Mask grabbing and placing positioning mechanism and exposure equipment

Abstract

The utility model provides a mask plate grabbing and positioning mechanism and exposure equipment. The mask plate grabbing and positioning mechanism comprises a plate fork body and a positioning assembly, the fork body comprises a preset surface; the positioning assembly comprises a positioning part and a driving part, the positioning part is movably arranged on the preset surface, and the driving part is connected with the positioning part to drive the positioning part to move; the number of the positioning assemblies is four, two positioning assemblies are X-direction positioning assemblies, and the other two positioning assemblies are Y-direction positioning assemblies. The two X-direction positioning assemblies are arranged in the X direction, and the moving direction of the positioning parts of the X-direction positioning assemblies is the X direction; the two Y-direction positioning assemblies are arranged in the Y direction, and the moving direction of the positioning parts of the Y-direction positioning assemblies is the Y direction; the Y direction is perpendicular to the X direction, and the connecting line of the two X-direction positioning assemblies intersects with the connecting line of the two Y-direction positioning assemblies. And through cooperation of the four positioning assemblies, grabbing and releasing of the mask can be achieved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a mask gripping and positioning mechanism and an exposure device. Background Technology

[0002] The mask transport subsystem is one of the key subsystems of the exposure equipment, mainly used to realize the transfer of masks between the mask storage module and the mask stage. The mask gripping and positioning mechanism is a key mechanism of the mask transport subsystem, which plays a crucial role in the stability and efficiency of the mask transfer between the mask storage module and the mask stage.

[0003] In exposure equipment, when the working distance of the objective lens is large, the mask can be picked up and placed on the mask stage by the "clamping and dragging" method. However, when the working distance of the objective lens is small, the purpose of picking up and placing the mask on the mask stage cannot be achieved by the clamping and dragging method. Utility Model Content

[0004] The purpose of this invention is to provide a mask gripping and positioning mechanism and an exposure device, which aims to ensure that the mask can be stably and efficiently transferred between the mask storage module and the mask stage.

[0005] To achieve the above objectives, this utility model provides a mask gripping and positioning mechanism, comprising:

[0006] The fork body has a pre-defined surface; and,

[0007] A positioning component includes a positioning part and a driving part; the positioning part is movably disposed on the preset surface, and the driving part is connected to the positioning part and configured to drive the positioning part to move;

[0008] The number of positioning components is four, including two X-axis positioning components and two Y-axis positioning components; the two X-axis positioning components are arranged along the X direction, and the movement direction of the positioning part of the X-axis positioning component is the X direction; the two Y-axis positioning components are arranged along the Y direction, and the movement direction of the positioning part of the Y-axis positioning component is the Y direction.

[0009] The Y direction is perpendicular to the X direction, and the line connecting the two X-direction positioning components intersects the line connecting the two Y-direction positioning components.

[0010] Optionally, one of the two Y-axis positioning components is a first Y-axis positioning component and the other is a second Y-axis positioning component;

[0011] Each of the positioning units has a first position and a second position spaced apart in its moving direction, the second position being closer than the first position to the intersection of the line connecting the two X-direction positioning components and the line connecting the two Y-direction positioning components;

[0012] The positioning component further includes a first detection element, a second detection element, and a trigger; the first detection element is disposed on the fork body and arranged corresponding to the first position; the second detection element is disposed on the fork body and arranged corresponding to the second position; the trigger is connected to the positioning part and moves synchronously with the positioning part; the trigger triggers the first detection element when the positioning part moves to the first position, and the trigger also triggers the second detection element when the positioning part moves to the second position;

[0013] In the first Y-axis positioning component, the positioning part further has a third position, which is located between the first position and the second position. When the positioning part moves to the third position, the trigger triggers the first detection element and the second detection element.

[0014] Optionally, the positioning component further includes a first limiting body, a second limiting body, and a third limiting body; the first limiting body and the second limiting body are disposed on the preset surface and arranged along the moving direction of the positioning part; the second limiting body is closer to the intersection of the line connecting the two X-direction positioning components and the line connecting the two Y-direction positioning components than the first limiting body; the third limiting body is connected to the positioning part and moves synchronously with the positioning part;

[0015] The positioning component is configured such that the positioning part reaches the first position when the third limiting body abuts against the first limiting body, and the positioning part reaches the second position when the third limiting body abuts against the second limiting body.

[0016] Optionally, in the X-direction positioning assembly, the positioning part includes a base, a positioning arm, and a support part; the base is movably connected to the fork body; the positioning arm is connected to the base and extends in the Z direction away from the base; the support part is disposed at one end of the positioning arm away from the base and extends in the X direction.

[0017] The supporting portions of the two X-direction positioning components extend in the X direction in a direction that approaches each other; the Z direction is perpendicular to the X direction and the Y direction.

[0018] Optionally, in the X-direction positioning assembly, the number of positioning arms is three, and the three positioning arms are spaced apart along the Y-direction, with each positioning arm connected to a support portion.

