52results about How to "Fully circulated" patented technology

There is provided a injector in which a backstop function is realized by a collar part at a position situated away from a gasket in the direction of the side of the proximal end and adequate sterilization can be carried out, with a plunger rod (in which the collar part is formed) assembled, while aiming to secure airtightness. (A backstop function is realized by means of a collar part at a position situated away from the gasket in the direction of the side of the proximal end, thereby providing a injector capable of being adequately sterilized with a plunger rod (in which the collar part is formed) assembled, while aiming to secure airtightness.) A gasket (3) is inserted from a proximal end opening (22) of a barrel (2). Next, a plunger rod (4) is inserted as to establish connection of its distal end and the gasket (3). Then, a finger grip (5) is mounted to a flange (23). A disc part (45) is formed at a position situated away, in the direction of the side of the proximal end, from the gasket, thereby making it possible for the disc part (45) to abut and stop against an aperture edge (521) of the finger grip. There is formed in an outer peripheral edge part of the disc part (45) a communication opening part (451) having a concave shape. At the time of sterilization with hydrogen peroxide gas, the hydrogen peroxide gas which has flowed into an open space (26) from the proximal end opening is permitted to circulate in a semi-hermetically closed space (25) by way of the communication opening part.

The invention discloses a hydrogen sensor with a ppb-level detection lower limit, which belongs to the technical field of sensors. The hydrogen sensor includes an oxidized metal foam and palladium nanoparticles loaded on the oxidized metal foam, wherein the particle size of the palladium nanoparticles is 5-10 nm, and the oxidized metal foam is made by heating the metal foam in an air atmosphere at a high temperature Obtained by heat treatment, the heat treatment temperature is 500-1000° C., and the time is 3-6 hours. The present invention fully oxidizes the metal foam at a certain temperature to obtain a large number of insulating metal oxide nano-wrinkles on the surface of the metal foam. The oxidized metal foam substrate has a larger surface area to adhere to Pd nanoparticles; The hydrogen reaction will generate incompletely reversible β-phase Pd-H compounds. For the first time, a method of activating the hydrogen sensor with high-concentration hydrogen is proposed, and the stable ppb-level hydrogen sensing performance of the hydrogen sensor is realized.

The invention discloses a middle hole pressure storage static leakage-free oil sprayer, comprising a high speed solenoid valve, a locking screw sleeve, a tapered surface ball valve type switch valve, a control plunger and barrel assembly, an oil sprayer spring, a spring seat, an opening check ring, an oil sprayer body, an oil sprayer assembly and an oil nozzle locking cap; the tapered surface ball valve type switch valve is arranged in a concave cavity in the upper end of the oil sprayer body; the upper end of the oil sprayer body is connected with the high speed solenoid valve by a locking nut; the lower end of the oil sprayer body is connected with the oil nozzle assembly by the oil nozzle locking cap; the control pole plunger and barrel assembly is arranged in a central hole formed along the axis of the oil sprayer body; the central hole of the oil sprayer body and the control pole plunger and barrel assembly form a middle hole pressure storage cavity. The oil sprayer is simple in structure, low in machining cost and convenient to mount, so the production efficiency and product percent of pass are improved.

The invention discloses a through-hole design method for a projection objective lens of a lithography machine and a lens holder thereof. The projection objective lens of a lithography machine comprises a lens barrel, a plurality of lenses and a lens support corresponding to the lenses, and the top of the lens barrel is provided with a The air outlet and the bottom are provided with an air inlet, and one side of the lens holder is provided with several through holes, and the gas flow rate and pressure loss value of each through hole are the same, and the through holes of the adjacent lens holders are arranged diagonally. According to the illumination field of view of each lens, the present invention arranges through holes with different apertures on the corresponding lens brackets according to a specific method, and makes the through holes of adjacent lens brackets diagonally distributed, which not only ensures the air pressure inside the projection objective lens Stability, and realize the full circulation of gas inside the projection objective lens, improve the heat dissipation performance and the temperature stability of the optical path area, and at the same time, the optical path area is fully filled with inert gas, which effectively reduces the sensitivity of the projection objective lens to temperature and pressure, and improves the photolithography. quality.