Processing device and processing method

Abstract

To provide a technology for firmly adsorbing and holding a target object which is a metal-formed body of a curved shape so that the object does not fall and an inner surface thereof is not damaged.SOLUTION: A holding member to be connected to an external suction pump and adsorbing and holding a curved surface of a metallic object is provided with a holder part 501 forming a decompression space 511 in which an adsorption side opening 511a and an exhaust opening 504a having the opening area smaller than that of the adsorption side opening 511a are formed, and an outer peripheral angle ring 509 and an inner peripheral angle ring 510 which are arranged so as to enclose the adsorption side opening 511a and abut on a curved surface of an object when the object is held. The curved surface of the object is adsorbed-held by sucking an inside atmosphere of the decompression space 511 with a suction pump through the exhaust opening to decrease pressure.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a technique for holding and processing an object having, for example, a curved shape. [Background technology]

[0002] Efforts are being made to collide accelerated electrons and positrons, and to precisely measure the particles generated and discover new particles. In addition, superconducting acceleration is used as a method of accelerating electrons and positrons, in which a strong electromagnetic field is formed in multiple hollow metal cells, and the generated electric field acts on the electrons and positrons to accelerate them.

[0003] The metal cells used for superconducting acceleration generate and store strong electromagnetic waves inside the cells, so the inner surface of the metal cell needs to be a curved mirror surface with as few irregularities as possible. For this reason, a method of processing the metal cells that is resistant to scratches has been sought.

[0004] Metal cells are manufactured by connecting the open ends of two bowl-shaped half cells. An opening is provided at the bottom of the half cells, which serves as the joining point between the metal cells. In the past, various special jigs were used to fix the bowl-shaped half cells in place during the cutting process of the open ends and openings of the half cells. However, there were various problems with this, such as the complexity of attaching the half cells to the jigs, the jigs coming into contact with the inner surface of the metal cells, and the inability to simultaneously process the open ends and openings of the cells.

[0005] A gripping jaw for a lathe chuck device has been invented that can secure a workpiece without using bolts during lathe processing (see Patent Document 1).

[0006] However, the method of Patent Document 1 was not able to fix a curved workpiece. Also, if the workpiece was clamped and fixed with the soft jaws, there was a risk of scratching the workpiece at the contact points of the soft jaws. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] JP 2003-127011 A Summary of the Invention [Problem to be solved by the invention]

[0008] In view of the above-mentioned problems, an object of the present invention is to provide a technique for firmly adsorbing and holding a curved metal object to be processed, without scratching the inner surface or causing the object to fall off. [Means for solving the problem]

[0009] In order to solve the above problems, the present invention is a processing device for cutting a metal object, comprising a suction pump for sucking in gas, a holding member connected to the suction pump for adsorbing and holding the object close to a curved surface of the object, and a cutting device for cutting the object held by the holding member, wherein the holding member comprises an exhaust opening or a reduced pressure space having the exhaust opening and an adsorption side opening, and a sealing member arranged to surround all of the exhaust openings or the reduced pressure space and abutting the curved surface of the object when holding the object. Effect of the Invention

[0010] According to the present invention, the object to be processed, which is a curved metal body, can be firmly attracted and held without damaging the inner surface and preventing it from falling off. [Brief description of the drawings]

[0011] [Figure 1] 1 is a schematic view of a curved metal body processing apparatus in Example 1. FIG. [Diagram 2] 1 is a perspective view of a metal curved body which is an object of the metal curved body processing apparatus in Example 1. FIG. [Diagram 3] FIG. 2 is a block diagram of the curved metal body processing device in the first embodiment. [Figure 4]FIG. 3 is a cross-sectional view showing a holding member holding a metal curved formation body in the first embodiment. [Diagram 5] FIG. 3 is a partial enlarged view of a holder portion of a holding member in the first embodiment. [Figure 6] 4 is a plan view of the holder portion in the first embodiment as viewed from the (+Z) side toward the (-Z) side. FIG. [Figure 7] FIG. 2 is a plan view of the chuck base portion in the first embodiment as viewed from the (+Z) side toward the (-Z) side. [Figure 8] 3 is a flow chart showing a processing method for the curved metal body in Example 1. [Figure 9] FIG. 2 is an internal view of a superconducting accelerator that actually uses the metal curved forming body in Example 1. [Figure 10] FIG. 11 is a cross-sectional view showing a holding member in a state in which the holding member holds a metal curved formation body in the second embodiment. [Figure 11] FIG. 11 is a partially enlarged view of a holder portion of a holding member in Example 2. [Figure 12] FIG. 11 is a cross-sectional view showing a holding member holding a metal curved formation body in the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, unless otherwise specified in the following description, descriptions regarding directions and orientations correspond to the drawings for the convenience of the description, and do not limit, for example, the implementation, product, or scope of rights. EXAMPLES

[0013] Fig. 1 is a schematic diagram of a curved metal body processing device 1. Note that the X-axis, Y-axis, and Z-axis shown in Fig. 1 are mutually perpendicular axes. In this embodiment, the X-axis and Y-axis are described as axes parallel to a horizontal plane, and the Z-axis is described as a vertical axis. The same applies to the following figures.

[0014] Although the details will be described later, the metal bend forming body processing device 1 is configured as a device that processes a metal bend forming body 4, which is an object to be processed, by placing it inside. The metal bend forming body 4, which is an object to be processed, is a member used to form a hollow superconducting acceleration cavity in a superconducting acceleration system that gives kinetic energy to charged particles. This metal bend forming body 4 is called a half cell having a large diameter part on one side and a small diameter part on the other side, and by connecting multiple pieces in a form in which the large diameter parts and the small diameter parts are connected to each other with alternating orientations, the shape has an inner diameter that changes gradually and regularly in size toward the traveling direction of the charged particles (the connection direction of the half cells). If the inner surface of this half cell is scratched, problems such as spark generation during use will occur, so it is required to have high processing accuracy of the connection part to a degree that does not scratch the inner surface and can maintain a vacuum inside the continuous half cells.

[0015] Fig. 2 is a perspective view of a metal bent body 4 which is an object of the metal bent body processing device 1. However, Fig. 2 illustrates the metal bent body 4 after processing.

[0016] The metal curved body 4 is a cylindrical metal member, and has a shape (approximately a bowl shape) in which the outer diameter and inner diameter change in the cylindrical axial direction. In the example shown here, the metal curved body 4 is made of a metal whose raw material is niobium, but the target object of the metal curved body processing device 1 is not limited to this.

[0017] The metal curved formation body 4 has a circular opening 401 and an opening 403. The opening 401 opens to the (+Z) side, and the opening 403 opens to the (-Z) side. Furthermore, the opening 401 has an opening edge 402 protruding to the (+Z) side. That is, the metal curved formation body 4 has the opening 403 which is a large opening opening that opens to the (-Z) side, and the opening 401 which is a small opening opening with a smaller diameter than the opening 403 that opens to the (+Z) side. The inner surface of the metal curved formation body 4 is a curved surface 404 like the inner surface of a bowl. However, the shape of the target object is not limited to the shape shown here.

