Heating device of silicon carbide crystal growing furnace

Abstract

The utility model discloses a heating device of a silicon carbide crystal growing furnace, which belongs to the field of growing furnace heating and comprises an operating platform, a heating device and a heating device. And the adjusting component is detachably mounted on the mounting plane of the operating platform. According to the heating device of the silicon carbide crystal growing furnace disclosed by the utility model, the second heating ring and the third heating ring are shifted up and down by loosening the limitation on the second heating ring and the third heating ring firstly, so that the positions of the second heating ring and the third heating ring can be adjusted; the first locking nut and the second locking nut are used for locking the second heating ring and the third heating ring after the positions of the second heating ring and the third heating ring are adjusted, so that the second heating ring and the third heating ring are locked through the first locking nut and the second locking nut. And the heating member can uniformly heat the growth furnace when the growth furnace is heated.

Description

Technical Field

[0001] This utility model belongs to the field of growth furnace heating, specifically relating to a heating device for a silicon carbide crystal growth furnace. Background Technology

[0002] Most semiconductor integrated circuit crystals are grown using the physical vapor transport (PVT) method. The basic principle of crystal growth is to place the raw material at the bottom of a graphite crucible and heat the crucible using the skin effect through an induction coil. Once a certain temperature is reached, the raw material decomposes into gas and volatilizes to the seed crystal area at the top of the crucible. After a series of chemical reactions, SiC is generated and crystallizes on the surface of the seed crystal through a certain axial and radial temperature gradient to obtain single-crystal silicon carbide with a certain structure.

[0003] When silicon carbide crystals are grown in a growth furnace, it is often necessary to introduce a certain gas pressure into the growth furnace and apply a certain temperature to the outside to promote the growth of silicon carbide crystals. However, during the heating process of the growth furnace, it is difficult to heat different heights of the growth furnace, resulting in uneven heating. Furthermore, it is difficult to cover the heated part onto the growth furnace after the growth furnace shifts. These issues urgently need to be improved.

[0004] This invention attempts to mitigate or at least alleviate such problems or defects by providing new or otherwise improved heating methods for growth furnaces. Utility Model Content

[0005] In view of one or more of the above-mentioned defects or improvement needs of the prior art, the present invention provides a heating device for a silicon carbide crystal growth furnace, which has the advantages of being able to heat the growth furnace at different heights and being able to cover the heating part on the growth furnace after the growth furnace shifts.

[0006] To achieve the above objectives, this utility model provides a heating device for a silicon carbide crystal growth furnace, which includes an operating table with an mounting surface.

[0007] Adjustment components are detachably mounted on the mounting surface of the operating table;

[0008] The correction component is detachably mounted on the adjustment component, and the correction component can be pushed by the adjustment component in the forward, backward and left-right directions;

[0009] A heating component is detachably mounted on the correction component. The heating component includes a tail support mounted on the correction component. A traction plate is detachably mounted on the tail support. A first heating ring is removably mounted on the traction plate. Multiple sets of locking screws are inserted into the first heating ring. Multiple sets of first locking nuts and multiple sets of second locking nuts are rotatably mounted on each set of locking screws. A second heating ring and a third heating ring are detachably mounted on the multiple sets of first heating rings.

[0010] As a further improvement of this utility model, the upper end face of the first heating ring is in contact with the first locking nut, and the lower end face of the first heating ring is in contact with the second locking nut.

[0011] As a further improvement of this utility model, the second heating ring is located above the first heating ring, and there is a first adjustable gap between the second heating ring and the first heating ring; the third heating ring is located below the first heating ring, and there is a second adjustable gap between the third heating ring and the first heating ring.

[0012] As a further improvement of this utility model, the upper and lower end faces of the second heating ring are respectively in contact with and fitted with one set of the first locking nut and the second locking nut, and the upper and lower end faces of the third heating ring are respectively in contact with and fitted with another set of the first locking nut and the second locking nut.

[0013] As a further improvement of this utility model, the cross-sectional area of ​​the traction plate is arc-shaped, and a heat insulation pad can be detachably installed on the traction plate, and the size of the heat insulation pad is adapted to the size of the traction plate.

