This application discloses a detection circuit and detection method for a capacitive MEMS sensor, comprising: a reference
voltage boosting module connected to the driving terminal of the capacitive MEMS sensor to provide an excitation
voltage, providing a reference
voltage to the driving terminal in a first stage, boosting the reference voltage to the driving terminal to a first
voltage amplitude in a second stage, and switching the excitation voltage of the driving terminal from the first
voltage amplitude to a predetermined low level in a third stage; a common-mode cancellation module including a
signal input terminal and an excitation terminal, the
signal input terminal being connected to the output terminal of the capacitive MEMS sensor, and the excitation terminal receiving an
excitation signal to drive the common-mode cancellation module to reduce common-mode fluctuations in the detection
signal at the output terminal; and an
operational amplifier module amplifying the detection signal with reduced common-mode fluctuations to generate an output signal. This application employs staged timing control of the reference
voltage boosting module to generate excitation for the capacitive MEMS sensor, effectively reducing
noise in the detection circuit.