[0018] Returning to FIG. 1, the metal bent body processing device 1 has a processing unit 2 for placing and processing a metal bent body 4 to be processed, and an operation unit 3 for receiving operation commands from the outside.

[0019] FIG. 3 is a block diagram of the curved metal body processing apparatus 1. As shown in FIG.

[0020] The operation unit 3 has a cutting operation unit 301 for operating the cutting drive unit 9, a rotation drive operation unit 302 for operating the rotation drive unit, and a suction pump operation unit 303 for operating the suction pump unit 7.

[0021] The processing unit 2 has a holding member 5 that holds the metal bent body 4, a rotation drive unit 6 that rotates the metal bent body 4 during processing, a suction pump unit 7 that sucks in gas (atmosphere), a cutting unit 8 that cuts the metal bent body 4, and a cutting drive unit 9 that drives the cutting unit 8.

[0022] Fig. 4 is a cross-sectional view showing the holding member 5 in a state in which the holding member 5 holds the metal curved formation body 4. Note that in Fig. 4, the pump intake passage 701 is not shown in cross section.

[0023] The holding member 5 has a holder portion 501 that holds the metal curved forming body 4 from the inside, an exhaust connection portion 502 that forms an exhaust outlet for creating a reduced pressure state inside the holder portion 501, and a chuck base portion 503 that is a base for fixing the holder portion 501 and the exhaust connection portion 502.

[0024] Fig. 5 is a partially enlarged view of the holder portion 501 of the holding member 5. Fig. 6 is a plan view of the holder portion 501 viewed from the (+Z) side toward the (-Z) side. Note that the metal curved formation body 4 is omitted from Figs. 5 and 6.

[0025] 6, the holder part 501 is composed of a holder outer peripheral part 505 arranged on the outer peripheral part of the holder part 501, and a holder inner peripheral part 506 arranged on the inner peripheral part of the holder part 501. The details will be described later, but the holder part 501 is a member that corresponds to the space forming member in the present invention.

[0026] As shown in FIG. 5, holder outer periphery 505 is composed of first holder outer periphery 507 and second holder outer periphery 508.

[0027] The first holder outer periphery 507 is a portion of the holder outer periphery 505 that is disposed on the (+Z) side. A part of the surface of the portion of the first holder outer periphery 507 that protrudes to the outer periphery forms proximity surfaces 507a, 507b. As shown in FIG. 4, the proximity surfaces 507a, 507b are in proximity to but do not contact the inner curved surface 404 of the metal curving body 4. It is preferable that the holder outer periphery 505 is made of a material that is softer than the metal curving body 4 so as not to damage the metal curving body 4 in the event that the proximity surfaces 507a, 507b come into contact with the curved surface 404 of the metal curving body 4.

[0028] Between the adjacent surfaces 507a and 507b, a groove is formed continuously around the circumference with the same width and depth. The depth and width of this groove are formed to be the same as the width of the outer peripheral square ring 509. The outer peripheral square ring 509 is fitted into this groove without any gaps.

[0029] 5, a recess is provided near the outer circumferential end of first holder outer circumferential portion 507 (between adjacent surface 507a and adjacent surface 507b). An outer circumferential corner ring 509 is attached to the recess.

[0030] Furthermore, the (+Z) side surface of first holder outer circumferential portion 507 forms surface 507c disposed in a direction parallel to the XY plane. Surface 507c constitutes a part of a partition wall for forming reduced pressure space 511, which will be described in detail later.

[0031] Second holder outer periphery 508 is a portion that protrudes toward the (-Z) side of holder outer periphery 505. Second holder outer periphery 508 protrudes further toward the (-Z) side than holder inner periphery 506, and the protruding end on the (-Z) side abuts against exhaust connection part 502.

[0032] An O-ring 518 is attached to the portion where second holder outer periphery 508 abuts against exhaust connection part 502. O-ring 518 prevents atmosphere from leaking from a gap between second holder outer periphery 508 and exhaust connection part 502.

[0033] The holder inner peripheral portion 506 has a shape that protrudes toward the (+Z) side from the holder outer peripheral portion 505. Part of the surface of the holder inner peripheral portion 506 forms proximity surfaces 506a, 506b, as shown in Fig. 5. The proximity surfaces 506a, 506b are in proximity to, but do not contact, the curved surface 404 of the metal curving body 4, as shown in Fig. 4. Note that the holder inner peripheral portion 506 is preferably made of a material that is softer than the metal curving body 4 so as not to damage the metal curving body 4 in the event that the proximity surfaces 506a, 506b come into contact with the curved surface 404 of the metal curving body 4.

[0034] Between the adjacent surfaces 506a and 506b, a groove is formed continuously around the outer periphery with the same width and depth. The depth and width of this groove are formed to be the same as the width of the inner peripheral corner ring 510. The inner peripheral corner ring 510 is fitted into this groove without any gaps.

[0035] 5, a recess is provided near the outer circumferential end of the holder inner circumferential portion 506 (between the adjacent surface 506a and the adjacent surface 506b). An inner circumferential corner ring 510 is attached to the recess.

[0036] Furthermore, part of the surface of the portion of holder inner peripheral portion 506 that is disposed on the (+Z) side relative to surface 507c of first holder outer peripheral portion 507 (portion protruding to the (+Z) side) forms curved surface 506c that is oriented parallel to the Z axis, as shown in Fig. 5. Although details will be described later, curved surface 506c constitutes part of a partition wall for forming reduced pressure space 511.

[0037] Strictly speaking, a gap is formed between the adjacent surface 506a and the curved surface 404 of the metal curved formation body 4. Therefore, the gap and a part of the recess where the inner circumference corner ring 510 is attached constitute a part of the reduced pressure space 511. Similarly, strictly speaking, a gap is formed between the adjacent surface 507b and the curved surface 404 of the metal curved formation body 4. Therefore, the gap and a part of the recess where the outer circumference corner ring 509 is attached constitute a part of the reduced pressure space 511. However, in the following description, for convenience of explanation, it is described that the reduced pressure space 511 is formed by the surface 507c of the first holder outer circumference part 507 and the curved surface 506c of the holder inner circumference part 506 in the holder part 501.

[0038] 5 is opened to the (-Z) side by exhaust opening 504a. Exhaust opening 504a is also an opening of exhaust flow path 504. In other words, decompression space 511 and exhaust flow path 504 are connected in communication with each other via exhaust opening 504a.

[0039] The reduced pressure space 511 is opened to the (+Z) side by an adsorption side opening 511a indicated by a broken line in Fig. 5. The adsorption side opening 511a is an opening formed mainly on the (+Z) side of the surface 507c. That is, the adsorption side opening 511a is ring-shaped like the surface 507c shown in Fig. 6. Furthermore, the adsorption side opening 511a is inclined with respect to the XY plane as shown in Fig. 5. Therefore, the shape of the adsorption side opening 511a is similar to the inclined surface of a truncated cone.

[0040] 5, exhaust flow path 504 is formed near the boundary between holder outer periphery 505 and holder inner periphery 506. Exhaust flow path 504 is formed to extend in a direction parallel to the Z axis, and is open to the (+Z) side and the (-Z) side.

