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2results about How to "No mixing" patented technology

Wafer processing method for etching two metals in the same etching chamber

This invention relates to a wafer processing method for etching two metals within the same etching chamber. It incorporates wafer cleaning and spin-drying between the two metal etching processes to ensure the cleanliness of the chamber. Simultaneously, by controlling the wafer rotation speed and the recovery tray rotation speed, a gradient is created between the positions L1 and L3 where the etching solution is splashed onto the recovery tray during the two etching processes and the position L2 where deionized water is splashed onto the recovery tray during the intermediate cleaning process. In step four, L2 is greater than L1 in step two, ensuring that the deionized water completely covers and cleans the first etching solution on the recovery tray. In step six, L3 is less than L1 in step two, so even if a trace amount of the first etching solution remains between L1 and L2, sufficient space exists between L3 and L1 where the second etching solution is splashed onto the recovery tray, preventing mixing of the two solutions. Furthermore, this invention does not require further modifications to the equipment structure, and the process flow is more seamless.
Owner:KINGSEMI CO LTD

Colored master batch mixing and stirring device

ActiveCN224255773UChange the mixing spaceGuaranteed to workProcess engineeringMechanical engineering
The utility model discloses a colored master batch mixing and stirring device, relates to the technical field of colored master batches, and aims to solve the technical problem that the stirring space in a box body cannot be adjusted according to the quantity of materials. According to the technical scheme, a stirring cover is installed on the top of the stirring barrel, a feeding port is formed in the stirring cover, a discharging port is formed in one side of the stirring barrel, a stirring shaft is further arranged on the stirring cover, the stirring shaft penetrates through the stirring cover and extends into the stirring barrel, a plurality of stirring blades are arranged on the stirring shaft, and the stirring blades are arranged on the stirring cover. A rotating assembly for driving the stirring shaft to rotate and a lifting assembly for changing the stirring space in the stirring barrel are arranged on the stirring cover, the lifting assembly acts on the top of the stirring shaft, and a reset assembly matched with the lifting assembly is arranged at the bottom of the stirring shaft. The utility model aims to provide a colored master batch mixing and stirring device.
Owner:JIAXING YICHUANG TECHNOLOGY CO LTD