Intelligent integrated type semiconductor manufacturing execution system

A manufacturing execution system, an integrated technology, applied in general control systems, control/regulation systems, program control, etc., to solve problems such as weak system reconfiguration performance

Inactive Publication Date: 2017-01-04
深圳市益普科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] The existing manufacturing execution system of semiconductor enterprises can provide the best performance for a specific environment, but it is often difficult to

Method used

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  • Intelligent integrated type semiconductor manufacturing execution system
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  • Intelligent integrated type semiconductor manufacturing execution system

Examples

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Embodiment Construction

[0025] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

[0026] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.

[0027] Techniques and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques and devices should be considered part of the description.

[0028] In all examples shown and discussed herein, any specific values ​​should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodiment may have different values.

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Abstract

The invention provides an intelligent integrated type semiconductor manufacturing execution system which comprises an MES manufacturing process model base, an MES manufacturing flow information memory pool, a manufacturing flow server, an internet of things model base, a production control terminal work station and a data interaction interface. According to the embodiment of the invention, the intelligent integrated type semiconductor manufacturing execution system provided by the invention has the following beneficial effects that: the intelligent integrated type semiconductor manufacturing execution system is designed by adopting an SAAS mode, setting up a semiconductor manufacturing process model, applying a data mining algorithm based on manufacturing large data, sharing files acquired through equipment data and adopting a mobile internet mode of a multi-operation platform visiting system; and the intelligent integrated type semiconductor manufacturing execution system has rich expansion interfaces for butt-joint with an ordering system, a financial system, an SPC system, and is multi-module, pluggable and capable of industrial transplanting.

Description

technical field [0001] The invention relates to the field of production process control in the process industry, in particular to an intelligent integrated semiconductor manufacturing execution system. Background technique [0002] The existing manufacturing execution system of semiconductor enterprises can provide the best performance for a specific environment, but it is often difficult to integrate with other application software, the whole system has weak reconfiguration performance, and it is difficult to perform function configuration and dynamic Change. Contents of the invention [0003] In order to solve the problems existing in the prior art, the present invention proposes an intelligent integrated semiconductor manufacturing execution system. [0004] According to an aspect of the present invention, an intelligent integrated semiconductor manufacturing execution system is proposed, including: [0005] MES manufacturing process model library, which is used to st...

Claims

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Application Information

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IPC IPC(8): G05B19/418
CPCY02P90/02G05B19/41865G05B2219/32252
Inventor 劳建音张心诚马运涛李现勇
Owner 深圳市益普科技有限公司
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