[0041] The opening on the (+Z) side of the exhaust flow path 504 is an exhaust opening 504a. As shown in Fig. 6, the holder part 501 in this embodiment is provided with eight exhaust openings 504a on the surface 507c of the first holder outer circumferential part 507. However, the number of exhaust openings 504a is not limited to eight.

[0042] The eight exhaust openings 504a are arranged in a ring shape so as to be concentric on the ring-shaped surface 507c. Furthermore, each exhaust opening 504a is arranged so that the distance between each adjacent exhaust opening 504a is the same.

[0043] The (-Z) side of each exhaust flow path 504 is connected in communication with the exhaust space 514. That is, the exhaust flow path 504 has a function of guiding the atmosphere in the reduced pressure space 511 to the exhaust space 514 described later through the exhaust opening 504a.

[0044] As is clear from Fig. 6, the opening area of ​​the exhaust openings 504a (total of eight) is smaller than the opening area of ​​the surface 507c. And, as is clear from Fig. 5, the opening area of ​​the surface 507c is smaller than the opening area of ​​the suction side opening 511a. Therefore, in the holding member 5, the opening area of ​​the exhaust openings 504a (total of eight) is smaller than the opening area of ​​the suction side opening 511a.

[0045] The outer peripheral angular ring 509, the inner peripheral angular ring 510, and the O-ring 518 are all doughnut-shaped members made of flexible (elastic) materials (e.g., resin such as rubber). The outer peripheral angular ring 509, the inner peripheral angular ring 510, and the O-ring 518 have the function of restricting (sealing) the passage of gas at the contact points by contacting with a specific member (and applying a biasing force).

[0046] As already described, the outer peripheral corner ring 509 is disposed at the outer peripheral end of the first holder outer peripheral portion 507. Therefore, the outer peripheral corner ring 509 is disposed near the outer periphery of the surface 507c as shown in FIG. 6. Moreover, the inner peripheral corner ring 510 is disposed near the inner periphery of the adjacent surface 506a of the holder inner peripheral portion 506. Therefore, the inner peripheral corner ring 510 is disposed near the (+Z) side end of the curved surface 506c as shown in FIG. 6. That is, the outer peripheral corner ring 509 and the inner peripheral corner ring 510 are disposed so as to surround the suction side opening 511a.

[0047] As shown in Fig. 4, the outer peripheral corner ring 509 and the inner peripheral corner ring 510 come into contact with the curved surface 404 of the metal curvature formation body 4 when the holding member 5 holds the metal curvature formation body 4. Although details will be described later, the holding member 5 uses an adsorption force (the suction force of the suction pump unit 7 and gravity) as a biasing force for biasing the curved surface 404 of the metal curvature formation body 4 to the outer peripheral corner ring 509 and the inner peripheral corner ring 510. Therefore, the outer peripheral corner ring 509 and the inner peripheral corner ring 510 come into close contact with the curved surface 404 of the metal curvature formation body 4 at the places where they come into contact with the curved surface 404 of the metal curvature formation body 4.

[0048] In this manner, the curved surface 404 of the metal curved formation body 4 comes into close contact with the outer peripheral corner ring 509 and the inner peripheral corner ring 510 arranged to surround the suction side opening 511a, thereby sealing the suction side opening 511a in the holder part 501. Therefore, the outer peripheral corner ring 509 is an outer peripheral seal member that surrounds the outer edge of the ring-shaped suction side opening 511a, and the inner peripheral corner ring 510 is an inner peripheral seal member that surrounds the inner edge of the ring-shaped suction side opening 511a.

[0049] The hardness of the outer corner ring 509 and the inner corner ring 510 is such that they can flexibly deform so as to abut against the curved surface 404 of the metal curved formation body 4 without any gaps, and yet have a strength (elasticity) such that the curved surface 404 does not come into contact with the adjacent surfaces 506a, 506b of the holder inner circumference 506 and the adjacent surfaces 507a, 507b of the first holder outer circumference 507 even when the metal curved formation body 4 is sucked in.

[0050] 4 comes into contact with second holder outer periphery 508 and exhaust connection part 502, and, as will be described in detail later, utilizes the fastening force (and gravity) of holder fixing screw 513 as a biasing force. In this way, O-ring 518 prevents atmosphere from leaking from the gap between second holder outer periphery 508 and exhaust connection part 502, as already described.

[0051] 4, exhaust connection part 502 has a central part protruding to the (-Z) side and is a generally round table-shaped member. A main exhaust passage 512 that penetrates exhaust connection part 502 in the Z-axis direction is formed inside the central part of exhaust connection part 502. The outer periphery of the (+Z) side surface of exhaust connection part 502 abuts against the (-Z) side end part of second holder outer periphery part 508 and is fixed by holder fixing screw 513.

[0052] Holder fixing screw 513 is screwed in from the (-Z) direction toward the (+Z) direction, and has the function of fastening exhaust connection part 502 and second holder outer circumferential part 508 together, as well as applying a biasing force to O-ring 518. Therefore, as already described, O-ring 518 functions as a sealing member.

[0053] Further, the protruding portion of the exhaust connection portion 502 protruding toward the (-Z) side is inserted into the central recess of the chuck base portion 503. At this time, since the second holder outer periphery portion 508 protrudes downward from the holder inner periphery portion 506, a cylindrical exhaust space 514 is formed between the (+Z) side surface of the exhaust connection portion 502 and the (-Z) side surface of the holder inner periphery portion 506. As already described, the (-Z) side of each exhaust flow path 504 is connected in communication with the exhaust space 514. That is, the exhaust space 514 is connected in communication with the reduced pressure space 511 via the exhaust flow path 504.

[0054] 7 is a plan view of chuck base 503 viewed from the (+Z) side toward the (-Z) side. Chuck base 503 has a recessed shape in the center for inserting the protruding portion of exhaust connection part 502, and has soft jaws 515 on the surface on the (+Z) side. Three soft jaws 515 are arranged at equal intervals.

[0055] The soft jaws 515 can slide toward the outer and inner circumferential directions of the chuck base part 503, and can also be fixed by the soft jaw fixing parts 516. When the three soft jaws 515 are moved toward the inner circumferential direction of the chuck base part 503 and the inner circumferential ends of the soft jaws 515 are brought into contact with the side surface of the exhaust connection part 502 and the side surface of the second holder outer circumferential part 508, the three soft jaws 515 can sandwich the exhaust connection part 502 and the second holder outer circumferential part 508. Therefore, by tightening the fixing screws of the three soft jaw fixing parts 516 in such a position, the exhaust connection part 502 and the holder part 501 are fixed to the chuck base part 503 by the three soft jaws 515.

[0056] As already explained, the rotation drive unit 6 shown in Fig. 3 has the function of rotating the metal bent forming body 4 during processing. More specifically, the rotation drive unit 6 rotates the holding member 5 holding the metal bent forming body 4.

[0057] 4, the suction pump unit 7 has a pump intake passage 701. The suction pump unit 7 has a function of sucking the atmosphere (gas) from the pump intake passage 701 and discharging it to the outside. The type of the suction pump unit 7 is not limited as long as it can suck the atmosphere from the connection destination of the pump intake passage 701, and a known pump can be used.

