Turnover device for double-sided coating of evaporation equipment

Abstract

The utility model belongs to the technical field of vacuum coating, and relates to a turnover device for double-sided coating of evaporation equipment, which comprises a vacuum shell, a rotating mechanism and a sample carrier, the rotating mechanism comprises a rotating servo component, a magnetic fluid, a rotating shaft and a bracket which are connected in sequence, one end of the vacuum shell is provided with an inlet flange, and the other end of the vacuum shell is provided with an outlet flange. The magnetic fluid penetrates through the other end of the vacuum shell in the horizontal direction, the rotary servo component is fixedly connected to the outside of the vacuum shell and drives the bracket to rotate around a horizontal shaft in the vacuum shell, and the sample carrier is used for fixing an evaporation sample piece. Electromagnets for attracting the edge of the sample carrier are arranged on the two sides of the bracket. According to the device, the evaporation sample piece can be turned over in the vacuum shell, the repeated vacuumizing process is avoided, the energy consumption is reduced, and the evaporation quality and the evaporation efficiency are improved. And the suction force of the electromagnet acts on the sample carrier, so that the surface of the evaporation sample piece is not damaged, and the coating quality is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a turning device for double-sided coating of evaporation equipment. Background Art

[0002] Evaporation is a method of heating a material in a vacuum environment to vaporize it and deposit it onto a substrate to obtain a thin film material. It is also called vacuum evaporation or vacuum coating. In some manufacturing processes, both sides of the evaporated sample need to be coated. Because the evaporation of the material is from bottom to top, double-sided coating requires the evaporation sample to be flipped 180° after coating one side before the second side can be evaporated. However, evaporation requires a clean surface. If the evaporation sample is taken out and turned over after coating one side, the surface of the evaporated sample will be exposed to the atmosphere again, which will put the surface at risk of contamination. In addition, the filling and deflation of the gas will waste energy and increase working hours.

[0003] Chinese patent CN213570718U discloses a flipping device and a vacuum double-sided coating device, which are aimed at battery substrates with relatively small structures. The upper and lower trays have face-to-face accommodating grooves, and the accommodating grooves are provided with magnetic suction units. The upper and lower trays can be flipped through the flipping structure to achieve the change of position between the two accommodating grooves. However, the magnetic suction unit will directly adsorb the battery substrate, and it is difficult to avoid hitting the surface during the transposition process, which is easy to cause damage to the coating. If the object is a flat-plate evaporation sample, there will be more adsorption collision positions, which is more likely to cause quality problems.

[0004] Therefore, it is necessary to design a flipping device specifically for flat-plate evaporation samples. Summary of the invention

[0005] The main purpose of the utility model is to provide a flipping device for double-sided coating of evaporation equipment, which completes the flipping of the evaporation sample inside the vacuum shell, and the suction force of the electromagnet acts on the sample carrier without damaging the surface of the evaporation sample, thereby ensuring the integrity of the coating.

[0006] The utility model achieves the above-mentioned purpose through the following technical scheme: a flipping device for double-sided coating of evaporation equipment, comprising a vacuum shell, a rotating mechanism and a sample carrier, the rotating mechanism comprising a rotating servo component, a magnetic fluid, a rotating shaft and a bracket connected in sequence, an inlet flange is provided at one end of the vacuum shell, the magnetic fluid passes through the other end of the vacuum shell in a horizontal direction, the rotating servo component is fixedly connected to the outside of the vacuum shell and drives the bracket to rotate around a horizontal axis in the vacuum shell, the sample carrier is used to fix the evaporated sample, and electromagnets are provided on both sides of the bracket for sucking the edges of the sample carrier.

[0007] Specifically, an electric feedthrough is provided in the magnetic fluid, and the electromagnet is electrically connected to a power source outside the vacuum housing through the electric feedthrough.

[0008] Specifically, the bracket is in a U-shaped structure, the inner edge of the bracket is provided with a support platform for limiting the sample carrier, and the electromagnet is located on the reverse side of the support platform.

[0009] Specifically, a laser sensor is provided on the upper portion of the vacuum housing, and when the bracket is retracted into the innermost side of the vacuum housing, the laser sensor senses the sample carrier.

[0010] Specifically, the vacuum housing is cylindrical, and the axis of the vacuum housing is colinear with the axis of the rotating shaft.

[0011] Specifically, one side of the vacuum shell is provided with an observation window for observing the interior.

[0012] Specifically, the outer side of the contact position between the vacuum housing and the rotating shaft is sealed with a magnetic fluid seal.

[0013] Specifically, the rotary servo component is a rotary cylinder with a rotation angle of 180°.