[0019] Optionally, the positioning portion of the X-axis positioning component further includes a first pad;

[0020] In one of the X-axis positioning components, the first pad is provided on the surface of the support portion at both ends facing the base; in another X-axis positioning component, the first pad is provided on the surface of the support portion in the middle facing the base.

[0021] Optionally, in the Y-direction positioning assembly, the positioning part includes a base and a positioning arm. The base is movably connected to the fork body, and the positioning arm is connected to the base and extends in the Z-direction in a direction away from the base. The Z-direction is perpendicular to the X-direction and the Y-direction.

[0022] Optionally, in the Y-direction positioning assembly, the positioning part further includes a second pad, which is disposed at the end of the positioning arm away from the base, and the second pads of the two Y-direction positioning assemblies are disposed opposite to each other in the Y direction.

[0023] Optionally, one of the two Y-axis positioning components is a first Y-axis positioning component and the other is a second Y-axis positioning component;

[0024] In the first Y-axis positioning component, there is one positioning arm; in the second Y-axis positioning component, there are two positioning arms, and the two positioning arms are spaced apart in the X-axis direction.

[0025] The triangle formed by the line connecting the positioning arm of the first Y-axis positioning component and the positioning arm of the second Y-axis positioning component is an acute triangle.

[0026] Optionally, the fork body is further provided with a docking part.

[0027] To achieve the above objectives, this utility model also provides an exposure device, including a robotic arm and a mask gripping and positioning mechanism as described in any of the preceding claims, wherein the robotic arm is connected to the mask fork body.

[0028] Optionally, the exposure apparatus further includes a mask stage and an objective lens system, wherein the mask stage and the objective lens system are arranged at intervals along the Z direction;

[0029] The mask stage includes a mask stage body and a support portion; the mask stage body has a through hole extending through the Z direction and coaxial with the objective lens system, the through hole has a rectangular cross-section and has four hole walls connected in sequence, wherein two of the hole walls are arranged opposite to each other in the X direction and the other two hole walls are arranged opposite to each other in the Y direction; a support portion is respectively provided on the two hole walls opposite to each other in the Y direction of the through hole, the support portion is located at one end of the through hole near the objective lens system and extends along the X direction.

[0030] Compared with the prior art, the photomask gripping and positioning mechanism and exposure equipment of this utility model have the following advantages:

[0031] The aforementioned mask gripping and positioning mechanism includes a fork body and positioning components. The fork body includes a preset surface. The positioning component includes a positioning part and a driving part. The positioning part is movably disposed on the preset surface, and the driving part is connected to the positioning part and configured to drive the positioning part to move. There are four positioning components: two X-axis positioning components and two Y-axis positioning components. The two X-axis positioning components are arranged along the X direction, and the moving direction of the positioning part of the X-axis positioning component is the X direction. The two Y-axis positioning components are arranged along the Y direction, and the moving direction of the positioning part of the Y-axis positioning component is the Y direction. The Y direction is perpendicular to the X direction, and the line connecting the two X-axis positioning components intersects the line connecting the two Y-axis positioning components. The gripping and releasing of the mask can be achieved through the cooperation of the four positioning components. Furthermore, the mask gripping and positioning mechanism is applied to an exposure device, which also includes a mask stage and an objective lens. The mask stage includes a mask stage body and a support portion. A through-hole extending along the Z-direction and coaxial with the objective lens system is formed on the mask stage body. The through-hole has a rectangular cross-section and four sequentially connected hole walls, two of which are arranged opposite each other in the X-direction and the other two in the Y-direction. A support portion is respectively provided on the two opposite hole walls in the Y-direction of the through-hole. The support portion is located at the end of the through-hole closer to the objective lens system and extends along the X-direction. The application of the mask gripping and positioning mechanism enables the mask to be placed within the through-hole and supported by the support portion. Attached Figure Description

[0032] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0033] Figure 1 This is a schematic diagram of the mask gripping and positioning mechanism provided in one embodiment of the present invention;

[0034] Figure 2 This is a schematic diagram of the positioning part of the X-direction positioning component of the mask grasping and positioning mechanism according to an embodiment of the present invention;

[0035] Figure 3 This is a schematic diagram of the mask gripping and positioning mechanism according to an embodiment of the present invention when gripping a mask;

[0036] Figure 4 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask gripping and step one is completed, according to an embodiment of the present invention.

[0037] Figure 5 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask is gripped and step one is completed, according to an embodiment of the present invention. Figure 5 and Figure 4 The difference lies in the direction of observation;

[0038] Figure 6 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask gripping and step two is completed, according to an embodiment of the present invention.

[0039] Figure 7 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask is gripped and step two is completed, according to an embodiment of the present invention. Figure 7 and Figure 6 The difference lies in the direction of observation;

[0040] Figure 8 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask gripping and step three is completed according to an embodiment of the present invention.

[0041] Figure 9 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask is gripped and step three is completed, according to an embodiment of the present invention. Figure 9 and Figure 8 The difference lies in the direction of observation;

[0042] Figure 10This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask is gripped and step four is completed, according to an embodiment of the present invention.