[0058] The pump intake passage 701 passes through the chuck base 503. The (+Z) end of the pump intake passage 701 is inserted into the (-Z) side of the main exhaust passage 512 of the exhaust connection portion 502. This allows the reduced pressure space 511, the eight exhaust passages 504, the exhaust space 514, and the main exhaust passage 512 in the holding member 5 to be connected in communication with the pump intake passage 701. That is, by inserting the pump intake passage 701 into the exhaust connection portion 502, the holding member 5 is connected to the suction pump portion 7.

[0059] In addition, the pump intake passage 701 has a suction pump O-ring 702, which is a sealing member, at the contact portion with the main exhaust passage 512. Thus, the suction pump O-ring 702 can prevent the atmosphere from leaking from the gap between the pump intake passage 701 and the exhaust connection part 502.

[0060] Therefore, when the atmosphere (gas) is sucked in through the pump intake passage 701 and exhausted to the outside, the main exhaust passage 512, the exhaust space 514, the eight exhaust passages 504, and the reduced pressure space 511 are reduced in pressure compared to the outside. When the inside of the reduced pressure space 511 is reduced in pressure, a suction force is generated on the metal curved formation body 4 abutting against the outer peripheral corner ring 509 and the inner peripheral corner ring 510 due to the pressure difference with the outside. As a result, the metal curved formation body 4 is sucked and held by the holder portion 501 (holding member 5).

[0061] More specifically, the suction force generated by the suction pump section 7 sucking the atmosphere inside the reduced pressure space 511 acts on the portion of the curved surface 404 of the curved metal body 4 that faces the suction side opening 511a.

[0062] Conventionally, the structure was such that the target object was sucked by the opening of the suction passage from the pump. In other words, the opening for exhaust and the opening on the side that sucks the target object were almost the same size. In this structure, the suction force from the pump was concentrated on a relatively narrow part of the target object, so increasing the suction force could cause damage such as deformation of the target object. Therefore, conventionally, there was a limit to how much the suction force could be increased, and there was a risk of the target object falling off during processing. For this reason, conventionally, it was necessary to use a member (external surface holding member) to hold the target object by sandwiching the inner and outer surfaces of the target object.

[0063] In contrast, in the holding member 5, the opening area of ​​the exhaust openings 504a (total of eight) is designed to be smaller than the opening area of ​​the suction side openings 511a. This allows the suction force of the suction pump section 7 to be dispersed. Even if the suction force is dispersed in this manner, the combined suction force (the total suction force acting on the metal curving body 4) does not decrease significantly. Therefore, the suction force of the suction pump section 7 can be increased to a level at which the metal curving body 4 does not fall off.

[0064] 3 includes two opposing cutting tools (not shown). The positions of the two cutting tools of the cutting unit 8 can be changed by the cutting drive unit 9 that receives an instruction from the cutting operation unit 301. In other words, the cutting tools are configured to be movable.

[0065] The cutting drive unit 9 has a function of moving the two cutting tools of the cutting unit 8 according to instructions from the cutting operation unit 301. The cutting drive unit 9 moves the cutting tools to a position where they come into contact with the metal curving body 4 before processing, and moves the cutting tools to a position (retracted position) away from the metal curving body 4 after processing.

[0066] The above is a description of the configuration and functions of the metal curved body processing device 1. Next, a processing method for processing the metal curved body 4 will be described.

[0067] FIG. 8 is a flow chart showing a method for processing the metal curved body 4.

[0068] 8 is started, the holding member 5 is prepared (step S1). In step S1, the operator fixes the holder part 501 and the exhaust connection part 502 connected to the pump intake passage 701 by screwing them with the holder fixing screw 513. Then, the operator inserts the protruding part of the exhaust connection part 502, which is fixed to the holder part 501 and the exhaust connection part 502, into the central recess of the chuck base part 503 in the processing part 2 of the curved metal body processing device 1. After that, the three soft jaws 515 are slid toward the inner circumference of the chuck base part 503, and the soft jaws 515 clamp the sides of the holder part 501 and the exhaust connection part 502 to fix the holder part 501 and the exhaust connection part 502 to the chuck base part 503.

[0069] After completing step S1, the worker places the metal curving body 4 by abutting the inner surface of the metal curving body 4 against the holder part 501 (step S2). At this time, in order to determine the exact installation position of the metal curving body 4, a positioning auxiliary jig such as the metal curving body fixing jig 517 can be used.

[0070] After completing step S2 and confirming the installation position of the metal curving formation body 4, the worker operates the suction pump operation unit 303 to start the suction pump unit 7. When the suction pump unit 7 starts suction, the inside of the reduced pressure space 511 of the holder unit 501 is reduced in pressure (step S3), and the metal curving formation body 4 is pressed against the holder unit 501 by the pressure difference with the outside air pressure, and suction holding begins (step S4). When the metal curving formation body fixing jig 517 is used, the worker confirms that the metal curving formation body 4 is securely fixed to the holder unit 501 before removing the metal curving formation body fixing jig 517.

[0071] Once holding of the metal bent forming body 4 has begun, the worker closes the door of the processing section 2. After that, the worker operates the rotation drive operating section 302 to rotate the holding member 5 and the metal bent forming body 4 held by the holding member 5 at a predetermined speed (step S5). At this time, if the rotation speed is too slow, the processed surface will become rough, and if it is too fast, there is a risk that the metal bent forming body 4 will move due to centrifugal force, so it is more preferable to set the rotation speed at a speed suitable for processing and at a level at which the metal bent forming body 4 will not shift due to centrifugal force.

[0072] After confirming that the rotation has stabilized, the operator operates the cutting operation unit 301. This causes the cutting drive unit 9 to bring the cutting tool of the cutting unit 8 into contact with the front and inner surfaces of the opening 403 and the opening edge 402 of the rotating metal curved formation body 4 (step S6). This causes the opening 403 and the opening edge 402 to be processed (step S7). Note that either the opening 403 or the opening edge 402 may be processed first.

[0073] When the cutting process on the metal curving body 4 is completed, the worker operates the cutting operation unit 301 to retract the cutting unit 8 from the metal curving body 4 (step S8). Furthermore, the worker operates the rotation drive operation unit 302 to stop the rotational motion of the holding member 5 and the metal curving body 4 (step S9), and opens the door of the processing unit 2. After that, the worker operates the suction pump operation unit 303 to stop the suction pump unit 7 (step S10), and removes the metal curving body 4 (step S11).

[0074] This allows a processed metal bent body 4 to be obtained by the metal bent body processing device 1. If a required number of metal bent bodies 4, which are different processing targets, are to be processed in the same manner, the process can be repeated by returning to step S2.

[0075] FIG. 9 is an internal view of a superconducting accelerator 10 in which the metal bend former 4 is actually used.

[0076] The superconducting accelerator 10 has a box-shaped container filled with a cooling solution and an electron acceleration unit. The electron acceleration unit is a hollow member in which metal cells, each of which is formed by connecting the openings 403 of two curved metal bodies 4 with a metal ring, are connected in the longitudinal direction by multiple openings 401 of different metal cells within the box-shaped container.

