Heating device

Abstract

The utility model provides a heating device, which at least comprises a first heater, a second heater and a third heater which are independently heated, the first heater, the second heater and the third heater form a common cavity for placing a crucible, the cavity is cylindrical, and the axial direction of the cavity is arranged along the vertical direction; the first heater comprises a first heating body, and the first heating body surrounds the whole circle of the periphery of the upper portion of the cavity; the second heater comprises a second heating body, the second heating body is arranged below the first heating ring, and the second heating body surrounds a first part of the periphery of the lower part of the cavity; the third heater comprises a third heating body, and the third heating body is arranged below the first heating body and surrounds a second part of the periphery of the lower part of the cavity; a first part of the periphery of the lower portion of the chamber and a second part of the periphery of the lower portion of the chamber are opposite to each other in the horizontal direction, and the sum of the arc lengths of the first part and the second part of the periphery of the lower portion of the chamber is smaller than the circumference of the whole periphery.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal pulling, in particular to a heating device. Background Art

[0002] In the solar single crystal manufacturing industry, single crystal pulling is an important part, which transforms disordered polycrystals into ordered single crystals. This process requires melting polycrystals and pulling single crystals. The melting of polycrystals consumes a lot of heat and requires special materials.

[0003] In the traditional single crystal pulling industry, the heat source for melting polysilicon is the heater, which is made of graphite. Electric current passes through the graphite heater, which is almost a pure resistor, and a large amount of heat is generated by work. The heat heats the polysilicon in the crucible through radiation, conduction, etc., causing the silicon material to melt, and the continuous heat generation allows the molten silicon to exist.

[0004] However, with the demand for refined and high-quality production, the industry has higher and higher requirements for silicon material melting speed, single crystal quality control, and energy consumption. The current heating device structure can no longer meet the requirements. Therefore, a heater that can melt the material quickly is urgently needed. Utility Model Content

[0005] In view of this, the utility model provides a heating device for solving the problem of how to quickly melt materials during single crystal pulling.

[0006] The utility model provides a heating device, comprising at least three independently heated first heaters, a second heater and a third heater, wherein the first heater, the second heater and the third heater form a common chamber for placing a crucible, the chamber is cylindrical and the axial direction is arranged along the vertical direction;

[0007] The first heater includes a first heating body, and the first heating body surrounds the entire circumference of the upper portion of the chamber;

[0008] The second heater includes a second heating body, the second heating body is disposed below the first heating ring, and the second heating body surrounds a first portion of the outer circumference of the lower portion of the chamber;

[0009] The third heater includes a third heating body, which is arranged below the first heating body and surrounds a second portion of the outer periphery of the lower portion of the chamber, the first portion of the outer periphery of the lower portion of the chamber and the second portion of the outer periphery of the lower portion of the chamber are opposite to each other in a horizontal direction, and the sum of the arc lengths of the first portion of the outer periphery of the lower portion of the chamber and the second portion of the outer periphery of the lower portion of the chamber is less than the circumference of the entire circle of the outer periphery of the lower portion of the chamber.

[0010] In one embodiment of the utility model, the first heating body further includes two first conductive columns arranged in the vertical direction, the two first conductive columns are arranged opposite to each other in the horizontal direction, the upper ends of the two first conductive columns are vertically connected to the first heating body, and the lower ends of the two first conductive columns are respectively connected to the positive and negative electrodes of the first power supply;

[0011] The second heating body further includes two second conductive columns arranged in a vertical direction, the two second conductive columns are respectively arranged at two ends of the second heating body opposite to the third heating body, the upper ends of the two second conductive columns are vertically connected to the second heating body, and the lower ends of the two second conductive columns are respectively connected to the positive and negative electrodes of the second power supply;

[0012] The third heating body also includes two third conduction columns arranged in the vertical direction, and the two third conduction columns are respectively arranged at the two ends of the third heating body opposite to the second heating body, the upper ends of the two third conduction columns are vertically connected to the third heating body, and the lower ends of the two third conduction columns are connected to the positive and negative electrodes of the third power supply.

[0013] In one embodiment of the present invention, the first power source, the second power source, and the third power source are independent of each other.

[0014] In one embodiment of the present invention, the first conductive pillar is disposed between the second conductive pillar and the third conductive pillar which are opposite to each other.