[0043] Figure 11 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask is gripped and step four is completed, according to an embodiment of the present invention. Figure 11 and Figure 10 The difference lies in the direction of observation;

[0044] Figure 12 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask gripping and step five is completed according to an embodiment of the present invention.

[0045] Figure 13 This is a schematic diagram showing the relative positional relationship between the mask and the mask gripping and positioning mechanism when the mask is gripped and step five is completed, according to an embodiment of the present invention. Figure 13 and Figure 12 The observation directions are different;

[0046] Figure 14 This utility model provides a partial structural schematic diagram of an exposure device according to an embodiment;

[0047] Figure 15 This is a partial structural schematic diagram of an exposure apparatus according to an embodiment of the present invention. Figure 15 and Figure 14 The observation directions are different.

[0048] [The following are explanations of the reference numerals in the attached drawings]: 10-Mask gripping and positioning mechanism, 100-Mask fork body, 101-Preset surface, 102-Connecting hole, 200-Positioning component, 210a-First positioning part, 210b-Second positioning part, 211-First base, 212-First positioning arm, 213-Support part, 214-Second base, 215-Second positioning arm, 216-First pad, 217-Second pad, 220-Drive part, 230-Limiting element, 231-First limiting body, 232-Second limiting body, 233-Third limiting body, 240-First detection element, 250-Second detection element, 260-Trigger element, 20-Mask, 30-Mask stage, 31-Mask stage body, 32-Support part, 33-Through hole, 40-Objective lens system. Detailed Implementation

[0049] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0050] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0051] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “a plurality” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “install,” “connect,” and “link” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can represent internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate relative importance or implicitly specify the number of indicated technical features. Those skilled in the art will understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0052] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly illustrate the objectives of the embodiments of this utility model. The same or similar reference numerals in the drawings represent the same or similar parts.

[0053] Figure 1 This diagram illustrates the mask gripping and positioning mechanism 10 provided in an embodiment of the present invention. Figure 1 As shown, the mask gripping and positioning mechanism 10 includes a fork body 100 and a positioning component 200. The fork body 100 has a preset surface 101. The positioning component 200 includes a positioning part (not shown in the figure) and a driving part 220. The positioning part is movably disposed on the preset surface 101, and the driving part 220 is connected to the positioning part and configured to drive the positioning part to move.

[0054] In this utility model, the number of positioning components 200 is four, wherein two positioning components 200 are arranged at intervals along the X direction, and the other two positioning components 200 are arranged at intervals along the Y direction, wherein the Y direction is perpendicular to the X direction. The line L1 connecting the two positioning components 200 arranged at intervals along the X direction (e.g., ...) Figure 1 (As shown by the red line in the image) and the line L2 connecting the two positioning components 200 arranged at intervals along the Y direction (as shown by the red line in the image) Figure 1 The green lines in the diagram intersect.

[0055] Two positioning components 200 spaced apart along the X direction are referred to as X-direction positioning components (not labeled in the figure), and the positioning portion of the X-direction positioning component is referred to as the first positioning portion 210a. Similarly, two positioning components 200 spaced apart along the Y direction are referred to as Y-direction positioning components (not labeled in the figure), and the positioning portion of the Y-direction positioning component is referred to as the second positioning portion 210b. In the X-direction positioning component, the drive unit 220 is configured to drive the first positioning portion 210a to move along the X direction. In the Y-direction positioning component, the drive unit 220 is configured to drive the second positioning portion 210b to move along the Y direction.

[0056] By moving the positioning portion of each of the positioning components 200, the mask gripping and positioning component 10 can grip or release the mask 20, thereby enabling the mask to be picked up and placed at a designated location (e.g., a mask stage).

[0057] Optionally, continue to refer to Figure 1 and combined Figure 2The first positioning part 210a includes a base, a positioning arm, and a support part 213. For ease of description, the base of the X-direction positioning component will be referred to as the first base 211, and the positioning arm of the X-direction positioning component will be referred to as the first positioning arm 212. The first base 211 is movably disposed on the preset surface 101 and connected to the corresponding driving part 220, so that it can move along the X direction under the drive of the corresponding driving part 220. The first positioning arm 212 is connected to the first base 211 and extends in the Z direction away from the first base 211, the Z direction being perpendicular to the X direction. The support part 213 is disposed on the end of the first positioning arm 212 away from the first base 211. The support portion 213 extends along the X direction, and the support portions 213 of the two X-direction positioning components extend in the X direction in a direction that approaches each other, that is, the support portion 213 of one X-direction positioning component extends in the X direction toward the other X-direction positioning component.

[0058] Optionally, continue to refer to Figure 1 The second positioning part 210b includes a base and a positioning arm. For ease of description, the base of the Y-direction positioning component is referred to as the second base 214, and the positioning arm of the Y-direction positioning component is referred to as the second positioning arm 215. The second base 214 is movably disposed on the preset surface 101 and connected to the corresponding drive part 220, so that it can move along the Y direction under the drive of the corresponding drive part 220. The second positioning arm 215 is connected to the second base 214 and extends in the Z direction away from the second base 212, the Z direction being perpendicular to the Y direction.

