Silicon wafer basket lifting device

Abstract

The utility model relates to the technical field of silicon wafer transfer, in particular to a silicon wafer basket lifting device, which can reduce the occupied space and meet the requirement of compact arrangement, and comprises a bottom supporting seat and a top fixing seat, and two vertical rods are connected between the bottom supporting seat and the top fixing seat side by side. Mounting plates are fixed to the back faces of the vertical rods, guide rails are installed on the front faces, located on the inner sides of the vertical rods, of the mounting plates, a lead screw mechanism is fixed between the two mounting plates, and a flower basket lifting base is connected with the lead screw mechanism.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer transfer, in particular to a silicon wafer basket lifting device. Background Art

[0002] During the transfer process of silicon wafers, a basket lifting device is needed to drive the silicon wafers up and down, and then transfer them after reaching the specified height. Figure 1 As shown, its modular structure is relatively thick and requires a side installation area, which results in more space being required in the width direction and is not suitable for compact space environments. Summary of the invention

[0003] In order to solve the problem that the existing lifting module occupies a large space, the utility model provides a silicon wafer flower basket lifting device, which can reduce the occupied space and meet the compact layout requirements.

[0004] The technical solution is as follows: a silicon wafer flower basket lifting device, characterized in that it includes a bottom support seat and a top fixed seat, two side-by-side vertical rods are connected between the bottom support seat and the top fixed seat, a mounting plate is fixed on the back of the vertical rod, a guide rail is installed on the front of the mounting plate located on the inner side of the vertical rod, a screw mechanism is fixed between the two mounting plates, and the flower basket lifting seat is connected to the screw mechanism.

[0005] Its further feature is that the screw mechanism includes a screw, a screw nut, and a motor, the two ends of the screw are respectively connected to the bearing seats on the upper fixing seat and the lower fixing seat, a motor seat is arranged at the lower part of the lower fixing seat, the motor is fixed to the motor seat and connected to the lower end of the screw;

[0006] Protective plates are installed on the front and back sides of the screw mechanism.

[0007] After adopting the utility model, the traditional module structure is cancelled and replaced by a split assembly. The screw mechanism is located between the vertical rods, and the vertical rods are fixed up and down, which saves the side installation space, thereby reducing the overall thickness and being suitable for compact space environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 This is a schematic diagram of the existing lifting module structure;

[0009] Figure 2 This is a schematic diagram of the structure of the utility model from the first perspective;

[0010] Figure 3 This is a schematic diagram of the structure of the utility model from a second viewing angle; Figure 4 for Figure 3 Enlarged schematic diagram at point A in the middle. DETAILED DESCRIPTION

[0011] See Figures 2 to 4 As shown, a silicon wafer flower basket lifting device includes a bottom support seat 1 and a top fixed seat 1, two side-by-side vertical rods 3 are connected between the bottom support seat 1 and the top fixed seat 2, a mounting plate 4 is fixed to the back of the vertical rod 3, and a guide rail 5 is installed on the front of the mounting plate 4 located on the inner side of the vertical rod. In order to better install the guide rail 5, a guide rail slot is opened on the mounting plate 4, a screw mechanism 6 is fixed between the two mounting plates 4, and the flower basket lifting seat 7 is connected to the screw mechanism 6. According to actual needs, the lifting device can be arranged in multiple groups side by side. In this embodiment, five groups are arranged side by side.

[0012] The screw mechanism 6 includes a screw 6-1, a screw nut, and a motor 6-2. The two ends of the screw 6-1 are respectively connected to the bearing seats on the upper fixed seat 6-3 and the lower fixed seat 6-4. The motor seat 6-5 is set at the lower part of the lower fixed seat 6-4. The motor 6-2 is fixed to the motor seat 6-5 and connected to the lower end of the screw 6-1.

[0013] In order to achieve aesthetic and protective effects, protective plates 9 are installed on the front and back of the screw mechanism 6.

[0014] The vertical rod 3, the bottom support seat 1 and the top fixing seat 2 are all profiles, and the joints are connected into one piece by a locking plate 8.

[0015] The thickness of the present application can be effectively reduced, so that more wafers can be arranged in a compact space, thereby improving the transportation efficiency of the silicon wafers.

Claims

1. A silicon wafer basket lifting device, characterized in that: It includes a bottom support seat and a top fixed seat, two side-by-side vertical rods are connected between the bottom support seat and the top fixed seat, a mounting plate is fixed on the back of the vertical rod, a guide rail is installed on the front of the mounting plate located on the inner side of the vertical rod, a screw mechanism is fixed between the two mounting plates, and the flower basket lifting seat is connected to the screw mechanism.

2. The silicon wafer basket lifting device according to claim 1, characterized in that: The screw mechanism includes a screw, a screw nut, and a motor. The two ends of the screw are respectively connected to the bearing seats on the upper fixed seat and the lower fixed seat. A motor seat is arranged at the lower part of the lower fixed seat. The motor is fixed to the motor seat and connected to the lower end of the screw.

3. The silicon wafer basket lifting device according to claim 1, characterized in that: Protective plates are installed on the front and back sides of the screw mechanism.

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