[0077] In the superconducting accelerator 10, a box-shaped container is filled with liquid helium or the like, and the inside of the electron acceleration section is placed in a superconducting state at extremely low temperatures. This fills the inside of the electron acceleration section with a magnetic field, generating a high electric field. Electrons passing through the electron acceleration section are accelerated by the voltage generated by the generated electric field. However, if the inner surface of the metal cell is damaged, sparks will occur when an electric field is generated, resulting in problems such as energy loss and destruction of the metal cell. For this reason, it is desirable that the inner surface of the metal cell is free of scratches or other damage.

[0078] In addition, the metal cell of the electron accelerator is made by connecting a plurality of metal curvature formation bodies 4. Therefore, the shape of the opening 403 and the opening edge 402 of the metal curvature formation body 4, which is the connecting part, must be a concentric shape without distortion in order to be reliably fixed when connected. However, if the metal curvature formation body 4 is removed for repositioning for each cutting part and then reattached, an error in positioning during the work occurs, and there is a risk that the shape of the opening 403 and the opening edge 402 for each metal curvature formation body 4 will be slightly different, and the metal curvature formation body 4 will not be connected properly when connected. Therefore, it is desirable to perform the cutting process of the surface and inner surface of the opening 403 and the opening edge 402 continuously without removing the metal curvature formation body 4 in the middle.

[0079] The metal curvature forming body processing method of the present invention holds the metal curvature forming body 4 by adsorption to the holder part 501 that abuts by air pressure difference, and can process the metal curvature forming body 4 without causing scratches on the inner surface, compared to conventional fixing methods such as physically clamping it with soft jaws or tightening it with bolts. In addition, by simultaneously cutting the front and inner surfaces, high-precision processing can be performed without causing distortion in the opening 403 and the opening edge 402. Furthermore, by simultaneously cutting the opening 403 and the opening edge 402 of the metal curvature forming body 4, the number of times it is attached and removed is reduced, and processing can be performed quickly and with high precision.

[0080] In other words, although the use of the metal bent body 4 is not particularly limited, the metal bent body processing apparatus 1 is particularly suitable for manufacturing the metal bent body 4 as a part of a superconducting accelerator 10, for example.

[0081] With the above configuration, the metal curved body processing device 1 for cutting the metal curved body 4 includes a suction pump unit 7 for sucking in the atmosphere, a holding member 5 connected to the suction pump unit 7 for suctioning and holding the curved surface 404 of the metal curved body 4, and a cutting unit 8 for cutting the metal curved body 4 held by the holding member 5. The holding member 5 includes a holder unit 501 for forming a reduced pressure space 511 in which an adsorption side opening 511a and an exhaust opening 504a having an opening area smaller than the opening area of ​​the adsorption side opening 511a are formed, and an outer peripheral corner ring 509 and an inner peripheral corner ring 510 are arranged to surround the adsorption side opening 511a and come into contact with the curved surface 404 of the metal curved body 4 when holding the metal curved body 4, and the pressure inside the reduced pressure space 511 is reduced by being sucked in by the suction pump unit 7 through the exhaust opening 504a. This allows the suction force to be dispersed without being concentrated in a narrow area of ​​the metal bent forming body 4, thereby suppressing damage to the curved surface 404 of the metal bent forming body 4.

[0082] In addition, the suction side opening 511a is formed in a ring shape, and is provided with an outer peripheral corner ring 509 surrounding the outer edge of the ring-shaped suction side opening 511a, and an inner peripheral corner ring 510 surrounding the inner edge of the ring-shaped suction side opening 511a.By doing so, the metal curved formation body 4 is adsorbed by the ring-shaped suction side opening 511a, and the suction force can be made uniform.

[0083] Furthermore, by forming a plurality of exhaust openings 504a in the reduced pressure space 511, the chucking force can be made more uniform.

[0084] Furthermore, by providing multiple exhaust flow paths 504 in a concentric arrangement and unifying the multiple exhaust flow paths 504 into one main exhaust path 512 via the exhaust space 514, it is possible to create a uniformly reduced pressure state within the reduced pressure space 511 with one suction pump section 7.

[0085] The present invention is not limited to the configurations of the above-described embodiments, and many other embodiments can be obtained.

[0086] For example, in the embodiment, it has been described that the holder part 501 and the exhaust connection part 502 are different parts, and the exhaust flow path 504 and the main exhaust path 512 are communicated through the exhaust space 514 formed between the exhaust connection part 502 and the holder inner peripheral part 506. However, it is also possible to configure the holder part 501 and the exhaust connection part 502 as one part, and to directly communicate the exhaust flow path 504 and the main exhaust path 512. EXAMPLES

[0087] Moreover, as a different embodiment of the present invention, Example 2 will be described with reference to the drawings. FIG. 10 is a cross-sectional view showing the holding member 5 in a state in which the holding member 5 holds the curved metal formation body 4 in the second embodiment, and FIG. 11 is a partially enlarged view of the holder portion 1501 of the holding member 5 in the second embodiment. In Example 2, the same components as those in Example 1 are denoted by the same reference numerals and the description thereof will be omitted. In addition, the configurations other than the holding member 5 in the curved metal body processing device 1, that is, the rotation drive unit 6, suction pump unit 7, cutting unit 8, and cutting drive unit 9 of the processing unit 2 shown in FIG. 3, the cutting operation unit 301, rotation drive operation unit 302, and suction pump operation unit 303 of the operation unit 3, and the chuck base unit 503, soft jaws 515, and soft jaw fixing unit 516 of the holding member 5 are the same as those in Example 1.

[0088] 10, the holder part 1501 is composed of an exhaust connection part 1502, a chuck base part 503, a holder outer periphery part 1505, and a holder inner periphery part 1506. An outer periphery seal ring 520 (first seal member) and an inner periphery seal ring 521 (second seal member) are arranged in the holder part 1501 as sealing members. The upper surface of the holder part 1501 corresponds to the shape of the outer surface of the curved metal body 4, and is formed so as to be concave downward from the outer periphery to the inner periphery.

[0089] The holder part 1501 is formed integrally with an exhaust connection part 1502, a holder outer periphery 1505, and a holder inner periphery 1506, and a gas flow path 526 is formed therein, which is composed of an exhaust flow path 1504, an exhaust space 1514, and a main exhaust path 1512.

[0090] The exhaust flow path 1504 is a cylindrical space that penetrates the holder part 1501 in the Z-axis direction (rotation axis direction), and is formed between the holder outer periphery 1505 and the holder inner periphery 1506. Furthermore, the exhaust flow path 1504 has an exhaust opening 1504a formed at the upper end. In this embodiment, eight exhaust openings 1504a are formed on the upper surface of the holder part 1501 so as to be arranged at equal intervals on the same circumference centered on the rotation axis, but the number and arrangement of the exhaust openings 1504a (exhaust flow paths 1504) are not limited to this.

[0091] The exhaust space 1514 is a cylindrical (disk-shaped) space having a diameter in the XY-axis plane direction (radial direction of the rotation axis), and is formed between the holder inner circumference 1506 and the exhaust connection part 1502. A part of the outer circumference of the exhaust space 1514 is connected to the lower outer circumference of the exhaust flow path 1504 and communicates with it. That is, the exhaust flow path 1504 and the exhaust space 1514 are formed as a continuous space. Furthermore, the height (length in the Z-axis direction) of the exhaust space 1514 is formed such that at least the upper end is below the middle of the exhaust flow path 1504 and the lower end is above the lower end of the exhaust flow path 1504.