[0059] In actual operation, the X and Y directions are horizontal, the Z direction is vertical, and the preset surface 101 is the lower surface of the plate fork body 100.

[0060] Thus, when the mask gripping and positioning mechanism 10 is in the gripping state and grips the mask 20, as... Figure 3As shown, the first positioning arms 212 of the two X-direction positioning components are located on opposite sides of the mask 20 in the X direction, and the supporting portion 213 abuts against the lower surface of the mask 20 to horizontally position the mask 20; the second positioning arms 215 of the two Y-direction positioning components clamp the mask 20 on opposite sides in the Y direction to fix the mask 20. By positioning the mask 20 in the X and Y directions, the mask 20 remains stationary relative to the mask gripping and positioning mechanism and cannot rotate in the Rz direction, thus achieving stable gripping of the mask 20 by the mask gripping and positioning mechanism 10, and thereby accurately picking up and placing the mask 20 at a designated position, such as on a mask table.

[0061] Optionally, such as Figure 1 and Figure 2 As shown, the first positioning part 210a includes three first positioning arms 212, and the three first positioning arms 212 are arranged at intervals along the Y direction, for example, at equal intervals.

[0062] One of the two Y-axis positioning components is referred to as the first Y-axis positioning component, and the other as the second Y-axis positioning component. Figure 1 As shown, in the first Y-axis positioning assembly, there is one second positioning arm 215, and in the second Y-axis positioning assembly, there are two second positioning arms 215, which are spaced apart along the X-direction. Furthermore, the triangle formed by the lines connecting the two second positioning arms 215 of the second Y-axis positioning assembly and the second positioning arm 215 of the first Y-axis positioning assembly (as shown in the diagram)... Figure 1 The blue dashed line in the figure shows an acute triangle, preferably an isosceles triangle, so that the two Y-axis positioning components can stably clamp the mask 20.

[0063] Further, please refer to Figure 2The first positioning part 210a further includes a first pad 216. The two X-axis positioning components are respectively referred to as the first X-axis positioning component and the second X-axis positioning component. The three supporting parts 213 of the first positioning part 210a of any X-axis positioning component are respectively referred to in arrangement as the first supporting part 213a, the second supporting part 213b, and the third pad 213c, with the second supporting part 213b located between the first supporting part 213a and the third supporting part 213c. In the first X-axis positioning component, the first pad 216 is provided on the surface of the first supporting part 213a facing the first base 211, and the first pad 216 is also provided on the surface of the third supporting part 213c facing the first base 211. In the second X-axis positioning component, the first pad 216 is provided on the surface of the second supporting part 213b facing the first base 211. Thus, when the mask 20 is grasped, the first support portion 213a and the third support portion 213c of the first X-axis positioning component, and the second support portion 213b of the second X-axis positioning component, do not directly contact the mask 20. Instead, they abut against the lower surface of the mask 20 through the first pad 216. Therefore, the two X-axis positioning components achieve a three-point support effect for the mask 20 through the first pad 216. In this case, the second support portion 213b of the first X-axis positioning component, the first support portion 213a of the second X-axis positioning component, and the third support portion 213c of the second X-axis positioning component provide auxiliary support for the mask 20.

[0064] Please return to the reference. Figure 1 The second positioning portion 210b of the Y-axis positioning assembly further includes a second pad 217, which is disposed at the end of the second positioning arm 215 away from the second base 214, and the second pads 217 of the two Y-axis positioning assemblies are arranged opposite to each other in the Y direction. Thus, the side of the second positioning arm 215 does not directly contact the mask 20, but rather contacts the side of the mask 20 through the second pad 216.

[0065] Both the first pad 216 and the second pad 217 are made of antistatic material. By bringing the mask plate 20 into contact with the first pad 216 and the second pad 217, static electricity can be prevented and particles can be prevented from contaminating the mask plate 20, while ensuring that the mask plate gripping and positioning mechanism 10 stably grips the mask plate 20. This embodiment of the invention does not limit the shape of the first pad 216 and the second pad 217, as long as the first pad 216 and the second pad 217 are configured so that the supporting part 213 and the second positioning arm 215 do not directly contact the mask plate 20. In an optional embodiment, the first pad 216 is circular, and the second pad 217 is rectangular with one side extending along the Z direction.

[0066] In this embodiment of the invention, each positioning component 200 has a positioning portion having a first position and a second position arranged at intervals in its moving direction, the second position being closer to the intersection of line L1 and line L2 than the first position. The positioning portion of the first Y-direction positioning component also has a third position, the third position being located between the corresponding first position and the second position in the Y-direction.

[0067] In an optional embodiment, when the mask gripping and positioning mechanism 10 is in the gripping state, the positioning part of the X-direction positioning component and the positioning part of the second Y-direction positioning component are respectively located at their respective second positions, and the positioning part of the first Y-direction positioning component is located at the third position.

