Wafer supply table convenient for mounting wafer box

Abstract

The utility model discloses a wafer supply table convenient to install a wafer box, which comprises a wafer table and a rotating plate, the rotating plate is rotatably connected with the wafer table, one side of the rotating plate is provided with a direct loading cavity for directly loading wafers, one side of the rotating plate far away from the direct loading cavity is provided with a wafer box cavity for loading the wafer box, and the wafer box cavity is provided with a wafer box. The wafer box comprises a wafer box cavity, one side of the wafer box cavity is fixedly connected with an elastic piece, the side, spaced from the elastic piece, of the wafer box cavity is fixedly connected with friction glue, the friction glue is obliquely placed, and the friction glue is movably connected with the wafer box. According to the utility model, the orientation of the rotating plate can be adjusted by rotating the rotating plate in the crystal table, when the direct installation cavity faces upwards, the direct installation cavity can be utilized to directly bear wafers, so that the positioning and direct processing of the wafers are facilitated, and when the wafer box cavity faces upwards, the wafer box cavity can be utilized to bear a wafer box, and then the wafer box is utilized to bear a plurality of wafers. Transfer and transportation of the wafer and taking of the wafer by a mechanical arm are facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal supply tables, in particular to a crystal supply table which is convenient for installing a wafer box. Background Art

[0002] 1. Wafer:

[0003] Also known as silicon wafer, it is an important material for making integrated circuits.

[0004] The sheet-like objects made of silicon have various diameter specifications, such as 6 inches, 8 inches, 12 inches, etc.

[0005] Integrated circuits and various semiconductor devices can be made by performing photolithography, ion implantation and other processes on wafers.

[0006] Single crystal silicon wafers are one type of them, which are made of high-purity polysilicon with a purity requirement of 99.9999% or even higher, and the impurity content is reduced to 10-9.

[0007] 2. Wafer box:

[0008] Container used to store and protect wafers.

[0009] Special materials and designs are usually used to ensure that the wafers are not damaged during storage and transportation.

[0010] Wafer cassettes may also feature protection against static electricity, moisture, and other contaminants to maintain the cleanliness and integrity of the wafers.

[0011] 3. Crystal supply platform:

[0012] In the semiconductor production process, the wafer supply table is a device used to support and position the wafer.

[0013] It usually has a flat and precise surface to ensure that the placement of the wafer on it is smooth and accurate.

[0014] The wafer supply table may also be equipped with heating, cooling and other control systems to meet the requirements of different production processes for wafer temperature and other environmental parameters.

[0015] The patent with publication number CN214898370U discloses a material positioning device and a crystal bonding machine. The patent specifically discloses "a material positioning device and a crystal bonding machine, the material positioning device at least includes a camera, an angle control device and at least three first lamp bodies, the first lamp bodies are arranged around the camera, and the light emitted by each first lamp body is converged and irradiated on the surface of the material, the angle control device further includes an angle controller and at least three adjusting parts, and each first lamp body is correspondingly arranged on an adjusting part". The technical solution realizes "the angle controller controls the angle between the first lamp body and the camera through the adjusting part, the distance between any two adjusting parts and the camera is the same, and the distance between adjacent adjusting parts is the same, so that the material can evenly reflect more light to the camera, thereby improving the clarity of the camera's imaging of the material. The material positioning device and the crystal bonding machine provided by the utility model can make the imaging of the material clearer and the positioning more accurate."

[0016] However, in actual use, the device is not suitable for fixing a wafer box or a wafer, especially not suitable for switching and fixing a wafer box or a wafer, and has a limited operating range, leaving room for improvement. Utility Model Content

[0017] The utility model aims to provide a wafer supply table which is convenient for installing a wafer box, so as to solve the problems raised in the above background technology.

[0018] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a crystal supply table which is convenient for installing a wafer box, comprising a crystal table and a rotating plate, wherein the rotating plate is rotatably connected to the crystal table, a direct loading cavity for directly loading wafers is provided on one side of the rotating plate, and a wafer box cavity for loading the wafer box is provided on the side of the rotating plate away from the direct loading cavity.

[0019] As a further solution of the utility model: a crystal supply table which is convenient for installing a wafer box, wherein a spring sheet is fixedly connected to one side of the wafer box cavity, and a friction glue is fixedly connected to one side between the wafer box cavity and the spring sheet, wherein the friction glue is placed obliquely and is movably connected to the wafer box.

[0020] As a further solution of the utility model: a crystal supply table which is convenient for installing a wafer box, wherein a fixing foot is fixedly connected to the outer side of the crystal table, a screw is threadedly connected to the inner side of the fixing foot, and a suction cup is fixedly connected to one end of the screw.

