HWS cover opening and picking device

Abstract

The utility model relates to the technical field of box body transportation and uncovering mechanisms, and discloses an HWS uncovering and picking device, which comprises a transplanting mechanism, a cover pressing mechanism, an uncovering mechanism and a bottom mechanism, is provided with the transplanting mechanism to conveniently realize transplanting of HWS, is provided with the cover pressing mechanism and the uncovering mechanism to conveniently uncover an HWS box in an up-and-down pressing manner, and is convenient to use. And the consistency of actions during uncovering of the device and the compatibility of the device to different HWS boxes are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of box transport and cover opening mechanisms, and more specifically, to a HWS cover opening and picking device. Background Art

[0002] In the semiconductor manufacturing industry, the produced wafers are stored in FOUP / FOSB and transported to the next level for processing. Before processing, the lid of the FOUP / FOSB needs to be opened and the wafers need to be taken out one by one. The processed wafers are then stacked one by one in the FOUP / FOSB. After it is fully loaded, the lid of the FOUP / FOSB needs to be closed.

[0003] The horizontally placed wafer box is used to protect, transport and temporarily store wafers. It can be stacked for easy storage and is mainly used to place thinned wafers. When the wafer is transferred between manufacturing plants, it needs to be placed in a horizontally placed wafer box, and static paper and buffer cotton need to be placed in it. In addition, the wafer needs to be taken out of the horizontally placed wafer box and placed in a front-opening shipping box / fully transparent wafer box to facilitate the application of other processes. At present, the above operations are mainly completed manually, but manual operation is inefficient and is prone to problems such as wafer damage.

[0004] The patent with publication number CN117476525B discloses a wafer box cover opening device, including a positioning device, including a placement table, a positioning mechanism and a locking mechanism located on the placement table, the positioning mechanism cooperates with the bottom of the wafer box to position the wafer box on the placement table, and the locking mechanism and the locking groove clamp the wafer box on the placement table; the cover opening device includes a cover opening mounting plate, a cover opening lifting mechanism, a lever and a lever driving mechanism, and the cover opening lifting mechanism is used to drive the cover opening mounting plate to rise and fall. Although the device can improve the efficiency of transferring wafer boxes and opening wafer boxes, it still has the following shortcomings:

[0005] 1. The device completes the lid opening action through the linkage of multiple cylinders, which is relatively costly;

[0006] 2. The device requires 4 cylinders to move at the same time to open the HWS, because the performance of the cylinders themselves is difficult to ensure consistency, and the wear of each cylinder is inconsistent during long-term use, which will cause asynchronous opening or failure of opening the cover;

[0007] 3. In order to prevent the HWS from falling off abnormally during the opening process, a locking mechanism is added to the bottom of the device. This structure is not easy to adjust and cannot be compatible. The device is used to open the 12-inch wafer HWS, but in fact some customers also use other types of 12-inch wafer boxes, and the appearance of each manufacturer's box is different.

[0008] Therefore, a method is needed to automatically open the HWS box and perform the transplanting function to solve the existing problems of high cost, inconsistent opening action and HWS box compatibility. Utility Model Content

[0009] The utility model aims to provide a HWS cover opening and picking device to solve the problems existing in the prior art. A transplanting mechanism is provided to facilitate the picking and transplanting of HWS, and a cover pressing mechanism and a cover opening mechanism are provided to facilitate the synchronous cover opening of HWS.

