Lifting device for nitrogen mesh enclosure

Abstract

The utility model relates to the technical field of semiconductor wafer processing, and discloses a lifting device for a nitrogen mesh enclosure, which comprises a base, a first rotating shaft, a first connecting rod, a second rotating shaft, a second connecting rod and a spring hanger, the first rotating shaft is fixedly connected to the base, one end of the first connecting rod rotatably sleeves the first rotating shaft, and the other end of the first connecting rod rotatably sleeves the second rotating shaft; the second rotating shaft is fixedly connected above the second connecting rod; the spring hanger is fixedly connected below the second connecting rod far away from the second rotating shaft; the spring hanger comprises a connecting body and a connecting part, and the connecting part is fixedly connected to the connecting body and used for being detachably connected to the nitrogen mesh enclosure. According to the utility model, maintenance personnel can be prevented from being in direct contact with the high-temperature nitrogen mesh enclosure, the risks of high-temperature scalding, heavy object falling and the like of the maintenance personnel are reduced, and the operation safety is improved. And moreover, pure manual taking-out operation of the nitrogen mesh enclosure is changed into semi-automatic operation, so that the operation difficulty is reduced, and the operation efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer processing technology, and specifically to a lifting device for a nitrogen mesh cover. Background Technology

[0002] In the semiconductor wafer fabrication field, the APCVDWJ999 equipment requires maintaining a high-temperature environment of 520°C and continuous nitrogen purging when isolating silane gas using a nitrogen hood. In related technologies, the nitrogen hood accumulates silica dust due to prolonged contact with the reactant gases, necessitating manual cleaning every 24 hours. However, current maintenance methods rely on manual handling of the approximately 15-pound high-temperature hood while wearing high-temperature gloves. Manual removal of the hood often carries risks such as burns and the risk of falling heavy objects, and is time-consuming, labor-intensive, and inefficient. Utility Model Content

[0003] In view of this, the present invention provides a lifting device for a nitrogen gas mesh cover to solve the problems of low efficiency and low safety in removing high-temperature nitrogen gas mesh covers.

[0004] This utility model provides a lifting device for a nitrogen gas mesh cover, comprising:

[0005] Base, first rotating shaft, first connecting rod, second rotating shaft, second connecting rod, and spring hanger;

[0006] The first rotating shaft is fixedly connected to the base, and one end of the first connecting rod is rotatably sleeved on the first rotating shaft, and the other end is rotatably sleeved on the second rotating shaft;

[0007] The second rotating shaft is fixedly connected above the second connecting rod, and the spring hanger is fixedly connected below the second connecting rod away from the second rotating shaft;

[0008] The spring hanger includes a connecting body and a connecting part. The connecting part is fixedly connected to the connecting body and is used for detachable connection to the nitrogen gas screen.

[0009] Beneficial effects: By coordinating the first rotating shaft, first connecting rod, second rotating shaft, and second connecting rod, the position of the spring hanger fixed on the second connecting rod can be adjusted, allowing the spring hanger to move to the nitrogen gas screen. Then, based on the cooperation between the connecting part on the spring hanger and the nitrogen gas screen, the connecting part on the spring hanger connects to the nitrogen gas screen, thereby automatically lifting the nitrogen gas screen and achieving the lifting operation. This avoids direct contact between maintenance personnel and the high-temperature nitrogen gas screen, reducing the risk of burns and falling objects, thus improving operational safety. Furthermore, it changes the nitrogen gas screen removal operation from purely manual to semi-automatic, reducing operational difficulty and improving efficiency.

[0010] In one optional embodiment, the connecting portion includes at least one first connecting portion and at least one second connecting portion; the first connecting portion extends from the connecting body in a direction away from the connecting body, and the first connecting portion is perpendicular to the connecting body; the second connecting portion is fixedly connected to the first connecting portion and extends vertically upward from the end of the first connecting portion away from the connecting body.

[0011] In one optional embodiment, two of each of the first and second connecting parts are provided, with the two first connecting parts being parallel to each other and fixedly connected to the connecting body.

[0012] In one optional embodiment, the length of the first connecting part is 10cm-15cm; the length of the second connecting part is 5cm-10cm.