[0015] In one embodiment of the present invention, the first heating body and the second heating body are aligned with each other in the vertical direction; the first heating body and the third heating body are aligned with each other in the vertical direction.

[0016] In one embodiment of the present invention, the second heating body and the third heating body are aligned with each other in the horizontal direction.

[0017] In one embodiment of the present invention, the first conductive pillar, the second conductive pillar and the third conductive pillar are equidistant from the central axis of the cylindrical chamber.

[0018] In one embodiment of the present invention, the second conductive pillar and the third conductive pillar are shorter in vertical direction than the first conductive pillar, so that there is a gap between the first heating body and the second heating body and the third heating body in vertical direction.

[0019] In one embodiment of the utility model, a plurality of heating grooves are arranged at intervals in the circumferential direction of the first heating body, the second heating body and the third heating body. The heating grooves extend from one side to the other side of the heating ring in the vertical direction and do not pass through the other side. The openings of every two adjacent heating grooves face opposite directions.

[0020] In one embodiment of the utility model, a fourth heater for independent heating is also included, and the fourth heater includes a heating plate, which is arranged at the bottom of the chamber and connected to the positive and negative electrodes of the fourth power supply. The beneficial effects of the above technical solution of the utility model are as follows:

[0021] According to the heating device of the embodiment of the utility model, by setting three separately heated heaters and dividing the three heaters into two layers, the height of the heating area is shortened compared with the original three-layer structure, and the heat is more concentrated on the surface of the heated object, so as to achieve the effect of precise materialization. The shortening of the height of the heating area also reduces the baking of the heated container by the heating device, effectively protects the container, and also reduces the reaction between the container and the heated solution, and reduces the incorporation of oxygen. In addition, in this two-layer structure of the embodiment of the utility model, the heater of the lower layer is divided into two independent second heaters and third heaters on the left and right, which are respectively powered by two independent power supplies, which can improve the power supply efficiency. The heating device of the embodiment of the utility model is powered by three independent heaters respectively, which can output higher power and achieve the effect of rapid materialization in the materialization state. Since the three independent heaters are separate circuits, they can also work alternately, which greatly increases the service life of the heaters. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the structure of the heating device of an embodiment of the utility model;

[0023] Figure 2 It is another structural schematic diagram of the heating device of an embodiment of the utility model;

[0024] Figure 3 This is a schematic diagram of the operation of the heating device according to an embodiment of the utility model;

[0025] Figure 4 This is another working schematic diagram of the heating device according to an embodiment of the utility model.

[0026] Reference numerals:

[0027] 10. Chamber; 11. Gap;

[0028] 20. Crucible; 30. Heating tank;

[0029] 100, first heater; 110, first heating body; 120, first conducting column; 130, first power source;

[0030] 200, second heater; 210, second heating body; 220, second conducting column; 230, second power supply;

[0031] 300, a third heater; 310, a third heating body; 320, a third conducting column; 330, a third power source;

[0032] 400, a fourth heater; 410, a fourth power source;

[0033] 500. single crystal furnace tube; 510. accommodation space. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0035] The following first describes in detail the heating device according to the embodiment of the utility model in conjunction with the accompanying drawings.

[0036] refer to Figure 1 and Figure 2 , Figure 1 The schematic diagram of the structure of the heating device of the embodiment of the utility model is shown. Figure 2 Another structural schematic diagram of the heating device according to an embodiment of the utility model is shown.

[0037] like Figure 1 and Figure 2As shown, the heating device according to the embodiment of the utility model comprises at least three independently heated first heaters 100, second heaters 200 and third heaters 300, and the first heaters 100, second heaters 200 and third heaters 300 form a common chamber 10 for placing the crucible, and the chamber 10 is cylindrical and the axial direction is arranged along the vertical direction. Among them, the first heater 100 may include a first heating body 110, and the first heating body 110 surrounds the entire circle of the outer periphery of the upper part of the chamber 10, that is, the first heating body 110 can be formed into a complete ring. The second heater 200 may include a second heating body 210, and the second heating body 210 is arranged below the first heating body 110, and the second heating body 210 surrounds the first part of the outer periphery of the lower part of the chamber 10, that is, the second heating body 210 can be formed into an incomplete ring, that is, a part of the ring. The third heater 300 may include a third heating body 310, which is arranged below the first heating body 110 and surrounds the second part of the outer periphery of the lower part of the chamber 10. That is, the third heating body 310 may be formed as an incomplete ring, that is, a part of a ring, and the first part of the outer periphery of the lower part of the chamber 10 and the second part of the outer periphery of the lower part of the chamber 10 are opposite to each other in the horizontal direction and the sum of the arc lengths of the first part of the lower part of the chamber 10 and the second part 310 of the outer periphery of the lower part of the chamber 10 is less than the circumference of the entire circle of the outer periphery of the lower part of the chamber 10. That is, the second heating body 210 and the third heating body 310 are both part of the same ring and are opposite to each other, and a gap is formed between the opposite ends, so that the sum of the arc lengths of the second heating body 210 and the third heating body 310 is less than the circumference of the entire circle of the complete ring.

