Annular vacuum cavity for PVD (Physical Vapor Deposition) coating equipment with vacuum degree convenient to adjust

Abstract

The utility model discloses an annular vacuum cavity for PVD (Physical Vapor Deposition) coating equipment, which is convenient in vacuum degree adjustment and comprises a base, the PVD coating equipment is arranged on one side of the upper end of the base, an outer cavity is arranged in the PVD coating equipment, an inner cavity is arranged in the outer cavity, a sealing door is arranged on one side of the front end of the PVD coating equipment, and a sealing cover is arranged on the sealing door. The PVD coating equipment further comprises an adjusting seat arranged on one side of the PVD coating equipment, a threaded rod is rotationally arranged in the adjusting seat, an L-shaped block is in threaded connection with the outer portion of the threaded rod, the adjusting seat is connected with the inner cavity through a gas conveying pipe, the PVD coating equipment further comprises a water tank arranged on one side of the interior of the base, a sewage cavity is formed in one side of the water tank, and a water outlet is formed in the other side of the water tank. And a water pump is arranged on one side of the water tank. According to the annular vacuum cavity for the PVD coating equipment with the vacuum degree convenient to adjust, the vacuum degree in the inner cavity can be adjusted according to specific conditions, and the coating effect is prevented from being affected.

Description

Technical Field

[0001] The utility model relates to the technical field of PVD coating equipment, in particular to an annular vacuum cavity for PVD coating equipment with convenient vacuum degree adjustment. Background Art

[0002] PVD coating equipment is a device that uses physical vapor deposition technology to prepare thin films. PVD technology is an advanced surface treatment technology that can deposit high-quality, high-hardness thin films on various substrates. PVD coating equipment mainly includes three main components: evaporation source, vacuum system and substrate table. The evaporation source is the core part of the equipment. It evaporates the material by heating it to produce a high-energy ion beam. The vacuum system can provide a high vacuum environment to ensure the quality of thin film deposition. The substrate table is where the substrate to be coated is placed, such as glass, plastic, metal, etc. The annular vacuum chamber used by the PVD coating equipment is mainly composed of an outer ring chamber and an inner ring chamber, which together constitute an annular chamber.

[0003] The existing Chinese patent with announcement number CN217149308U discloses a ring-shaped vacuum chamber PVD coating equipment, including a vacuum pump group, an outer ring chamber, an inner ring chamber, and a first valve and a second valve respectively adapted to the outer ring chamber and the inner ring chamber, and the two chambers constitute an annular chamber; one end of the first valve is connected to the vacuum pump group, and the other end is connected to the outer ring chamber; one end of the second valve is connected to the vacuum pump group, and the other end is connected to the inner ring chamber; and the first valve and the second valve are configured to be connected when opened.

[0004] Although the above scheme improves the existing PVD coating equipment due to its large chamber size, resulting in long vacuum pumping time and low production efficiency, the annular vacuum chamber of the equipment lacks vacuum degree adjustment. The fluctuation of vacuum degree will affect the deposition behavior of atoms or molecules, resulting in uneven film structure and affecting the coating effect. Therefore, it does not meet the existing needs. In this regard, we propose a ring-shaped vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment. Utility Model Content

[0005] The utility model aims to provide an annular vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment, so as to solve the problem in the above background technology that the annular vacuum chamber for PVD coating equipment is inconvenient to adjust the vacuum degree, which affects the coating effect.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a ring-shaped vacuum chamber for a PVD coating device with convenient vacuum degree adjustment, comprising a base, a PVD coating device is installed on one side of the upper end of the base, an outer cavity is arranged inside the PVD coating device, an inner cavity is arranged inside the outer cavity, and a sealing door is installed on one side of the front end of the PVD coating device;

[0007] It also includes an adjustment seat, which is arranged on one side of the PVD coating device, a threaded rod is rotatably arranged inside the adjustment seat, an L-shaped block is threadedly connected to the outside of the threaded rod, and the adjustment seat is connected to the inner cavity through an air delivery pipe;

[0008] It also includes a water tank, which is arranged on one side of the base. A sewage cavity is opened on one side of the water tank. A water pump is arranged on one side of the water tank. An annular water spray seat is arranged on the upper end of the inner part of the outer cavity. The water pump is connected to the annular water spray seat and the water tank through a water pipe.