[0013] In one alternative embodiment, the spring hanger further includes a coil spring installed within the connecting body;

[0014] A force adjustment switch is provided on the connecting body for adjusting the preload of the coil spring.

[0015] In one alternative embodiment, a connecting rope is further included, one end of which is connected to the second connecting rod and the other end of which is connected to the coil spring.

[0016] In one alternative embodiment, the connecting rope comprises a stainless steel connecting rope with a diameter of 0.8mm-1.2mm.

[0017] In one alternative embodiment, the connecting portion includes a metal plate.

[0018] In one alternative embodiment, the thickness of the metal plate is 5mm-10mm.

[0019] In one alternative embodiment, the nitrogen mesh cover is provided with a connection interface that matches the connection portion of the spring hanger. Attached Figure Description

[0020] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1This is a schematic diagram of the structure of a lifting device for a nitrogen mesh cover according to an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of a nitrogen mesh cover according to an embodiment of the present invention.

[0023] Explanation of reference numerals in the attached figures:

[0024] 100, Base; 110, First connecting rod; 120, Second connecting rod; 130, First rotating shaft; 140, Second rotating shaft; 150, Connecting rope; 200, Spring hanger; 210, First connecting part; 220, Second connecting part; 230, Force adjustment switch; 300, Nitrogen gas screen; 310, Exhaust pipe; 311, Connecting interface. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0026] According to embodiments of the present invention, such as Figure 1 , Figure 2 As shown, a lifting device for a nitrogen gas filter 300 is provided, comprising: a base 100, a first rotating shaft 130, a first connecting rod 110, a second rotating shaft 140, a second connecting rod 120, and a spring hanger 200; the first rotating shaft 130 is fixedly connected to the base 100, one end of the first connecting rod 110 is rotatably sleeved on the first rotating shaft 130, and the other end is rotatably sleeved on the second rotating shaft 140; the second rotating shaft 140 is fixedly connected above the second connecting rod 120, and the spring hanger 200 is fixedly connected below the second connecting rod 120 away from the second rotating shaft 140; the spring hanger 200 includes a connecting body and a connecting part, the connecting part being fixedly connected to the connecting body for detachable connection to the nitrogen gas filter 300.

[0027] In this embodiment, the base 100 is fixedly disposed around the nitrogen mesh cover 300. During lifting, the base 100 serves as the main load-bearing frame, providing load support. A first rotating shaft 130, rotatable 180°, is fixedly connected to the base 100 for adjusting the position of the spring hanger 200 during lifting. One end of the first connecting rod 110 is rotatably sleeved on the first rotating shaft 130, allowing the first connecting rod 110 to rotate around the first rotating shaft 130. The other end of the first connecting rod 110 is rotatably sleeved on a second rotating shaft 140, which is fixedly connected above the second connecting rod 120, allowing the first connecting rod 110 and the second connecting rod 120 to be arranged in parallel and able to rotate relative to each other. A spring hanger 200, comprising a connecting body and a connecting part, is connected to the connecting body at one end for detachable connection to the nitrogen mesh cover 300. This allows the spring hanger 200 to move along with the second link 120, thereby automatically lifting the nitrogen mesh cover 300 and realizing the lifting operation of the nitrogen mesh cover 300.

[0028] When the nitrogen screen 300 needs to be lifted, force is first applied to the first connecting rod 110 to adjust the positions of the first connecting rod 110 and the second connecting rod 120. Since the second rotating shaft 140 is fixedly connected to the second connecting rod 120, further force is applied to the second connecting rod 120, causing it to move relative to the first connecting rod 110. This adjusts the position of the spring hanger 200 fixed to the second connecting rod 120, connecting the connecting part on the spring hanger 200 to the nitrogen screen 300, thus enabling the lifting operation of the nitrogen screen 300. When the nitrogen screen 300 does not need to be lifted, the spring hanger 200 can be rotated to an idle position by the cooperation of the first rotating shaft 130, the second rotating shaft 140, the first connecting rod 110, and the second connecting rod 120, thereby reducing the space occupied by the lifting device.

[0029] The lifting device for the nitrogen gas screen provided by this utility model can prevent maintenance personnel from directly contacting the high-temperature nitrogen gas screen 300, reducing the risk of burns and falling heavy objects, and improving the safety of the operation. Furthermore, it changes the removal of the nitrogen gas screen 300 from a purely manual to a semi-automatic operation, reducing the difficulty of the operation and improving efficiency.