[0038] Specifically, the heating device may include three separate heaters. Compared with the conventional design of dividing the three heaters into three layers, the present invention combines the three heaters into two layers, thereby shortening the heating area (e.g. Figure 1For example, the three-layer heating device in the traditional solution has a heating area height of 280 mm, while the heating area height D of the heating device in the embodiment of the utility model can be 200 mm, and the height reduction of the heating area can be close to 30%. The shortening of the heating area height can concentrate the heat more on the surface of the heated object, thereby achieving the effect of precise material heating. The shortening of the heating area height also reduces the baking of the heated container (for example, crucible) by the heating device, effectively protects the crucible, reduces the reaction between the crucible and the heated solution (for example, silicon liquid), and reduces the incorporation of oxygen. The heating device provided by the embodiment of the utility model has two layers, the first heating body 110 of the upper layer is a full ring, and the lower layer includes a second heating body 210 and a third heating body 310 arranged on the left and right, and a gap is formed between the second heating body 210 and the third heating body 310, so that the first conduction column 120 of the first heater 100 can be better arranged, and the second heating body 210 and the third heating body 310 are respectively powered by independent power supplies, so that the lower layer of the entire heating device can have a higher heating efficiency, and when one of the second heater 200 and the third heater 300 fails and needs to be replaced, the operation of the other heater will not be affected.

[0039] In addition, continue to refer to Figure 2 In the material-making stage of single crystal pulling, the three heaters are all in working state. Since the three independent heaters are powered separately, higher power can be output, so as to achieve the effect of rapid material-making. In addition, in the shoulder-pulling stage of single crystal pulling, one of the second heater 200 and the third heater 300 is turned off, which can not only keep the heater heating the molten silicon in the crucible continuously, but also prevent the heat from being concentrated in one area of ​​the crucible, thereby minimizing the reaction between the crucible and the molten silicon, reducing the amount of oxygen doped into the molten silicon, and protecting the crucible. In the equal-diameter stage of single crystal pulling, the second heater 200 and the third heater 300 are turned off, and only the first heater 100 is turned on to maintain the temperature required for normal pulling of the silicon liquid in the crucible. Since the three independent heaters are separate circuits (i.e., the ability to heat independently), they can also work alternately. If one of the heaters is damaged, it can be directly disassembled and replaced, and the other heaters are not affected, which increases the service life of the heaters.

[0040] like Figure 1 and Figure 2 As shown, in one embodiment of the utility model, the first heater 100 also includes two first conduction columns 120 arranged in the vertical direction, the two first conduction columns 120 are arranged horizontally opposite to each other, the upper ends of the two first conduction columns 120 are vertically connected to the first heating body 110, and the lower ends of the two first conduction columns 120 are respectively connected to the positive and negative electrodes of the first power supply 130.

[0041] Continue to refer Figure 1 and Figure 2 The second heater 200 also includes two second conduction columns 220 arranged in a vertical direction. The two second conduction columns 220 are respectively arranged at two ends of the second heating body 210 opposite to the third heating body 310. The upper ends of the two second conduction columns 220 are vertically connected to the second heater 300, and the lower ends of the two second conduction columns 220 are respectively connected to the positive and negative electrodes of the second power supply 230.

[0042] Continue to refer Figure 1 and Figure 2 The third heater 300 also includes two third conduction columns 320 arranged in a vertical direction. The two third conduction columns 320 are respectively arranged at two ends of the third heating body 310 opposite to the second heating body 210. The upper ends of the two third conduction columns 320 are vertically connected to the third heating body 310, and the lower ends of the two third conduction columns 320 are connected to the positive and negative electrodes of the third power supply 330.

