A coreless rod furnace for drawing quartz glass rods

Abstract

The invention relates to a method for drawing a quartz glass rod by a coreless rod through a continuous melting method. According to the method disclosed by the invention, a drawing device comprises a furnace body which is internally provided with a tungsten-molybdenum crucible, a material platform is arranged at the bottom of the tungsten-molybdenum crucible, a discharge hole is formed in the material platform, a continuous melting furnace cover is arranged on an upper port of the furnace body and comprises a bottom cover and an upper cover, an installation hole is formed in the middle part of the bottom cover and is internally provided with a connecting cylinder, the upper end of the connecting cylinder is fixedly connected with the upper cover, a boss used for locking the tungsten-molybdenum crucible is arranged on the inner wall at the lower end of the connecting cylinder, a sealing mechanism is arranged between the bottom cover and the connecting cylinder, an upper cover lifting regulation mechanism is arranged between the bottom cover and the upper cover, a top cover is arranged above the upper cover and is fixedly connected with the upper cover through a fastener, and a feeding hole is formed in the top cover. According to the method disclosed by the invention, as a core rod and a former are not arranged in the tungsten-molybdenum crucible, the tungsten-molybdenum crucible can be used for enlarging the specification of the quartz glass rod from the traditional 2-30mm to 2-60mm, and the problem of a black core of the quartz glass rod can be solved by virtue of coreless rod drawing.

Description

Technical field [0001] The invention relates to a continuous melting furnace for drawing a quartz glass rod, in particular to a coreless continuous melting furnace for drawing a quartz glass rod. Background technique [0002] At present, there are two methods for drawing quartz glass rod by continuous melting method in China: one is to process the shaper at the lower end of the core rod into a cone to draw the quartz glass rod, and the other is to draw the quartz glass tube. If you need to draw a quartz glass rod, first turn off the protective gas, and then install a vacuum pump at the upper end of the core rod vent hole to form the downward suction state of the quartz glass liquid, and then the quartz glass rod can be drawn. The disadvantage of the above two technologies is that even the melting furnace must have a core rod and a shaper. The size of the quartz glass rod drawn is small, especially the quartz glass rod has a black core in the middle, which cannot meet the requirem...

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Problems solved by technology

The disadvantage of the above two technologies is that even the melting furnace must have a core rod and a former. The size of the drawn quartz glass rod is small, especially there will be a black core in the middle of the quartz glass rod, which cannot meet the requirements of the semiconductor and integrated circuit manufacturing industry. quality requirements

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