A module 10 is provided on the side of the mask box 2 away from the teaching pendant 5, and the rotating end of the motor 9 is installed on the module 10. A lower limit position 11 is fixedly provided at the inner bottom of the mask box 2, and an upper limit position 12 is fixedly provided at the inner top of the mask box 2. A box opening device 14 is slidably provided in the internal height direction of the mask box 2, and the box opening device 14 is located between the lower limit position 11 and the upper limit position 12.

[0025] More specifically, one end of the teach pendant connecting line 6 is fixedly provided on the side of the teach pendant 5 close to the library junction box 13, and the other end of the teach pendant connecting line 6 is fixedly provided with a teach pendant plug 7. A teach pendant socket 8 is fixedly provided on the side of the library junction box 13 close to the teach pendant 5, and the teach pendant plug 7 is plugged into the teach pendant socket 8. The teach pendant 5 is plugged into the teach pendant socket 8 through the teach pendant connecting line 6 and the teach pendant plug 7 for transmitting signals.

[0026] When the mask box 2 is inserted into the storage position 4, there is a possibility of frictional electricity generated by the friction between the mask box 2 and the metal, which makes the surface of the mask carry static electricity. In order to avoid static electricity on the mask before it is sent into the objective lens, an anti-static eliminator 1 is installed above the mask removal port of the magazine. The ion outlet of the anti-static eliminator 1 blows ion wind downward all the time. During the process of taking out the mask, the ion wind will blow evenly on every position on the surface of the mask, thereby eliminating the static electricity on the surface of the mask.

[0027] The box opening device 14 of the plate library is installed on the module 10. The module 10 is driven by the motor 9 to drive the box opening device 14 to move up and down. The box opening device 14 is extended and retracted to complete the function of opening and closing the mask box 2.

[0028] Because the plate library was previously operated in the main control PC area, when debugging the positioning, the debugging personnel usually needed to set the parameters in the PC operation area and then go to the plate library to debug; therefore, the positioning of each box opening position required multiple round trips from the PC operation area to the plate library area before debugging to the appropriate position, or at least 2 debugging personnel were required to cooperate to complete the debugging work.

[0029] In order to solve this problem, the new mask library is equipped with a teaching pendant 5, and a connection port of the teaching pendant 5 is installed on the side of the junction box below the mask library.

[0030] When it is necessary to debug or calibrate the opening position of the plate library and the parameters of the up and down movement of the opening device 14, it is only necessary to insert the teaching pendant plug 7 into the teaching pendant 5 interface on the plate port, and the teaching pendant 5 can establish a link relationship with the main controller.

[0031] Only one debugging personnel needs to operate the teaching pendant 5 to complete the setting of all parameters of the box opening device 14, as well as the confirmation of each box opening position and send it to the main control system. After the debugging is completed, the teaching pendant 5 can be unplugged and put back to the appropriate position, or taken to debug the universal machine of the teaching pendant 5. This avoids the problem of the debugging personnel running back and forth between the two areas many times, and increases the debugging efficiency.

[0032] This new version library solves the problem that the original version library lacks static electricity removal function while keeping the cost basically unchanged, and also solves the problem that a single debugger needs to run back and forth between multiple operation areas during the debugging process.

[0033] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A new type of mask library, characterized in that: The invention comprises an electrostatic eliminator (1), a mask box (2), a teaching pendant (5) and a magazine junction box (13), wherein the electrostatic eliminator (1) is fixedly mounted on the top of the mask box (2), the teaching pendant (5) is located on one of the two sides of the mask box (2), and the top of the magazine junction box (13) is fixedly mounted on the bottom of the mask box (2).

2. A novel mask library according to claim 1, characterized in that: A storage position indicator light (3) is fixedly arranged at the front end of the mask box (2), and a storage position (4) is provided at the bottom of the mask box (2).

3. A novel mask library according to claim 1, characterized in that: A motor (9) is arranged on the side of the mask box (2) away from the teaching pendant (5), a module (10) is arranged on the side of the mask box (2) away from the teaching pendant (5), and a rotating end of the motor (9) is mounted on the module (10).

4. A novel mask library according to claim 1, characterized in that: A lower limit position (11) is fixedly provided on the inner bottom of the mask box (2), and an upper limit position (12) is fixedly provided on the inner top of the mask box (2).

5. A novel mask library according to claim 1, characterized in that: The mask box (2) is provided with a box opening device (14) which is slidable in the internal height direction, and the box opening device (14) is located between the lower limit position (11) and the upper limit position (12).

6. A novel mask library according to claim 1, characterized in that: One end of a teaching pendant connection line (6) is fixedly provided on one side of the teaching pendant (5) close to the library junction box (13), and a teaching pendant plug (7) is fixedly provided on the other end of the teaching pendant connection line (6).

7. A novel mask library according to claim 1, characterized in that: A teaching pendant socket (8) is fixedly arranged on one side of the library junction box (13) close to the teaching pendant (5).

8. A novel mask library according to claim 6, characterized in that: The teaching pendant plug (7) is plugged into the teaching pendant socket (8).

Images