[0030] like Figure 2 As shown, in one embodiment, the nitrogen mesh cover 300 is provided with a connection interface 311 that matches the connection portion of the spring hanger 200.

[0031] In this embodiment, a connection interface 311 matching the connection part of the spring hanger 200 is welded on the side wall of the exhaust pipe 310 of the nitrogen screen 300. When it is necessary to lift the nitrogen screen 300, the connection part of the spring hanger 200 can be detachably inserted into the connection interface 311, and then the nitrogen screen 300 is automatically lifted by the spring hanger 200 to complete the lifting operation of the nitrogen screen 300.

[0032] In other possible implementations, two connection interfaces 311 are provided, respectively positioned opposite each other on the side walls of the two exhaust pipes 310 on the nitrogen mesh cover 300. This ensures that when the nitrogen mesh cover 300 is removed using a lifting device, it can be perpendicular to the ground and move vertically up and down. The connection interfaces 311 are generally rectangular in shape, with a length of 8cm-13cm (e.g., 8cm, 10cm, 13cm), a width of 1cm-1.5cm (e.g., 1cm, 1.2cm, 1.5cm), and a height of 5.5cm-10.5cm (e.g., 5.5cm, 7.5cm, 10.5cm). By setting appropriately sized connection interfaces 311, it is ensured that the connecting part can be smoothly inserted into the connection interface 311 without being too loose, preventing impacts caused by loosening during the lifting of the nitrogen mesh cover 300.

[0033] In one embodiment, the connecting portion includes at least one first connecting portion 210 and at least one second connecting portion 220; the first connecting portion 210 extends from the connecting body in a direction away from the connecting body and is perpendicular to the connecting body; the second connecting portion 220 is fixedly connected to the first connecting portion 210 and extends vertically upward from the end of the first connecting portion 210 away from the connecting body.

[0034] In this embodiment, one end of the first connecting part 210 is fixedly connected to the connecting body, and then extends from the connecting body in a direction away from the connecting body to form the first connecting part 210, so that the connecting part can reach a suitable connection position of the nitrogen mesh cover 300, which facilitates the support of the nitrogen mesh cover 300 through the first connecting part 210; the first connecting part 210 is perpendicular to the connecting body, so that the first connecting part 210 can better transmit the force to the connecting body when subjected to force, and is more stable in structure, able to withstand greater tensile and shear forces, and ensure the strength and stability of the connection. The second connecting part 220 is fixedly connected to the end of the first connecting part 210 away from the connecting body. The second connecting part 220 extends vertically upward from the end of the first connecting part 210 away from the connecting body. Thus, the second connecting part 220 can be inserted into the connecting interface 311 of the nitrogen mesh cover 300 through the cooperation of the second connecting part 220 with the connecting interface 311 of the nitrogen mesh cover 300. This prevents the second connecting part 220 from slipping off the connecting interface 311 during the lifting process. Moreover, during the lifting process, the direction of the force is more perpendicular to the nitrogen mesh cover 300, reducing the horizontal component of the force, thereby lifting the nitrogen mesh cover 300 more stably and avoiding the nitrogen mesh cover 300 from shaking or shifting during the lifting process.

[0035] In one embodiment, there are two first connecting portions 210 and two connecting portions 220. The two first connecting portions 210 are parallel to each other and are fixedly connected to the connecting body.

[0036] In this embodiment, by providing two first connecting parts 210 and fixing them parallel to each other on the connecting body, the nitrogen mesh cover 300 can be subjected to more balanced force during the lifting process, avoiding tilting or deformation due to uneven force. Similarly, two second connecting parts 220 are provided. Since the second connecting parts 220 are fixedly connected to the first connecting parts 210, the two second connecting parts 220 are also parallel to each other. The two second connecting parts 220 can match the two connecting interfaces 311 on the side wall of the exhaust pipe 310 on the nitrogen mesh cover 300, so that when the nitrogen mesh cover 300 is taken out using the lifting device, the nitrogen mesh cover 300 can move vertically up and down perpendicular to the ground, avoiding shaking or displacement of the nitrogen mesh cover 300 during the lifting process.

