Three dimensional micromechanical spring and manufacturing method thereof

A manufacturing method and micro-mechanical technology, applied in the field of three-dimensional spring manufacturing, to achieve outstanding effects and efficiency, low cost, and good consistency

Inactive Publication Date: 2016-06-08
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional three-dimensional springs or coils have incomparable advantages over two-dimensional structural devices, but the existing micromachining methods are difficult to realize this complex three-microstructure

Method used

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  • Three dimensional micromechanical spring and manufacturing method thereof
  • Three dimensional micromechanical spring and manufacturing method thereof

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Experimental program
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Embodiment Construction

[0022] The present invention will be further described below in conjunction with the accompanying drawings.

[0023] see figure 1 , the three-dimensional micromechanical spring structure provided by the present invention, the spring structure includes a support material 1,

[0024] Adhesive material layer 2, first spring end 3, spring wire 4, second spring end 5; wherein,

[0025] The supporting material 1 includes two opposite end surfaces and a main body connecting the two end surfaces;

[0026] The support material 1 is used as the carrier of the spring, and a circle of adhesive material layer 2 is covered on the outer surface near any end surface thereof, and a circle of spring metal is covered on the surface of the adhesive material layer 2 as the first spring end 3; the second spring end 5 Covered on the support material 1 , the first spring end 3 and the second spring end 5 are connected together by a spring wire 4 freely wound around the main body of the support mate...

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Abstract

The invention provides a three dimensional micromechanical spring and a manufacturing method thereof. The spring comprises a supporting material (1), an adhesion material layer (2), a first spring end (3), a spring line (4), and a second spring end (5); the supporting material (1) comprises two opposite end faces and a body used for connecting the two end faces; as a carrier of the spring, the external surface of the supporting material (1) close to any one end face is covered with a circle of adhesion material layer (2); the surface of the adhesion material layer (2) is covered with a circle of spring metal as the first spring end (3); the second spring end (5) is sleeved on the supporting material (1); and the first spring end (3) and the second spring end (5) are connected together through the spring line (4) which is freely intertwined on a body of the supporting material (1). The three dimensional micromechanical spring and the manufacturing method thereof provided by the invention have good consistency and low cost.

Description

technical field [0001] The invention is a three-dimensional spring manufacturing method based on micromachining, in particular a manufacturing method combining structure rotation and semiconductor photolithography technology and a three-dimensional micromechanical spring manufactured by the method. Background technique [0002] Microsprings are widely used in micro force sensors and actuators. Using micromachining technology can easily realize the manufacture of two-dimensional structures. There have been many reports on using micromachining technology to make some components such as planar springs and coils. Traditional three-dimensional springs or coils have incomparable advantages over two-dimensional structural devices, but the existing micromachining methods are difficult to realize this complex three-microstructure. How to quickly and conveniently complete the micromachining of three-dimensional devices is still one of the current research hotspots. Invention conten...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): B81B1/00B81C1/00
CPCB81B1/006B81C1/00103B81C1/00373
Inventor秦明高磬雅王庆贺穆林
OwnerSOUTHEAST UNIV