[0010] To achieve the above-mentioned purpose, the utility model provides the following scheme: The utility model provides a HWS cover opening and picking device, comprising: a transplanting mechanism, the transplanting mechanism is used to complete the transplanting of HWS; a capping mechanism, the transplanting mechanism is fixed on one side of the capping mechanism, the capping mechanism comprises a bracket, a vacuum suction piece, a detection assembly and a pressure head assembly, the bracket is fixedly connected to the transplanting mechanism, the vacuum suction piece is installed on the bracket, the detection assembly is fixedly installed on the bracket, and the pressure head assembly is fixedly installed on the bracket and passes through the bracket; a cover opening mechanism, the cover opening mechanism is arranged below the bracket, the cover opening mechanism comprises a power assembly, a lever assembly and a moving frame, the moving frame is arranged below the bracket, the lever assembly is arranged below the moving frame, and the power assembly passes through the moving frame; a bottom mechanism, the bottom mechanism is arranged below the moving frame, the bottom mechanism comprises a bottom base assembly, a bottom upper top plate assembly and a limit assembly, the bottom upper top plate assembly is fixed on the bottom base assembly, the limit assembly is arranged on the bottom upper top plate assembly, and the bottom upper top plate assembly is arranged below the moving frame.

[0011] Furthermore, the bracket is provided with a waist hole, the vacuum suction piece is installed in the waist hole through a stud, and the vacuum suction piece includes an adjusting suction cup, and the adjusting suction cup is arranged at the waist hole.

[0012] Furthermore, the detection component includes a distance measuring sensor, a contact sensor and a close-range detection sensor, and the distance measuring sensor, the contact sensor and the close-range detection sensor are all fixedly mounted on a bracket.

[0013] Furthermore, the pressure head assembly includes a guide column, a first spring and a pressure head, the guide column passes through the bracket and is connected to the pressure head, and the first spring is sleeved on the guide column.

[0014] Furthermore, the movable frame includes a movable base, a first guide rod and an adjustment block. The movable base is arranged under the bracket, the first guide rod is fixed under the movable base, the adjustment block is arranged at the center position of the movable base, the first guide is connected to the bottom base assembly at the upper and lower parts, and the power assembly is connected to the adjustment block.

[0015] Furthermore, the power assembly includes a cylinder, an articulated seat, a second spring, an axle pin and a connecting rod, the top of the cylinder is connected to the articulated seat, the articulated seat is hinged to the connecting rod through the axle pin, the second spring is arranged on the top of the articulated seat, the second spring is sleeved on the cylinder, the other end of the connecting rod is installed on the movable frame, the top of the articulated seat is connected to the adjustment block, one end of the spring is connected to the adjustment block, and the other end is connected to the articulated seat.

[0016] Furthermore, the lever assembly includes a lever seat, a lever base and a lever, the lever seat is fixed under the movable base, the other end of the connecting rod is hinged to the lever seat, the lever base is fixed on the lever seat, and the lever is arranged on the lever base and extends upward through the movable base.

[0017] Furthermore, the bottom base assembly includes a bottom substrate and a second guide rod, the second guide rod is fixed to the bottom substrate by screws, and the second guide rod extends upward and is sleeved outside the first guide rod.

[0018] Furthermore, the bottom-to-top assembly includes a bottom-to-top plate and a PIN, the PIN is fixed to the bottom-to-top plate by screws, and the bottom-to-top plate is connected to the bottom substrate by screws; the limiting assembly includes a positioning base plate and a limiting block, the positioning base plate is arranged on the bottom-to-top plate, and the limiting block is fixed to the positioning base plate.

[0019] Furthermore, the transplanting mechanism includes an X-direction motion module and a Z-direction motion module, the X-direction motion module and the Z-direction motion module are connected via a connecting plate, and both the X-direction motion module and the Z-direction motion module are driven by a motor.

[0020] The utility model discloses the following technical effects:

[0021] The device is provided with a transplanting mechanism to facilitate the transplanting of HWS, a vacuum suction piece is provided to facilitate fixing the top of the HWS box, and a detection component is provided to detect whether the HWS box is placed horizontally on the bottom mechanism, so as to facilitate positioning the HWS box. At the same time, a power component is provided to facilitate lifting the HWS box to complete the opening process of the HWS box. The power component can save costs and ensure the consistency of the action when opening the cover, so as to ensure the smooth opening process. The device uses a cover pressing mechanism and a cover opening mechanism to press up and down, so as to facilitate the height adjustment and realize the opening of different HWS boxes. The device is used to automatically open the HWS box and achieve the transplanting function, so as to solve the problems of high cost, inconsistent cover opening action and compatibility of HWS boxes in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 It is a structural schematic diagram of the transplanting mechanism in the utility model;

