The invention relates to a precise air
floating platform, and belongs to the technical field of transportation devices. The air
floating platform comprises one or more parallel supporting surfaces, and each supporting surface comprises a
positive pressure unit and a negative pressure unit; the
positive pressure units comprise pressure outlets, and the pressure outlets provide pressurized gas and are used for generating supporting gas films for supporting a borne object; the negative
pressure units comprise pressure inlets, and the pressure inlets provide a pressure value smaller than the environment pressure value and generate adsorption pressure opposite to the supporting gas films; and an
atmosphere communicating groove surrounds the periphery of each
positive pressure unit and the periphery of each negative pressure unit, and the
atmosphere communicating grooves locally
discharge the
mass flow of the pressure outlets or locally provide the
mass flow of the pressure inlets, so that the pressure at the
atmosphere communicating grooves is kept as the environment pressure. By adopting the technical scheme, a thin flexible object can be stably, reliably and contactlessly suspended on the air
floating platform, and low-friction, high-precision, lossless and efficient supporting, transportation, detection and
processing treatment are realized.