[0037] In one embodiment, the length of the first connecting portion 210 is 10cm-15cm; the length of the second connecting portion 220 is 5cm-10cm.

[0038] In this embodiment, the length of the first connecting part 210 can be 10cm, 12cm, 15cm, etc., and can be set according to actual usage requirements. If the length of the first connecting part 210 is too short, such as less than 10cm, it may not be able to effectively support the nitrogen mesh cover 300; if the length of the first connecting part 210 is too long, such as greater than 15cm, its strength may be reduced. When lifting the nitrogen mesh cover 300, the excessively long lever arm will cause the first connecting part 210 to bear excessive bending moment, making it prone to bending deformation and affecting the normal operation of the entire lifting device. By setting a reasonable length for the first connecting part 210, it is ensured that the first connecting part 210 can effectively support the nitrogen mesh cover 300, and the supporting strength of the first connecting part 210 can be guaranteed.

[0039] The length of the second connecting part 220 can be 5cm, 7cm, 10cm, etc. If the length of the second connecting part 220 is too short, such as less than 5cm, when the second connecting part 220 is inserted into the connecting interface 311, it may not be able to effectively limit the nitrogen mesh cover 300, causing the nitrogen mesh cover 300 to fall off the second connecting part 220 and resulting in a falling object incident. If the length of the second connecting part 220 is too long, such as greater than 10cm, there is a possibility that the second connecting part 220 may interfere with other components in the APCVDWJ999 equipment. By setting a reasonable length for the second connecting part 220, it can be ensured that the second connecting part 220 effectively limits the nitrogen mesh cover 300, avoiding falling object incidents during the lifting process.

[0040] In one embodiment, the spring hanger 200 further includes a coil spring installed within the connecting body; and a force adjustment switch 230 disposed on the connecting body for adjusting the preload of the coil spring.

[0041] In this embodiment, a coil spring is installed inside the connecting body, and a force adjustment switch 230 is also provided on the connecting body to adjust the preload of the coil spring. By adjusting the preload of the coil spring, the lifting force of the spring hanger 200 can be adjusted. During the process of removing the nitrogen mesh cover 300 using the lifting device, firstly, the preload of the coil spring is reduced by adjusting the force adjustment switch 230, that is, the lifting force of the spring hanger 200 is reduced, and the connecting part is inserted into the connecting interface 311 of the nitrogen mesh cover 300. Then, the preload of the coil spring is increased by adjusting the force adjustment switch 230, that is, the lifting force of the spring hanger 200 is increased. Through the elastic potential energy stored in the coil spring, the nitrogen mesh cover 300 is automatically lifted, completing the semi-automatic removal of the nitrogen mesh cover 300.

[0042] In other possible implementations, the connecting body is also equipped with a fall-prevention self-locking device to prevent the nitrogen mesh cover 300 from suddenly falling and to avoid accidental falling objects.

[0043] In one embodiment, a connecting rope 150 is also included, one end of which is connected to the second connecting rod 120 and the other end is connected to a coil spring.

[0044] In this embodiment, one end of the connecting rope 150 is connected to the second connecting rod 120, and the other end is connected to the coil spring, so as to connect the second connecting rod 120 and the spring hanger 200 together; during the process of lifting the nitrogen mesh cover 300, the nitrogen mesh cover 300 can be automatically lifted smoothly by the cooperation of the coil spring and the connecting rope 150, thereby completing the lifting operation of the nitrogen mesh cover 300.

[0045] In one embodiment, the connecting rope 150 includes a stainless steel connecting rope 150 with a diameter of 0.8mm-1.2mm.

[0046] In this embodiment, the diameter of the stainless steel connecting rope 150 can be 0.8mm, 1.0mm, 1.2mm, etc., and can be set according to actual usage requirements. The stainless steel connecting rope 150 has high strength and hardness, can withstand large tensile forces without easily breaking, and can ensure the safety of the nitrogen mesh cover 300 during the lifting process. By setting a reasonable diameter for the stainless steel connecting rope 150, it can safely carry objects and will not deform or break excessively under a certain tensile force, ensuring the safety of the lifting process. It also avoids affecting the flexibility and ease of operation of the entire lifting device due to an excessively large diameter. For example, an excessively large diameter connecting rope 150 may require more force to drive the coil spring, thus affecting the lifting performance of the entire device.

