SECS communication method based on semi standard

A communication method and standard technology, applied in the field of network communication, can solve problems such as non-compliance with SEMI standards, aging of equipment and control systems, etc., to achieve the effect of improving cluster control capabilities, solving losses, and improving communication

Inactive Publication Date: 2011-12-14
MICROCYBER CORP +1
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  • Summary
  • Abstract
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  • Claims
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Problems solved by technology

The software used by domestic semiconductor equipment manufacturers is mainly to directly purchase foreign products or purchase authorization for simple secondary development. At present, the equipment and control systems are generally aging and do not meet SEMI standards.

Method used

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  • SECS communication method based on semi standard
  • SECS communication method based on semi standard
  • SECS communication method based on semi standard

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Embodiment Construction

[0025] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0026] The SECS communication method based on the SEMI standard of the present invention includes: the HSMS communication module realizes the connection between the device and the host computer, and performs data transmission steps through the network; and performs SECS II encoding and decoding through the SECS protocol module, and implements data collection, device control and abnormal processing steps .

[0027] Such as figure 1 As shown, the communication protocol belongs to the equipment automation / software standard in the SEMI standard, including four standards of SECS-I, HSMS, SECS-II and GEM, and the standard number of the standard is indicated in parentheses in the figure. Among them, SECS-I and HSMS belong to the transmission protocol standard, which describes how data is transmitted between the device and the host through the physical medium. SECS...

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Abstract

The invention belongs to the network communication technology, in particular to a SECS communicating method based on SEMI standard. The method comprises the following steps of: realizing the connection of equipment to a host by an HSMS communication module and carrying out data transmission by a network; carrying out SECS II coding and decoding by an SECS protocol module and realizing data collection, equipment control and exception handling. The communicating method adopted can realize automatic management of a semiconductor factory, can meet characteristic requirements of high vacuum, high cleanness, high dustless, and the like in the manufacturing process of semiconductors, can standardize different equipment control systems, improve production efficiency and reduce production cost.

Description

technical field [0001] The invention belongs to network communication technology, in particular to a SECS communication method based on SEMI standard. technical background [0002] At present, domestic semiconductor factories have invested in 12-inch wafers. The wafer production process is becoming increasingly complex, and many production equipment may come from different equipment manufacturers, which brings difficulties to wafer processing and equipment management. [0003] In the semiconductor industry, manufacturing equipment is required to have the characteristics of high vacuum, high cleanliness, and high dust-free operation of large-area wafer materials. Traditional wafer handling methods can no longer meet the needs of high-quality wafers in advanced semiconductor production. [0004] As the demand for wafer area continues to increase, the number of ICs that can be manufactured on a single wafer increases, so the manufacturing method has evolved from batch manufactu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04L29/08H04L12/54
Inventor 于海斌王宏林跃徐皑冬周建辉康凯刘明哲王水涛
Owner MICROCYBER CORP
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