Roller system cleaning device for magnetron sputtering coating equipment

Abstract

The utility model discloses a roller system cleaning device for magnetron sputtering coating equipment in the technical field of conductive film production, which comprises a support, a cleaning roller and a dust collector, two ends of the cleaning roller are rotatably arranged on the support, the cleaning roller is in the shape of a sand clock with a thin middle and two thick ends, and the dust collector is arranged on the support. The generatrix of the cleaning roller is an arc section matched with the outer wall of the traction roller system, and the dust collector is connected with one end of the cleaning roller through a dust collection pipe. The problems that metal powder on an existing traction roller system is extremely inconvenient to clean and low in cleaning efficiency are solved, the cleaning roller can stretch into magnetron sputtering coating equipment by holding the support with the hand, and the appearance of the cleaning roller can be perfectly attached to the traction roller system; the cleaning roller moves back and forth in the axial direction of the traction roller system, so that the dust collector cleans metal powder on the traction roller system, cleaning is convenient and easy, application in a narrow space is facilitated, the cleaning efficiency is greatly improved, and the labor intensity is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive film production, in particular to a roller system cleaning device for magnetron sputtering coating equipment. Background Art

[0002] Conductive film is a polymer material with copper or aluminum layers plated on the top and bottom surfaces of substrates such as PET and PP. It has a sandwich structure and is also called a composite thin film current collector. It is a type of material with many good properties and is widely used in lithium-ion batteries, mainly as a battery current collector in lithium-ion batteries.

[0003] At present, magnetron sputtering coating equipment is used in the preparation process of conductive metal films. Magnetron sputtering is a type of physical vapor deposition (PVD). The general sputtering method can be used to prepare a variety of materials such as metals, semiconductors, insulators, etc., and has the advantages of simple equipment, easy control, large coating area and strong adhesion. The magnetron sputtering method developed in the 1970s has the advantages of high speed, low temperature and low damage. Because high-speed sputtering is carried out under low pressure, the ionization rate of the gas must be effectively increased. Magnetron sputtering introduces a magnetic field on the surface of the target cathode and uses the magnetic field to constrain charged particles to increase the plasma density and increase the sputtering rate.

[0004] When using existing magnetron sputtering coating equipment, the traction roller system must be cleaned before the film is wound to prevent the metal powder on the traction roller system from adhering to the conductive metal film. However, since the traction roller system is long and the space is relatively small, the existing method of manually entering the equipment for cleaning is extremely inconvenient and inefficient. Utility Model Content

[0005] In order to solve the problem that it is extremely inconvenient to clean the metal powder on the existing traction roller system and the cleaning efficiency is low, the utility model provides a roller system cleaning device for magnetron sputtering coating equipment.

[0006] The technical solution of the utility model is as follows:

[0007] A roller cleaning device for magnetron sputtering coating equipment includes a bracket, a cleaning roller, and a vacuum cleaner. The two ends of the cleaning roller are rotatably arranged on the bracket. The cleaning roller is in the shape of an hourglass with a thin middle and thick ends, and the generatrix of the cleaning roller is an arc segment that matches the outer wall of the traction roller system. The vacuum cleaner is connected to one end of the cleaning roller through a vacuum tube.

[0008] According to the utility model of the above scheme, the surface of the cleaning roller is densely covered with a plurality of dust suction holes, the interior of the cleaning roller is hollow, and one end of the cleaning roller extends out of the bracket and is connected to a rotating joint, and the rotating joint is connected to the vacuum cleaner through the dust suction pipe.

[0009] According to the utility model of the above solution, a plurality of strip-shaped cleaning slits are arranged at intervals on the circumference of the surface of the cleaning roller, and the length direction of the cleaning slits is parallel to the axial direction of the cleaning roller.

[0010] According to the utility model of the above scheme, a plurality of supports are provided in the inner cavity of the cleaning roller, and a sliding plug is provided at each cleaning gap. The inner end of the sliding plug is connected to the support through an elastic member, so that the outer end of the sliding plug extends out of the cleaning gap and can be pressed.

[0011] According to the utility model of the above solution, a plurality of staggered strip-shaped cleaning slits are provided on the circumference of the surface of the cleaning roller, and the length direction of the cleaning slits is inclined with the axial direction of the cleaning roller.