[0014] The beneficial effects of the technical solution of the utility model are:

[0015] The device can turn over the vapor-deposited sample inside the vacuum shell, avoiding repeated vacuuming, reducing energy consumption, and improving the vapor deposition quality and efficiency. The suction force of the electromagnet acts on the sample carrier without damaging the surface of the vapor-deposited sample, thus ensuring the quality of the coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A three-dimensional diagram of a flip device for double-sided coating of an evaporation device according to an embodiment;

[0017] Figure 2 A three-dimensional cross-sectional view of the flip device when placing the sample carrier and the vapor-deposited sample;

[0018] Figure 3 It is a three-dimensional diagram of the rotating mechanism.

[0019] The numbers in the figure represent:

[0020] 1- Flip device,

[0021] 11- vacuum housing, 111- inlet flange, 112- laser sensor, 113- observation window, 114- guide tube, 115- sealing ring;

[0022] 12-rotating mechanism, 121-rotating servo component, 122-magnetic fluid, 123-rotating shaft, 124-bracket, 1241-bracket, 125-electromagnet, 126-electric feedthrough;

[0023] 13- Sample carrier;

[0024] 2-Evaporation samples. DETAILED DESCRIPTION

[0025] The utility model is further described in detail below in conjunction with specific embodiments.

[0026] Example:

[0027] like Figure 1 As shown, a flipping device 1 for double-sided coating of an evaporation device of the present invention comprises a vacuum housing 11 , a rotating mechanism 12 and a sample carrier 13 .

[0028] like Figure 1 and Figure 2 As shown, the rotating mechanism 12 includes a rotating servo component 121, a magnetic fluid 122, a rotating shaft 123 and a bracket 124 which are connected in sequence. An inlet flange 111 is provided at one end of the vacuum shell 11, and the rotating shaft 123 passes through the other end of the vacuum shell 11 in a horizontal direction. The rotating servo component 121 is fixedly connected to the outside of the vacuum shell 11 and drives the bracket 124 to rotate around the horizontal axis in the vacuum shell 11.

[0029] The inlet flange 111 is used for feeding and discharging materials. The rotating mechanism 12 flips the bracket 124 by rotating the servo component 121, thereby realizing the turning over of the vapor-deposited sample 2. The vacuum shell 11 is in a closed system, and the vacuum degree needs to be guaranteed, but the rotating shaft 123 will rotate during operation, so the contact position between the vacuum shell 11 and the rotating shaft 123 needs to be sealed in a dynamic manner to ensure that there is no air leakage. The magnetic fluid 122 is a dynamic sealing component that can ensure the vacuum degree in the cavity of the vacuum shell 11. After completing the delivery of the vapor-deposited sample 2, the device can complete the turning over of the vapor-deposited sample 2 inside the vacuum shell 11, avoiding the repeated vacuuming process, reducing energy consumption, and improving the vaporization quality and efficiency.

[0030] like Figure 2 As shown, the sample carrier 13 is used to fix the vapor deposition sample 2, and electromagnets 125 are provided on both sides of the bracket 124 for sucking the edge of the sample carrier 13. An electric feedthrough 126 is provided in the magnetic fluid 122, and the electromagnet 125 is electrically connected to a power source (not shown) outside the vacuum housing 11 through the electric feedthrough 126. The rotating shaft 123 is hollow and is passed through by the wire of the electromagnet 125. The bracket 124 is a U-shaped structure, and a support platform 1241 for limiting the sample carrier 13 is provided on the inner edge of the bracket 124, and the electromagnet 125 is located on the opposite side of the support platform 1241.

[0031] The sample carrier 13 can be made of magnetic conductive material as a whole, or can be made of magnetic conductive material only at the position corresponding to the electromagnet 125. The support 1241 is a step-shaped structure lower than the upper surface of the bracket 124, and its surrounding side walls will match the edge of the sample carrier 13, so that when the support 1241 is upward, the sample carrier 13 can be embedded in the bracket 124 from top to bottom. The suction force of the electromagnet 125 acts on the sample carrier 13 without damaging the surface of the evaporated sample 2, thereby ensuring the integrity of the coating. The electromagnet 125 is in a sealed environment and requires input current to work. The electrical feedthrough 126 can input and output current for the components in the closed environment, meeting the two needs of power supply and sealing.

[0032] like Figure 1 and Figure 2 As shown, a laser sensor 112 is disposed on the upper portion of the vacuum housing 11 . When the sample carrier 13 is placed on the bracket 124 , the laser sensor 112 senses the sample carrier 13 .

[0033] The laser sensor 112 can determine whether the sample carrier 13 is located at a normal position on the bracket 124 before and after flipping. If the laser sensor 112 fails to detect the sample carrier 13 , flipping will not be performed.