[0009] Preferably, a PLC controller is provided on the front side of the adjustment seat, a servo motor is provided on one side inside the adjustment seat, and the output end of the servo motor is connected to the threaded rod through a coupling transmission, and the input end of the servo motor is electrically connected to the output end of the PLC controller.

[0010] Preferably, a vacuum detector is provided on the upper side of the inner cavity, and the output end of the vacuum detector is electrically connected to the input end of the PLC controller.

[0011] Preferably, a guide rod is welded directly below the threaded rod, one end of the guide rod passes through the L-shaped block, and the guide rod is slidably matched with the L-shaped block.

[0012] Preferably, a fan is provided on one side of the adjustment seat and is connected to the adjustment seat, and an air release valve is installed on one side of the upper end of the adjustment seat.

[0013] Preferably, the sewage chamber is connected to the outer chamber through a water inlet pipe, a water outlet pipe is provided on one side of the front end of the sewage chamber, and one end of the water outlet pipe extends to the outside of the sewage chamber.

[0014] Preferably, a vacuum pump is provided on one side inside the base, and the vacuum pump is connected to the inner cavity.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. The utility model is provided with an adjustment seat on one side of the upper end of the base. When in use, the vacuum degree in the inner cavity can be detected by a vacuum detector. When the vacuum degree needs to be adjusted, the fan is started to input the external airflow into the inside of the adjustment seat. The servo motor is started to make the L-shaped block move horizontally. The amount of airflow passing through can be controlled by shielding the air pipe through the L-shaped block and maintained for a period of time, so that the vacuum degree inside the inner cavity can be adjusted. It can be adjusted according to the specific situation to avoid affecting the coating effect.

[0017] 2. The utility model provides an annular water spray seat at the upper end of the outer cavity. After long-term use, the inner wall of the outer cavity will be adhered with oil, rust and residual plating. When the water pump is started, the water in the water tank can enter the interior of the annular water spray seat under the connection of the water pipe, so that the water can be sprayed out through the annular water spray seat to rinse the inner wall of the outer cavity. A good cleaning effect can be achieved by using tools such as a cleaning brush, thereby facilitating daily cleaning and maintenance.

[0018] 3. The utility model provides a sewage cavity inside the base, and the sewage cavity is connected to the outer cavity through an inlet pipe. The cleaned sewage will enter the sewage cavity through the inlet pipe, so that the sewage can be stored in the sewage cavity. There is no need to frequently clean the sewage, and the sewage can be discharged through the outlet pipe, making the sewage discharge more efficient and practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a front view schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a front view schematic diagram of the internal structure of the utility model;

[0021] Figure 3 It is a side view schematic diagram of the internal structure of the adjustment seat of the utility model;

[0022] Figure 4 For the utility model Figure 2 A partial enlarged view of area A.

[0023] In the figure: 1. Base; 2. PVD coating equipment; 3. Outer cavity; 4. Inner cavity; 5. Sealing door; 6. Vacuum pump; 7. Adjustment seat; 8. Threaded rod; 9. Guide rod; 10. Servo motor; 11. Air relief valve; 12. Air pipe; 13. Fan; 14. Water tank; 15. Water pump; 16. Water pipe; 17. Annular water spray seat; 18. PLC controller; 19. Vacuum detector; 20. Sewage chamber; 21. Water inlet pipe; 22. Water outlet pipe; 23. L-shaped block. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-4The utility model provides a technical solution: a ring-shaped vacuum chamber for a PVD coating device with convenient vacuum degree adjustment, comprising a base 1, a PVD coating device 2 is installed on one side of the upper end of the base 1, an outer cavity 3 is arranged inside the PVD coating device 2, an inner cavity 4 is arranged inside the outer cavity 3, and a sealing door 5 is installed on one side of the front end of the PVD coating device 2;

