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A high-precision non-contact three-dimensional micro-force generating device

A non-contact, generating device technology, used in measuring devices, force/torque/work measuring instrument calibration/testing, instruments, etc., can solve problems such as rarely reported, frequent, irreversible, etc. Simple, easy-to-use effects

Active Publication Date: 2018-08-21
GUANGDONG INST OF METROLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, at present, the establishment of measurement and traceability systems for small force values ​​in various countries in the world is relatively lagging behind, and there is no unified and reliable method for traceability of small force values.
Moreover, force is a vector, and its directionality and magnitude have the same importance. At present, most of the research on small force values ​​at home and abroad is concentrated in the vertical direction, and there are few studies on small force values ​​in non-vertical directions. There are reports
However, in practical applications, the non-vertical small force value is more frequently used than the vertical small force value, and the accurate measurement of the non-vertical small force value has become the key to restrict the development of related high-end, high-precision, and emerging industries. question
[0008] In addition, most of the current micro-force detection devices use a cantilever or lever structure. When touching the device under test, if you are not careful, you will apply too much force and cause damage to the device under test or irreversible damage, which is not reliable enough.

Method used

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  • A high-precision non-contact three-dimensional micro-force generating device
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  • A high-precision non-contact three-dimensional micro-force generating device

Examples

Experimental program
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Effect test

no. 1 example

[0051] The traditional electrostatic force generating device generally generates a small force value through the electrostatic force between the capacitor plates. According to the principle of the capacitor, the electrostatic force between the two plates of the flat capacitor F The calculation formula is:

[0052] (1)

[0053] in, ε 0 is the dielectric constant of the gas between the plates, V is the voltage applied between the two plates, L is the distance between the two plates, A p is the relative area between the two plates.

[0054] From formula (1), we can see that the distance between the plates L has a square relationship with the electrostatic force between the two plates, that is, even L A small change in the value of , will also have a great impact on the force value between the two polar plates. The electrostatic force generated between the two polar plates is originally a small force value. If there is a slight deviation in the measurement of the dist...

no. 2 example

[0070] A high-precision non-contact three-dimensional micro-force generator of the present invention is mainly composed of an interdigital micro-force generator, a position adjustment device, a direction adjustment rod, a rotating platform and a fixed base. The interdigital micro force generator can generate micro electrostatic force by applying voltage at its two ends, and at the same time, it can generate micro force in all directions of space by rotating the platform and the direction adjustment rod, and the position adjustment device in the three directions of X, Y, and Z can Precisely adjust the position and distance between the two forked fingers, thereby generating tiny forces in all directions in space.

[0071] The process of using the device is:

[0072] Firstly, the functional relationship between the loading voltage and the tiny force between the fingers is determined through experiments when the finger distance is within a certain range. Due to the adoption of a ...

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Abstract

The invention discloses a high precision non-contact three-dimensional micro force generation device. The high precision non-contact three-dimensional micro force generation device comprises a non-contact micro force generator, a direction adjusting rod, a rotary platform and a fixing foundation, wherein the rotary platform is mounted on the fixing foundation, the direction adjusting rod is hinged with the rotary platform, and the non-contact micro force generator is mounted on the direction adjusting rod. The high precision non-contact three-dimensional micro force generation device is characterized by adding the direction adjusting rod and the rotary platform, through adjustment effects of the direction adjusting rod and the rotary platform, micro forces in a vertical direction can not only be generated, micro forces in a horizontal direction and in other non-vertical directions can be further generated, great flexibility and relatively high precision are realized, the non-contact micro force generator of a non-contact structure is employed, so damage to or unrecoverable influence on a detected device caused by overlarge force adopted during detection calibration can be effectively prevented, and the high precision non-contact three-dimensional micro force generation device is more reliable. The high precision non-contact three-dimensional micro force generation device can be widely applied to the mechanics metering field.

Description

technical field [0001] The invention relates to the field of mechanical measurement, in particular to a high-precision non-contact three-dimensional micro-force generating device. Background technique [0002] Force value is one of the most basic physical quantities in mechanics. Force value measurement is widely used in aerospace, ships, weapons and other national defense technology fields, and also plays an important role in civil fields such as electronics industry, automobile industry and other manufacturing industries. [0003] After decades of development, force measurement has formed a relatively complete measurement system. At present, a unified and complete force measurement standard device within a certain range has been established at home and abroad. my country's current force value measurement standards are limited to high force values ​​(0.1MN~5MN and 0.5MN~20MN) and small and medium force values ​​(10N~1MN). The measurement of tiny force values ​​is generall...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L25/00
Inventor 徐立郑培亮黄振宇李倩
Owner GUANGDONG INST OF METROLOGY