[0068] It should be understood that the mask gripping and positioning mechanism 10 also has a release state. When the mask gripping and positioning mechanism 10 switches from the gripping state to the release state, the mask gripping and positioning mechanism 10 can release the mask 20 it has gripped. In an optional embodiment, when the mask gripping and positioning mechanism 10 is in the release state, the positioning portions of each positioning component 200 are respectively located at the corresponding first positions.

[0069] Optionally, such as Figure 1As shown, the positioning component 200 further includes a limiting member 230, which includes a first limiting body 231, a second limiting body 232, and a third limiting body 233. The first limiting body 231 and the second limiting body 232 are both disposed on the preset surface 101 of the fork body 100 and are spaced apart along the moving direction of the positioning part. The second limiting body 232 is closer to the intersection of the connecting line L1 and the connecting line L2 than the first limiting body 231. The third limiting body 233 is disposed on the positioning part and moves synchronously with the positioning part, and can abut against the first limiting body 231 or the second limiting body 232.

[0070] In this embodiment of the present invention, when the positioning part moves to the point where the third limiting body 233 abuts against the first limiting body 231, the positioning part is located at the first position; when the positioning part moves to the point where the third limiting body 233 abuts against the second limiting body 232, the positioning part is located at the second position. In other words, when the mask gripping and positioning mechanism 10 is in the gripping state, the third limiting bodies 233 of the two X-direction positioning components and the third limiting body 233 of the second Y-direction positioning component abut against the corresponding second limiting body 232, and the third limiting body 233 of the first Y-direction positioning component is located between the corresponding first limiting body 231 and the second limiting body 232; when the mask gripping and positioning mechanism 10 is in the releasing state, the third limiting bodies 233 of each positioning component 200 abut against the corresponding first limiting body 231.

[0071] Furthermore, it can be understood that when the third limiting body 233 abuts against the first limiting body 231, the positioning part, restricted by the third limiting body 233 and the first limiting body 231, cannot continue to move in the direction from the second limiting body 232 to the first limiting body 231, but can only move in the direction from the first limiting body 231 to the second limiting body 232; and when the third limiting body 233 abuts against the second limiting body 232, the positioning part, restricted by the third limiting body 233 and the second limiting body 232, cannot continue to move in the direction from the first limiting body 231 to the second limiting body 232, but can only move in the direction from the second limiting body 232 to the first limiting body 231. In other words, in any of the positioning components 200, the first limiting body 231 and the second limiting body 232 define the movement range of the positioning part.

[0072] Alternatively, please continue to refer to Figure 1Each positioning component 200 further includes a first detection element 240, a second detection element 250, and a trigger 260. The first detection element 240 and the second detection element 250 are both disposed on the fork body 100, with the first detection element 240 corresponding to the first position and the second detection element 250 corresponding to the second position. The trigger 260 is connected to the positioning part and moves synchronously with the positioning part. In any positioning component 200, when the positioning part moves to the first position, the trigger 260 triggers the first detection element 240; when the positioning part moves to the second position, the trigger 260 triggers the second detection element 250. In the first Y-axis positioning component, when the positioning part moves to the third position, the trigger 260 simultaneously triggers both the first detection element 240 and the second detection element 250.

[0073] Conversely, when the first detection element 240 of any one of the positioning components 200 is triggered while the second detection element 250 is not triggered, it indicates that the positioning part of the positioning component 200 is located in the first position; when the first detection element 240 of any one of the positioning components 200 is not triggered while the first detection element 250 is triggered, it indicates that the positioning part of the positioning component 200 is located in the second position; when both the first detection element 240 and the second detection element 250 of the first Y-axis positioning component are triggered, it indicates that the second positioning part 210b of the first Y-axis positioning component is located in the third position.

[0074] In some embodiments, the first detection element 240 and the second detection element 250 are both sensors integrating a signal transmitting module and a signal receiving module, and the trigger 260 is a baffle. In any of the positioning components 200, when the positioning part 210 moves to the first position, the trigger 260 corresponds to the second detection element 250. At this time, the detection signal emitted by the first detection element 240 is continuously transmitted in its transmission direction and will not be reflected by the trigger 260, causing the first detection element 240 to not receive the detection signal and be triggered. At the same time, when the detection signal emitted by the second detection element 250 propagates along its transmission direction to the trigger 260, it is reflected back to the second detection element 250 by the trigger 260, so that the second detection element 250 receives the detection signal but is not triggered. When the positioning part moves to the second position, the trigger 260 corresponds to the first detection element 240. At this time, the detection signal emitted by the first detection element 240 is transmitted along its transmission direction to the trigger 260 and is reflected back to the first detection element 240 by the trigger 260, so that the first detection element 240 receives the detection signal but cannot be triggered. At the same time, the detection signal emitted by the second detection element 250 is continuously transmitted without being reflected by the trigger 260, so that the second detection element 250 does not receive the detection signal and is not triggered. In the first Y-direction positioning component, when the positioning part moves to the third position, the trigger 260 is neither corresponding to the first detection element 240 nor the second detection element 250. As a result, the detection signal emitted by the first detection element 240 is transmitted along its transmission direction and is not reflected by the trigger 260, so that the first detection element 240 does not receive the detection signal and is triggered. Similarly, the detection signal emitted by the second detection element 250 is transmitted along its transmission direction and is not reflected by the trigger 260, so that the second detection element 250 does not receive the detection signal and is triggered.