[0047] In one embodiment, the connecting portion includes a metal plate. Further, the thickness of the metal plate is 5mm-10mm.

[0048] In this embodiment, the connecting part is made of a metal plate, specifically a stainless steel plate, to ensure that the connecting part will not deform during long-term use. Furthermore, by setting a reasonable thickness for the metal plate, the connecting part has sufficient strength and rigidity to withstand the force applied by the nitrogen mesh 300, while ensuring the overall manufacturing cost and flexibility of the lifting device. If the thickness of the metal plate is too small, such as less than 5mm, when lifting the heavy nitrogen mesh 300, the thin metal plate may undergo significant tensile deformation under the tension of the connecting rope 150, causing changes in the dimensions of the connecting part, affecting the structural stability of the entire lifting device, and potentially even leading to a safety accident. If the thickness of the metal plate is too large, such as greater than 10mm, it will increase material costs and significantly increase the weight of the entire lifting device, leading to inconvenience in installation and operation. Moreover, an excessively heavy metal plate will increase the labor intensity of operators and reduce work efficiency. The specific thickness of the metal plate can be 5mm, 7mm, 10mm, etc., and can be set according to actual usage requirements.

[0049] It is understandable that, in order for the first connecting part 210 and the second connecting part 220 to cooperate with the connecting interface 311, the length of the first connecting part 210 is less than the length of the connecting interface 311, the length of the second connecting part 220 is less than the height of the connecting interface 311, and the thickness of the metal plate is less than the width of the connecting interface 311.

[0050] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A lifting device for a nitrogen hood, characterized in that, The utility model relates to a nitrogen gas cover fixing device, including: Base (100), first pivot (130), first connecting rod (110), second pivot (140), second connecting rod (120) and spring hanger (200); First pivot (130) fixedly connected on base (100), one end of first connecting rod (110) rotatably sleeved on first pivot (130), the other end rotatably sleeved on second pivot (140); Second pivot (140) fixedly connected above second connecting rod (120), spring hanger (200) fixedly connected below second connecting rod (120) away from second pivot (140); Spring hanger (200) includes connecting body and connecting portion, connecting portion fixedly connected on connecting body, used for detachable connection on nitrogen gas cover (300).

2. The lifting device for a nitrogen hood according to claim 1, characterized in that, Connecting portion includes at least one first connecting portion (210) and at least one second connecting portion (220), first connecting portion (210) extends from connecting body to the direction away from connecting body, and first connecting portion (210) is perpendicular to connecting body, second connecting portion (220) is fixedly connected on first connecting portion (210), and extends vertically upward from one end of first connecting portion (210) away from connecting body.

3. The lifting device for a nitrogen hood according to claim 2, characterized in that, First connecting portion (210) and second connecting portion (220) are provided with two, two first connecting portions (210) are parallel, and are fixedly connected on connecting body.

4. The lifting device for a nitrogen hood according to claim 2, characterized in that, The length of first connecting portion (210) satisfies 10cm-15cm, and the length of second connecting portion (220) satisfies 5cm-10cm.

5. The lift apparatus for a nitrogen drape according to claim 1, wherein, Spring hanger (200) further includes coil spring, installed in connecting body; Force adjusting switch (230) is arranged on connecting body, and is used for adjusting the pre-tightening force of coil spring.

6. The lifting device for a nitrogen hood according to claim 5, characterized in that Further including connecting rope (150), one end of connecting rope (150) is connected with second connecting rod (120), and the other end is connected with coil spring.

7. The lifting device for a nitrogen drape according to claim 6, characterized in that, Connecting rope (150) includes stainless steel connecting rope (150), and the diameter of stainless steel connecting rope (150) satisfies 0.8mm-1.2mm.

8. The lift apparatus for a nitrogen drape according to claim 1, wherein, Connecting portion includes metal plate.

9. The lifting device for a nitrogen drape according to claim 8, characterized in that, The thickness of metal plate satisfies 5mm-10mm.

10. The lift apparatus for a nitrogen drape according to claim 1, wherein, Nitrogen gas cover (300) is provided with connecting interface (311) matched with the connecting portion of spring hanger (200).

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