Integral Scattering Rate/Integral Transmittance High-Precision Measurement System for Ultra-High Mirrors

Abstract

The invention provides a high-precision measurement system for the integrated scattering rate / integrated transmissivity of an ultrahigh reflector and is used for solving problems in the prior art that the technical precision and stability is low and the operation is complex. The high-precision measurement system comprises an optical path control module, a parameter measurement module, a reference measurement module and a measurement control module. The optical path control module comprises a convergence convex lens, a diaphragm, a collimation convex lens controlled by an axial displacement bench, a polaroid set controlled by a motor rotating table and a beam splitter mirror. The parameter measurement module comprises an integrating sphere, a transmission sample carrying platform positioned before a light incoming hole of the integrating sphere, a scattering sample wafer carrying platform positioned on the inner surface of the integrating sphere, and a detector. The photosensitive surface of the detector is tightly adhered to a narrowband filter. The reference measurement module comprises an attenuation sheet, the narrowband filter and a detector which are arranged on a secondary optical path in sequence. The measurement control module comprises a preamplifier, a divider, a data collection card and a computer which are connected in sequence. The invention is advantaged by simple operation, stable measurement and high precision.

Description

technical field [0001] The invention belongs to the technical field of optical testing, and relates to a high-precision measurement system for the integrated scattering rate / integrated transmittance of an ultra-high reflective mirror, which can be used for measuring the roughness of an optical surface. Background technique [0002] Ultra-high reflective mirrors, that is, optical elements with less loss such as scattering, transmission, and diffraction. Scattering, transmission and diffraction loss of the component are key factors affecting its performance, and accurate measurement of these parameters is of great value in many technical fields. For example, in the laser gyro system, the scattering and transmission characteristics of the ultra-high reflection mirror are one of the most important factors affecting its accuracy. Accurate measurement has very important guiding significance for the preparation of the laser gyro; during the preparation of the ultra-high reflection ...

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