[0092] The main exhaust path 1512 is a cylindrical space extending in the Z-axis direction, and its upper end is connected to and communicates with the central lower end of the exhaust space 1514, and its lower end is connected to and communicates with the pump intake path 1701. That is, the exhaust flow path 1504, the exhaust space 1514, and the main exhaust path 1512 are formed in a continuous space. In this embodiment, the main exhaust path 1512 is cylindrical and formed on the central axis of the holder part 1501 in the Z-axis direction, but the shape and position of the main exhaust path 1512 are not limited to this. However, regardless of the shape and position, it is preferable that the lower end of the main exhaust path 1512 is formed on the central axis of the holder part 1501 in the Z-axis direction.

[0093] As shown in FIG. 11, the holder outer periphery 1505 has a curved shape in which the upper surface extends upward toward the outer periphery. That is, the upper surface of the holder outer periphery 1505 is more concave on the inner side of the radius of the rotation axis than on the outer side of the radius. The upper surface of the holder outer periphery 1505 forms near-contact surfaces 1505a and 1505b. The near-contact surfaces 1505a and 1505b contact or are close to the inner outer surface of the curved surface 404 of the metal curved body 4. That is, the upper surface of the holder outer periphery 1505 and the near-contact surfaces 1505a and 1505b constituting the upper surface become object-facing surfaces that face the metal curved body 4, which is the object to be processed. The holder outer periphery 1505 is preferably formed of a material softer than the metal curved body 4 so that the near-contact surfaces 1505a and 1505b do not damage the curved surface 404 of the metal curved body 4.

[0094] Between the near-contact surfaces 1505a and 1505b, an outer periphery seal ring fixing groove 525 is formed with a uniform thickness and depth continuously around the circumference. The outer periphery seal ring fixing groove 525 is composed of an outer periphery side surface 525b, a bottom surface 525a, an inner periphery side surface 525d, and a corner 525c connecting each side surface and the bottom surface 525a, and the upper surface has an open shape. In addition, the outer periphery side surface 525b and the inner periphery side surface 525d are formed parallel to the Z axis. In this embodiment, the bottom surface 525a is formed parallel to the XY axis plane, and a corner 525c is formed at a right angle between the outer periphery side surface 525b and the inner periphery side surface 525d, but the shape of the bottom surface 525a is not limited to this. For example, a corner may be provided on the bottom surface 525a, and the corner 525c may not be a right angle.

[0095] The outer periphery seal ring 520 is manufactured from a flexible (elastic) material (e.g., resin such as rubber), is fitted into the outer periphery seal ring fixing groove 525, is positioned, and is formed with a uniform thickness all around. That is, the outer periphery seal ring fixing groove 525 serves as a positioning portion for the outer periphery seal ring 520. The outer periphery seal ring 520 is composed of two side surfaces 520d that face each other in parallel, a bottom surface 520a, two corners 520c that connect each side surface and the bottom surface 520a, and an upper surface 520b that has a cross-sectional arc shape that curves upward. The length between the two side surfaces 520d (thickness of the outer periphery seal ring 520 in the XY-axis plane direction) is formed to be the same as the thickness of the outer periphery seal ring fixing groove 525. That is, the two side surfaces 520d abut against the outer periphery side surface 525b and the inner periphery side surface 525d, and the corners 520c abut against the corners 525c. Moreover, at least a part of the upper surface 520b protrudes from the open upper surface of the outer circumferential seal ring fixing groove 525. Moreover, the outer circumferential seal ring 520 has two corners 520c that abut against the inner circumferential seal ring fixing groove 525 in the cross section in the thickness direction, and the surface that faces (abuts against) the metal curved formation body 4, which is the workpiece, is the upper surface 520b that has a cross-sectional arc shape that protrudes toward the outer circumferential side. In this embodiment, the bottom surface 525a abuts against the bottom surface 520a, but they may not abut depending on the shapes of the bottom surfaces 525a and 520a.

[0096] The holder inner peripheral portion 1506 has an inclination such that the upper surface extends upward toward the outer periphery. That is, the upper surface of the holder inner peripheral portion 1506 is more concave on the radially inner side than on the radially outer side of the rotation axis. The upper surface of the holder inner peripheral portion 1506 forms near-contact surfaces 1506d, 1506e. The near-contact surfaces 1506d, 1506e contact or are close to the inner outer surface of the curved surface 404 of the metal curved formation body 4. That is, the upper surface of the holder inner peripheral portion 1506 and the near-contact surfaces 1506d, 1506e constituting the upper surface become object-facing surfaces that face the metal curved formation body 4, which is the object to be processed. The holder inner peripheral portion 1506 is preferably formed of a material softer than the metal curved formation body 4 so that the near-contact surfaces 1506d, 1506e do not damage the curved surface 404 of the metal curved formation body 4.

[0097] Between the near-contact surfaces 1506d and 1506e, an inner seal ring fixing groove 524 is formed with a uniform thickness and depth continuously around the circumference. The inner seal ring fixing groove 524 is composed of an outer peripheral side surface 524b, a bottom surface 524a, an inner peripheral side surface 524d, and a corner 524c connecting each side surface and the bottom surface 524a, and has an open shape on the upper surface. In addition, the outer peripheral side surface 524b and the inner peripheral side surface 524d are formed parallel to the Z axis. In this embodiment, the bottom surface 524a is formed parallel to the XY axis plane, and a corner 524c is formed at a right angle between the outer peripheral side surface 524b and the inner peripheral side surface 524d, but the shape of the bottom surface 524a is not limited to this. For example, a corner may be provided on the bottom surface 524a, and the corner 524c may not be a right angle.

[0098] The inner seal ring 521 is made of a flexible (elastic) material (e.g., resin such as rubber), is fitted into the inner seal ring fixing groove 524, is positioned, and is formed with a uniform thickness all around. That is, the inner seal ring fixing groove 524 functions as a positioning portion for the inner seal ring 521, and the inner seal ring 521 has a smaller ring inner diameter than the outer seal ring 520. The inner seal ring 521 is composed of two side surfaces 521d that face each other in parallel, a bottom surface 521a, two corners 521c that connect each side surface and the bottom surface 521a, and an upper surface 521b that has a cross-sectional arc shape that curves upward. That is, the length between the two side surfaces 521d (thickness of the outer seal ring 520 in the XY-axis plane direction) is formed to be the same as the thickness of the inner seal ring fixing groove 524. That is, the two side surfaces 521d abut against the outer peripheral side surface 524b and the inner peripheral side surface 524d, and the corner 521c abuts against the corner 524c. At least a part of the upper surface 521b protrudes from the open upper surface of the inner peripheral seal ring fixing groove 524. The inner peripheral seal ring 521 has two corners 521c that abut against the inner peripheral seal ring fixing groove 524 in the cross-sectional shape in the thickness direction, and the surface that faces (abuts against) the metal curved formation body 4, which is the processing object, is the upper surface 521b that has a cross-sectional arc shape that protrudes toward the outer peripheral side. In this embodiment, the bottom surface 524a abuts against the bottom surface 521a, but they may not abut depending on the shapes of the bottom surfaces 524a and 521a.