[0021] As a further solution of the utility model: a crystal supply table that is convenient for installing a wafer box, a turntable is provided on one side of the crystal table, a rotating end of the turn plate is rotatably connected to the turntable, a bolt is threadedly connected to one side of the turntable, and the bolt is movably connected to the rotating end of the turn plate.

[0022] As a further solution of the utility model: a wafer supply table which is convenient for installing a wafer box, a groove is provided on one side of the direct installation cavity, and the height of the groove is shorter than that of the direct installation cavity.

[0023] As a further solution of the utility model: a wafer supply table which is convenient for installing a wafer box, wherein the friction glue is made of silica gel.

[0024] Compared with the prior art, the beneficial effects of the utility model are:

[0025] 1. The direction of the rotating plate can be adjusted by rotating the rotating plate inside the crystal table. When the direct-loading cavity faces upward, the direct-loading cavity can be used to directly carry the wafer, which is convenient for positioning and direct processing of the wafer. When the wafer box cavity faces upward, the wafer box cavity can be used to carry the wafer box, and then the wafer box can be used to carry multiple wafers, which is convenient for the transfer and transportation of wafers and the taking of wafers by the robot.

[0026] 2. Since a spring sheet is fixedly connected to one side of the wafer box cavity, and a friction glue is fixedly connected to the side between the spring sheet and the friction glue is placed obliquely and the oblique direction of the friction glue is opposite to the installation direction of the wafer box, the friction can be increased on the basis of supporting the side of the wafer box, thereby improving the clamping and fixing of the wafer box by the rotating plate.

[0027] 3. Since the rotating plate is rotatably connected to the crystal table, the fixing of the rotating plate after rotation can be controlled by bolts, which is convenient and quick to operate.

[0028] 4. The equipment can be fixed to the SMT machine workbench by fixing feet, suction cups and screws. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall structure of a wafer supply table that is convenient for installing a wafer box according to the utility model;

[0030] Figure 2 It is a schematic diagram of a wafer table in a wafer supply table and its connection structure which is convenient for installing a wafer box according to the utility model;

[0031] Figure 3 It is a schematic diagram of a straight-loading cavity in a wafer supply table and its connection structure that is convenient for installing a wafer box according to the utility model;

[0032] Figure 4 It is a schematic diagram of assembling a wafer box and a wafer box cavity in a wafer supply station for facilitating installation of a wafer box according to the utility model;

[0033] In the figure: 1. crystal table; 2. rotating plate; 3. direct installation cavity; 4. wafer box cavity; 5. rotating seat; 6. bolt; 7. fixing foot; 8. suction cup; 9. screw; 10. groove; 11. wafer box; 12. spring; 13. friction glue. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, which are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. The following is an explanation of the embodiments of the present utility model based on the overall structure of the present utility model.

[0036] In an embodiment of the utility model, a crystal supply table for facilitating installation of a wafer box comprises a crystal table 1 and a turn plate 2, wherein the turn plate 2 is rotatably connected to the crystal table 1, a direct loading cavity 3 for direct loading of wafers is provided on one side of the turn plate 2, and a wafer box cavity 4 for loading a wafer box 11 is provided on a side of the turn plate 2 away from the direct loading cavity 3.

[0037] See also Figure 1 , Figure 2 and Figure 3 The direction of the rotating plate 2 can be adjusted by rotating the rotating plate 2 inside the crystal table 1. When the direct-loading cavity 3 faces upward, the direct-loading cavity 3 can be used to directly carry the wafer, which is convenient for positioning and direct processing of the wafer. When the wafer box cavity 4 faces upward, the wafer box cavity 4 can be used to carry the wafer box 11, and then the wafer box 11 can be used to carry multiple wafers, which is convenient for transferring and transporting wafers and for the robot to take the wafers.

[0038] Also, see Figure 3 and Figure 4Since one side of the wafer box cavity 4 is fixedly connected with a spring sheet 12, and one side between the spring sheet 12 is fixedly connected with a friction glue 13, and the friction glue 13 is placed obliquely, Figure 4 It can be seen that the oblique direction of the friction glue 13 is opposite to the installation direction of the wafer box 11 , so the friction can be increased on the basis of providing lateral support for the wafer box 11 , thereby improving the clamping and fixing performance of the turn plate 2 on the wafer box 11 .

[0039] See also Figure 2 Since the rotating plate 2 is rotatably connected to the crystal table 1, the fixing of the rotating plate 2 after rotation can be controlled by the bolt 6, and the operation is convenient and quick.