[0043] Among them, the main functions of the first conduction column 120, the second conduction column 220 and the third conduction column 320 are conduction and support. They will also generate heat during conduction, but the heating efficiency cannot be compared with that of the heating body and does not affect the overall heating effect of the heating device.

[0044] like Figure 1 and Figure 2 As shown, in one embodiment of the utility model, the first power supply 130, the second power supply 230 and the third power supply 330 are independent of each other, so that the first heater 100, the second heater 200 and the third heater 300 are powered independently respectively, and each heater can reach the maximum rated power, thereby increasing the sum of the powers of all heaters working simultaneously, and achieving the effect of rapid material processing.

[0045] like Figure 2 As shown, in one embodiment of the present invention, the first conductive column 120 is disposed between the second conductive column 220 and the third conductive column 320 which are opposite to each other. This is beneficial to plan the arrangement of the heater legs (i.e., the first conductive column 120, the second conductive column 220, and the third conductive column 320) in the vertical direction, so as to avoid insufficient space between the heater legs to reduce the air permeability, thereby affecting the discharge of impurities.

[0046] like Figure 2 As shown, in one embodiment of the present invention, the first heating body 110 and the second heating body 210 are aligned with each other in the vertical direction. Further, the first heating body 110 and the third heating body 310 are also aligned with each other in the vertical direction.

[0047] Furthermore, if Figure 2As shown, in one embodiment of the present invention, the second heating body 210 and the third heating body 310 are aligned with each other in the horizontal direction.

[0048] Furthermore, if Figure 2 As shown, in one embodiment of the present invention, the first conductive pillar 120 , the second conductive pillar 220 , and the third conductive pillar 320 are at the same distance from the central axis of the cylindrical chamber 10 .

[0049] Among them, by rationally planning the positions of the three heating bodies, the heat can be evenly covered on the cylindrical chamber 10, and the heating area is more concentrated, thereby achieving the effect of precise material heating.

[0050] like Figure 2 As shown, in one embodiment of the present invention, the lengths of the second conductive pillar 220 and the third conductive pillar 320 in the vertical direction are smaller than the first conductive pillar 120, so that there is a gap 11 in the vertical direction between the first heating body 110 and the second heating body 210 and the third heating body 310. The provision of the gap 11 can prevent the vertical distance between the first heating body 110 and the second heating body 210 and the third heating body 310 from being too close, thereby causing damage to the heating bodies.

[0051] like Figure 1 and Figure 2 As shown, in one embodiment of the utility model, heating grooves 30 are arranged at intervals in the circumferential direction of the first heating body 110, the second heating body 210 and the third heating body 310. The heating grooves 30 extend from one side of the heating body to the other side in the vertical direction and do not penetrate the other side. The openings of every two adjacent heating grooves 30 face opposite directions. The heating grooves 30 are used to increase the surface area of ​​the heating body, so that the heating body can transfer heat to the heated material more quickly and evenly, thereby improving the heating efficiency and heat dissipation effect of the heating body.

[0052] like Figure 1 As shown, in one embodiment of the utility model, the heating device may further include an independently heated fourth heater 400. The fourth heater 400 includes a heating plate, which is arranged at the bottom of the chamber 10 and connected to the positive and negative electrodes of the fourth power supply. The fourth heater 400 is a bottom heater, and its main function is to serve as a stable heat source at the bottom of the crucible during the melting process, so that the heated material remains in a molten state and slightly accelerates the melting speed.

[0053] like Figure 1 and Figure 2 As shown, in one embodiment of the present invention, the first heater 100, the second heater 200, the third heater 300 and the fourth heater 400 are all detachably connected to each power source, so that the heaters can be replaced at any time.

[0054] Combination Figure 1 and Figure 2 , and refer to Figure 3 and Figure 4 , Figure 3 The working schematic diagram of the heating device of the embodiment of the utility model is shown. Figure 4 Another working schematic diagram of the heating device according to the embodiment of the utility model is shown.

[0055] like Figures 1 to 4 As shown, in one embodiment of the present invention, the heating device can be arranged in the accommodation space 510 inside the single crystal furnace drum 500 when working, and the crucible 20 is placed in the heating device.