[0012] According to the above scheme of the utility model, the bracket includes a first bracket, a second bracket, and a grip rod, the first bracket and the second bracket are respectively connected to the same end of the grip rod so that the first bracket, the second bracket and the grip rod are combined to form a Y-shaped structure, one end of the cleaning roller is rotatably connected to the first bracket, and the other end of the cleaning roller is rotatably connected to the second bracket.

[0013] According to the utility model of the above solution, an anti-slip sleeve is provided at the bottom of the grip rod.

[0014] According to the above solution of the utility model, the gripping rod is of three sections, and the three sections of the gripping rod are connected by threads.

[0015] According to the utility model of the above solution, the grip rod is a telescopic rod.

[0016] According to the utility model of the above solution, both ends of the cleaning roller are provided with cylindrical connecting sections, and the cleaning roller is rotatably connected with the cleaning roller through the connecting sections.

[0017] The utility model according to the above scheme has the following beneficial effects:

[0018] In the roller cleaning device for the above-mentioned magnetron sputtering coating equipment, the staff can stand outside the magnetron sputtering coating equipment and extend the cleaning roller into the magnetron sputtering coating equipment through a handheld bracket. The shape of the cleaning roller can fit perfectly with the traction roller system. The cleaning roller is moved back and forth along the axial direction of the traction roller system, so that the vacuum cleaner cleans the metal powder on the traction roller system, making cleaning convenient and simple, which is conducive to implementation in a small space, greatly improving the cleaning efficiency and reducing labor intensity. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a structural schematic diagram of Example 1;

[0021] Figure 2 It is a structural schematic diagram of Example 2;

[0022] Figure 3 is a schematic structural diagram of the cleaning roller in Example 2;

[0023] Figure 4 for Figure 3 A magnified view of part A;

[0024] Figure 5 This is a schematic diagram of the structure of Example 3.

[0025] In the figure, 1. bracket; 11. first bracket; 12. second bracket; 13. gripping rod; 131. anti-slip sleeve; 2. cleaning roller; 21. dust suction hole; 22. cleaning seam; 23. support; 24. connecting section; 25. rotating joint; 26. busbar; 3. vacuum cleaner; 31. dust suction pipe; 4. sliding plug; 5. elastic member. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0027] Example 1

[0028] like Figure 1As shown, this embodiment provides a roller cleaning device for magnetron sputtering coating equipment, including a bracket 1, a cleaning roller 2, and a vacuum cleaner 3. Both ends of the cleaning roller 2 are rotatably arranged on the bracket 1. The vacuum cleaner 3 is connected to one end of the cleaning roller 2 through a vacuum tube 31. The vacuum cleaner 3 provides negative pressure suction for the cleaning roller 2 to clean the metal powder on the traction roller system.

[0029] In this embodiment, the bracket 1 includes a first bracket 111, a second bracket 121, and a grip 13. The first bracket 111 and the second bracket 121 are respectively connected to the same end of the grip 13 so that the first bracket 111, the second bracket 121 and the grip 13 form a Y-shaped structure. One end of the cleaning roller 2 is rotatably connected to the first bracket 111, and the other end of the cleaning roller 2 is rotatably connected to the second bracket 121, which helps the staff to clean the traction roller system by holding the grip 13. In addition, the length of the bracket 1 is 1.2m to 1.8m, and the length of the bracket 1 can be designed to be any value in the range of 1.2m, 1.3m, 1.4m, 1.5m, 1.6m, 1.7m, 1.7m, etc., which can be well matched with the existing traction roller system length, avoiding the bracket 1 being too long to cause inconvenience in operation, or too short to effectively complete the cleaning of the entire traction roller system.

[0030] In this embodiment, the material of the grip 13 can be designed to be metal or plastic. Of course, in actual design, the material of the grip 13 can be designed according to actual needs. In addition, an anti-slip cover 131 is provided at the bottom of the grip 13. The anti-slip cover 131 is designed to be made of rubber material. The rubber material has good elasticity and wear resistance, and can provide a reliable anti-slip effect in various environments. The anti-slip cover 131 is provided at the bottom of the grip 13 to provide a stable friction force, thereby helping the operator to maintain control of the grip 13 and avoid slipping. Of course, in actual design, the material of the anti-slip cover 131 can be designed according to actual conditions.