[0075] In other embodiments, the first detection element includes a separate first signal transmitting module and a first signal receiving module, and the second detection element includes a separate second signal transmitting module and a second signal receiving module. The first signal transmitting module and the first signal receiving module are arranged on opposite sides of the trigger (not shown in the figure), and their arrangement direction is perpendicular to the movement direction of the corresponding positioning part. The second signal transmitting module and the second signal receiving module are also arranged on opposite sides of the trigger, and their arrangement direction is perpendicular to the movement direction of the corresponding positioning part. In this case, when the positioning part moves to the first position, the trigger corresponds to the first detection element. At this time, the detection signal emitted by the first signal transmitting module is reflected by the trigger when it reaches the trigger, causing the detection signal to be unable to be transmitted to the first signal receiving module, so that the first signal receiving module does not receive the detection signal, thereby triggering the first detection element. Simultaneously, the detection signal emitted by the second signal transmitting module is transmitted along its transmission direction to the second signal receiving module and received by the second signal receiving module, so that the second detection element is not triggered. When the positioning part moves to the second position, the trigger corresponds to the second detection element. At this time, the detection signal emitted by the first signal transmitting module is transmitted to the first signal receiving module along its transmission direction and is received by the first signal receiving module, so that the first detection element is not triggered. At the same time, the detection signal emitted by the second signal transmitting module is transmitted to the trigger and reflected by the trigger, so that the second signal receiving module does not receive the detection signal, thereby triggering the second detection element. In the first Y-axis positioning assembly, when the positioning part moves to the third position, the trigger corresponds to both the first detection element and the second detection element. In this way, the detection signal emitted by the first signal transmitting module is transmitted to the trigger along its transmission direction and reflected by the trigger, so that the first signal receiving module does not receive the detection signal, thereby triggering the first detection element; and the detection signal emitted by the second signal transmitting module is transmitted to the trigger and reflected by the trigger, so that the second signal receiving module does not receive the detection signal, thereby triggering the second detection element. Furthermore, those skilled in the art will understand that the mask gripping and positioning mechanism 10 is used to connect to a robotic arm (not shown in the figure). To this end, the fork body 100 is also provided with a docking portion, so that the fork body 100 can be connected to the robotic arm through the docking portion. In an optional embodiment, the docking portion is a connecting hole 102 penetrating the fork body 100 along the Z direction, and the connecting hole 102 may be located at the center of the fork body 100.

[0076] The following describes the process of the mask gripping and positioning mechanism 10 gripping the mask 20, including:

[0077] Step 1: With the mask gripping and positioning mechanism 10 in the released state, the robotic arm drives the mask gripping and positioning mechanism 10 to move until the first positioning arms 212 of the two X-direction positioning components are positioned on opposite sides of the mask 20 in the X-direction, such that the distance between each support portion 213 and the mask 20 in the X-direction is greater than zero s1, the first pad 216 on the support portion 213 is lower than the lower surface of the mask 20, and the distance between the first pad 216 and the lower surface of the mask 20 is greater than zero z (e.g., ...). Figure 4 As shown, Figure 4 (Dimension z is not specified), and the second positioning arms 215 of the two Y-direction positioning components are arranged on opposite sides of the mask 20 in the Y direction, and the distance between the second pad 217 on each second positioning arm 215 and the mask 20 in the Y direction is greater than zero s2 (e.g., ...). Figure 5 (As shown).

[0078] Step 2: Keep the robotic arm stationary and control the positioning portions of the two X-axis positioning components 200 to move horizontally along the direction corresponding to the first position pointing to the second position, until the positioning portions of the two X-axis positioning components 200 reach their corresponding second positions. At this time, the relative positions of the mask gripping and positioning mechanism 10 and the mask 20 are as follows: Figure 6 and Figure 7 As shown, the first pads 216 on both of the support portions 213 are located below the mask plate 20, and the dimension by which either support portion 213 and the mask plate 20 coincide in the X direction is s3. In addition, the distance between the first positioning arm 212 and the mask plate 20 in the vertical direction can be greater than zero.

[0079] Step 3: Using the robotic arm, the mask gripping and positioning mechanism 10 is moved upwards until the first pad 216 abuts against the lower surface of the mask 20. The robotic arm can be further controlled to move the mask 20 a certain distance vertically upwards, so that the mask 20 is tightly pressed against the first pad 216 under the influence of gravity. At this time, the relative positions between the mask gripping and positioning mechanism 10 and the mask 20 are as follows: Figure 8 and Figure 9 As shown.