[0025] Figure 3 It is a structural schematic diagram of the pressure cover mechanism in the utility model;

[0026] Figure 4 It is a side view of the cover mechanism in the utility model;

[0027] Figure 5 This is a structural schematic diagram of the bottom of the pressure cover assembly in the utility model;

[0028] Figure 6 It is a structural schematic diagram of the cover opening mechanism in the utility model;

[0029] Figure 7 It is a side view of the cover opening mechanism in the utility model;

[0030] Figure 8 It is a structural schematic diagram of the bottom mechanism in the utility model;

[0031] Fig. 9 It is a structural schematic diagram of the limit assembly in the utility model;

[0032] Fig.10 This is a schematic diagram of the structure of the HWS box;

[0033] Among them, 100, transplanting mechanism; 110, X-axis motion module; 120, Z-axis motion module; 200, capping mechanism; 210, bracket; 220, vacuum suction piece; 230, detection assembly; 240, pressure head assembly; 241, guide column; 242, first spring; 243, pressure head; 3, capping mechanism; 310, power assembly; 311, cylinder; 312, hinge seat; 313, second spring; 314, shaft pin; 315, connecting rod; 320 , lever assembly; 321, lever seat; 322, lever base; 323, lever; 330, moving frame; 331, moving base plate; 332, first guide rod; 333, adjustment block; 400, bottom mechanism; 410, bottom base assembly; 411, bottom base; 412, second guide rod; 420, bottom upper top plate assembly; 421, bottom upper top plate; 422, PIN; 430, limit assembly; 431, limit block; 432, positioning bottom plate. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0036] like Figure 1-Figure 9As shown, the utility model provides a HWS cover opening and picking device, including: a transplanting mechanism 100, the transplanting mechanism 100 is used to complete the transplanting of HWS; a capping mechanism 200, the transplanting mechanism 100 is fixed on one side of the capping mechanism 200, the capping mechanism 200 includes a bracket 210, a vacuum suction piece 220, a detection component 230 and a pressure head component 240, the bracket 210 is fixedly connected to the transplanting mechanism 100, the vacuum suction piece 220 is installed on the bracket 210, the detection component 230 is fixedly installed on the bracket 210, and the pressure head component 240 is fixedly installed on the bracket 210 and penetrates the bracket 210; the cover opening mechanism 300, the cover opening mechanism 300 is arranged on the bracket 210, the cover opening mechanism 300 includes a power assembly 310, a lever assembly 320 and a moving frame 330, the moving frame 330 is arranged below the bracket 210, the lever assembly 320 is arranged below the moving frame 330, and the power assembly 310 runs through the moving frame 330; the bottom mechanism 400, the bottom mechanism 400 is arranged below the moving frame 330, the bottom mechanism 400 includes a bottom base assembly 410, a bottom upper top plate assembly 420 and a limiting assembly 430, the bottom upper top plate assembly 420 is fixed on the bottom base assembly 410, the limiting assembly 430 is arranged on the bottom upper top plate assembly 420, and the bottom upper top plate assembly 420 is arranged below the moving frame 330.

[0037] like Figure 2 As shown, the transplanting mechanism 100 includes an X-axis motion module 110 and a Z-axis motion module 120, and the X-axis motion module 110 and the Z-axis motion module 120 are connected by a connecting plate. The X-axis motion module 110 and the Z-axis motion module 120 both realize linear motion of the X-axis motion module 110 and the Z-axis motion module 120 by driving moving parts with motors.

[0038] like Figure 3-Figure 5 As shown, the bracket 210 is fixedly connected to the Z-axis motion module 120 as a main body, and the vacuum suction piece 220 is installed in the waist hole on the bracket 210 through a stud, and the adjustment suction cup on the vacuum suction piece 220 is located at the waist hole and can pass through the waist hole for easy fixation on the top of the HWS box, wherein a spring is arranged in the adjustment suction cup for flexible contact between the full-seat adjustment suction cup and the HWS box to avoid damage to the HWS.