[0014] As a further improvement of this utility model, the adjusting member includes

[0015] The machine tool is detachably mounted on the mounting surface of the operating table;

[0016] A horizontal plate is detachably mounted on the machine base. A first electric cylinder is detachably mounted on the horizontal plate, and a first displacement plate is detachably mounted on the output end of the first electric cylinder.

[0017] The second electric cylinder is detachably mounted on the first displacement plate.

[0018] The second displacement plate has a connecting plate detachably mounted on it, and the connecting plate is detachably connected to the output end of the second electric cylinder.

[0019] As a further improvement of this utility model, the correction component includes

[0020] A mounting plate is detachably mounted on the adjusting member, and a third electric cylinder is detachably mounted on the mounting plate.

[0021] A plug plate is detachably mounted on the output end of the third electric cylinder, and a third displacement plate is detachably mounted on the plug plate.

[0022] A drive motor is detachably mounted on the third displacement plate, and a drive wheel is detachably mounted on the output end of the drive motor. A belt is removably fitted onto the drive wheel.

[0023] A rotating plate is rotatably mounted on the third displacement plate. The rotating plate has a rotating shaft, and a driven wheel is mounted on the rotating shaft. The driven wheel can be bypassed by the belt.

[0024] As a further improvement of this utility model, the diameter of the driven wheel is twice the diameter of the driving wheel, and in the initial position, the driven wheel is in contact with the third displacement plate.

[0025] In summary, the beneficial effects of the above-described technical solutions conceived by this utility model compared with the prior art include:

[0026] The heating device of this utility model for a silicon carbide crystal growth furnace, through the arrangement of adjustment components, can quickly change the overall position of the heating component in the front and left-right directions. Through the arrangement of correction components, the operator can push the third displacement plate downwards by activating the switch of the third electric cylinder, allowing the heating component to be fitted onto the growth furnace. Activating the drive motor can drive the drive wheel and the rotating plate to rotate slightly, correcting the overall alignment of the heating component and making it easier to fit onto the furnace. Even after the growth furnace has shifted, it can still be fitted onto the furnace. When adjusting the heating components, the positions of the second and third heating rings can be adjusted by first loosening the restraints on the second and third heating rings and then moving them up and down. This allows the heating components to heat different parts of the growth furnace. After adjusting the positions of the second and third heating rings, the first and second locking nuts are used to lock the second and third heating rings respectively, ensuring that the heating components heat the growth furnace more evenly. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the heating device for the silicon carbide crystal growth furnace of this utility model;

[0028] Figure 2This is a schematic diagram of the heating device of the silicon carbide crystal growth furnace from another angle.

[0029] Figure 3 This is a schematic diagram of the overall structure of the adjusting component of this utility model;

[0030] Figure 4 This is a schematic diagram of the overall structure of the correction component of this utility model;

[0031] Figure 5 This is a schematic diagram of the overall structure of the correction component from another perspective.

[0032] Figure 6 This is a schematic diagram of the overall structure of the heating component of this utility model.

[0033] In all the accompanying drawings, the same reference numerals denote the same technical features, specifically: 1. Operating table; 2. Adjusting component; 21. Machine base; 22. Horizontal plate; 23. First electric cylinder; 24. First displacement plate; 25. Second electric cylinder; 26. Second displacement plate; 27. Connecting plate; 3. Correction component; 31. Mounting plate; 32. Third electric cylinder; 33. Insert plate; 34. Third displacement plate; 35. Drive motor; 36. Drive wheel; 37. Belt; 38. Rotating plate; 39. Driven wheel; 4. Heating component; 41. Tail support; 42. Traction plate; 43. First heating ring; 44. Locking screw; 45. First locking nut; 46. Second locking nut; 47. Second heating ring; 48. Third heating ring. Detailed Implementation

[0034] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0035] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0036] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0037] In the embodiments, by Figure 1-6 A heating device for a silicon carbide crystal growth furnace is provided, wherein, Figure 1 This is a schematic diagram of the overall structure of the heating device for the silicon carbide crystal growth furnace of this utility model; Figure 2 This is a schematic diagram of the heating device of the silicon carbide crystal growth furnace from another angle. Figure 3 This is a schematic diagram of the overall structure of the adjusting component of this utility model; Figure 4 This is a schematic diagram of the overall structure of the correction component of this utility model; Figure 5 This is a schematic diagram of the overall structure of the correction component from another perspective.