[0080] Step 4: Keep the robotic arm stationary and control the positioning part of the second Y-axis positioning component to move horizontally in the direction corresponding to the first position pointing to the second position until the positioning part reaches the corresponding second position. At this time, the relative positional relationship between the mask gripping and positioning mechanism 10 and the mask 20 is as follows: Figure 10 and Figure 11 As shown, the second pad 217 of the second Y-axis positioning component is in contact with the mask 20.

[0081] Step 5: Keep the robotic arm stationary and control the positioning part of the first Y-axis positioning component to move horizontally in the direction corresponding to the first position pointing to the second position until the second pad 217 on the first Y-axis positioning component abuts against the mask 20, completing the gripping of the mask 20. At this time, the relative positional relationship between the mask gripping and positioning mechanism 10 and the mask 20 is as follows: Figure 12 and Figure 13 As shown, it can be understood that the positioning part of the first Y-axis positioning component is in the third position at this time.

[0082] It is understood that during the execution of step one, the first detection element 240 of each positioning component 200 is triggered by the corresponding trigger 260. Upon completion of step two, the second detection element 250 of each X-axis positioning component is triggered by the corresponding trigger 260, while the first detection element 240 is not triggered. Upon completion of step four, the second detection element 250 of the second Y-axis positioning component is triggered by the trigger 260, while the first detection element 240 is not triggered. After completion of step five, both the first detection element 240 and the second detection element 250 of the first Y-axis positioning component are triggered by the trigger 260.

[0083] It is worth noting that if the mask 20 is not present, then during step five, after the positioning part of the first Y-axis positioning component reaches the third position, it continues to move in the direction corresponding to the first position pointing to the second position until it reaches the corresponding second position. At this time, the second detection element 250 of the first Y-axis positioning component is triggered by its trigger 260, while the first detection element 240 cannot be triggered. Thus, after the mask gripping and positioning mechanism 10 performs step five, if the first detection element 240 of the first Y-axis positioning component 200 is not triggered, it can be determined that the mask gripping and positioning mechanism 10 has not gripped the mask 20.

[0084] In addition, the specific values ​​of dimensions s1, s2, s3, and z mentioned above are determined by those skilled in the art based on the actual situation.

[0085] It should also be noted that the operation of the mask gripping and positioning mechanism 10 releasing the mask 20 is as follows: first, the robotic arm drives the mask gripping and positioning mechanism 10 to move downward relative to the mask 20 until the first pad 216 of the X-direction positioning component separates from the lower surface of the mask 20; then, the positioning parts of each positioning component 200 are controlled to move to the corresponding first position, so that the mask gripping and positioning mechanism 10 switches to the released state; finally, the robotic arm drives the mask gripping and positioning mechanism 10 to move upward.

[0086] Furthermore, this utility model embodiment also provides an exposure device, which includes a robotic arm and a mask gripping and positioning mechanism 10 as described above. The robotic arm is connected to the fork body 100, specifically, the robotic arm is connected to the fork body 100 through the aforementioned docking part.

[0087] Furthermore, such as Figure 14 and Figure 15 The exposure apparatus further includes a mask stage 30 and an objective lens system 40. The mask stage 30 and the objective lens system 40 are arranged at intervals along the Z direction. Generally, the mask stage 30 is located above the objective lens system 40.

[0088] Optionally, the mask stage 30 includes a mask stage body 31 and a support portion 32. A through hole 33 extending through the Z direction is formed on the mask stage body 31, and the through hole 33 is coaxial with the objective lens system 40. The through hole 33 has a rectangular cross-section and four sequentially connected hole walls, wherein two of the hole walls are arranged opposite each other in the X direction and the other two are arranged opposite each other in the Y direction. A support portion 32 is respectively provided on the two opposite hole walls in the Y direction of the through hole 33, and the support portion 32 is located at one end of the through hole 33 near the objective lens system 40 and extends along the X direction.

[0089] During the application of the exposure equipment, the robotic arm cooperates with the mask gripping and positioning mechanism 10 to allow the mask 20 to move between the mask storage module and the mask stage 30.

[0090] The steps of the mask gripping and positioning mechanism 10 gripping the mask 20 on the mask storage module or the mask stage 30 are as described above. The operation of the mask gripping and positioning mechanism 10 releasing the mask 20 on the mask stage 30 can be referred to the previous text. It should be noted that before the mask gripping and positioning mechanism 10 is moved downward by the robotic arm until the first pad 216 of the X-direction positioning component is separated from the lower surface of the mask 20, the robotic arm is used to move the mask gripping and positioning mechanism 10 and the mask 20 downward together until the mask 20 is supported on the support part 32.

[0091] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A mask gripping and positioning mechanism, characterized in that, include: The fork body has a pre-designed surface; as well as, The positioning component includes a positioning part and a driving part; The positioning part is movably disposed on the preset surface, and the driving part is connected to the positioning part and configured to drive the positioning part to move. The number of positioning components is four, including two X-axis positioning components and two Y-axis positioning components; the two X-axis positioning components are arranged along the X direction, and the movement direction of the positioning part of the X-axis positioning component is the X direction; the two Y-axis positioning components are arranged along the Y direction, and the movement direction of the positioning part of the Y-axis positioning component is the Y direction. The Y direction is perpendicular to the X direction, and the line connecting the two X-direction positioning components intersects the line connecting the two Y-direction positioning components.