[0056] In one embodiment of the present invention, the first heater 100, the second heater 200, the third heater 300 and the fourth heater 400 are all isostatically pressed graphite materials. In other embodiments, each heater may also be made of other materials, which is not limited in the present invention.

[0057] In summary, according to the heating device of the utility model, by setting three independently heated heaters and dividing them into two layers, the height of the heating area is shortened, and the heat is more concentrated on the surface of the heated object, so as to achieve the effect of precise chemical reaction. In addition, the baking of the crucible by the heater is reduced, the crucible is effectively protected, the reaction between the crucible and the heated solution is reduced, and the incorporation of oxygen is reduced. In addition, the three independent heaters are powered separately, and higher power can be output, which can achieve the effect of rapid chemical reaction in the chemical reaction state. The three heaters can also work alternately, which greatly increases the service life of the heater.

[0058] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. The words "connect" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0059] The above is a preferred embodiment of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A heating device, characterized in that: At least three independently heated first heaters, second heaters and third heaters are included, wherein the first heaters, the second heaters and the third heaters form a common chamber for placing a crucible, and the chamber is cylindrical and axially arranged in a vertical direction; The first heater includes a first heating body, and the first heating body surrounds the entire circumference of the upper portion of the chamber; The second heater includes a second heating body, the second heating body is arranged below the first heating body, and the second heating body surrounds a first portion of the outer circumference of the lower portion of the chamber; The third heater includes a third heating body, which is arranged below the first heating body and surrounds the second part of the outer periphery of the lower part of the chamber, the first part of the outer periphery of the lower part of the chamber and the second part of the outer periphery of the lower part of the chamber are opposite to each other in a horizontal direction, and the sum of the arc lengths of the first part of the outer periphery of the lower part of the chamber and the second part of the outer periphery of the lower part of the chamber is less than the circumference of the entire circle of the outer periphery of the lower part of the chamber.

2. The heating device according to claim 1, characterized in that The first heater further comprises two first conductive columns arranged in a vertical direction, the two first conductive columns are arranged opposite to each other in a horizontal direction, the upper ends of the two first conductive columns are vertically connected to the first heating body, and the lower ends of the two first conductive columns are respectively connected to the positive and negative electrodes of the first power supply; The second heater further comprises two second conductive columns arranged in a vertical direction, the two second conductive columns are respectively arranged at two ends of the second heating body opposite to the third heating body, the upper ends of the two second conductive columns are vertically connected to the second heating body, and the lower ends of the two second conductive columns are respectively connected to the positive and negative electrodes of the second power supply; The third heater also includes two third conduction columns arranged along the vertical direction, and the two third conduction columns are respectively arranged at the two ends of the third heating body opposite to the second heating body, the upper ends of the two third conduction columns are vertically connected to the third heating body, and the lower ends of the two third conduction columns are connected to the positive and negative electrodes of the third power supply.

3. The heating device according to claim 2, characterized in that: The first power supply, the second power supply, and the third power supply are independent of each other.

4. The heating device according to claim 3, characterized in that , the first conductive column is disposed between the second conductive column and the third conductive column which are opposite to each other.

5. The heating device according to claim 4, characterized in that: The first heating body and the second heating body are aligned with each other in a vertical direction; the first heating body and the third heating body are aligned with each other in a vertical direction.

6. The heating device according to claim 5, characterized in that: The second heating body and the third heating body are aligned with each other in a horizontal direction.

7. The heating device according to claim 6, characterized in that: The first conductive pillar, the second conductive pillar, and the third conductive pillar are equidistant from a central axis of the cylindrical chamber.

8. The heating device according to claim 7, characterized in that: The second conductive pillar and the third conductive pillar have shorter lengths in the vertical direction than the first conductive pillar, so that there is a gap between the first heating body and the second heating body and the third heating body in the vertical direction.

9. The heating device according to claim 8, characterized in that: A plurality of heating grooves are arranged at intervals in the circumferential direction of the first heating body, the second heating body and the third heating body. The heating grooves extend from one side to the other side of the heating ring in the vertical direction and do not pass through the other side. The openings of every two adjacent heating grooves face opposite directions.

10. The heating device according to claim 9, characterized in that It also includes a fourth heater for independent heating, wherein the fourth heater includes a heating plate, the heating plate is arranged at the bottom of the chamber and is connected to the positive and negative electrodes of a fourth power supply.

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