[0099] In this embodiment, the circumference on which the exhaust opening 1504a is arranged, the outer circumferential seal ring 520, and the inner circumferential seal ring 521 are arranged with the same axis as their center. That is, the circumference on which the exhaust opening 1504a is arranged, the outer circumferential seal ring 520, and the inner circumferential seal ring 521 are arranged parallel to each other and maintain a certain distance therebetween.

[0100] In this embodiment, the processing method of the metal curvature forming body 4 is the same as in the embodiment 1. However, in this embodiment, unlike in the embodiment 1, the opening 401 of the metal curvature forming body 4 opens on the (-Z) side, and the opening 403 opens on the (+Z) side, as shown in FIG. 10. That is, when the holding member 5 holds the metal curvature forming body 4, the upper surface 520b of the outer circumferential seal ring 520 and the upper surface 521b of the inner circumferential seal ring 521 abut against the outer surface of the metal curvature forming body 4. Similarly, the near contact surfaces 1505a, 1505b, 1506d, and 1506e abut or are close to the outer surface of the metal curvature forming body 4. In addition, when the near contact surfaces 1505b and 1506e are close to the outer surface of the metal curvature forming body 4, a reduced pressure space is formed by the near contact surfaces 1505b, 1506e, the outer circumferential seal ring 520, the inner circumferential seal ring 521, and the outer surface of the metal curvature forming body 4. EXAMPLES

[0101] Moreover, as still another embodiment of the present invention, Example 3 will be described with reference to the drawings. FIG. 12 is a cross-sectional view showing the holding member 5 in a state in which the holding member 5 holds the metal curved formation body 4 in the third embodiment. In Example 3, the same components as those in Example 1 or Example 2 are denoted by the same reference numerals and the description thereof will be omitted. In addition, the configurations other than the holding member 5 in the curved metal body processing apparatus 1, that is, the rotation drive unit 6, suction pump unit 7, cutting unit 8, and cutting drive unit 9 of the processing unit 2 shown in FIG. 3, the cutting operation unit 301, rotation drive operation unit 302, and suction pump operation unit 303 of the operation unit 3, the chuck base unit 503, the soft jaws 515, and the soft jaw fixing unit 516 of the holding member 5 are the same as those in Example 1, and the inner peripheral seal ring 521 and the outer peripheral seal ring 520 of the holding member 5 are the same as those in Example 2.

[0102] 12, the holder part 2501 is composed of an exhaust connection part 2502, a chuck base part 503, a holder outer periphery part 2505, a holder inner periphery part 2506, and a metal curved formation body fixing jig 2517. Further, an outer periphery seal ring 520 and an inner periphery seal ring 521 are arranged in the holder part 2501 as sealing members. Further, the holder part 2501 corresponds to the shape of the outer surface of the metal curved formation body 4 as in the second embodiment, and is formed so as to be concave downward from the outer periphery to the inner periphery.

[0103] The holder part 2501 is formed integrally with an exhaust connection part 2502, a holder outer periphery 2505, and a holder inner periphery 2506, and a gas flow path 2526 is formed therein, which is composed of an exhaust flow path 2504, an exhaust space 2514, and a main exhaust path 2512.

[0104] The exhaust flow path 2504 is a cylindrical space extending in the Z-axis direction (rotation axis direction) inside the holder part 2501, and is formed between the holder outer periphery 2505 and the holder inner periphery 2506. Further, the exhaust flow path 2504 has an exhaust opening 2504a formed at the upper end. In this embodiment, eight exhaust openings 2504a are formed on the upper surface of the holder part 2501 so as to be arranged at equal intervals on the same circumference centered on the rotation axis, but the number and arrangement of the exhaust openings 2504a (exhaust flow paths 2504) are not limited to this.

[0105] The exhaust space 2514 is a cylindrical space extending radially from the vicinity of the central axis in the Z-axis direction of the holder part 501 in the XY-axis plane direction (radial direction of the rotation axis), and is formed between the holder inner circumference part 2506, the holder outer circumference part 2505, and the exhaust connection part 2502. In addition, the exhaust space 2514 is connected to the lower end of the exhaust flow path 2504 at a part of its outer circumference and communicates with it. In this embodiment, the exhaust spaces 2514 are provided in the same number as the exhaust flow paths 2504, and the exhaust flow paths 2504 and the exhaust spaces 2514 are formed as a continuous space. In addition, one end of the exhaust space 2514 is provided on the outer circumference of the holder outer circumference part 2505 and is sealed by a sealing plug 522. The other end is connected to the other end of the other exhaust space 2514, and is further connected to the main exhaust path 2512 extending downward at the connection part and the jig fixing hole extending upward. The distance between one end and the other end of each of the exhaust spaces 2514 (the length of each of the exhaust spaces 2514) is set to be the same.

[0106] The main exhaust path 2512 is a cylindrical space extending in the Z-axis direction, with its upper end connected to and communicating with the central end of the exhaust space 2514 and the lower end of the jig fixing hole, and its lower end connected to and communicating with the pump intake path 2701. In other words, the other ends of the multiple exhaust spaces 2514 are connected near the central axis of the holder part 2501 in the Z-axis direction, and the main exhaust path 2512 and the jig fixing hole are long on the central axis in the same direction as the central axis.

[0107] The metal curvature forming body fixing jig 2517 has a bottom surface curved in the same shape as the corresponding inner surface of the metal curvature forming body 4. The metal curvature forming body fixing jig 2517 is fixed to the holder part 2501 by the jig fixing member 523. At this time, the curved part of the bottom surface of the metal curvature forming body fixing jig 2517 fixes the vicinity of the opening 401 of the metal curvature forming body 4 so as to sandwich it with the holder inner circumference part 2506, thereby fixing the position of the metal curvature forming body 4.

[0108] The above-mentioned configuration of Example 2 or Example 3 makes it possible to more advantageously hold the workpiece, which is a curved metal body, by suction without damaging the inner surface and without dropping off. That is, by making the part that comes into contact with the metal bend forming body 4 for holding by suction the outer surface side of the workpiece, it is possible to prevent the inner surface of the workpiece from being damaged. Also, by performing suction (holding) on ​​the outer surface of the metal bend forming body 4, the inner surface is not damaged even if it is adsorbed with a strong suction force, so that it is easy to improve the suction force. In particular, when the workpiece is a half cell used in a superconducting accelerator, it is possible to prevent the inner surface from being damaged even if the holding stability is increased by adsorbing with a strong suction force. That is, by increasing the suction force, even if the outer surface of the metal bend forming body 4 comes into contact with the holding member 5 between the outer seal ring 520 and the inner seal ring 521, the inner surface of the metal bend forming body 4 is not contacted, so the inner surface can be kept without being damaged.