[0038] Figure 6 This is a schematic diagram of the overall structure of the heating component of this utility model. It includes an operating platform 1 with a mounting surface; an adjusting component 2, which is detachably mounted on the mounting surface of the operating platform 1; a correction component 3, which is detachably mounted on the adjusting component 2 and can be pushed by the adjusting component 2 in the forward, backward, left, and right directions; and a heating component 4, which is detachably mounted on the correction component 3. The heating component 4 includes a tail support 41 mounted on the correction component 3, a traction plate 42 detachably mounted on the tail support 41, a first heating ring 43 removably mounted on the traction plate 42, multiple sets of locking screws 44 inserted into the first heating ring 43, multiple sets of first locking nuts 45 and multiple sets of second locking nuts 46 rotatably mounted on each set of locking screws 44, and a second heating ring 47 and a third heating ring 48 detachably mounted on the multiple sets of first heating rings 43.

[0039] The overall concept of this utility model is as follows: By using the adjustable component 2, the position of the heating component 4 in the front and left / right directions can be quickly changed. By using the corrective component 3, the operator can push the third displacement plate 34 downwards by activating the third electric cylinder 32, allowing the heating component 4 to be fitted onto the growth furnace. Activating the drive motor 35 causes the drive wheel 36 and the rotating plate 38 to rotate slightly, correcting the overall alignment of the heating component 4 and making it easier to fit onto the growth furnace. Even after the growth furnace shifts, it can still be fitted onto the furnace. Through the arrangement of the heating components... When adjusting the heating element 4, the second heating ring 47 and the third heating ring 48 are first loosened, and then moved up and down to adjust their positions. This allows the heating element 4 to heat different parts of the growth furnace. After adjusting the positions of the second heating ring 47 and the third heating ring 48, the first locking nut 45 and the second locking nut 46 are used to lock the second heating ring 47 and the third heating ring 48 respectively, ensuring that the heating element 4 heats the growth furnace more evenly.

[0040] In some embodiments, more specifically, in order to further improve the locking effect of the first heating ring 43, the upper end face of the first heating ring 43 is in contact with the first locking nut 45, and the lower end face of the first heating ring 43 is in contact with the second locking nut 46.

[0041] When locking the first heating ring 43, simply rotate the first locking nut 45 to fit against the upper surface of the first heating ring 43, and rotate the second locking nut 46 to fit against the lower surface of the first heating ring 43 to complete the locking operation of the first heating ring 43.

[0042] In some embodiments, more specifically, in order to enable the heating element 4 to heat different positions of the growth furnace as a whole, so as to make the heating effect of the heating element 4 more uniform, the second heating ring 47 is located above the first heating ring 43, and there is a first adjustable gap between the second heating ring 47 and the first heating ring 43; the third heating ring 48 is located below the first heating ring 43, and there is a second adjustable gap between the third heating ring 48 and the first heating ring 43.

[0043] By first loosening the restraints on the second heating ring 47 and the third heating ring 48, and then moving the second heating ring 47 and the third heating ring 48 up and down, the positions of the second heating ring 47 and the third heating ring 48 can be adjusted so that the heating component 4 as a whole can heat different positions of the growth furnace. After the positions of the second heating ring 47 and the third heating ring 48 are adjusted, the first locking nut 45 and the second locking nut 46 are used to lock the second heating ring 47 and the third heating ring 48 respectively.

