Window cleaning kit for wire bonding apparatus, wire bonding apparatus including the same and cleaning method of capillary using the same

Abstract

The invention relates to a window cleaning kit for a wire bonding apparatus, a wire bonding apparatus including the same and a cleaning method of capillary using the same; the apparatus can effectively clean foreign matters attached on end portions of the capillaries in a long term process using the wire bonding; the cleaning kit for wire bonding apparatus can fix a wire bonding object, can be arranged on a window clamp plate having a hole in a fixed manner for usage, and can be used as the cleaning kit in a dismounting state; the cleaning kit comprises a vibration generation plate and a grinding sheet; the vibration generation plate is placed on the window clamp plate; the grinding sheet is attached on the vibration generation plate and linked with the vibration generation plate.

Description

technical field [0001] The present invention relates to a cleaning kit for a wire bonding (Wire Bonding) device, a wire bonding device including the cleaning kit for a wire bonding device, and a capillary cleaning method using the wire bonding device. A cleaning kit for generating vibration is attached to a window clamp, a cleaning kit for a wire bonding device capable of effectively cleaning the end of a capillary, a wire bonding device including the cleaning kit for a wire bonding device, and a wire bonding device using the wire bonding device. Capillary cleaning method for combined devices. Background technique [0002] In the manufacturing process of semiconductors, the technology of connecting light-emitting chips and substrates with metal wires using wire bonding devices is widely used. In such a wire bonding process, gold is commonly used as the metal wire. However, in view of the recent demand for higher speed and lower prices of semiconductors, in addition to gold...

AI Technical Summary

Problems solved by technology

However, such chemical treatment of the capillary not only takes a long time, but also has the problem of damage to the capillary itself depending on the situation.

[0008] Due to such a problem, after the capillary is used for a specified time, the capillary itself is replaced instead of chemical agent treatment, but in this case, not only does it take a long time to replace the capillary, but also because work needs to be re-executed when installing a new capillary There is a problem that the profit rate of the process decreases due to the reason of the setting, etc.

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