[0031] In this embodiment, the cleaning roller 2 is in the shape of an hourglass with a thin middle and thick ends, and the generatrix 26 of the cleaning roller 2 is a circular arc segment that matches the outer wall of the traction roller system, which can perfectly fit the traction roller system, and is helpful for the staff to hold the handle 13 and move back and forth along the axial direction of the traction roller system for cleaning, thereby cleaning the metal powder on the traction roller system. In addition, both ends of the cleaning roller 2 are provided with a cylindrical connecting section 24, and the connecting section 24 is rotatably connected to the bracket 1 through a bearing, which facilitates the molding of the cleaning roller 2 and improves the structural strength.

[0032] In this embodiment, the surface of the cleaning roller 2 is densely covered with a number of dust suction holes 21, the interior of the cleaning roller 2 is hollow, and the connecting section 24 at one end of the cleaning roller 2 extends out of the bracket 1 and is connected to a rotating joint 25, which is connected to the vacuum cleaner 3 through a dust suction pipe 31, that is, the dust suction port of the vacuum cleaner 3 is connected to the rotating joint 25, and then connected to the cavity inside the cleaning roller 2, and the metal powder on the traction roller system is sucked into the vacuum cleaner 3 through the dust suction holes 21, so as to achieve the cleaning of the traction roller system. Secondly, since the metal powder is adsorbed into the vacuum cleaner 3, the phenomenon of metal powder being lifted up during the cleaning process can be avoided, and the lifted metal powder can be prevented from adhering to the surface of the traction roller system for the second time. In addition, the vacuum cleaner 3 is movable, and a universal wheel can be set at the bottom of the vacuum cleaner 3 to facilitate the movement of the vacuum cleaner 3 for cleaning. In addition, the dust suction pipe 31 can be a corrugated pipe or other retractable plastic pipe. Of course, in actual design, the structure of the dust suction pipe 31 can be designed according to actual needs.

[0033] In this embodiment, one cleaning roller 2 is provided. Of course, two cleaning rollers 2 may also be provided. The two cleaning rollers 2 are provided side by side between the first bracket 111 and the second bracket 121. In the height direction of the bracket 1, the two cleaning rollers 2 are arranged up and down. This design can enhance the cleaning force on the surface of the traction roller system, so that the metal powder adhering to the surface of the traction roller system can be better cleaned. Of course, three, four, five or even more cleaning rollers 2 may also be provided between the first bracket 111 and the second bracket 121. In actual design, the number of cleaning rollers 2 may be designed according to actual needs.

[0034] When the utility model is in use, the staff can stand outside the magnetron sputtering coating equipment, and extend the cleaning roller 2 into the magnetron sputtering coating equipment by holding the handle 13, and the shape of the cleaning roller 2 can be perfectly fitted with the traction roller system, and the cleaning roller 2 is moved back and forth along the axial direction of the traction roller system, so that the vacuum cleaner 3 cleans the metal powder on the traction roller system, making cleaning convenient and simple, which is conducive to being carried out in a small space, greatly improving the cleaning efficiency and reducing labor intensity.

[0035] Example 2

[0036] like Figure 2 As shown, the difference from Example 1 is that this Example 2 provides a roller cleaning device for magnetron sputtering coating equipment. The handle 13 of this Example 2 is a three-section type, and the three-section handle 13 is connected by threads for easy carrying and storage.

[0037] In this embodiment, a plurality of strip-shaped cleaning slits 22 are arranged at intervals on the circumference of the surface of the cleaning roller 2, and the length direction of the cleaning slits 22 is parallel to the axial direction of the cleaning roller 2, that is, in the orthographic projection direction of the cleaning roller 2, the projection of the cleaning slits 22 is arranged parallel to the axial direction of the cleaning roller 2. This design can increase the working area of ​​the entire cleaning roller 2, and ensure that the cleaning roller 2 achieves the expected effect of cleaning the metal powder.

[0038] like Figure 3 , Figure 4 As shown, in this embodiment, a plurality of supports 23 are provided in the inner cavity of the cleaning roller 2, and a sliding plug 4 is provided at each cleaning slit 22 to close the cleaning slit 22. The inner end of the sliding plug 4 is connected to the support 23 through an elastic member 5, so that the outer end of the sliding plug 4 extends out of the cleaning slit 22, and the cleaning slit 22 can be pressed. When the sliding plug 4 moves along the traction roller system with the cleaning roller 2, the outer end of the sliding plug 4 is pressed and sinks to overcome the resistance of the elastic member 5. At this time, the cleaning slit 22 is opened, and the metal powder on the surface of the traction roller system is adsorbed into the vacuum cleaner 3, thereby being cleaned, and the cleaning slit 22 that is not in contact with the traction roller system is still in a closed state, which ensures sufficient negative pressure suction in the cleaning roller 2, thereby ensuring the effect of cleaning the metal powder. In addition, the elastic member 5 can be designed as a spring. Of course, in actual design, the structure of the elastic member 5 can be designed according to actual needs.