[0026] It also includes an adjustment seat 7, which is arranged on one side of the PVD coating device 2, a threaded rod 8 is rotatably arranged inside the adjustment seat 7, an L-shaped block 23 is connected to the outer thread of the threaded rod 8, and the adjustment seat 7 is connected to the inner cavity 4 through an air delivery pipe 12;

[0027] It also includes a water tank 14, which is arranged on one side of the base 1. A sewage cavity 20 is opened on one side of the water tank 14. A water pump 15 is arranged on one side of the water tank 14. An annular water spray seat 17 is arranged at the upper end of the outer cavity 3. The water pump 15 is connected to the annular water spray seat 17 and the water tank 14 through a water pipe 16.

[0028] When in use, the vacuum detector 19 can detect the vacuum degree and transmit the detection data to the PLC controller 18. After processing by the PLC controller 18, the data can be displayed through an external display device. The servo motor 10 can be started by the PLC controller 18 to drive the threaded rod 8 to make the L-shaped block 23 rotate synchronously. The L-shaped block 23 can move horizontally and linearly under the axial limiting action of the guide rod 9. Starting the fan 13 can input external air into the interior of the adjustment seat 7. When the L-shaped block 23 moves, the air pipe 12 can be blocked, thereby controlling the amount of airflow. The airflow passes through the air pipe 12 and enters the interior of the inner cavity 4 to achieve the adjustment of the vacuum degree.

[0029] See also Figure 1 and Figure 4 A PLC controller 18 is provided on the front side of the adjustment seat 7, a servo motor 10 is provided on one side of the adjustment seat 7, and the output end of the servo motor 10 is connected to the threaded rod 8 through a coupling transmission, and the input end of the servo motor 10 is electrically connected to the output end of the PLC controller 18, and the servo motor 10 provides power for the movement of the L-shaped block 23;

[0030] See also Figure 2 A vacuum detector 19 is provided on the upper side of the inner cavity 4, and the output end of the vacuum detector 19 is electrically connected to the input end of the PLC controller 18, and the vacuum detector 19 can perform real-time detection of the vacuum degree;

[0031] See also Figure 3 and Figure 4A guide rod 9 is welded directly below the threaded rod 8, one end of the guide rod 9 passes through the L-shaped block 23, and the guide rod 9 and the L-shaped block 23 are slidably matched. The guide rod 9 can axially limit the L-shaped block 23, so that the rotation of the L-shaped block 23 can be converted into horizontal linear movement. The upper end of the L-shaped block 23 can be adhered and fixed with a sealing gasket to increase the sealing effect;

[0032] See also Figure 1 and Figure 2 A fan 13 is provided on one side of the adjusting seat 7, and the fan 13 is connected to the adjusting seat 7. A gas relief valve 11 is installed on one side of the upper end of the adjusting seat 7. The setting of the gas relief valve 11 can avoid the risk of explosion caused by gas accumulation;

[0033] See also Figure 1 and Figure 2 The sewage chamber 20 is connected to the outer chamber 3 through an inlet pipe 21. A water outlet pipe 22 is provided at one side of the front end of the sewage chamber 20, and one end of the water outlet pipe 22 extends to the outside of the sewage chamber 20. A solenoid valve is provided at one end of the inlet pipe 21 to avoid affecting the normal coating work. The outlet pipe 22 can discharge the sewage in a centralized manner, which is convenient to use.

[0034] See also Figure 1 A vacuum pump 6 is provided on one side of the base 1 , and the vacuum pump 6 is connected to the inner cavity 4 , and the vacuum pump 6 can extract the gas from the inner cavity 4 .