[0109] The holder parts 1501, 2501 of the present invention are configured so that the outer circumferential seal ring 520 and the inner circumferential seal ring 521, which are made of a flexible (elastic) material (e.g., resin such as rubber), abut against and hold the outer surface of the metal bend forming body 4. With this configuration, the inner surface of the metal bend forming body 4 abuts only a limited part of the metal bend forming body fixing jig 2517 even during processing. Therefore, it is possible to prevent the inner surface of the metal bend forming body 4 from being scratched, which is particularly advantageous for manufacturing metal cells (half cells) used to form the superconducting accelerating parts required for superconducting accelerators.

[0110] Moreover, the outer circumferential seal ring 520 and the inner circumferential seal ring 521 of the present invention have two corners 520c and 521c, and are configured to abut against two corners 520c and 521c provided in the outer circumferential seal ring fixing groove 525 and the inner circumferential seal ring fixing groove 524, respectively. With this configuration, the outer circumferential seal ring 520 and the inner circumferential seal ring 521 do not move within the fixing grooves 525 and 524 into which they are respectively fitted, and it is possible to prevent the metal curved formation body 4 from moving during processing.

[0111] Furthermore, the outer peripheral seal ring 520 and the inner peripheral seal ring 521 of the present invention have a cross-sectional arc shape in which the surface that comes into contact with the metal curving body 4 curves toward the outer periphery (the metal curving body 4 side). With this configuration, even if the metal curving body 4 is strongly adsorbed and held, the ring does not leave a mark on the outer surface of the metal curving body 4, and the appearance of the outer surface of the metal curving body 4 can be maintained in a good condition.

[0112] Moreover, the outer circumferential seal ring 520 and the inner circumferential seal ring 521 have a cross-sectional arc shape that curves over the entire circumference of the surface that comes into contact with the metal curving body 4. This allows the outer circumferential seal ring 520 and the inner circumferential seal ring 521 to come into contact with the outer surface of the metal curving body 4 over the entire circumference without any gaps, and the metal curving body 4 can be reliably adsorbed and held when sucked by the suction pump unit 7.

[0113] Moreover, the outer circumferential seal ring 520 and the inner circumferential seal ring 521 are positioned away from both the opening 401 and the opening 403 of the metal curvature-forming body 4, and further, by performing suction between the outer circumferential seal ring 520 and the inner circumferential seal ring 521 which are on the side away from the opening 401 and the opening 403, it is possible to prevent the opening 401 and the opening 403 of the curvature-forming body 4 from being deformed by suction. Therefore, the curvature-forming body 4 can be manufactured with good accuracy without impairing the processing accuracy required for connecting the openings 401 and the openings 403 of the curvature-forming body 4 when manufacturing a superconducting accelerating cavity.

[0114] In addition, the circumference on which the exhaust openings 1504a, 2504a are arranged, the outer circumferential seal ring 520, and the inner circumferential seal ring 521 in the present invention are arranged around the same axis. With this configuration, the exhaust openings 1504a, 2504a or the reduced pressure space can be reduced in a balanced manner, and the metal curved forming body 4 can be prevented from moving during processing. [Industrial Applicability]

[0115] The present invention can be used in industries that process curved metal curved formations. [Explanation of symbols]

[0116] 1...Metal curved body processing device 2…Processing section 3...Operation unit 301...Cutting operation section 302...Rotation drive operation unit 303…Suction pump operation section 4...Metal curved body 401, 403…Opening 402…Opening edge 404…Curved surface 5…Retaining member 501…Holder part 502…Exhaust connection 503…Chuck base 504…Exhaust passage 504a…Exhaust opening 505…Outer periphery of holder 506…Inner circumference of holder 506a, 506b, 507a, 507b…nearby surface 506c…Curved surface 507…Outer periphery of first holder 507c…Surface 508…Outer periphery of second holder 509...Outer periphery ring 510…Inner circumference corner ring 511…Reduced pressure space 511a...Adsorption side opening 512…Main exhaust passage 513…Holder fixing screw 514…Exhaust space 515…Nails 516…Naked jaw fixing part 517...Metal curved body fixing jig 518…O-ring 520...Outer seal ring 521…Inner seal ring 524…Inner seal ring fixing groove 525...Outer seal ring fixing groove 6...Rotation drive unit 7…Suction pump section 701…Pump intake passage 702…Suction pump O-ring 8...Cutting part 9…Cutting drive unit 10. Superconducting accelerator

Claims

1. A processing device for cutting a metal object, A suction pump that draws in gas; A holding member for holding the object; a cutting device that cuts the object held by the holding member, The holding member is a gas flow path through which a gas is sucked by the suction pump, the gas flow path being provided with one or more openings on an object facing surface facing the object; a seal member provided on the object facing surface, the seal member surrounding the opening and protruding from the object facing surface toward the object to come into contact with the object; the suction pump is configured to suck gas from the gas flow path while the seal member is in contact with the object, thereby generating a reduced pressure space among the object facing surface, the object, and the seal member, the decompression space has an exhaust opening and an adsorption side opening, The holding member has a planar surface at the object facing surface, the planar surface being spaced from the object to form the reduced pressure space, The exhaust opening is provided on the surface. Processing equipment.

2. a rotation drive unit that rotates one of the holding member and the cutting device relative to the other, The object is The cross section of the rotary drive unit is ring-shaped in a plane perpendicular to the rotary shaft, The inner diameter changes in the direction, with a small opening on one side and a large opening on the other side. The seal member is configured to contact an outer surface of the object, the holding member has, on the object facing surface, a plurality of proximity surfaces that are in proximity to the object without contacting the object, and a groove into which the seal member is fitted, The plurality of adjacent surfaces are provided so as to sandwich the groove. The processing device according to claim 1.

3. The sealing member is a first seal member having a ring shape centered on the rotation axis; a second seal member having a ring inner diameter smaller than that of the first seal member centered on the rotation axis, The opening is formed between the first seal member and the second seal member that are disposed on the object facing surface of the holding member. The processing apparatus according to claim 2.

4. the sealing member has a shape including two or more corners around its entire circumference that come into contact with the holding member in a cross section in the thickness direction, The holding member has a positioning portion for fixing the seal member.

4. The processing apparatus according to claim 1, 2 or 3.

5. The sealing member has a cross-sectional shape in a thickness direction of a surface that contacts the object, the cross-sectional shape being formed into a curved surface that is convexly curved toward an outer periphery at least when the sealing member is not in contact with the object. The processing apparatus according to claim 4.

6. The exhaust opening has an opening area smaller than that of the suction side opening.

6. The processing device according to claim 1 .

7. The metal object to be processed is a half cell of a metal cell used to form a superconducting accelerator section, The holding member and the sealing member are configured not to come into contact with the inner surface of the object. The processing apparatus according to claim 2 or 3.

8. A processing method for cutting a metal object using the processing device according to claim 1, comprising: The object is held by a holding member; a step of generating a reduced pressure space by a suction pump between a surface of the holding member facing the object, the object, and a seal member, thereby holding a curved surface of the object; A step of processing the held object by a cutting device; The processing method has the following features.

9. The reduced pressure space is It has an exhaust opening and an adsorption side opening, The exhaust opening has an opening area smaller than that of the suction side opening. The processing method according to claim 8.

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