2. The mask gripping and positioning mechanism according to claim 1, characterized in that, One of the two Y-axis positioning components is a first Y-axis positioning component, and the other is a second Y-axis positioning component; Each of the positioning units has a first position and a second position spaced apart in its moving direction, the second position being closer than the first position to the intersection of the line connecting the two X-direction positioning components and the line connecting the two Y-direction positioning components; The positioning component further includes a first detection element, a second detection element, and a trigger; the first detection element is disposed on the fork body and arranged corresponding to the first position; the second detection element is disposed on the fork body and arranged corresponding to the second position; the trigger is connected to the positioning part and moves synchronously with the positioning part; the trigger triggers the first detection element when the positioning part moves to the first position, and the trigger also triggers the second detection element when the positioning part moves to the second position; In the first Y-axis positioning component, the positioning part further has a third position, which is located between the first position and the second position. When the positioning part moves to the third position, the trigger triggers the first detection element and the second detection element.

3. The mask gripping and positioning mechanism according to claim 2, characterized in that, The positioning component further includes a first limiting body, a second limiting body, and a third limiting body; the first limiting body and the second limiting body are disposed on the preset surface and arranged along the moving direction of the positioning part; the second limiting body is closer to the intersection of the line connecting the two X-direction positioning components and the line connecting the two Y-direction positioning components than the first limiting body. The third limiting body is connected to the positioning part and moves synchronously with the positioning part; The positioning component is configured such that the positioning part reaches the first position when the third limiting body abuts against the first limiting body, and the positioning part reaches the second position when the third limiting body abuts against the second limiting body.

4. The mask gripping and positioning mechanism according to claim 1, characterized in that, In the X-direction positioning assembly, the positioning part includes a base, a positioning arm, and a support part; the base is movably connected to the fork body; the positioning arm is connected to the base and extends in the Z direction away from the base; the support part is disposed at the end of the positioning arm away from the base and extends in the X direction. The supporting portions of the two X-direction positioning components extend in the X direction in a direction that approaches each other; the Z direction is perpendicular to the X direction and the Y direction.

5. The mask gripping and positioning mechanism according to claim 4, characterized in that, In the X-direction positioning assembly, there are three positioning arms, and the three positioning arms are spaced apart along the Y-direction; each positioning arm is connected to a support portion.

6. The mask gripping and positioning mechanism according to claim 5, characterized in that, The positioning part of the X-axis positioning component further includes a first pad; In one of the X-axis positioning components, the first pad is provided on the surface of the support portion at both ends facing the base; in another X-axis positioning component, the first pad is provided on the surface of the support portion in the middle facing the base.

7. The mask gripping and positioning mechanism according to claim 1, characterized in that, In the Y-direction positioning assembly, the positioning part includes a base and a positioning arm. The base is movably connected to the fork body, and the positioning arm is connected to the base and extends in the Z-direction in a direction away from the base. The Z-direction is perpendicular to the X-direction and the Y-direction.

8. The mask gripping and positioning mechanism according to claim 7, characterized in that, In the Y-direction positioning assembly, the positioning part further includes a second pad, which is disposed at the end of the positioning arm away from the base, and the second pads of the two Y-direction positioning assemblies are disposed opposite to each other in the Y direction.

9. The mask gripping and positioning mechanism according to claim 7 or 8, characterized in that, One of the two Y-axis positioning components is a first Y-axis positioning component, and the other is a second Y-axis positioning component; In the first Y-axis positioning component, there is one positioning arm; in the second Y-axis positioning component, there are two positioning arms, and the two positioning arms are spaced apart in the X-axis direction. The triangle formed by the line connecting the positioning arm of the first Y-axis positioning component and the positioning arm of the second Y-axis positioning component is an acute triangle.

10. The mask gripping and positioning mechanism according to claim 1, characterized in that, The fork body is also provided with a docking part.

11. An exposure apparatus, characterized in that, It includes a robotic arm and a mask gripping and positioning mechanism as described in any one of claims 1-10, wherein the robotic arm is connected to the mask fork body.

12. The exposure apparatus according to claim 11, characterized in that, The exposure apparatus further includes a mask stage and an objective lens system, wherein the mask stage and the objective lens system are arranged at intervals along the Z direction; The mask stage includes a mask stage body and a support portion; the mask stage body has a through hole extending through the Z direction and coaxial with the objective lens system, the through hole has a rectangular cross-section and has four hole walls connected in sequence, wherein two of the hole walls are arranged opposite to each other in the X direction and the other two hole walls are arranged opposite to each other in the Y direction; a support portion is respectively provided on the two hole walls opposite to each other in the Y direction of the through hole, the support portion is located at one end of the through hole near the objective lens system and extends along the X direction.

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