[0039] Example 3

[0040] like Figure 5 As shown, the difference from Example 2 is that this Example 3 provides a roller cleaning device for magnetron sputtering coating equipment, and the handle 13 of this Example 3 is a telescopic rod, which is easy to carry and store.

[0041] In this embodiment, a plurality of strip-shaped cleaning slits 22 are provided on the circumferential surface of the cleaning roller 2. The plurality of strip-shaped cleaning slits 22 are staggered and distributed, and the length direction of the cleaning slits 22 is inclined with the axial direction of the cleaning roller 2, that is, in the positive projection direction of the cleaning roller 2, the projection of the cleaning slits 22 is inclined with the axial direction of the cleaning roller 2, which can increase the contact time between the cleaning slits 22 and the traction roller system, increase the time when the sliding plug 4 is pressed, and thereby extend the opening time of the cleaning slits 22, thereby improving the cleaning efficiency and the cleaning efficiency.

[0042] It should be noted that the indicated orientation or position relationship is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship in which the application product is usually placed when used, or is the orientation or position relationship commonly understood by technical personnel in this field, or is the orientation or position relationship in which the application product is usually placed when used. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0043] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0044] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A roller cleaning device for magnetron sputtering coating equipment, characterized in that: It includes a bracket, a cleaning roller, and a vacuum cleaner. The two ends of the cleaning roller are rotatably arranged on the bracket. The cleaning roller is in the shape of an hourglass with a thin middle and thick ends, and the generatrix of the cleaning roller is an arc segment matching the outer wall of the traction roller system. The vacuum cleaner is connected to one end of the cleaning roller through a vacuum tube.

2. The roller cleaning device for magnetron sputtering coating equipment according to claim 1, characterized in that: The surface of the cleaning roller is densely covered with a plurality of dust suction holes. The interior of the cleaning roller is hollow. One end of the cleaning roller extends out of the bracket and is connected with a rotating joint. The rotating joint is connected to the vacuum cleaner through the dust suction pipe.

3. The roller cleaning device for magnetron sputtering coating equipment according to claim 1, characterized in that: A plurality of strip-shaped cleaning slits are arranged at intervals on the circumference of the surface of the cleaning roller, and the length direction of the cleaning slits is parallel to the axial direction of the cleaning roller.

4. The roller cleaning device for magnetron sputtering coating equipment according to claim 3 is characterized in that: A plurality of supports are arranged in the inner cavity of the cleaning roller, and a sliding plug is arranged at each cleaning slit. The inner end of the sliding plug is connected to the support through an elastic member, so that the outer end of the sliding plug extends out of the cleaning slit and can be pressed.

5. The roller cleaning device for magnetron sputtering coating equipment according to claim 1, characterized in that: A plurality of staggered strip-shaped cleaning slits are arranged on the circumference of the surface of the cleaning roller, and the length direction of the cleaning slits is inclined to the axial direction of the cleaning roller.

6. The roller cleaning device for magnetron sputtering coating equipment according to any one of claims 1 to 5, characterized in that: The bracket includes a first bracket, a second bracket, and a grip rod. The first bracket and the second bracket are respectively connected to the same end of the grip rod so that the first bracket, the second bracket and the grip rod form a Y-shaped structure in combination. One end of the cleaning roller is rotatably connected to the first bracket, and the other end of the cleaning roller is rotatably connected to the second bracket.

7. The roller cleaning device for magnetron sputtering coating equipment according to claim 6, characterized in that: The bottom of the grip rod is provided with an anti-slip sleeve.

8. The roller cleaning device for magnetron sputtering coating equipment according to claim 6, characterized in that: The grip rod is of three sections, and the three sections of the grip rod are connected by threads.

9. The roller cleaning device for magnetron sputtering coating equipment according to claim 6, characterized in that: The grip rod is a telescopic rod.

10. The roller cleaning device for magnetron sputtering coating equipment according to any one of claims 1 to 5 or 7 to 9, characterized in that: Both ends of the cleaning roller are provided with cylindrical connecting sections, and the cleaning roller is rotatably connected with the cleaning roller through the connecting sections.

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