[0040] See also Figure 1 The device can be fixed to the workbench of the placement machine through the fixing feet 7, the suction cup 8 and the screw 9.

[0041] Other embodiments of the utility model: a spring sheet 12 is fixedly connected to one side of the wafer box cavity 4, a friction glue 13 is fixedly connected to one side between the wafer box cavity 4 and the spring sheet 12, the friction glue 13 is placed obliquely, and the friction glue 13 is movably connected to the wafer box 11.

[0042] Other embodiments of the present invention: a fixing foot 7 is fixedly connected to the outer side of the crystal table 1 , a screw rod 9 is threadedly connected to the inside of the fixing foot 7 , and a suction cup 8 is fixedly connected to one end of the screw rod 9 .

[0043] Other embodiments of the utility model: a turntable 5 is provided on one side of the crystal table 1, the rotating end of the turntable 2 is rotatably connected to the turntable 5, a bolt 6 is threadedly connected to one side of the turntable 5, and the bolt 6 is movably connected to the rotating end of the turntable 2.

[0044] In other embodiments of the present invention, a groove 10 is formed on one side of the direct-installation cavity 3 , and the groove 10 is shorter than the direct-installation cavity 3 .

[0045] Other embodiments of the present invention: the friction rubber 13 is made of silicone rubber.

[0046] The working principle of the utility model is: the direction of the rotating plate 2 can be adjusted by rotating the rotating plate 2 inside the crystal table 1. When the direct-loading cavity 3 faces upward, the direct-loading cavity 3 can be used to directly carry the wafer, which is convenient for positioning and direct processing of the wafer. When the wafer box cavity 4 faces upward, the wafer box cavity 4 can be used to carry the wafer box 11, and then the wafer box 11 can be used to carry multiple wafers, which is convenient for the transfer and transportation of wafers and the taking of wafers by a robot.

[0047] Furthermore, since one side of the wafer box cavity 4 is fixedly connected to the spring sheet 12, and the other side between the spring sheet 12 is fixedly connected to the friction glue 13, and the friction glue 13 is placed obliquely, Figure 4It can be seen that the oblique direction of the friction glue 13 is opposite to the installation direction of the wafer box 11 , so the friction can be increased on the basis of providing lateral support for the wafer box 11 , thereby improving the clamping and fixing performance of the turn plate 2 on the wafer box 11 .

[0048] Since the rotating plate 2 is rotatably connected to the crystal table 1 , the rotating plate 2 can be fixed after rotation by controlling the bolts 6 , which is convenient and quick to operate.

[0049] The device can be fixed to the workbench of the placement machine by means of the fixing foot 7, the suction cup 8 and the screw 9.

[0050] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A wafer supply table for facilitating installation of a wafer box, characterized in that: The invention comprises a crystal table (1) and a rotating plate (2), wherein the rotating plate (2) is rotatably connected to the crystal table (1), a direct loading cavity (3) for directly loading wafers is provided on one side of the rotating plate (2), and a wafer box cavity (4) for loading a wafer box (11) is provided on a side of the rotating plate (2) away from the direct loading cavity (3).

2. A wafer supply table for facilitating installation of a wafer box according to claim 1, characterized in that: A spring sheet (12) is fixedly connected to one side of the wafer box cavity (4), and a friction glue (13) is fixedly connected to one side between the wafer box cavity (4) and the spring sheet (12). The friction glue (13) is placed obliquely, and the friction glue (13) is movably connected to the wafer box (11).

3. A wafer supply table for facilitating installation of a wafer box according to claim 2, characterized in that: The outer side of the crystal table (1) is fixedly connected to a fixed foot (7), the interior of the fixed foot (7) is threadedly connected to a screw rod (9), and one end of the screw rod (9) is fixedly connected to a suction cup (8).

4. A wafer supply table for facilitating installation of a wafer box according to claim 3, characterized in that: A rotating seat (5) is provided on one side of the crystal table (1), and the rotating end of the rotating plate (2) is rotatably connected to the rotating seat (5). A bolt (6) is threadedly connected to one side of the rotating seat (5), and the bolt (6) is movably connected to the rotating end of the rotating plate (2).

5. A wafer supply table for facilitating installation of a wafer box according to claim 4, characterized in that: A groove (10) is provided on one side of the direct installation cavity (3), and the groove (10) is shorter than the direct installation cavity (3).

6. A wafer supply table for facilitating installation of a wafer box according to claim 5, characterized in that: The friction rubber (13) is made of silica gel.

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