[0044] In some embodiments, more specifically, in order to enable the first locking nut 45 and the second locking nut 46 to lock the second heating ring 47 and the third heating ring 48 respectively, the upper and lower end faces of the second heating ring 47 are respectively in contact with one set of the first locking nut 45 and the second locking nut 46, and the upper and lower end faces of the third heating ring 48 are respectively in contact with another set of the first locking nut 45 and the second locking nut 46.

[0045] In some embodiments, more specifically, in order to further prevent the first heating ring 43 from scalding the traction plate 42 during the heating process, the cross-sectional area of ​​the traction plate 42 is arc-shaped, and a heat insulation pad is detachably installed on the traction plate 42, and the size of the heat insulation pad is adapted to the size of the traction plate 42.

[0046] Next, a more specific structure and construction of the adjusting component 2 will be given for further explanation. The adjusting component 2 includes a machine base 21, which is detachably mounted on the mounting plane of the operating table 1; a horizontal plate 22, which is detachably arranged on the machine base 21, and a first electric cylinder 23 is detachably mounted on the horizontal plate 22. A first displacement plate 24 is detachably arranged on the output end of the first electric cylinder 23; a second electric cylinder 25, which is detachably arranged on the first displacement plate 24; and a second displacement plate 26, on which a connecting plate 27 is detachably arranged, and the connecting plate 27 is detachably connected to the output end of the second electric cylinder 25.

[0047] Next, the working principle of the adjustment component 2 will be further explained. By activating the first electric cylinder 23, the operator can push the second displacement plate 26 to move in the left and right direction. By activating the second electric cylinder 25, the operator can push the second displacement plate 26 to move in the front and back direction, which can quickly adjust the position of the heating component 4 in the front, back, left and right directions.

[0048] Next, a more specific structure and construction of the correction component 3 will be given for further explanation. The correction component 3 includes a mounting plate 31, which is detachably mounted on the adjusting component 2. A third electric cylinder 32 is detachably mounted on the mounting plate 31; an insert plate 33, which is detachably arranged on the output end of the third electric cylinder 32. A third displacement plate 34 is detachably arranged on the insert plate 33; a drive motor 35, which is detachably mounted on the third displacement plate 34. A drive wheel 36 is detachably mounted on the output end of the drive motor 35. A belt 37 is removably sleeved on the drive wheel 36; and a rotating plate 38, which is rotatably arranged on the third displacement plate 34. A rotating shaft is located inside the rotating plate 38. A driven wheel 39 is located on the rotating shaft, and the driven wheel 39 can be bypassed by the belt 37.

[0049] Next, the working principle and effect of the correction component 3 will be further explained. By turning on the switch of the third electric cylinder 32, the staff can push the third displacement plate 34 to move down, so that the heating component 4 can be fitted onto the growth furnace. By turning on the drive motor 35, the drive wheel 36 and the rotating plate 38 can be rotated slightly, which can correct the deviation of the heating component 4 and make it easier to fit onto the heating component 4. Even after the growth furnace is deviated, it can still be fitted onto the growth furnace.

[0050] In some embodiments, in order to further reduce the speed of the drive motor 35 during rotation, the diameter of the driven wheel 39 is twice the diameter of the driving wheel 36, and the driven wheel 39 is in contact with the third displacement plate 34 in the initial position.

[0051] In summary, the adjustable components 2 allow for rapid changes in the overall position of the heating component 4 in the front and left / right directions. The corrective components 3 allow the operator to activate the third electric cylinder 32, which pushes the third displacement plate 34 downwards, enabling the heating component 4 to be fitted onto the growth furnace. Activating the drive motor 35 causes the drive wheel 36 and the rotating plate 38 to rotate slightly, correcting the overall position of the heating component 4 and facilitating its placement. Even after the growth furnace shifts, the component remains fitted onto the furnace. The placement of the heating component 4 ensures proper heating... When adjusting component 4, the positions of the second heating ring 47 and the third heating ring 48 are adjusted by first loosening the restraints on the second heating ring 47 and the third heating ring 48 and then moving them up and down. This allows the heating component 4 to heat different parts of the growth furnace. After adjusting the positions of the second heating ring 47 and the third heating ring 48, the first locking nut 45 and the second locking nut 46 are used to lock the second heating ring 47 and the third heating ring 48 respectively. This ensures that the heating component 4 heats the growth furnace more evenly.