[0039] The detection component 230 includes three ranging sensors, one contact sensor and one proximity sensor. The ranging sensors, the contact sensor and the proximity sensor are all fixedly arranged on the bracket 210. Among them, the three ranging sensors are used to detect whether the state of the picked-up HWS cover is placed horizontally on the bottom mechanism 400, one contact sensor is used to detect whether the HWS box reaches the Z-direction picking position, and the other proximity detection sensor is used to detect whether the HWS box falls off abnormally or is successfully detached during transportation or unloading.

[0040] The pressure head assembly 240 includes two guide pillars 241, a first spring 242 and a pressure head 243. There are two first springs 242, which are respectively sleeved on the two guide pillars 241. The pressure head 243 is arranged at the bottom of the two guide pillars 241. The first end of the first spring 242 is connected to the bottom of the bracket 210 and the other end is connected to the top of the pressure head 243. When working, the Z-axis motion module 120 moves along the Z-axis direction, and the pressure head 243 contacts the HWS box and contacts the HWS box by relying on the elastic pressure of the first spring 242 to ensure contact with the HWS box and not damage the HWS. After the cover is opened, the vacuum suction piece 220 picks up the HWS box and transports it to the designated workstation.

[0041] like Figure 6 and Figure 7 As shown, the power assembly 310 includes a cylinder 311, an articulated seat 312, a second spring 313, an axle pin 314 and a connecting rod 315. The articulated seat 312 is fixed to the cylinder 311 by threads, and four connecting rods 315 are connected to the articulated seat 312 through the axial holes of the four axle pins 314.

[0042] The lever assembly 320 includes a lever seat 321, a lever base 322 and a lever 323. The two lever seats 321 are connected to the lever base 322 through an axial hole. The lever base 322 is connected to the connecting rod 315 through a thread. The lever 323 and the lever base 322 are connected through a thread. The swing position of the lever 323 can be slightly changed by adjusting the screw of the chain rod.

[0043] The movable frame 330 includes a movable base plate 331, a first guide rod 332 and an adjustment block 333. The movable frame 330 is basically connected with four lever bases 322 through threads. The four first guide rods pass through four second guide rods 412 respectively. The other end of the second spring 313 is fixed in the adjustment block, and the adjustment block is connected to the movable base plate 331 through threads.

[0044] During operation, the cylinder 311 drives the hinge seat 312 to move, and the hinge seat 312 presses the second spring 313, and the second spring 313 presses the lever assembly 320 and the moving frame 330. When the moving base plate 331 contacts the bottom upper plate 421, the cylinder 311 continues to rise, compressing the second spring 313, and the hinge seat 312 drives the connecting rod 315 to move, and the connecting rod 315 moves with the lever base 322, and the lever 323 directly contacts the buckle of the HWS, and the cylinder 311 continues to push, so that the buckle at the bottom of the HHWS is separated from the cover of the HWS, thereby completing the cover opening process.

[0045] like Figure 8 and Fig. 9As shown, the bottom base assembly 410 includes a bottom substrate and a second guide rod 412, and the second guide rod 412 is connected to the bottom substrate by screws; the bottom upper plate assembly 420 includes a bottom upper plate 421 and a PIN422, wherein three PIN422s are provided, the bottom upper plate 421 is connected to the bottom substrate by screws, and the PIN422 is fixed to the bottom upper plate 421 by screws; the limiting assembly 430 includes a positioning bottom plate 432 and a limiting block 431, wherein two limiting blocks 431 are provided, the positioning bottom plate 432 is fixed to the bottom upper plate 421, and the limiting block 431 is fixed to the positioning bottom plate 432, wherein the limiting block 431 and the PIN422 play a role in limiting the HWS box.