[0034] like Figure 2 As shown, the vacuum housing 11 is cylindrical, and the axis of the vacuum housing 11 is colinear with the axis of the rotating shaft 1221 .

[0035] The sample carrier 13 and the vapor deposition sample 2 will sweep through a cylindrical space when flipping, so in order to make the enclosed space smaller and save the exhaust flow, the vacuum housing 11 is preferably a cylindrical structure.

[0036] like Figure 1 As shown, a viewing window 113 for observing the interior is provided on one side of the vacuum housing 11 .

[0037] The observation window 113 allows the staff to observe the evaporation condition of the evaporation sample 2 in the closed environment with the naked eye, and if any problem is found, it can be eliminated in time.

[0038] like Figure 1 and Figure 2 As shown, a guide tube 114 surrounding the rotating shaft 123 is provided on the vacuum housing 11 , and a sealing ring 115 is used to seal the contact surface between the guide tube 114 and the vacuum housing 11 .

[0039] The guide cylinder 114 supports and guides the rotating shaft 123 and can also form a static seal at the sealing ring 115 to improve the sealing performance of the device.

[0040] like Figures 1 to 3 As shown, the rotary servo component 121 is a rotary cylinder with a rotation angle of 180°.

[0041] The vapor deposition sample 2 only needs to be rotated in the range of 180°, so a rotary cylinder can be used to achieve this purpose. The rotary cylinder is easy to control and has the advantage of being light in weight.

[0042] The working process of the device is as follows: the bracket 124 is first in a position where the support 1241 is facing upward, the manipulator clamps the sample carrier 13 and the vapor-deposited sample 2 as a whole, extends into the inlet flange 111, and reaches above the bracket 124, and then puts the sample carrier 13 into the bracket 124 from top to bottom; after the laser sensor 112 senses that the sample carrier 13 is in place, the electromagnet 125 is energized again, thereby sucking the sample carrier 13; the manipulator retreats, and the rotary cylinder drives the bracket 12 to flip 180°, and the vapor-deposited sample 2 will also flip to face down. During this process, the sample carrier 13 will be firmly adsorbed on the bracket 12 and will not fall off temporarily; then the manipulator extends into the vacuum shell 11 again, and reaches below the inverted bracket 124, the electromagnet 125 is powered off, and at this time the sample carrier 13 and the vapor-deposited sample 2 fall onto the manipulator, and the manipulator takes the vapor-deposited sample 2 that has been flipped out of the vacuum shell 11.

[0043] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A turning device for double-sided coating of evaporation equipment, characterized in that: It includes a vacuum shell, a rotating mechanism and a sample carrier, the rotating mechanism includes a rotating servo component, a magnetic fluid, a rotating shaft and a bracket connected in sequence, one end of the vacuum shell is provided with an inlet flange, the magnetic fluid passes through the other end of the vacuum shell in a horizontal direction, the rotating servo component is fixedly connected to the outside of the vacuum shell and drives the bracket to rotate around the horizontal axis in the vacuum shell, the sample carrier is used to fix the vapor-deposited sample, and electromagnets are provided on both sides of the bracket for sucking the edge of the sample carrier.

2. The turning device for double-sided coating of evaporation equipment according to claim 1, characterized in that: An electric feedthrough is arranged in the magnetic fluid, and the electromagnet is electrically connected to a power source outside the vacuum housing through the electric feedthrough. The rotating shaft is hollow and is penetrated by a wire of the electromagnet.

3. The turning device for double-sided coating of evaporation equipment according to claim 1, characterized in that: The bracket is in a U-shaped structure, and a support platform for limiting the sample carrier is provided on the inner edge of the bracket, and the electromagnet is located on the reverse side of the support platform.

4. The turning device for double-sided coating of evaporation equipment according to claim 1, characterized in that: A laser sensor is disposed on the upper portion of the vacuum housing. When the sample carrier is placed on the bracket, the laser sensor senses the sample carrier.

5. The turning device for double-sided coating of evaporation equipment according to claim 1, characterized in that: The vacuum housing is cylindrical, and an axis of the vacuum housing is colinear with an axis of the rotating shaft.

6. The turning device for double-sided coating of evaporation equipment according to claim 1, characterized in that: An observation window for observing the interior is provided on one side of the vacuum shell.

7. The turning device for double-sided coating of evaporation equipment according to claim 1, characterized in that: The vacuum housing is provided with a guide cylinder surrounding the rotating shaft, and a sealing ring is used to seal the contact surface between the guide cylinder and the vacuum housing.

8. The turning device for double-sided coating of evaporation equipment according to claim 1, characterized in that: The rotary servo component is a rotary cylinder with a rotation angle of 180°.

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