[0052] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A heating device of a silicon carbide crystal growth furnace, characterized by comprising: It includes The operating platform (1) has an installation plane; Adjusting component (2) is detachably mounted on the installation plane of the operating platform (1); The deviation correcting component (3) is detachably mounted on the adjusting component (2), and the deviation correcting component (3) can be pushed by the adjusting component (2) in the front and back and left and right directions; The heating component (4) is detachably arranged on the deviation correcting component (3), and the heating component (4) includes a tail support (41) mounted on the deviation correcting component (3), a traction plate (42) detachably arranged on the tail support (41), a first heating ring (43) removably arranged on the traction plate (42), a plurality of sets of locking screws (44) inserted in the first heating ring (43), a plurality of sets of first locking nuts (45) and a plurality of sets of second locking nuts (46) rotatably arranged on each set of locking screws (44), and a second heating ring (47) and a third heating ring (48) detachably mounted on a plurality of the first heating ring (43).

2. The heating device of a silicon carbide crystal growing furnace according to claim 1, characterized by Among them, The upper end surface of the first heating ring (43) is in contact with the first locking nut (45), and the lower end surface of the first heating ring (43) is in contact with the second locking nut (46).

3. The heating apparatus of a silicon carbide crystal growing furnace according to claim 2, wherein The second heating ring (47) is located above the first heating ring (43), and the second heating ring (47) and the first heating ring (43) have a first adjustable distance, and the third heating ring (48) is located below the first heating ring (43), and the third heating ring (48) and the first heating ring (43) have a second adjustable distance.

4. The heating apparatus of a silicon carbide crystal growing furnace according to claim 3, wherein Among them, The upper and lower end surfaces of the second heating ring (47) are in contact with one set of the first locking nut (45) and the second locking nut (46) respectively, and the upper and lower end surfaces of the third heating ring (48) are in contact with another set of the first locking nut (45) and the second locking nut (46) respectively.

5. The heating apparatus of a silicon carbide crystal growing furnace according to claim 1, wherein Among them, The cross-sectional area of the traction plate (42) is arc-shaped, and a heat insulation pad is detachably mounted on the traction plate (42), and the size of the heat insulation pad is adapted to the size of the traction plate (42).

6. The heating apparatus of a silicon carbide crystal growing furnace according to claim 1, wherein The adjusting component (2) includes The machine table (21) is detachably mounted on the installation plane of the operating platform (1); The cross plate (22) is detachably arranged on the machine table (21), and a first electric cylinder (23) is detachably mounted on the cross plate (22); The second electric cylinder (25) is detachably arranged on the first displacement plate (24); The second displacement plate (26) has a connecting plate (27) detachably arranged thereon, and the connecting plate (27) is detachably connected with the output end of the second electric cylinder (25).

7. The heating apparatus of a silicon carbide crystal growing furnace according to claim 6, wherein The deviation correcting component (3) includes The mounting plate (31) is detachably mounted on the adjusting component (2), and a third electric cylinder (32) is detachably mounted on the mounting plate (31); A plug plate (33) is detachably arranged on the output end of the third electric cylinder (32), and a third displacement plate (34) is detachably arranged on the plug plate (33); A driving motor (35) is detachably arranged on the third displacement plate (34), and a driving wheel (36) is detachably arranged on the output end of the driving motor (35), and a belt (37) is removably sleeved on the driving wheel (36); A rotating plate (38) is rotatably arranged on the third displacement plate (34), and a rotating shaft is arranged in the rotating plate (38), and a driven wheel (39) is arranged on the rotating shaft, and the driven wheel (39) can be wrapped by the belt (37).

8. The heating apparatus of a silicon carbide crystal growing furnace according to claim 7, wherein The caliber of the driven wheel (39) is twice the caliber of the driving wheel (36), and the driven wheel (39) is in contact with the third displacement plate (34) in the initial position.

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