[0046] During operation, the HWS box is manually placed on the bottom upper plate 421, and the limit block 431 and PIN422 are used for limiting. The X-axis motion module 110 drives the Z-axis motion module 120 and the cover pressing mechanism 200 to move to the corresponding position, and the Z-axis motion module 120 descends along the Z-axis direction. The pressure head 243 contacts the HWS box, and the Z-axis motion module 120 continues to move downward and press down. The first spring 242 is compressed, and the adjustment suction cup contacts the HWS upper cover. The cylinder 311 lifts the hinge seat 312, and the hinge seat 312 presses against the second spring 313 (the height of the adjustment block 333 can be adjusted according to the characteristics of the second spring 313). 33 drives the lever assembly 320 and the moving frame 330 to move upward. At this time, the lever 323 will be inserted into the buckle groove of the HWS box. When the moving base plate 331 contacts the bottom upper plate 421, the moving base plate 331 stops moving, and the power assembly 310 continues to rise, compressing the second spring 313. The hinge seat 312 pushes the connecting rod 315, and the connecting rod 315 swings with the lever base 322 and the lever 323. The lever 323 presses the HWS buckle sideways. After the sensor in the detection assembly 230 detects correctly, the Z-direction motion module 120 is lifted along the Z-axis, and the vacuum suction piece 220 absorbs the HWS box and moves upward to complete the process of opening the cover.

[0047] The device can save costs. The existing cover opening and picking components use 6 cylinders 311 (4 prying cylinders 311, 1 lifting cylinder 311 and 1 locking cylinder 311) to complete the cover opening action. In the present device, only one cylinder 311 is used to complete the cover opening action, and the solenoid valves are changed from 2 to 1. Feedback shows that the original 10 are changed to 2, which can greatly save costs. The device can ensure the consistency of the action. The original action requires 4 prying cylinders 311 to act at the same time to open the HWS box. Since the performance of the cylinder 311 itself is difficult to maintain consistency, and the wear of each cylinder 311 is inconsistent during long-term use, it will cause asynchronous opening or opening. The cover fails to be opened. The use of the cover opening mechanism 3 in the present device can overcome this technical problem and complete the simultaneous cover opening; the present device is compatible. In the original cover opening process, a locking mechanism is added at the bottom to prevent the HWS from falling off abnormally, but the structure is not easy to adjust and cannot be compatible. The original solution is used to open the 12-inch wafer HWS, but in actual production, some customers will use other types of 12-inch wafer boxes, and the box shapes of each manufacturer are different. The locking mechanism in the original solution cannot be compatible. The present application adopts the cover pressing mechanism 200 and the cover opening mechanism 3 to press up and down, which can achieve height adjustment, making the device compatible and having a wider range of uses.

[0048] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0049] The embodiments described above are only descriptions of the preferred methods of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should fall within the protection scope determined by the claims of the present invention.

Claims

1. A HWS cover opening and picking device, characterized in that: include: A transplanting mechanism (100), wherein the transplanting mechanism (100) is used to complete the transplanting of the HWS; A capping mechanism (200), wherein the transplanting mechanism (100) is fixed on one side of the capping mechanism (200), the capping mechanism (200) comprising a bracket (210), a vacuum suction piece (220), a detection assembly (230) and a pressing head assembly (240), the bracket (210) being fixedly connected to the transplanting mechanism (100), the vacuum suction piece (220) being mounted on the bracket (210), the detection assembly (230) being fixedly mounted on the bracket (210), and the pressing head assembly (240) being fixedly mounted on the bracket (210) and penetrating the bracket (210); A cover opening mechanism (300), the cover opening mechanism (300) is arranged below the bracket (210), the cover opening mechanism (300) comprises a power assembly (310), a lever assembly (320) and a movable frame (330), the movable frame (330) is arranged below the bracket (210), the lever assembly (320) is arranged below the movable frame (330), and the power assembly (310) passes through the movable frame (330); A bottom mechanism (400), wherein the bottom mechanism (400) is arranged below the movable frame (330), and the bottom mechanism (400) comprises a bottom base assembly (410), a bottom upper plate assembly (420), and a limit assembly (430), wherein the bottom upper plate assembly (420) is fixed to the bottom base assembly (410), the limit assembly (430) is arranged on the bottom upper plate assembly (420), and the bottom upper plate assembly (420) is arranged below the movable frame (330).