[0035] Working principle: When in use, the vacuum pump 6 is started to extract the gas in the inner cavity 4, and the vacuum degree can be detected by the vacuum detector 19. The vacuum detector 19 can transmit the detection data to the PLC controller 18. After processing by the PLC controller 18, the data can be displayed through an external display device. The servo motor 10 can be started by the PLC controller 18, and the servo motor 10 will drive the threaded rod 8 to rotate, and the threaded rod 8 will drive the L-shaped block 23 to rotate. Since the L-shaped block 23 and the guide rod 9 are slidably matched, the L-shaped block 23 will be axially limited, and the rotation of the L-shaped block 23 will be converted into horizontal linear movement. Starting the fan 13 can input external air into the interior of the adjustment seat 7, and the risk of explosion caused by gas accumulation can be avoided through the air relief valve 11. The L-shaped block 23 moves When the air supply pipe 12 is in motion, the air supply pipe 12 can be blocked to control the amount of air flow. The air supply pipe 12 will enter the interior of the inner cavity 4 to adjust the vacuum degree. When the vacuum degree reaches the specified requirement, the product is coated. After long-term use, the water pump 15 can be started. The water pump 15 can input the water flow in the water tank 14 into the annular water spray seat 17 through the water supply pipe 16, and the water flow can be sprayed out through the annular water spray seat 17. The user can use a cleaning brush and other tools to clean the inner wall of the outer cavity 3, which is convenient for daily cleaning and maintenance. The electromagnetic pump on the water inlet pipe 21 is started to connect the water inlet pipe 21. The sewage will enter the interior of the sewage cavity 20 through the water inlet pipe 21, so that the sewage can be stored. It can be discharged through the water outlet pipe 22 after multiple storages, which is convenient for daily use.

[0036] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A ring-shaped vacuum chamber for a PVD coating device with convenient vacuum degree adjustment, comprising a base (1), a PVD coating device (2) being installed on one side of the upper end of the base (1), an outer cavity (3) being arranged inside the PVD coating device (2), an inner cavity (4) being arranged inside the outer cavity (3), a sealing door (5) being installed on one side of the front end of the PVD coating device (2), characterized in that: It also includes an adjustment seat (7) which is arranged on one side of the PVD coating device (2); a threaded rod (8) is rotatably arranged inside the adjustment seat (7); an L-shaped block (23) is connected to the outer thread of the threaded rod (8); and the adjustment seat (7) is connected to the inner cavity (4) via an air delivery pipe (12); It also comprises a water tank (14) which is arranged on one side of the base (1), a sewage cavity (20) is provided on one side of the water tank (14), a water pump (15) is provided on one side of the water tank (14), an annular water spray seat (17) is provided at the upper end of the interior of the outer cavity (3), and the water pump (15) is connected to the annular water spray seat (17) and the water tank (14) via a water pipe (16).

2. The annular vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment according to claim 1 is characterized in that: A PLC controller (18) is arranged on the front side of the adjustment seat (7), a servo motor (10) is arranged on one side inside the adjustment seat (7), and the output end of the servo motor (10) is connected to the threaded rod (8) through a coupling transmission, and the input end of the servo motor (10) is electrically connected to the output end of the PLC controller (18).

3. The annular vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment according to claim 2 is characterized in that: A vacuum detector (19) is provided on the upper side of the inner cavity (4), and the output end of the vacuum detector (19) is electrically connected to the input end of the PLC controller (18).

4. The annular vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment according to claim 1 is characterized in that: A guide rod (9) is welded directly below the threaded rod (8), one end of the guide rod (9) passes through the L-shaped block (23), and the guide rod (9) and the L-shaped block (23) are slidably matched.

5. The annular vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment according to claim 1 is characterized in that: A fan (13) is provided on one side of the adjustment seat (7), and the fan (13) is connected to the adjustment seat (7). An air release valve (11) is installed on one side of the upper end of the adjustment seat (7).

6. The annular vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment according to claim 1, characterized in that: The sewage chamber (20) is connected to the outer chamber (3) via a water inlet pipe (21); a water outlet pipe (22) is provided on one side of the front end of the sewage chamber (20), and one end of the water outlet pipe (22) extends to the outside of the sewage chamber (20).

7. The annular vacuum chamber for PVD coating equipment with convenient vacuum degree adjustment according to claim 1 is characterized in that: A vacuum pump (6) is provided on one side of the interior of the base (1), and the vacuum pump (6) is connected to the inner cavity (4).

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