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Detection circuit and detection method for capacitive MEMS sensor

PendingCN122281975Areduce noiseincrease power consumptionCapacitanceVoltage amplitude
This application discloses a detection circuit and detection method for a capacitive MEMS sensor, comprising: a reference voltage boosting module connected to the driving terminal of the capacitive MEMS sensor to provide an excitation voltage, providing a reference voltage to the driving terminal in a first stage, boosting the reference voltage to the driving terminal to a first voltage amplitude in a second stage, and switching the excitation voltage of the driving terminal from the first voltage amplitude to a predetermined low level in a third stage; a common-mode cancellation module including a signal input terminal and an excitation terminal, the signal input terminal being connected to the output terminal of the capacitive MEMS sensor, and the excitation terminal receiving an excitation signal to drive the common-mode cancellation module to reduce common-mode fluctuations in the detection signal at the output terminal; and an operational amplifier module amplifying the detection signal with reduced common-mode fluctuations to generate an output signal. This application employs staged timing control of the reference voltage boosting module to generate excitation for the capacitive MEMS sensor, effectively reducing noise in the detection circuit.
Owner:HANGZHOU SILAN MICROELECTRONICS CO LTD