2. The HWS cover opening and picking device according to claim 1, characterized in that: The bracket (210) is provided with a waist hole, and the vacuum suction member (220) is installed in the waist hole through a stud, and the vacuum suction member (220) comprises an adjusting suction cup, and the adjusting suction cup is arranged at the waist hole.

3. The HWS cover opening and picking device according to claim 2, characterized in that: The detection component (230) comprises a distance measuring sensor, a contact sensor and a close distance detection sensor, and the distance measuring sensor, the contact sensor and the close distance detection sensor are all fixedly mounted on the bracket (210).

4. The HWS cover opening and picking device according to claim 3, characterized in that: The pressure head assembly (240) comprises a guide column (241), a first spring (242) and a pressure head (243); the guide column (241) passes through the bracket (210) and is connected to the pressure head (243); the first spring (242) is sleeved on the guide column (241).

5. The HWS cover opening and picking device according to claim 1, characterized in that: The movable frame (330) comprises a movable base plate (331), a first guide rod (332) and an adjustment block (333); the movable base plate (331) is arranged below the bracket (210); the first guide rod (332) is fixed below the movable base plate (331); the adjustment block (333) is arranged at the center of the movable base plate (331); the first guide rod is connected to the bottom base assembly (410) at the top and bottom; and the adjustment block (333) is connected to the power assembly (310).

6. The HWS cover opening and picking device according to claim 5, characterized in that: The power assembly (310) comprises a cylinder (311), an articulated seat (312), a second spring (313), an axle pin (314) and a connecting rod (315); the top of the cylinder (311) is connected to the articulated seat (312); the articulated seat (312) is hinged to the connecting rod (315) via the axle pin (314); the second spring (313) is arranged on the top of the articulated seat (312); the second spring (313) is sleeved on the cylinder (311); the other end of the connecting rod (315) is installed on the moving frame (330); the top of the articulated seat (312) is connected to the adjusting block (333); one end of the spring is connected to the adjusting block (333) and the other end is connected to the articulated seat (312).

7. The HWS cover opening and picking device according to claim 6, characterized in that: The lever assembly (320) comprises a lever seat (321), a lever base (322) and a lever (323); the lever seat (321) is fixed below the movable base (331); the other end of the connecting rod (315) is hinged to the lever seat (321); the lever base (322) is fixed on the lever seat (321); the lever (323) is arranged on the lever base (322) and extends upwards through the movable base (331).

8. The HWS cover opening and picking device according to claim 5, characterized in that: The bottom base assembly (410) comprises a bottom substrate and a second guide rod (412), wherein the second guide rod (412) is fixed to the bottom substrate by screws, and the second guide rod (412) extends upward and is sleeved outside the first guide rod (332).

9. The HWS cover opening and picking device according to claim 8, characterized in that: The bottom upper top component comprises a bottom upper top plate (421) and a PIN (422), wherein the PIN (422) is fixed to the bottom upper top plate (421) by screws, and the bottom upper top plate (421) is connected to the bottom substrate by screws; the limiting component (430) comprises a positioning bottom plate (432) and a limiting block (431), wherein the positioning bottom plate (432) is arranged on the bottom upper top plate (421), and the limiting block (431) is fixed to the positioning bottom plate (432).

10. The HWS cover opening and picking device according to claim 1, characterized in that: The transplanting mechanism (100) comprises an X-direction motion module (110) and a Z-direction motion module (120); the X-direction motion module (110) and the Z-direction motion module (120) are connected via a connecting plate; and both the X-direction motion module (110) and the Z-direction motion module (120) are driven by a motor.

Images